Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “reaction”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 451 records · Page 25

Autonomous design of new chemical reactions using a variational autoencoder

Artificial intelligence based chemistry models are a promising method of exploring chemical reaction design spaces. However, training datasets based on experimental synthesis are typically reported only for the optimal synthesis reactions. This leads to an inherited bias in the model predictions. Therefore, robust datasets that span the entirety of the solution space are necessary to remove inherited bias and permit complete training of the space. In this study, an artificial intelligence model based on a Variational AutoEncoder (VAE) has been developed and investigated to synthetically generate continuous datasets. The approach involves sampling the latent space to generate new chemical reactions. This developed technique is demonstrated by generating over 7,000,000 new reactions from a training dataset containing only 7,000 reactions. The generated reactions include molecular species that are larger and more diverse than the training set.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Role of ring-enlargement reactions in the formation of aromatic hydrocarbons

Ring-enlargement reactions can provide a fast route towards the formation of six-membered single-ring or polycyclic aromatic hydrocarbons (PAHs). To investigate the participation of the cyclopentadienyl (C 5 H 5 ) radical in ring-enlargement reactions in high-temperature environments, a mass-spectrometric study was conducted. Experimental access to the C 5 H 5 high-temperature chemistry was provided by two counterflow diffusion flames. Cyclopentene was chosen as a primary fuel given the large amount of resonantly stabilized cyclopentadienyl radicals produced by its decomposition and its high tendency to form PAHs. In a second experiment, methane was added to the fuel stream to promote methyl addition pathways and to assess the importance of ring-enlargement reactions for PAH growth. The experimental dataset includes mole fraction profiles of small intermediate hydrocarbons and of several larger species featuring up to four condensed aromatic rings. Results show that, while the addition of methane enhances the production of methylcyclopentadiene and benzene, the concentration of larger polycyclic hydrocarbons is reduced. The increase of benzene is probably attributable to the interaction between the methyl and the cyclopentadienyl radicals. However, the formation of larger aromatics seems to be dominated only by the cyclopentadienyl driven molecular-growth routes which are hampered by the addition of methane. Furthermore, in addition to the experimental work, two chemical mechanisms were tested and newly calculated reaction rates for cyclopentadiene reactions were included. In an attempt to assess the impact of cyclopentadienyl ring-enlargement chemistry on the mechanisms’ predictivity, pathways to form benzene, toluene, and ethylbenzene were investigated. Results show that the updated mechanism provides an improved agreement between the computed and measured aromatics concentrations. Nevertheless, a detailed study of the single reaction steps leading to toluene, styrene, and ethylbenzene would be certainly beneficial.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Interpreting Tafel behavior of consecutive electrochemical reactions through combined thermodynamic and steady state microkinetic approaches

Assessing the reaction pathway of multi-electron-transfer reactions is an essential yet difficult task for the rational design of electrocatalysts. In this work, we develop a heuristic approach that combines thermodynamic adsorption energetics calculated through density functional theory with microkinetic modeling using the steady state approximation to interpret the potential-dependent Tafel behavior of consecutive electrochemical reactions. In doing so, we introduce a kinetic framework for ab initio calculations that ensures self-consistent adsorption energetics based on kinetically limited adsorbate coverages. The approach is applied to experimental results on CoO x (OH) 2-x single crystal electrocatalyst particles yielding coverage dependent mechanistic information and identification of the rate-limiting step with standard rate constants for the oxygen evolution reaction on the ($11\bar{2}0$) surfaces of the β-Co(OH) 2 , β-CoOOH, and CoO 2 bulk phases. Finally, this generalizable method enables catalyst benchmarking based on determining the active species involved and associated intrinsic reaction rate constants in consecutive multi-electron-transfer reactions.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Universal crossed beam imaging studies of polyatomic reaction dynamics

The marriage between high level quantum calculations and experimental advances in laser technology, quantum state control, and detection techniques have opened the door to the study of molecular collision dynamics at a new level of detail. However, one current challenge lies in adapting these powerful strategies to address questions beyond the scope of the small ground state systems that have largely been the focus of reaction dynamics investigations to-date. For molecules with intermediate or large size (more than 6 atoms), lack of spectroscopic information and spectral congestion limit quantum state preparation, control and detection for experiment, and the large number of degrees of freedom of the system makes accurate quantum dynamics calculations prohibitively expensive. Nevertheless, studies of the chemical dynamics of such systems can reveal novel aspects of reactivity not anticipated based upon the behavior of smaller model systems. This Perspective will highlight applications of soft vacuum ultraviolet photoionization at 157 nm as a universal probe in combination with crossed beams and DC slice velocity map ion imaging to study bimolecular reaction dynamics of molecules of intermediate or large size, illuminated with support of high-level ab initio calculations. In this work, we report on the chemical dynamics of atomic oxygen or chlorine reactions with organic compounds: propanol isomers, alkylamines (N(CH 3 ) 3 and NH(CH 3 ) 2 ), and isobutene ((CH 3 ) 2 CCH 2 ) studied using this approach. The polyatomic radical products from the hydrogen abstraction process have been detected by 157 nm photoionization and their slice ion images embody translational energy and angular information that directly reflect the underlying collision dynamics. Various reaction mechanisms (such as direct abstraction and addition–elimination) along with the involvement of roaming dynamics and novel intersystem crossing pathways are presented. These demonstrate the power of this technique to reveal fundamentally new aspects of reaction dynamics that arise in larger reaction systems.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Tandem synthesis of tetrahydroquinolines and identification of the reaction network by operando NMR

The study of the reaction mechanism and complex network for heterogeneously catalyzed tandem reactions is challenging but can guide reaction design and optimization. Here, we describe a case study using bifunctional metal–organic framework supported Pd nanoparticles (Pd/UiO-66(HCl)) for the one-pot tandem synthesis of substituted tetrahydroquinolines via the Claisen–Schmidt condensation and reductive intramolecular cyclization. The directly observed evolution of intermediates and products, including reactive species containing hydroxylamine group and unstable intermediate 2-phenyl-3,4-dihydroquinoline, was enabled by operando magic angle spinning nuclear magnetic resonance studies under 50 bar H 2 . The reaction network of the tandem reaction is deduced based on reaction kinetic information obtained from the operando study. The optimized procedure was applied to various acetophenone and nitrobenzaldehyde derivatives carrying different functional groups, and eight valuable substituted tetrahydroquinolines were obtained in moderate to good yields. This work provides a molecular-level understanding of the catalytic system and brings up new opportunities for efficient and sustainable synthesis of medicinally relevant building blocks.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Theoretical analysis of the OH-initiated atmospheric oxidation reactions of imidazole

Imidazoles are present in Earth's atmosphere in both the gas-phase and in aerosol particles, and have been implicated in the formation of brown carbon aerosols. The gas-phase oxidation of imidazole (C 3 N 2 H 4 ) by hydroxyl radicals has been shown to be preferentially initiated via OH-addition to position C5, producing the 5-hydroxyimidazolyl radical adduct. However, the fate of this adduct upon reaction with O 2 in the atmospheric gas-phase is currently unknown. We employed an automated approach to investigate the reaction mechanism and kinetics of imidazole's OH-initiated gas-phase oxidation, in the presence of O 2 and NO x . The explored mechanism included reactions available to first-generation RO 2 radicals, as well as alkoxyl radicals produced from RO 2 + NO reactions. Product distributions were obtained by assembling and solving a master equation, under conditions relevant to the Earth's atmosphere. Our calculations show a complex, branched reaction mechanism, which nevertheless converges to yield two major closed-shell products: 4H-imidazol-4-ol (4H-4ol) and N,N′-diformylformamidine (FMF). At 298 K and 1 atm, we estimate the yields of 4H-4ol and FMF from imidazole oxidation initiated via OH-addition to position C5 to be 34 : 66, 12 : 85 and 2 : 95 under 10 ppt, 100 ppt and 1 ppb of NO respectively. This work also revealed O 2 -migration pathways between the α-N-imino peroxyl radical isomers. This reaction channel is fast for the first-generation RO 2 radicals, and may be important during the atmospheric oxidation of other unsaturated organic nitrogen compounds as well.

Almeida, Thomas Golin↗

rNets: a standalone package to visualize reaction networks

In the study of chemical processes, visualizing reaction networks is pivotal for identifying crucial compounds and transformations. Traditional methods, such as network schematics and reaction path linear plots, often struggle to effectively represent complex reaction networks due to their size and intricate connectivity. Alternatives capable of leading with complexity include graph methods, but they are not user-friendly, lacking simplicity and modularity, which hinders their integration with widely-used research software. This work introduces rNets an innovative tool designed for the efficient visualization of reaction networks with a user-friendly interface, modularity, and seamless integration with existing software packages. The effectiveness of rNets is demonstrated through its application in analyzing three catalytic reactions, showcasing its potential to significantly enhance research both in homogeneous and heterogeneous catalysis fields. This tool not only simplifies the visualization process but also opens new avenues for exploring complex reaction networks in diverse research contexts.

Pablo-García, Sergio↗

Reaction dynamics of S( 3 P) with 1,3-butadiene and isoprene: crossed-beam scattering, low-temperature flow experiments, and high-level electronic structure calculations

Sulfur atoms serve as key players in diverse chemical processes, from astrochemistry at very low temperature to combustion at high temperature. Building upon our prior findings, showing cyclization to thiophenes following the reaction of ground-state sulfur atoms with dienes, we here extend this investigation to include many additional reaction products, guided by detailed theoretical predictions. The outcomes highlight the complex formation of products during intersystem crossing (ISC) to the singlet surfaces. Here, we employed crossed-beam velocity map imaging and high-level ab initio methods to explore the reaction of S( 3 P) with 1,3-butadiene and isoprene under single-collision conditions and in low-temperature flows. For the butadiene reaction, our experimental results show the formation of thiophene via H 2 loss, a 2H-thiophenyl radical through H loss, and thioketene through ethene loss at a slightly higher collision energy compared to previous observations. Complementary Chirped-Pulse Fourier-Transform mmWave spectroscopy (CP-FTmmW) measurements in a uniform flow confirmed the formation of thioketene in the reaction at 20 K. For the isoprene reaction, we observed analogous products along with the 2H-thiophenyl radical arising from methyl loss and C 3 H 4 S (loss of ethene or H 2 + acetylene). CP-FTmmW detected the formation of thioformaldehyde via loss of 1,3-butadiene, again in the 20 K flow. Coupled-cluster calculations on the pathways found by the automated kinetic workflow code KinBot support these findings and indicate ISC to the singlet surface, leading to the generation of various long-lived intermediates, including 5-membered heterocycles.

Lang, Jinxin↗

Automated electrosynthesis reaction mining with multimodal large language models (MLLMs)

Leveraging the chemical data available in legacy formats such as publications and patents is a significant challenge for the community. Automated reaction mining offers a promising solution to unleash this knowledge into a learnable digital form and therefore help expedite materials and reaction discovery. However, existing reaction mining toolkits are limited to single input modalities (text or images) and cannot effectively integrate heterogeneous data that is scattered across text, tables, and figures. In this work, we go beyond single input modalities and explore multimodal large language models (MLLMs) for the analysis of diverse data inputs for automated electrosynthesis reaction mining. We compiled a test dataset of 65 articles (MERMES-T24 set) and employed it to benchmark five prominent MLLMs against two critical tasks: (i) reaction diagram parsing and (ii) resolving cross-modality data interdependencies. The frontrunner MLLM achieved ≥96% accuracy in both tasks, with the strategic integration of single-shot visual prompts and image pre-processing techniques. We integrate this capability into a toolkit named MERMES (multimodal reaction mining pipeline for electrosynthesis). Our toolkit functions as an end-to-end MLLM-powered pipeline that integrates article retrieval, information extraction and multimodal analysis for streamlining and automating knowledge extraction. This work lays the groundwork for the increased utilization of MLLMs to accelerate the digitization of chemistry knowledge for data-driven research.

Leong, Shi Xuan↗

First (p,n) reaction measurement in inverse kinematics with SECAR

Nucleosynthesis in the νp-process occurs in regions of slightly proton-rich nuclei in the neutrino-driven wind of core-collapse supernovae. The process proceeds via a sequence of (p,γ) and (n,p) reactions, and depending on the conditions, may produce elements between Ni and Sn. Recent studies show that a few key (n,p) reactions regulate the efficiency of the neutrino-p process (νp-process). We performed a study of one of such (n,p) reactions via the measurement of the reverse (p,n) in inverse kinematics with SECAR at NSCL/FRIB.Such proton-induced reaction measurements are particularly challenging, as the recoils and the unreacted projectiles have nearly identical masses. An appropriate separation level can be achieved with SECAR, and along with the incoincidence detection of neutrons these measurements become attainable. The preparation of the SECAR system for accommodating its first (p,n) reaction measurement, including the development of alternative ion beam optics, and the setup of the in-coincidence neutron detection, along with discussion on preliminary results from the p(58Fe,n)58Co reaction measurement are presented and discussed.

Tsintari, P↗

A technique for studying (n,p) reactions of astrophysical interest using radioactive beams with SECAR

The formation of nuclei in slightly proton-rich regions of the neutrino-driven wind of core-collapse supernovae could be attributed to the neutrino-p process (νp-process). As it proceeds via a sequence of (p,γ) and (n,p) reactions, it may produce elements in the range of Ni and Sn, considering adequate conditions. Recent studies identify a number of decisive (n,p) reactions that control the efficiency of the νp-process. The study of one such (n,p) reaction via the measurement of the reverse (p,n) in inverse kinematics was performed with SECAR at NSCL/FRIB. Proton-induced reaction measurements, especially at the mass region of interest, are notably difficult since the recoils have nearly identical masses as the unreacted projectiles. Such measurements are feasible with the adequate separation level achieved with SECAR, and the in-coincidence neutron detection. Adjustments of the SECAR system for the first (p,n) reaction measurement included the development of new ion beam optics, and the installation of the neutron detection system. The aforementioned developments along with a discussion on the preliminary results of the p(58Fe,n)58Co reaction measurement are presented.

Tsintari, P↗

Investigating shock-induced chemical reactions in Ni+Al multilayers: A continuum-based mesoscale approach with Arrhenius kinetics and artificial thermal conduction

A new continuum-based mesoscale modeling approach for shock-induced chemical reactions (SICRs) in Ni+Al multilayers is demonstrated in Sandia’s shock physics hydrocode, CTH. The approach utilizes Arrhenius-type kinetics and artificial thermal conduction. Our work builds upon previous efforts to parameterize equations of state for Ni x Al y [J. Appl. Phys. 137, 075102 (2025)], as well as simulations of inert shocks in realistic 2D microstructures [J. Appl. Phys. 137, 225301 (2025)]. To calibrate the reaction kinetics, pairs of the reaction coordinate, R′, vs time are extracted from the molecular dynamics (MD) literature. Here, the MD-informed kinetics are used to simulate the dynamic evolution of pressure and temperature in 2D mesoscale simulations. Overall, the MD-informed kinetics obtained for planar interfaces are too slow, as initial reaction is not observed on a nanosecond time scale. Even with quasi-periodic shock focusing leading to the formation of so-called “hot-spots,” the hot spots are unable to grow and coalesce using the fitted Arrhenius rate constants. However, by increasing the rate constants by two orders of magnitude, SICRs are observed at a shock pressure near 30 GPa, which is supported by experiments. Consequently, these mesoscale simulations suggest that unresolved shear-based mechanical mixing might possibly account for the discrepancies in kinetic rates, with shock-generated intense perturbations, interfacial vortical flows, and elevated temperatures serving as favorable reaction conditions. Future work will calibrate a shear-dependent reaction rate from the MD simulations with realistic interfaces that are wavy, diffuse, and disordered.

Kittell, David E. [Sandia National Laboratories (S↗

Plasma-assisted catalysis for ammonia synthesis in a dielectric barrier discharge reactor: key surface reaction steps and potential causes of low energy yield

Ammonia synthesis experiments were carried out in a coaxial dielectric barrier discharge (DBD) reactor packed with several different supports and metal catalysts. There was a marked increase in the reaction rate, over that obtained in an empty DBD plasma reactor, upon introduction of a packed bed of γ-Al 2 O 3 , Ru/γ-Al 2 O 3 , or SiO 2 particles. The difference in the reaction rates over γ-Al 2 O 3 and Ru/γ-Al 2 O 3 was minimal. Complementary zero-dimensional plasma kinetic model analysis was also performed using inputs from experimental data. This kinetic analysis allowed for gas phase reactions, Eley–Rideal (E–R) reactions, and direct adsorption of radical species on the γ-Al 2 O 3 surface. On the metal surface, dissociative adsorption of N 2 and H 2 , and Langmuir–Hinshelwood reactions were also included. This analysis revealed that, under the conditions of our experiments, ammonia synthesis proceeds principally by the formation of reactive radicals in the gas phase, which then adsorb and participate in E–R reactions on both the metal and support material surfaces. Furthermore, this finding illustrates a challenge for substantially increasing the energy yield for plasma-assisted ammonia synthesis in typical DBD reactors containing packed catalyst beads.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Direct Reactions and Spectroscopy with Hydrogen Targets at the RIBF

The implementation of MINOS, a liquid-hydrogen target and vertex-tracking system, at the Radioactive Isotope Beam Factory (RIBF) of the RIKEN Nishina Center has led to numerous nuclear physics discoveries. In experiments involving rare-isotope beams at intermediate energies, MINOS was integrated with the DALI2 + γ-ray spectrometer and other auxiliary devices. These were positioned in front of both the ZeroDegree Spectrometer and the SAMURAI magnetic spectrometers for the identification of ejectiles following quasi-free scattering direct reactions. Notable outcomes include the first spectroscopy of unstable doubly magic nucleus, investigations into multi-neutron decays, and the study of shell evolution along isotopic chains. These studies have significantly advanced our understanding of nuclear structure, as well as the mechanism of direct reactions with fast beams. Simultaneously, these direct reactions enabled raising new physics questions and paved the way for next-generation experimental setups to address them. Through the combination of particle- and γ-spectroscopy with a broad range of nuclear reactions, new frontiers will be established in our understanding of nuclear structure and reaction mechanisms. Here, we review the past ten years of studies on direct reactions and spectroscopy of exotic nuclei with liquid-hydrogen targets at the RIBF and define a vision for the future.

Bertulani, Carlos A [East Texas A & M Univ., Comme↗

Measurement of g 9/2 strength in the stretched 8 – state and other negative parity states via the 51 V (d,p) 52 V reaction

We performed a measurement of the 51 V (d,p) 52 V reaction at 16 MeV using the Florida State University Super-Enge Split-Pole Spectrograph (SE-SPS) to search for single-neutron transfer strength for the g 9/2 intruder orbit. Measurements of νg 9/2 strength with (d, p) reactions in the N = 29 isotones 49 Ca, 51 Ti, 53 Cr, and 55 Fe have concluded that much of the expected νg 9/2 strength is “missing”; that is, the summed strength is much smaller than the sum rule. In odd-odd N = 29 isotones, we expect a significant amount of νg 9/2 strength to be located in the “stretched” 8 – states with π $f$$^{n}_{7/2}$νg 9/2 structure that were systematically observed in the odd-odd N = 29 isotones via the (α,d) reaction. 52 V is the only one of these odd-odd isotones in which a stable target is available for single-neutron transfer reactions. We report on a determination of νg 9/2 strength for the stretched 8 – state and ten other negative parity states populated via L = 4 transfer in the 51 V(d, p) 52 V reaction. Furthermore, this is the first measurement of spectroscopic strength for L = 4 states in 52 V via (d, p). In total, the L = 4 strength observed here sums to only 28.9(11)% of the sum rule for g 9/2 neutron strength, a result that is consistent with the summed strengths observed in recent (d, p) measurements of the even-Z N = 29 isotones 51 Ti, 53 Cr, and 55 Fe. The (α,3 He) reaction and the use of particle-γ coincidences would provide more sensitivity to search for the missing g 9/2 strength.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Direct cross-section measurement of the weak r -process Sr 88 ( α , n ) Zr 91 reaction in ν -driven winds of core-collapse supernovae

About half of the heavy elements beyond iron are known to be produced by the rapid neutron capture process, known as the r process. However, the astrophysical site producing the r process is still uncertain. Chemical abundances observed in several cosmic sites indicate that different mechanisms should be at play. For instance, the abundances around silver measured in a subset of metal-poor stars indicate the presence of a weak r process. This process may be active in neutrino-driven winds of core collapse supernovae where (α,n) reactions dominate the synthesis of Ζ ≈ 40 elements in the expelled materials. Scarcely measured, the rates of (α,n) reactions are determined from statistical Hauser-Feshbach calculations with α-optical-model potentials, which are still poorly constrained. Further, the uncertainties of the (α,n) reaction rates therefore make a significant contribution to the uncertainties of the abundances determined from stellar modeling. In this work, the 88 Sr (α,n)⁢ 91 Zr reaction which impacts the weak r-process abundances has been probed at astrophysics energy for the first time; directly measuring the total cross sections at astrophysical energies of 8.37–13.09 MeV in the center of mass (3.8–7.5 GK). Two measurements were performed at ATLAS with the electrically segmented ionization chamber MUSIC, in inverse kinematics, while following the active target technique. The cross sections of this α-induced reaction on 88 Sr, located at the shell closure N = 50, have been found to be lower than expected, by a factor of 3, despite recent statistical calculations validated by measurements on neighboring nuclei. This result encourages more experimental investigations of (α,n) reactions, at Ν = 50 and towards the neutron-rich side, to further test the predictive power and reliability of such calculations.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Considerations for quantitative in situ X-ray powder diffraction studies of solid-state reactions

The importance of sample preparation in collecting high-fidelity powder diffraction data suitable for quantitative structure and phase analysis is well established. Such powder diffraction experiments are increasingly being appliedin situ, during reactions, to explore solid-state reactivity. When appliedin situ, X-ray diffraction is widely used to gain insight into the mechanism and kinetics, and to identify dynamic intermediate states. Here, using a model ion-exchange reaction (NaFeO 2 + LiCl → LiFeO 2 + NaCl), we show that sample preparation not only influences the fidelity of powder diffraction analysis but also impacts the observed reaction progress. Specifically, we found that the observed reaction progress can differ by ∼50% depending on the capillary sample preparation. Thus, forin situdiffraction studies of solid-state reactions, packing fraction is an important and previously unrecognized consideration that impacts reproducibility and fidelity of the reaction study.

Chemistry↗

Millisecond timescale reactions observed via X-ray spectroscopy in a 3D microfabricated fused silica mixer

Determination of electronic structures during chemical reactions remains challenging in studies which involve reactions in the millisecond timescale, toxic chemicals, and/or anaerobic conditions. Here, a three-dimensionally (3D) microfabricated microfluidic mixer platform that is compatible with time-resolved X-ray absorption and emission spectroscopy (XAS and XES, respectively) is presented. This platform, to initiate reactions and study their progression, mixes a high flow rate (0.50–1.5 ml min –1 ) sheath stream with a low-flow-rate (5–90 µl min –1 ) sample stream within a monolithic fused silica chip. The chip geometry enables hydro­dynamic focusing of the sample stream in 3D and sample widths as small as 5 µm. The chip is also connected to a polyimide capillary downstream to enable sample stream deceleration, expansion, and X-ray detection. In this capillary, sample widths of 50 µm are demonstrated. Further, convection–diffusion-reaction models of the mixer are presented. The models are experimentally validated using confocal epifluorescence microscopy and XAS/XES measurements of a ferricyanide and ascorbic acid reaction. The models additionally enable prediction of the residence time and residence time uncertainty of reactive species as well as mixing times. Residence times (from initiation of mixing to the point of X-ray detection) during sample stream expansion as small as 2.1 ± 0.3 ms are also demonstrated. Importantly, an exploration of the mixer operational space reveals a theoretical minimum mixing time of 0.91 ms. The proposed platform is applicable to the determination of the electronic structure of conventionally inaccessible reaction intermediates.

3D microfabrication↗