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At least 469 records · Page 26

High-precision monitoring of outgassing species in model extreme ultraviolet photoresists with a cavity ring-down spectrometer

Background Extreme ultraviolet (EUV) photoresists play a pivotal role in advancing nanopatterning technologies by balancing image quality and sensitivity. The outgassing behavior of photoresist thin films under EUV and deep ultraviolet (DUV) exposure reveals chemical details relevant to their performance. Aim Here, we focus on utilizing an analytical technique not previously used in photolithography, the tabletop cavity ring-down spectrometer, to investigate outgassing dynamics in EUV photoresists, enabling precise chemical identification and deeper insights into resist processing. Approach The spectrometer’s enhanced laser path length (∼ 20 km) and broadband absorption capabilities in the C–H overtone region allow for sensitive and temporally resolved detection of mixtures of outgassed species. Using a model resist comprising a polymer matrix with a photoacid generator and quencher, we analyzed the influence of time delays between exposure and post-exposure bake (PEB) as well as storage under varying environmental conditions. Results Suppression of isobutylene outgassing and thickness loss was observed with extended delays between exposure and PEB, potentially linked to water absorption and acid deactivation. The technique proved highly effective in distinguishing subtle chemical differences between processing stages. Conclusions Delay times and their environmental conditions, particularly humidity, reduce outgassing and thickness loss of photoresists during PEB, suggesting decreased acid-driven deprotection. This can potentially impact sensitivity, defectivity, and roughness of resist patterns, necessitating precise monitoring and control.

Extreme ultraviolet photoresists↗

High precision monitoring of outgassing species in model EUV photoresists with a cavity ring-down spectrometer

Extreme ultraviolet (EUV) photoresists play a pivotal role in advancing nanopatterning technologies by balancing image quality and sensitivity. The outgassing behavior of photoresist thin films under EUV and deep ultraviolet (DUV) exposure reveals chemical details relevant to their performance. This study focuses on utilizing an analytical technique not previously used in photolithography, the tabletop cavity ring-down spectrometer, to investigate outgassing dynamics in EUV photoresists, enabling precise chemical identification and deeper insights into resist processing. The spectrometer’s enhanced laser path length (~20 km) and broadband absorption capabilities in the CH overtone region allow for sensitive and temporally resolved detection of outgassed species. Using a model resist comprising a polymer matrix with a photoacid generator and quencher, we analyzed the influence of time delays between exposure and Post-Exposure Bake (PEB) as well as storage under varying environmental conditions. Suppression of isobutylene outgassing and thickness loss was observed with extended delays between exposure and PEB, potentially linked to water absorption and acid deactivation. The technique proved highly effective in distinguishing subtle chemical differences between processing stages. Delay times and their environmental conditions, particularly humidity, reduce outgassing and thickness loss of photoresists during PEB, suggesting decreased acid-driven deprotection. This can potentially impact sensitivity, defectivity, and roughness of resist patterns, necessitating precise monitoring and control.

Lüttgenau, Bernhard↗

LoTToR: An Algorithm for Missing-Wedge Correction of the Low-Tilt Tomographic 3D Reconstruction of a Single-Molecule Structure (LoTToR) v1.0

The low-tilt tomographic reconstruction (LoTToR) method is a post-processing method to correct the missing-wedge artifact, which contains a model-free iteration process under a set of constraints in real and reciprocal spaces. A proof of concept is conducted by using the LoTToR on a phantom, i.e., a simulated 3D reconstruction from a low-tilt series of images, including that within a tilt range of ±15°. The method is validated by using both negative-staining (NS) and cryo-electron tomography (cryo-ET) experimental data. A significantly reduced missing-wedge artifact verifies the capability of LoTToR, suggesting a new tool to support the future study of macromolecular dynamics, fluctuation and chemical activity from the viewpoint of single-molecule 3D structure determination. Moreover, the software can be used for hospital computer tomography (CT) to reduce the radiation damage to patients without reducing the CT image quality.

Ren, Gang↗

An adaptable technique for comparative image assessment: Application to crosswell electromagnetic survey design for fluid monitoring

Reservoir integrity stewardship accompanying carbon capture and sequestration considers fluid extraction and reinjection as a risk-mitigating method against overpressuring that could lead to caprock damage and ensuing [Formula: see text] leakage. Crosswell electromagnetics offers a technically viable monitoring method with the spatial volume coverage necessary for reservoir-encompassing pressure management. However, a certain logistic dilemma for deep gas sequestration into saline and thus electrically conductive aquifers is that crosswell magnetic-field measurements underperform in the imaging of more resistive plume bodies, further exacerbated when vertical arrays intersect, as opposed to surround, plumes. Furthermore, comparative synthetic-data plume imaging of such scenarios rates the information content of magnetic-field versus electric-field 3D crosswell layouts for reservoir and infrastructure conditions of a representative pilot site in a coastal area in Florida. The image quality of the resulting plume replications can be ranked numerically through a newly proposed semblance qualifier, appraising the model goodness of fit to a given reference. In contrast to common least-squares measures for goodness of fit, the semblance formulation uses classifying logistic function types, thus enabling a better distinction of predefined anomaly features.

58 GEOSCIENCES↗

Fresnel zone plate development for x-ray radiography of hydrodynamic instabilities at the National Ignition Facility

The study of Rayleigh–Taylor (RT) and Richtmyer–Meshkov (RM) instabilities in a planar geometry at high energy densities at the National Ignition Facility (NIF) requires high spatial resolution imaging. We demonstrate the potential of Fresnel zone plates (FZPs) to achieve resolution that would unlock such studies. FZPs are circular aperiodic gratings that use diffraction to focus x rays and produce an image with high spatial resolution. Taking into account the NIF’s challenging environment, we have designed a specific array of five FZPs for a zinc backlighter to take a radiograph of a target with 9 keV x rays. We measured a mean resolution for the FZP of 1.9µm±0.5µm and a ±1mm depth of focus at an x-ray calibration facility as well as a 2.3µm±0.4µm resolution on a resolution wire mesh shot on the NIF. We also performed an in-depth analysis of the image quality to assess the capability to resolve the small features present in RT and RM instabilities.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Adaptive optical third-harmonic generation microscopy for in vivo imaging of tissues

Third-harmonic generation microscopy is a powerful label-free nonlinear imaging technique, providing essential information about structural characteristics of cells and tissues without requiring external labelling agents. In this work, we integrated a recently developed compact adaptive optics module into a third-harmonic generation microscope, to measure and correct for optical aberrations in complex tissues. Taking advantage of the high sensitivity of the third-harmonic generation process to material interfaces and thin membranes, along with the 1,300-nm excitation wavelength used here, our adaptive optical third-harmonic generation microscope enabled high-resolution in vivo imaging within highly scattering biological model systems. Examples include imaging of myelinated axons and vascular structures within the mouse spinal cord and deep cortical layers of the mouse brain, along with imaging of key anatomical features in the roots of the model plant Brachypodium distachyon. In all instances, aberration correction led to enhancements in image quality.

60 APPLIED LIFE SCIENCES↗

Adorym: a multi-platform generic X-ray image reconstruction framework based on automatic differentiation

We describe and demonstrate an optimization-based X-ray image reconstruction framework called Adorym. Our framework provides a generic forward model, allowing one code framework to be used for a wide range of imaging methods ranging from near-field holography to fly-scan ptychographic tomography. By using automatic differentiation for optimization, Adorym has the flexibility to refine experimental parameters including probe positions, multiple hologram alignment, and object tilts. It is written with strong support for parallel processing, allowing large datasets to be processed on high-performance computing systems. We demonstrate its use on several experimental datasets to show improved image quality through parameter refinement.

36 MATERIALS SCIENCE↗

Design of monolithic piezoelectric bimorph mirrors made from lithium niobate

Recent advances in deformable mirrors based on monolithic piezoelectric substrates, such as lithium niobate, have the potential to improve the image quality of X-ray optical systems on synchrotron and free-electron laser beamlines and microscopes. However, the quantitative relationship between design parameters and the deformed shape has not been readily available in the literature. We present an analytical model, validated through finite element analysis, enabling calculation of tangential and sagittal curvatures based on mirror dimensions, crystallographic orientation, and applied voltage. We demonstrate that through the selection of material orientation, it is possible to achieve different deformed shapes (sphere, cylinder, or hyperbolic paraboloid). This methodology can be generalized to other piezoelectric materials and substrate-integrated actuator systems.

Marzari, Francesco [University of Trento (Italy); ↗

Low Size, Weight, and Power Space-Based Imaging System

The proposed low-SWAP solution is a FPA focus mechanism which is composed of an actuator motor, attached to a flexure that holds the camera sensor while imaging. The mechanism, while moderately complex, allows for large changes in the focal plane while also maintaining the ability to make small adjustments to produce the best possible data. This solution does the best job at accounting for thermal gradients within the optical components that tend to degrade the image quality.

42 ENGINEERING↗

High Dose Rate Irradiations of Enduray Vision System for Nuclear Inspections

Higher radiation-hardened video cameras are needed in the operation and remote handling of equipment in nuclear reactor inspection and refueling applications. Vega Wave Systems, Inc. has developed a radiation-hardened vision system for nuclear energy applications. This vision system has been developed under several small business innovative research programs (SBIRs) from the U.S. Department of Energy, and the previous GAIN voucher program at Argonne National Laboratory (ANL) was successful in demonstrating that a prototype of the camera is radiation-hard up to at least 525 kGy (5.25 × 106 rad, Si equivalent) at dose rates of 10 kGy/hr with no measurable degradation in image quality and no measurable radiation-induced noise (RIN). Vega Wave Systems has developed a new version of the camera with more than 3X the resolution using a new design and new components, and this new design requires radiation-hardness qualification for marketplace acceptance. The program described in this report provided high radiation-hardness testing of this redesigned high-resolution vision system using the Argonne Low-Energy Accelerator Facility (LEAF). This report presents the results of irradiation tests performed on Vega Wave System’s redesigned high resolution vision system at a dose rate of 9.3 kGy/hr and up to total doses of 1823 kGy. This was an accumulation of 197 hours of irradiation. The results were excellent, providing proof of the redesigned high-resolution vision system’s immunity to high levels of radiation.

42 ENGINEERING↗

Optimization of scintillated imaging detectors for MeV X-ray radiography

Radiographic imaging at X-ray energies in the MeV range poses a complex problem. Detection of high energy X-rays depends heavily on the ability of the detection material, in this work the scintillator, to attenuate and ultimately stop the X-ray. Attenuation is more readily achieved by increasing material thickness, however thick scintillators are plagued with relatively high internal scattering, leading to an overall decrease in spatial resolution and image quality.

42 ENGINEERING↗

Structural Evolution of the Hogback Monocline and Its Tectonic Significance in the San Juan Basin

The San Juan Basin is recognized as a Laramide foreland basin. It is located within the Colorado Plateau, a broad tectonic province characterized by a thick sedimentary sequence that was segmented into smaller sub basins during the Late Cretaceous to Paleogene Laramide orogeny. The Hogback Monocline lies along the northwestern margin of the San Juan Basin and is considered a Laramide-age structure formed in response to compressional stress. In this study, we interpret surface and subsurface datasets to construct a structural geological model and evaluate its tectonic significance. Through seismic data, we identify key fault and fold geometries at depth. The seismic dataset used in this study was reprocessed in depth and constrained with well log velocity data to enhance seismic imaging quality. Additionally, we performed well log correlations to identify formation tops and assess variations in basin infill and thickness geometry. A series of structural cross-sections, constructed using seismic data and a high density of boreholes, are presented to evaluate geometric variations along the structure and its evolution during basin development. Furthermore, kinematic restoration and forward modeling analyses were conducted to validate our structural interpretation. This work suggests that the Hogback Monocline formed through fault-propagation folding and flexural slip affecting the pre-Laramide sedimentary sequence under compressional stresses associated with the Laramide orogeny. This structure is interpreted as a high-angle reverse fault that influenced the geometry of the late basin infill. Additionally, monocline bending along the structure may have been controlled by fault relay systems and, in some cases, influenced by strike-slip faulting.

Reyes, Martin [New Mexico Bureau o fGeology and Mi↗

Simulation Study of Monoenergetic Photon Source LiDAR System Performance for Emergency Response Applications

The following report summarizes the results of a Monte Carlo simulation and modeling study of the Lawrence Berkeley National Laboratory’s (LBL) Monoenergetic Photon Source (MPS) as part of a high-energy LiDAR system for use in emergency response applications. A set of image quality indicators (IQI) and nonsensitive phantoms or generalized surrogates for search targets have been identified for use in the planned measurement campaign at the Berkeley Lab Laser Accelerator (BELLA) Center toward the end FY2023. These items were modeled and the time-of-flight (TOF) spectral responses following irradiation were calculated for a set of varying operating conditions. The goal of this study was to both predict the LiDAR system performance as well as determine if minor modifications to the IQI and phantom designs were required before fabrication. It was found that the IQI and target designs both overlap and extend towards the limit of performance of the system and are thus suitable for the final project measurement campaign.

43 - PARTICLE ACCELERATORS↗

Cryo-EM visualization of viruses from partially irrigated soils

Viruses are numerically the most abundant forms on Earth, and most are present in soil. Even though viruses are highly abundant in soil and critical to rhizosphere function, visualizing the diverse morphotypes within soil has been challenging. The difficulty is primarily due to the heterogenous nature of isolated suspensions that typically contain nanometer to micron scale debris which renders protein crystallography for structural studies unfeasible and hinders cryo-electron microscopy due to ice thickness and contrast issues. Here we employed and compared a simple spin filtration method to cleanup solutions of extracted viruses for direct observation with cryo-electron microscopy. The method employs common physical biochemical separation steps to remove large and small debris which dramatically improves image quality and preservation of structural features to permit visualizing morphotypes not typically seen with conventional negative stain approaches. In addition to tailed and non-tailed polyhedral phages, several under reported or novel morphotypes of soil viruses are directly visualized as a particle library with both 2D and 3D information.

cryo-EM↗

Enhanced Monte Carlo Simulations for Electron Energy Loss Mitigation in Real-Space Nanoimaging of Thick Biological Samples and Microchips

High-resolution imaging using Transmission Electron Microscopy (TEM) is essential for applications such as grain boundary analysis, microchip defect characterization, and biological imaging. However, TEM images are often compromised by electron energy spread and other factors. In TEM mode, where the objective and projector lenses are positioned downstream of the sample, electron–sample interactions cause energy loss, which adversely impacts image quality and resolution. This study introduces a simulation tool to estimate the electron energy loss spectrum (EELS) as a function of sample thickness, covering electron beam energies from 300 keV to 3 MeV. Leveraging recent advances in MeV-TEM/STEM technology, which includes a state-of-the-art electron source with 2-picometer emittance, an energy spread of 3 × 10 -5 , and optimized beam characteristics, we aim to minimize energy spread. By integrating EELS capabilities into the BNL Monte Carlo (MC) simulation code for thicker samples, we evaluate electron beam parameters to mitigate energy spread resulting from electron–sample interactions. Based on our simulations, we propose an experimental procedure for quantitively distinguishing between elastic and inelastic scattering. The findings will guide the selection of optimal beam settings, thereby enhancing resolution for nanoimaging of thick biological samples and microchips.

36 MATERIALS SCIENCE↗

The Star Formation Across Cosmic Time (SFACT) Survey. II. The First Catalog from a New Narrowband Survey for Emission-line Objects

Star Formation Across Cosmic Time (SFACT) is a new narrowband (NB) survey designed to detect faint emission-line galaxies (ELGs) and QSOs over a broad range of redshifts. Here we present the first list of SFACT candidates from our pilot-study fields. Using the WIYN 3.5 m telescope, we are able to achieve good image quality with excellent depth and routinely detect ELGs to r = 25.0. The limiting line flux of the survey is ~1.0 × 10 –16 erg s –1 cm –2 . SFACT targets three primary emission lines: Hα, [O III ] λ5007, and [O II ] λ3727. The corresponding redshift windows allow for the detection of objects at z ~ 0–1. With a coverage of 1.50 deg 2 in our three pilot-study fields, a total of 533 SFACT candidates have been detected (355 candidates deg –2 ). We detail the process by which these candidates are selected in an efficient and primarily automated manner, then tabulate accurate coordinates, broadband photometry, and NB fluxes for each source.

79 ASTRONOMY AND ASTROPHYSICS↗

The Optical Corrector for the Dark Energy Spectroscopic Instrument

The Dark Energy Spectroscopic Instrument (DESI) is currently measuring the spectra of 40 million galaxies and quasars, the largest such survey ever made to probe the nature of cosmological dark energy. The 4 m Mayall telescope at Kitt Peak National Observatory has been adapted for DESI, including the construction of a 3$_{.}^{°}$2 diameter prime focus corrector that focuses astronomical light onto a 0.8 m diameter focal surface with excellent image quality over the DESI bandpass of 360–980 nm. The wide-field corrector includes six lenses, as large as 1.1 m in diameter and as heavy as 237 kilograms, including two counterrotating wedged lenses that correct for atmospheric dispersion over zenith angles from 0° to 60°. The lenses, cells, and barrel assembly all meet precise alignment tolerances on the order of tens of microns. The barrel alignment is maintained throughout a range of observing angles and temperature excursions in the Mayall dome by use of a hexapod, which is itself supported by a new cage, ring, and truss structure. In this paper we describe the design, fabrication, and performance of the new corrector and associated structure, focusing on how they meet DESI requirements. In particular, we describe the prescription and specifications of the lenses, design choices and error budgeting of the barrel assembly, stray light mitigations, and integration and test at the Mayall telescope. We conclude with some validation highlights that demonstrate the successful corrector on-sky performance, and we list some lessons learned during the multiyear fabrication phase.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Large-scale Gravitational Lens Modeling with Bayesian Neural Networks for Accurate and Precise Inference of the Hubble Constant

We investigate the use of approximate Bayesian neural networks (BNNs) in modeling hundreds of time delay gravitational lenses for Hubble constant (H 0 ) determination. Here, our BNN was trained on synthetic Hubble Space Telescope quality images of strongly lensed active galactic nuclei with lens galaxy light included. The BNN can accurately characterize the posterior probability density functions (PDFs) of model parameters governing the elliptical power-law mass profile in an external shear field. We then propagate the BNN-inferred posterior PDFs into an ensemble H 0 inference, using simulated time delay measurements from a plausible dedicated monitoring campaign. Assuming well-measured time delays and a reasonable set of priors on the environment of the lens, we achieve a median precision of 9.3% per lens in the inferred H 0 . A simple combination of a set of 200 test lenses results in a precision of 0.5 km s –1 Mpc –1 (0.7%), with no detectable bias in this H 0 recovery test. The computation time for the entire pipeline—including the generation of the training set, BNN training and H0 inference—translates to 9 minutes per lens on average for 200 lenses and converges to 6 minutes per lens as the sample size is increased. Being fully automated and efficient, our pipeline is a promising tool for exploring ensemble-level systematics in lens modeling for H 0 inference.

79 ASTRONOMY AND ASTROPHYSICS↗