Characterization of Ultrathin Polymer Films Using p-polarized ATR-FTIR and Its Comparison with XPS
Here, we report on the chemical analysis of ultrathin (10 nm) polymer films using attenuated total reflectance (ATR)–FTIR technique based on p-polarized IR light and two types of enhancing substrates, i.e. metallic (Au) and dielectric (Si). We selected low temperature plasma treated ~10 nm-thick polystyrene films as a test case for demonstrating the capability of the p-polarized ATR-FTIR whose performance was further compared with the conventional X-ray photoelectron spectroscopy (XPS) techniques. Although the ATR-FTIR cannot be used for quantitatively determining elemental compositions in polymers at which XPS excels, it allows to be operated under non-vacuum conditions and study hydrogen containing moieties. By correcting the contact condition between polymer surface and ATR prism, the relative concentration of the chemical bonds from different samples can be compared. Since ATR-FTIR and XPS provide complementary information on chemical bonds, their combination provides a powerful approach for studying the composition and bonding of polymers.