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At least 451 records · Page 25
All sourcesNASA NTRSDOE OSTI
NASA NTRS2001

A Highly Miniaturized Inertial Grade Gyroscope for Space Applications

The evolution of inertial grade gyroscopes for space applications represents well over 50 years of technology development and an investment of hundreds of millions of dollars. The workhorse product which represents the current state-of-the art for commercially available high performance devices is the Litton-Hemishperical Resonator Gyro (HRG) Inertial Measurement Unit (IMU). This product has a performance figure of merit of 0.003 deg/hr bias drift, a volume of 567 cubic inches, weighs 19 pounds, draws about 30 watts and costs over $1 million each. Clearly devices of this magnitude are not conducive to the minimized mass, volume, power, and cost constraints of outer planet missions. An approach to breaking these potential barriers is the use of Microelectromechanical Systems (MEMS) based inertial devices. Although substantially reduced in size, mass power and cost, this approach has produced devices in the tactical performance range of greater than 1 deg/hour bias drift. This level of performance satisfies the preponderance of high market volume requirements such as automotive and tactical munitions but does not meet the limited market quantity requirements for the high precision space based market. Because of the very limited size of the space based market, there is little economic incentive for commercial fabricators of tactical grade devices to address the necessary performance improvements. The Jet Propulsion Laboratory (JPL) in conjunction with Boeing Space Systems (BSS) is addressing this void to satisfy our mutual requirements in this area. The project objective to is to achieve 0.01 deg/hr performance in an IMU which is less than 10 cubic inches in volume, weighs less than 0.5 pounds, draws less than 1 watt and is available in volume production for less than $2500. Reductions of this magnitude will be mission enabling capabilities for a variety of anticipated outer planet mission attributes such as autonomous control and docking, formation flying and robotic outposts. The improved performance will be realized using improved relative precision fabrication, enhanced vibratory drive and sense designs, and statistical data analysis.

Wiberg, D. V.↗
NASA NTRS2001

Toward a Micro Gas Chromatograph/Mass Spectrometer (GC/MS) System

Miniature mass filters (e.g., quadrupoles, ion traps) have been the subject of several miniaturization efforts. A project is currently in progress at JPL to develop a miniaturized Gas Chromatograph/Mass Spectrometer (GC/MS) system, incorporating and/or developing miniature system components including turbomolecular pumps, scroll type roughing pump, quadrupole mass filter, gas chromatograph, precision power supply and other electronic components. The preponderance of the system elements will be fabricated using microelectromechanical systems (MEMS) techniques. The quadrupole mass filter will be fabricated using an X-ray lithography technique producing high precision, 5x5 arrays of quadrupoles with pole lengths of about 3 mm and a total volume of 27 cubic mm. The miniature scroll pump will also be fabricated using X-ray lithography producing arrays of scroll stages about 3 mm in diameter. The target detection range for the mass spectrometer is 1 to 300 atomic mass units (AMU) with are solution of 0.5 AMU. This resolution will allow isotopic characterization for geochronology, atmospheric studies and other science efforts dependant on the understanding of isotope ratios of chemical species. This paper will discuss the design approach, the current state-of-the art regarding the system components and the progress toward development of key elements. The full system is anticipated to be small enough in mass, volume and power consumption to allow in situ chemical analysis on highly miniaturized science craft for geochronology, atmospheric characterization and detection of life experiments applicable to outer planet roadmap missions.

Wiberg, D. V.↗
NASA NTRS2000

Effects of Radiation on the Mechanical Properties of Polysilicon and Polydiamond thin Film

Due to its many excellent properties, diamond is being explored as a material for MicroElectroMechanical Systems (MEMS). However, as is true in the case of silicon, a large amount of basic material characterization issues still warrant investigation. This paper presents preliminary results from charged particle irradiation of Chemical Vapor Deposited (CVD) polycrystalline diamond films. The films were simultaneously dosed to a level of 9.4 x l0(exp 13)/sq cm using 700 keV protons and 1 MeV electrons. The samples were then subject to cross-sectional nanoindention analysis and Raman spectroscopy. Polycrystalline silicon was also investigated for comparison purposes. The diamond was unaffected by the irradiation. However, the silicon did indicate a slight decrease in the Young's Modulus.

Newton, Robert L.↗
NASA NTRS2001

Novel Low Loss Wide-Band Multi-Port Integrated Circuit Technology for RF/Microwave Applications

In this paper, novel low loss, wide-band coplanar stripline technology for radio frequency (RF)/microwave integrated circuits is demonstrated on high resistivity silicon wafer. In particular, the fabrication process for the deposition of spin-on-glass (SOG) as a dielectric layer, the etching of microvias for the vertical interconnects, the design methodology for the multiport circuits and their measured/simulated characteristics are graphically illustrated. The study shows that circuits with very low loss, large bandwidth, and compact size are feasible using this technology. This multilayer planar technology has potential to significantly enhance RF/microwave IC performance when combined with semi-conductor devices and microelectromechanical systems (MEMS).

Simons, Rainee N.↗
NASA NTRS2001

Novel Vertical Interconnects With 180 Degree Phase Shift for Amplifiers, Filters, and Integrated Antennas

In this paper, novel low loss, wide-band coplanar stripline technology for RF/microwave integrated circuits is demonstrated on high resistivity silicon wafer. In particular, the fabrication process for the deposition of spin-on-glass (SOG) as a dielectric layer, the etching of microvias for the vertical interconnects, the design methodology for the multiport circuits and their measured/simulated characteristics are graphically illustrated. The study shows that circuits with very low loss, large bandwidth and compact size are feasible using this technology. This multilayer planar technology has potential to significantly enhance RF/microwave IC performance when combined with semiconductor devices and microelectromechanical systems (MEMS).

Goverdhanam, Kavita↗
NASA NTRS2001

Microgravity Production of Nanoparticles of Novel Materials Using Plasma Synthesis

The research goal is to study the formation in reduced gravity of high quality nanoparticulate of novel materials using plasma synthesis. Particular emphasis will be placed on the production of powders of non-oxide materials like diamond, SiC, SiN, c-BN, etc. The objective of the study is to investigate the effect of gravity on plasma synthesis of these materials, and to determine how the microgravity synthesis can improve the quality and yield of the nanoparticles. It is expected that the reduced gravity will aid in the understanding of the controlling mechanisms of plasma synthesis, and will increase the yield, and quality of the synthesized powder. These materials have properties of interest in several industrial applications, such as high temperature load bearings or high speed metal machining. Furthermore, because of the nano-meter size of the particulate produced in this process, they have specific application in the fabrication of MEMS based combustion systems, and in the development and growth of nano-systems and nano-structures of these materials. These are rapidly advancing research areas, and there is a great need for high quality nanoparticles of different materials. One of the primary systems of interest in the project will be gas-phase synthesis of nanopowder of non-oxide materials.

Frenklach, Michael↗
NASA NTRS1999

A Novel Silicon Micromachined Integrated MCM Thermal Management System

This research concerned the development of a novel porous wick, fabricated totally out of silicon, using state-of-the-art MEMS technology. A comprehensive summary of results, as well as additional fabrication details, can be found in the following three documents located in the attached Appendices: A) Selected pages and excerpts from Year 2 progress report of the principal NASA Grant awarded from NASA Lewis Research Center, Grant Number NAG3-1706 entitled "A Novel Silicon Nficromachined Integrated MCM Thermal Management System" submitted to NASA LRC on 4/4/98. B) Selected viewgraphs from the joint NASA, TEES, and UC meeting held at the University of Cincinnati on April 24, 1998. C) Pre-print of the paper entitled "Coherent Macro Porous Silicon as a Wick Structure in an Integrated Nficrofluidic Two-Phase Cooling System" to be presented September 20-25, 1998 at the SPIE conference held in Santa Clara, Ca. To summarize,. nearly all of the proposed work was successfully accomplished (albeit a 3-month time extension was required), proving that micromachining can indeed be used to fabricate porous silicon wick structures with precise hole sizes and patterning control, thus permitting a substantial improvement in future wick designs. In addition, the appropriate range of thermal conductivities of the porous samples were theoretically predicted (see Appendix A). Although not part of the scope of work, the permeability of the test samples were measured (see results sections of Appendices B and C).

Kazmierczak, M. J.↗
NASA NTRS2001

On the Fabrication and Behavior of Diamond Microelectromechanical Sensors (DMEMS)

CVD (chemically vapor deposited) diamond films can be processed similar to "conventional" semiconductor device fabrication and as such can be used to achieve microelectromechanical structures (MEMS) also similar to, for example, silicon technology. Very small cantilever beams, membranes, stripes, tips, etc. can be constructed in doped and undoped diamond films and offer an array of choices in diamond with its known superior properties such as elastic modulus, high temperature semiconduction, high thermal conductivity, very low coefficient of expansion and numerous other diamond parameters. This paper will review the construction and behavior of the second generation DMEMS devices comprised as an accelerometer with a diamond diaphragm for use in very high G applications and a diamond pressure sensor for very high temperature and frequency response.

Holmes, K.↗
NASA NTRS2001

Micro-Scale Avionics Thermal Management

Trends in the thermal management of avionics and commercial ground-based microelectronics are converging, and facing the same dilemma: a shortfall in technology to meet near-term maximum junction temperature and package power projections. Micro-scale devices hold the key to significant advances in thermal management, particularly micro-refrigerators/coolers that can drive cooling temperatures below ambient. A microelectromechanical system (MEMS) Stirling cooler is currently under development at the NASA Glenn Research Center to meet this challenge with predicted efficiencies that are an order of magnitude better than current and future thermoelectric coolers.

Moran, Matthew E.↗
NASA NTRS1996

Scaling Properties of Algorithms in Nanotechnology

At the present time, several technologies are pressing the limits of microminiature manufacturing. In semiconductor technology, for example, the Intel Pentium Pro (which is used in the Department of Energy's ASCI 'red' parallel supercomputer system) and the DEC Alpha 21164 (which is used in the CRAY T3E) both are fabricated using 0.35 micron process technology. Recently Texas Instruments (TI) announced the availability of 0.25 micron technology chips by the end of 1996 and plans to have 0.18 micron devices in production within two years. However, some significant challenges lie down the road. These include the skyrocketing cost of manufacturing plants, the 0.1 micron foreseeable limit of the photolithography process, quantum effects, data communication bandwidth limitations, heat dissipation, and others. Some related microminiature technologies include micro-electromechanical systems (MEMS), opto-electronic devices, quantum computing, biological computing, and others. All of these technologies require the fabrication of devices whose sizes are approaching the nanometer level. As such they are often collectively referred to with the name 'nanotechnology'. Clearly nanotechnology in this general sense is destined to be a very important technology of the 21st century. The ultimate dream in this arena is 'molecular nanotechnology', in other words the fabrication of devices and materials with most or all atoms and molecules in a pre-programmed position, possibly placed there by 'nano-robots'. This futuristic capability will probably not be achieved for at least two decades. However, it appears that somewhat less ambitious variations of molecular nanotechnology, such as devices and materials based on 'buckyballs' and 'nanotubes' may be realized significantly sooner, possibly within ten years or so. Even at the present time, semiconductor devices are approaching the regime where quantum chemical effects must be considered in design.

Saini, Subhash↗
NASA NTRS2002

Subsystem Imaging Performance and Modeling of the Infrared Multi-Object Spectrograph

The Infrared Multi-Object Spectrograph (IRMOS) is a facility instrument for the Kitt Peak National Observatory Mayall Telescope (3.8 meter). IRMOS is a near-IR (0.8 - 2.5 micron) spectrograph with low to mid resolution (R=lambda/delta, lambda = 300 - 3800). The IRMOS spectrograph produces simultaneous spectra of - 100 objects in its 2.8 x 2.0 arc-min field of view using a commercial MEMS multi-mirror array device (MMA). The IRMOS optical design consists of two imaging systems, or "stages." The focal reducer, stage one, images the focal plane of the telescope onto the MMA. The spectrograph, stage two, images the MMA onto the detector. We describe the breadboard alignment method and imaging and scattered light performance for both the focal reducer and spectrograph. This testing provides verification of the optomechanical alignment method, and a measurement of the contribution of scattered light in the system due to mirror small scale surface error. After the stage I and 2 optics are integrated with the instrument, our test results will make it possible to distinguish between scattered light from the mirrors and the MMA. Image testing will be done at four wavelengths in the visible and near-IR. A mercury-argon pencil lamp will provide spectral lines at 546.1 and 1012 nm, and a blackbody radiation source lines at 1600 and 2200 nm. A CCD camera will be used as a detector for the visible wavelengths, and an IR photodiode will be used for the IR wavelengths. We compare our data with a theoretical analysis using a commercial software package. Mirror surface error is modeled by treating each surface as a superposition of various gratings (e.g., diamond turning tool marks, features due to the impurities of Al 6061, and periodic mid-frequency errors due to drift during machining).

Connelly, Joseph A.↗
NASA NTRS2001

Microshutter Arrays for the NGST NIRSpec

We are developing a programmable multiobject field selector for the NGST NIRSpec. This device is a microshutter array, a close-packed 2000 x 2000 array of 100 micrometer x 100 micrometer shutters fabricated with Micro-ElectroMechanical Systems (MEMS) technologies. The shutters are opened using a magnet scanned over the array. The shutters are held open by electrostatic potentials on adjacent vertical electrodes. Modeling of the magnetic actuation of the microshutters allowed optimization of the magnetic field configuration, the distance between magnet and shutters, and the force and torque produced by the magnet. The results of laboratory tests are consistent with our modeling. We have demonstrated actuation, latching and addressing. We are able to rotate shutters out of the plane up to 90 degree and more, to latch them electrostatically to the walls and release them selectively. During the last six month all critical elements of the array have been demonstrated. Fabrication processes were developed to deposit vertical electrodes on support grid side walls and insulated light-shields that block the gaps between shutters and the support grid. Physical optics analysis was performed to assess the expected optical performance of the microshutters. A preliminary Fourier optics analysis on the microshutter array performance has been carried out. More detailed analysis of wave propagation through 3D structures is a next step. An optical test station for verifying optical parameters of the shutter array at room temperature has been developed. It allows to measure parameters, such as transmission, scattering, contrast ratio, and diffraction of the array structure. Initial data have been acquired and are being analyzed and compared to theoretical predictions.

Moseley, Harvey↗
NASA NTRS2002

Integrated Shear Stress/Temperature Micromachined Sensors

During this project we were able to design and initiate the fabrication of an integrated Micro ElectroMechanical Systems (MEMS)-based shear stress/temperature sensor for flow control applications. A brief summary of the completed activities during this project is presented.

Sheplak, Mark↗
NASA NTRS2002

Etching of Silicon in HBr Plasmas for High Aspect Ratio Features

Etching in semiconductor processing typically involves using halides because of the relatively fast rates. Bromine containing plasmas can generate high aspect ratio trenches, desirable for DRAM and MEMS applications, with relatively straight sidewalk We present scanning electron microscope images for silicon-etched trenches in a HBr plasma. Using a feature profile simulation, we show that the removal yield parameter, or number of neutrals removed per incident ion due to all processes (sputtering, spontaneous desorption, etc.), dictates the profile shape. We find that the profile becomes pinched off when the removal yield is a constant, with a maximum aspect ratio (AR) of about 5 to 1 (depth to height). When the removal yield decreases with increasing ion angle, the etch rate increases at the comers and the trench bottom broadens. The profiles have ARs of over 9:1 for yields that vary with ion angle. To match the experimentally observed etched time of 250 s for an AR of 9:1 with a trench width of 0.135 microns, we find that the neutral flux must be 3.336 x 10(exp 17)sq cm/s.

Hwang, Helen H.↗
NASA NTRS2002

Comparison of Stress Relief Procedures for Cryogenic Aluminum Mirrors

The Infrared Multi-Object Spectrograph (IRMOS) is a facility instrument for the Kitt Peak National Observatory Mayall Telescope (3.8 meter) and an engineering prototype for a potential design for the Next Generation Space Telescope/Multi-Object Spectrograph. IRMOS is a low-to mid-resolution (R = lambda/delta-lambda = 300-3800), near-IR (0.8-2.5 micron) spectrograph which produces simultaneous spectra of approximately 100 objects in its 2.8 x 2.0 arcmin field of view using a commercial MEMS multimirror array device. The instrument operating temperature is 80 K and the design is athermal --- the optical bench and mirrors are machined from aluminum 6061-T651. In spite of its baseline mechanical stress relief, aluminum 6061-T651 harbors some residual stress, which, unless relieved during fabrication, may relieve and distort mirror figure to unacceptable levels at the operating temperature. Other cryogenic instruments using aluminum mirrors for both ground-based and space IR astronomy have employed a variety of heat treatment formulae, with mixed results. We present the results of a test program designed to empirically determine the best stress relief procedure for the IRMOS mirrors. Identical test mirrors with spherical and flat optical prescriptions are processed with five different heat treatment formulae from the literature and compared to samples with out any additional processing. After figuring via diamond turning, the mirrors are tested for figure error and radius of curvature at room temperature and at 80 K for several thermal cycles. The heat treatment procedure for the mirrors that yielded the least and most repeatable change in figure error and radius is applied to the IRMOS mirror blanks. We correlate the results of our optical testing with heat treatment and metallographic data.

Ohl, Raymond G.↗
NASA NTRS1999

Optical Fiber Protection

F&S Inc. developed and commercialized fiber optic and microelectromechanical systems- (MEMS) based instrumentation for harsh environments encountered in the aerospace industry. The NASA SBIR programs have provided F&S the funds and the technology to develop ruggedized coatings and coating techniques that are applied during the optical fiber draw process. The F&S optical fiber fabrication facility and developed coating methods enable F&S to manufacture specialty optical fiber with custom designed refractive index profiles and protective or active coatings. F&S has demonstrated sputtered coatings using metals and ceramics and combinations of each, and has also developed techniques to apply thin coatings of specialized polyimides formulated at NASA Langley Research Center. With these capabilities, F&S has produced cost-effective, reliable instrumentation and sensors capable of withstanding temperatures up to 800? C and continues building commercial sales with corporate partners and private funding. More recently, F&S has adapted the same sensing platforms to provide the rapid detection and identification of chemical and biological agents

Source record↗
NASA NTRS2002

Advanced Measurement Systems Available to PIWG Members

It was developed advanced measurement technologies to meet NASA goals: reduce design cycle time, reduce emission, reduce testing time, increase safety. The technology are saving money. This technology are available now for technology transfer: optical diagnostics, the film technology and MEMS devices.

Anderson, Robert↗
NASA NTRS2002

Instrumentation and Controls Division Overview: Sensors Development for Harsh Environments at Glenn Research Center

The Instrumentation and Controls Division is responsible for planning, conducting and directing basic and applied research on advanced instrumentation and controls technologies for aerospace propulsion and power applications. The Division's advanced research in harsh environment sensors, high temperature high power electronics, MEMS (microelectromechanical systems), nanotechnology, high data rate optical instrumentation, active and intelligent controls, and health monitoring and management will enable self-feeling, self-thinking, self-reconfiguring and self-healing Aerospace Propulsion Systems. These research areas address Agency challenges to deliver aerospace systems with reduced size and weight, and increased functionality and intelligence for future NASA missions in advanced aeronautics, economical space transportation, and pioneering space exploration. The Division also actively supports educational and technology transfer activities aimed at benefiting all humankind.

Zeller, Mary V.↗