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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 505 records · Page 28
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Hybrid chemical characterization of latent images in EUV resist with 12 nm half-pitch features

With the advancement of high numerical aperture extreme ultraviolet (EUV) lithography, the new platform will enable chipmakers to achieve critical dimensions of 8 nm. However, resist materials face significant challenges in delivering increased sensitivity while managing rising stochastic variations. We aim to develop comprehensive techniques to characterize the chemical profile of latent images, stored in EUV resists after exposure and postexposure baking, which is essential for understanding the origin of stochastic effects. Infrared photo-induced force microscopy (IR PiFM) is a bimodal atomic force microscopy technique combined with an infrared light source, allowing for simultaneous sub-5 nm topographic and chemical characterization within a localized environment. Critical-dimension resonant soft X-ray scatterometry (CD-RSoXS) provides statistical data that reveal structural and chemical information for comparative analysis. For the first time, IR PiFM has been used to chemically map the latent images of EUV resists (after exposure and postexposure baking) at a record high resolution of 12 nm half-pitch, enabling nondestructive analysis of patterns prior to development. Furthermore, CD-RSoXS offers direct experimental observation and comparison of exposed, postexposure baked, and developed patterns, which align with the IR PiFM results. We demonstrate that the IR PiFM technique offers valuable insights into both high spatial resolution and local chemical information simultaneously. In addition, CD-RSoXS provides statistical results that support our main findings. This hybrid metrology approach leverages a multifaceted dataset by combining the most reliable information from each source, which is essential for a comprehensive understanding of the stochastic effects in EUV lithography processes.

O’Reilly, Padraic↗
DOE OSTI2022

Fine Pitch Bonding for High Density Interconnects

CTE (coefficient of thermal expansion) mismatch between two wafers has potential for brittle failure when large areas are bonded on top of one another (wafer to wafer or wafer to die bonds). To address this type of failure, we proposed patterning a polymer around metallic interconnects. For this project, utilized benzo cyclobutene (BCB) to form the bond and accommodate stress. For the metal interconnects, we used indium. To determine the benefits of utilizing BCB, mechanical shear testing of die bonding with just BCB were compared to die bonded just with oxide. These tests demonstrated that BCB, when cured for only 30 minutes and bonded at 200°C, the BCB was able to withstand shear forces similar to oxide. Furthermore, when the BCB did fail, it experienced a more ductile failure, allowing the silicon to crack, rather than shatter. To demonstrate the feasibility of using BCB between indium interconnects, wafers were pattered with layers of BCB with vias for indium or ENEPIG (electroless nickel, electroless palladium, immersion gold). Subsequently, these wafers were pattered with a variety of indium or ENEPIG interconnect pitches, diameters, and heights. These dies were bonded under a variety of conditions, and those that held a bond, were cross-sectioned and imaged. Images revealed that certain bonding conditions allow for interconnects and BCB to achieve a void-less bond and thus demonstrate that utilizing polymers in place of oxide is a feasible way to reduce CTE stress.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Study on Electrostatic Separation of Quinoline Insolubles from Coal Tar Pitch

The feasibility of electrical separation in the removal of quinoline insoluble (QI) particles from coal tar pitch (CTP) was experimentally investigated. QI particle involvement prohibits the effective fabrication of high-quality value-added products, such as carbon fibers, from CTP. A substantial and sustainable CTP market exists around the world; therefore, a strong incentive exists to develop a viable technical approach to effectively and economically remove QI particles from CTP. The electrical separation method shows promise to achieve this technical goal (Cao et al., 2012). Even with the given setup (wire- cylinder adapted), critical issues remain to be addressed for this method to be applicable to the CTP: (1) identifying the wash oil used in the original QI separation, (2) understanding the mechanism of QI separation, (3) characterizing the deposit, and (4) identifying the QI. This study integrated a set of experimental and analysis techniques into the electrical separation tests to address the aforementioned issues. Key findings are as follows: 1. Electric current responses: • The electric current level of the CTP–wash oil solution reported by Cao et al. (2012) can be attained by using a mixture of 25% quinoline and 75% toluene for the CTPs examined in this study under the same electrical load condition. • The electric current tends to decrease during the test period because of the decreasing number of charged particles. • The reversed field corresponded to the configuration of electrostatic precipitation for positive corona discharge. The high electric field can result in dielectric breakdown and lead to an abrupt current surge. 2 Deposit response and solvent candidates: • Deposit of particles in CTP mixture can be effectively implemented in a wire-cylinder configuration as proposed and examined in this study. • Deposit depends on the solvents. Among the solvents tested, two- and three-part solvents that included quinoline and ethanol (i.e., 25% quinoline and 75% toluene; 50% quinoline and 50% toluene; and 33% wash oil, 33% BTX, and 34% ethanol) produced the highest deposit weight. • The deposit process examined in this study is derived from the charged particles. An appreciable relation exists between deposit weight and electric charge. 3. QI removal efficiency (RE): • The RE of the electrostatic separation can reach as high as 76.2% for Carbores, and 61.6% for Koppers. • The RE can be further enhanced if the field level increases from 0.16 kV/mm that was used in the current study to 0.23 kV/mm, according to the relation established between the RE and the electric field. 4. Testing of the modeling system: • The motion of particles is originally driven by the charge-based electric force in the cases tested. The solid particle separation mechanism is similar to that of QI deposition in CTP. • The mechanical movement of solid particles can be strongly affected by the gravitational and viscous forces in the electric field. 5. EDS analysis and chemical compositions: • The main chemical composition of deposit QI matches that of as-prepared CTP QI. The deposit QI is derived from the same group of the CTP QI. • In addition to carbon, the QI contains oxygen, sodium, aluminum, silicon, iron, and sulfur. The work for the near future is also discussed.

01 COAL, LIGNITE, AND PEAT↗
DOE OSTI2025

Characterization of Fine-Pitch Interconnects for Long-Lifetime HI Applications

This conference talk discusses optimizing gold-gold and gold-ENIG fine-pitch interconnections for Heterogeneous Integration applications, with a focus on longevity. We first look at electrical data from gold-gold bumps subjected to highly accelerated lifetime testing. Then, we discuss using chemical and physical data as a predictor for ENIG bump flip-chip success.

Humphrey, Nicholas James [Sandia National Laborato↗
DOE OSTI2022

Particle Acceleration in Magnetic Reconnection with Ad Hoc Pitch-angle Scattering

Particle acceleration during magnetic reconnection is a long-standing topic in space, solar, and astrophysical plasmas. Recent 3D particle-in-cell simulations of magnetic reconnection show that particles can leave flux ropes due to 3D field-line chaos, allowing particles to access additional acceleration sites, gain more energy through Fermi acceleration, and develop a power-law energy distribution. This 3D effect does not exist in traditional 2D simulations, where particles are artificially confined to magnetic islands due to their restricted motions across field lines. Full 3D simulations, however, are prohibitively expensive for most studies. Here, we attempt to reproduce 3D results in 2D simulations by introducing ad hoc pitch-angle scattering to a small fraction of the particles. We show that scattered particles are able to transport out of 2D islands and achieve more efficient Fermi acceleration, leading to a significant increase of energetic particle flux. We also study how the scattering frequency influences the nonthermal particle spectra. This study helps achieve a complete picture of particle acceleration in magnetic reconnection.

79 ASTRONOMY AND ASTROPHYSICS↗