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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 505 records · Page 28
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Zone plate-based extreme ultraviolet mask microscope with through-pellicle imaging capability

Mirror-based and zone plate-based imaging systems are being used in actinic extreme ultraviolet (EUV) reticle review tools. With regard to zone plates, a short working distance is advantageous in terms of the required spectral bandwidth, manufacturability, and potential throughput and imaging performance. Zone plates therefore typically have a short working distance. The industry has adopted the use of an EUV pellicle to protect the photomask. Imaging photomask through-pellicle requires a working distance larger than 2.5 mm. A zone-plate-based EUV mask microscope with a 3-mm working distance has been commissioned at beamline 11.3.2 of the Advanced Light Source. Through-pellicle imaging at an exposure time of 2 s is demonstrated. The instrument achieves an image contrast of 95% on large features on a photomask with a tantalum-based absorber. Imaging down to 45-nm half pitch (mask scale) is demonstrated. A NILS of 2.55 is achieved on 60-nm half-pitch (mask scale) lines and spaces. These results demonstrate that zone-plate-based imaging systems can meet the requirements of an actinic EUV mask review tool in terms of imaging performance and throughput in an instrument compatible with EUV pellicles.

Extreme ultraviolet↗
DOE OSTI2024

Direct electron beam patterning of electro-optically active PEDOT:PSS

The optical and electronic tunability of the conductive polymer poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) has enabled emerging applications as diverse as bioelectronics, flexible electronics, and micro- and nano-photonics. High-resolution spatial patterning of PEDOT:PSS opens up opportunities for novel active devices in a range of fields. However, typical lithographic processes require tedious indirect patterning and dry etch processes, while solution-processing methods such as ink-jet printing have limited spatial resolution. Here, we report a method for direct write nano-patterning of commercially available PEDOT:PSS through electron-beam induced solubility modulation. The written structures are water stable and maintain the conductivity as well as electrochemical and optical properties of PEDOT:PSS, highlighting the broad utility of our method. We demonstrate the potential of our strategy by preparing prototypical nano-wire structures with feature sizes down to 250 nm, an order of magnitude finer than previously reported direct write methods, opening the possibility of writing chip-scale microelectronic and optical devices. We finally use the high-resolution writing capabilities to fabricate electrically-switchable optical diffraction gratings. We show active switching in this archetypal system with >95 % contrast at CMOS-compatible voltages of +2 V and -3 V, offering a route towards highly-miniaturized dynamic optoelectronic devices.

42 ENGINEERING↗
DOE OSTI2025

3D printable silicone compositions exhibiting high toughness and low durometer

3D printable silicones can be designed with varying crosslink density, network structures, and types of reinforcing additives. Within this design space, one may tailor the uncured material’s rheology and mechanical response to access a wide range of potential applications. However, printable, low modulus silicones, particularly those applicable to direct ink write, are underreported in published literature. To address the need for higher performance, low modulus silicones with demonstrated printability, a new set of ca. 20–50 Shore A hardness silicone elastomers exhibiting ca. 7 MPa ultimate tensile strength and ca. 400–1200% elongation at break is presented. Mechanical properties were analyzed, providing insight to the effects of formulation constituents on mechanical properties. Cyclic mechanical testing of the silicone formulations was also performed, and the energy loss and permanent set throughout cycling were determined. In conclusion, printed structures demonstrate the feasibility of these new silicones as durable frameworks for novel soft device applications.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Effect of micron-scale manufacturing flaws on the tensile response of centimeter sized two-photon polymerization microlattices

Two-photon polymerization (TPP) is a unique fabrication technique that enables sub-micron scale resolution. Herein, we report on uniaxial tensile tests on millimeter-sized TPP log-pile structures that were fabricated using a recently developed interdigitated stitching strategy. As expected, the Young’s modulus increased with laser intensity, however elastic modulus, ultimate strength and strain-at-failure varied widely, even for nominally identical samples. Post-mortem analysis revealed a series of print defects resulting from various sources including misalignments, resin shrinkage, laser beam shadowing, and local depletion of the oxygen inhibitor. While some of the defects can be eliminated, such as misalignments due to insufficient precision of the mechanical stage, others are more intrinsic to TPP and thus more difficult to address.

36 MATERIALS SCIENCE↗
NASA NTRS2002

Quantum metrology

This paper addresses the formal equivalence between the Mach-Zehnder interferometer, the Ramsey spectroscope, and a specific quantum logical gate. Based on this equivalence we introduce the quantum Rosetta Stone, and we describe a projective measurement scheme for generating the desired correlations between the interferometric input states in order to achieve Heisenberg-limited sensitivity.

quantum interferometry lithography projective meas↗
NASA NTRS1995

Fabricating Sub-collimating Grids for an X-ray Solar Imaging Spectrometer using LIGA Techniques

This paper describes fabrication of sub-collimating X-ray grids that are used in an instrument for the High Energy Solar Spectroscopic Imager ( HESSI ), a proposed NASA mission that will promote understanding of solar particle acceleration and explosive energy release in the magnetized plasmas at the Sun. The HESSI comprises 12 rotating pairs of high-aspect-ratio, high-Z grids; each pair is separated by 1.7 meters and backed by a single Ge detector.

x-ray↗