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At least 397 records · Page 22

Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography

Extreme ultraviolet lithography (EUVL, λ = 13.5 nm) is critical for sub-1 nm technology nodes but remains constrained by inherent trade-offs among resolution, line-edge roughness (LER), and sensitivity. Stochastic effects originating from photon shot noise, low-energy secondary electron blur, and the random distribution of resist components further limit its advancement toward high numerical-aperture (NA, NA = 0.55) and hyper-NA (NA ≥0.75) EUVL. While the optimization of spin-on chemically amplified resists (CARs) continues, metal-oxide resists (MORs) have emerged as strong candidates for next-generation EUVL by incorporating metals with high EUV absorption coefficients, which enhances both resist sensitivity and etch resistance during pattern transfer. Besides spin-coating, recent advances in vapour-phase techniques, such as vapour-phase infiltration (VPI), chemical vapour deposition (CVD), and molecular atomic layer deposition (MALD), offer promising pathways to achieve new resist platforms, such as dry resists, that satisfy the stringent thickness and uniformity requirements of next-generation EUVL. These methods enable the direct incorporation of metal species into existing resist matrices or the formation of hybrid inorganic–organic resist platforms, thereby improving film uniformity, etch durability, and pattern fidelity while mitigating stochastic defects. This review highlights the latest advancements in vapour-phase-synthesized EUV resists, emphasizing material design, lithographic performance, and the underlying exposure mechanisms. Although still emerging, vapour-phase strategies are paving the way for an all-dry integration framework that could improve EUV patterning workflows and meet the demands of future technology nodes.

36 MATERIALS SCIENCE↗

A 90 GHz Amplifier Assembled Using a Bump-Bonded InP-Based HEMT

We report on the performance of a novel W-band amplifier fabricated utilizing very compact bump bonds. We bump-bonded a high-speed, low-noise InP high electron mobility transistor (HEMT) onto a separately fabricated passive circuit having a GaAs substrate. The compact bumps and small chip size were used for efficient coupling and maximum circuit design flexibility. This new quasi-monolithic millimeter-wave integrated circuit (Q-MMIC) amplifier exhibits a peak gain of 5.8 dB at approx. 90 GHz and a 3 dB bandwidth of greater than 25%. To our knowledge, this is the highest frequency amplifier assembled using bump-bonded technology. Our bump-bonding technique is a useful alternative to the high cost of monolithic millimeter-wave integrated circuits (MMIC's). Effects of the bumps on the circuit appear to be minimal. We used the simple matching circuit for demonstrating the technology - future circuits would have all of the elements (resistors, via holes, bias lines, etc.) included 'in conventional MMIC's. Our design in different from other investigators' efforts in that the bumps are only 8 microns thick by 15 microns wide. The bump sizes were sufficiently small that the devices, originally designed for W-band hybrid circuits, could be bonded without alteration. Figure 3 shows the measured and simulated magnitude of S-parameters from 85-120 GHz, of the InP HEMT bump-bonded to the low noise amplifier (LNA) passive. The maximum gain is 5.8 dB at approx. 90 GHz, and gain extends to 117 GHz. Measurement of a single device (without matching networks) shows approx. 1 dB of gain at 90 GHz. The measured gain of the amplifier agrees well with the design in the center of the measurement band, and the agreement falls off at the band edges. Since no accommodation for the bump-bonding parasitics was made in the design, the result implies that the parasitic elements associated with the bonding itself do not dominate the performance of the LNA circuit. It should be noted that this amplifier was designed for good noise performance, which is why the input and output return losses are poorer than one would expect for an amplifier simply matched for gain. However, noise performance has not been measured at this time. While the agreement between modeled vs. experimental data is not exact, the data prove that bump-bonded technology can be used for amplifiers at frequencies at least as high as 100 GHz. JPL is pursuing this technology as a way to economically and quickly incorporate the best available HEMTs into a circuit with all of the reliability and circuit design flexibility offered by MMIC technology. We are currently using the technology to fabricate 4-stage, wide-band, W-band LNA's. We have also performed pull and shear tests which show that the bump bonds are sufficiently robust for any anticipated application.

Pinsukanjana, Paul R.↗

Analysis of Ice Mass Growth Over Time on the CRM65 Midspan Hybrid Model

The Aeronautics Research Mission Directorate at NASA is developing and applying tools to enable future technologies towards sustainable flight. Aircraft icing has been identified as a potential barrier to entry into service for innovative designs necessitating improvements to computational ice accretion tools. NASA is developing the Glenn Icing Computational Environment (GlennICE) to address deficiencies in the computational modeling capabilities of previously developed ice accretion solvers. To benchmark and improve the ability to model highly three-dimensional ice accretion, high quality validation data against experimental data is required. The CRM65 Midspan Hybrid geometry was previously tested at the NASA Icing Research Tunnel to generate experimental data for swept wing geometries typical for commercial transport aircraft. As a part of a 2018 icing test campaign, experimental data characterizing the relationship between ice accretion time and ice mass growth was obtained and can be leveraged for use in validation of computational tools. The desire for computational ice accretion solvers to predict ice shapes profiles accreted experimentally has often overshadowed the comparison to the mass and bulk volume of ice accreted. To address this deficiency, an analysis is presented in which GlennICE is applied to simulations of the CRM65 Midspan Hybrid model tested in the NASA Icing Research Tunnel. Results from the computational fluid dynamics simulations compared favorably to the experimental pressure coefficient data, thus validating the modeling setup. The experimental data showed excellent repeatability for the 15.0 minute accretion time. The comparisons between the experimental and computational ice mass over time showed good agreement up to 10.0 minutes after which the ice mass was underpredicted. The experimental ice mass was largely linear with some nonlinear data. The bulk volume of ice accreted experimentally compared well to GlennICE for the scanned ice shapes and mean combined cross section ice shapes, but was underpredicted for the maximum combined cross section ice shapes at longer accretion times. The experimental minimum combined cross section, mean combined cross section, and maximum combined cross section profiles when compared to GlennICE show good agreement for the mean combined cross section up to 15.0 minutes. The analyses show that with a single-shot method, GlennICE currently underpredicts the ice mass for longer accretion times, is not able to match the bulk volume of the maximum combined cross section due to dominating scallop features, and future work is required to generate a more generalized ice bulk density model.

Icing↗

Analysis of Ice Mass Growth Over Time on the CRM65 Midspan Hybrid Model

The Aeronautics Research Mission Directorate at NASA is developing and applying tools to enable future technologies towards sustainable flight. Aircraft icing has been identified as a potential barrier to entry into service for innovative designs necessitating improvements to computational ice accretion tools. NASA is developing the Glenn Icing Computational Environment (GlennICE) to address deficiencies in the computational modeling capabilities of previously developed ice accretion solvers. To benchmark and improve the ability to model highly three-dimensional ice accretion, high quality validation data against experimental data is required. The CRM65 Midspan Hybrid geometry was previously tested at the NASA Icing Research Tunnel to generate experimental data for swept wing geometries typical for commercial transport aircraft. As a part of a 2018 icing test campaign, experimental data characterizing the relationship between ice accretion time and ice mass growth was obtained and can be leveraged for use in validation of computational tools. The desire for computational ice accretion solvers to predict ice shapes profiles accreted experimentally has often overshadowed the comparison to the mass and bulk volume of ice accreted. To address this deficiency, an analysis is presented in which GlennICE is applied to simulations of the CRM65 Midspan Hybrid model tested in the NASA Icing Research Tunnel. Results from the computational fluid dynamics simulations compared favorably to the experimental pressure coefficient data, thus validating the modeling setup. The experimental data showed excellent repeatability for the 15.0 minute accretion time. The comparisons between the experimental and computational ice mass over time showed good agreement up to 10.0 minutes after which the ice mass was underpredicted. The experimental ice mass was largely linear with some nonlinear data. The bulk volume of ice accreted experimentally compared well to GlennICE for the scanned ice shapes and mean combined cross section ice shapes, but was underpredicted for the maximum combined cross section ice shapes at longer accretion times. The experimental minimum combined cross section, mean combined cross section, and maximum combined cross section profiles when compared to GlennICE show good agreement for the mean combined cross section up to 15.0 minutes. The analyses show that with a single-shot method, GlennICE currently underpredicts the ice mass for longer accretion times, is not able to match the bulk volume of the maximum combined cross section due to dominating scallop features, and future work is required to generate a more generalized ice bulk density model.

Icing↗

Future directions in technology development - Increased use of space as a facility

As human activities in space continue to grow in size and scope, the role of in-space technology experiments, as a necessary tool for essential technological development, will also grow. NASA has recognized the increasing importance of such experiments, and has instituted programs to plan, organize, and coordinate future in-space technology experiment activities within the overall space community. This paper discusses the history of in-space technology experiments, and expected future trends. It also describes NASA activities in this growing area of experimentation, and provides several examples of such experiments.

Ambrus, Judith H.↗

Near-Zero Power MOF-Based Sensors for NO 2 Detection

Detection and capture of toxic nitrogen oxides (NO x ) is important for emissions control of exhaust gases and general public health. The ability to directly electrically detect trace (0.5–5 ppm) NO 2 by a metal–organic framework (MOF)-74-based sensor at relatively low temperatures (50 °C) is demonstrated via changes in electrical properties of M-MOF-74, M = Co, Mg, Ni. The magnitude of the change is ordered Ni > Co > Mg and explained by each variant's NO 2 adsorption capacity and specific chemical interaction. Ni-MOF-74 provides the highest sensitivity to NO 2 ; a 725× decrease in resistance at 5 ppm NO2 and detection limit <0.5 ppm, levels relevant for industry and public health. Furthermore, the Ni-MOF-74-based sensor is selective to NO 2 over N 2 , SO 2 , and air. Linking this fundamental research with future technologies, the high impedance of MOF-74 enables applications requiring a near-zero power sensor or dosimeter, with the active material drawing <15 pW for a macroscale device 35 mm 2 with 0.8 mg MOF-74. Finally, this represents a 10 4 –10 6 × decrease in power consumption compared to other MOF sensors and demonstrates the potential for MOFs as active components for long-lived, near-zero power chemical sensors in smart industrial systems and the internet of things.

47 OTHER INSTRUMENTATION↗

A Roadmap for Reaching the Potential of Brain-Derived Computing

Neuromorphic computing is a critical future technology for the computing industry, but it has yet to achieve its promise and has struggled to establish a cohesive research community. A large part of the challenge is that full realization of the potential of brain inspiration requires advances in both device hardware, computing architectures, and algorithms. This simultaneous development across technology scales is unprecedented in the computing field. This article presents a strategy, framed by market and policy pressures, for moving past these current technological and cultural hurdles to realize its full impact across technology. Achieving the full potential of brain-derived algorithms as well as post-complementary metal-oxide-semiconductor (CMOS) scaling neuromorphic hardware requires appropriately balancing the near-term opportunities of deep learning applications with the long-term potential of less understood opportunities in neural computing.

97 MATHEMATICS AND COMPUTING↗

Uncontrolled Learning: Codesign of Neuromorphic Hardware Topology for Neuromorphic Algorithms

Neuromorphic computing has the potential to revolutionize future technologies and our understanding of intelligence, yet it remains challenging to realize in practice. The learning-from-mistakes algorithm, inspired by the brain's simple learning rules of inhibition and pruning, is one of the few brain-like training methods. This algorithm is implemented in neuromorphic memristive hardware through a codesign process that evaluates essential hardware trade-offs. While the algorithm effectively trains small networks as binary classifiers and perceptrons, performance declines significantly with increasing network size unless the hardware is tailored to the algorithm. This work investigates the trade-offs between depth, controllability, and capacity—the number of learnable patterns—in neuromorphic hardware. This highlights the importance of topology and governing equations, providing theoretical tools to evaluate a device's computational capacity based on its measurements and circuit structure. The findings show that breaking neural network symmetry enhances both controllability and capacity. Additionally, by pruning the circuit, neuromorphic algorithms in all-memristive circuits can utilize stochastic resources to create local contrasts in network weights. Through combined experimental and simulation efforts, the parameters are identified that enable networks to exhibit emergent intelligence from simple rules, advancing the potential of neuromorphic computing.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Mechanism of Lithium Ion Exchange Into Spinel Manganese Oxide

Lithium manganese oxide (LMO) is an effective absorbent for lithium recovery from brines, characterized by its high adsorption capacity, excellent regeneration performance, and selectivity. Here, this study investigates the mechanisms of material degradation during lithium loading and unloading in LMO, employing a combination of time‐resolved Raman spectroscopy, X‐ray diffraction, and X‐ray photoelectron spectroscopy. Key findings reveal that the A 1g vibrational mode wavenumber shifts from 635 cm −1 at the onset of lithium ion exchange to 656 cm −1 after 12 min, indicating local symmetry loss and manganese (Mn) loss during lithium intercalation. The proposed lithium exchange mechanism involves initial occupation of tetrahedral interstitial voids, followed by migration into interstitial sites between Mn octahedral sites. Computational modeling suggests that the loss of symmetry in MnO cubane‐like groups occurs as lithium migrates, significantly affecting the Raman spectra. Importantly, the study demonstrates that after 100 cycles of lithium/hydrogen loading, a 24% loss in Mn is observed, which correlates with decreased structural stability; however, the structural integrity of LMO is enhanced when subjected to multiple cycles without complete loading. Here, these insights contribute to the understanding of LMO's performance in lithium recovery applications and highlight potential strategies to optimize its use in future technologies.

15 GEOTHERMAL ENERGY↗

Autonomous Changes in Polymer Materials Driven by Chemical Fuels

Time-dependent properties in polymer materials can be achieved through coupling to out-of-equilibrium chemical fuel reactions that mimic biological processes. Through transient changes in bonding in polymers, transient gelation, changes in mechanical stiffness, swelling, self-healing, or self-assembly can be achieved. Recent advances in these categories are discussed. These out-of-equilibrium behaviors enable applications ranging from smart adhesives to actuators for soft robotics. However, challenges remain, including waste accumulation, bio-compatibility, and achieving functionally useful performance. Addressing these issues is essential for advancing the practical use of chemically driven polymer materials and unlocking their full potential for future technologies.

36 MATERIALS SCIENCE↗

Possibility of an integrated transmission electron microscope: enabling complex in-situ experiments

Abstract Multimodal in-situ experiments are the wave of the future, as this approach will permit multispectral data collection and analysis during real-time nanoscale observation. In contrast, the evolution of technique development in the electron microscopy field has generally trended toward specialization and subsequent bifurcation into more and more niche instruments, creating a challenge for reintegration and backward compatibility for in-situ experiments on state-of-the-art microscopes. We do not believe this to be a requirement in the field; therefore, we propose an adaptive instrument that is designed to allow nearly simultaneous collection of data from aberration-corrected transmission electron microscopy (TEM), probe-corrected scanning transmission electron microscopy, ultrafast TEM, and dynamic TEM with a flexible in-situ testing chamber, where the entire instrument can be modified as future technologies are developed. The value would be to obtain a holistic understanding of the underlying physics and chemistry of the process-structure–property relationships in materials exposed to controlled extreme environments. Such a tool would permit the ability to explore, in-situ, the active reaction mechanisms in a controlled manner emulating those of real-world applications with nanometer and nanosecond resolution. If such a powerful tool is developed, it has the potential to revolutionize our materials understanding of nanoscale mechanisms and transients. Graphical Abstract

36 MATERIALS SCIENCE↗

Demonstration and technoeconomic analysis of dodecanol production from acetate using metabolically engineered Escherichia coli

In a circular bioeconomy, the one-way conversion of petroleum to chemicals and CO 2 is replaced with processes that reduce CO 2 to energy carriers and useful materials that are returned to CO 2 upon combustion. A circular bioeconomy that relies on photosynthesis to generate sugars as the chief energy carrier and precursor to chemical building blocks has yet to overcome many recalcitrant aspects of plant-based photosynthesis, namely, high feedstock costs, arable land scarcity, food competition, and fertilizer overuse. Acetate is a potential sustainable energy carrier because it can be produced from CO 2 either electrocatalytically or by acetogens via the Wood-Ljungdahl pathway. Here, in this work, we conducted a metabolic engineering study of Escherichia coli 's ability to convert acetate into dodecanol as a model oleochemical product. We performed techno-economic and life cycle analyses to determine break-even points with alternative fossil fuel-based strategies and identified critical process performance parameters for supporting an industrial acetate-based bioprocess. These analyses showed that oleochemical yield is the primary driver of minimum oleochemical selling price and carbon intensity. Therefore, to increase yield on acetate, we deleted the aceBAK operon, which facilitates funneling of acetate into biomass instead of product. We performed additional strain engineering to increase flux towards dodecanol and increase acetate uptake. Finally, we demonstrated increased yield in controlled bioreactors, improving from 13% of the maximum theoretical yield to 37%. Rigorous uncertainty analyses assuming a range of market conditions and future technological performances resulted in 88% and 37% of simulated scenarios having lower carbon intensities than fossil fuel-based routes and lower minimum selling prices than the market price.

Acetate↗

International assessment of priority environmental issues for land-based and offshore wind energy development

Non-technical summary A substantial increase in wind energy deployment worldwide is required to help achieve international targets for decreasing global carbon emissions and limiting the impacts of climate change. In response to global concerns regarding the environmental effects of wind energy, the International Energy Agency Wind Technical Collaborative Program initiated Task 34 – Working Together to Resolve Environmental Effects of Wind Energy or WREN. As part of WREN, this study performed an international assessment with the global wind energy and environmental community to determine priority environmental issues over the next 5‒10 years and help support collaborative interactions among researchers, developers, regulators, and stakeholders. Technical summary A systematic assessment was performed using feedback from the international community to identify priority environmental issues for land-based and offshore wind energy development. Given the global nature of wind energy development, feedback was of interest from all countries where such development is underway or planned to help meet United Nations Intergovernmental Panel on Climate Change targets. The assessment prioritized environmental issues over the next 5–10 years associated with wind energy development and received a total of 294 responses from 28 countries. For land-based wind, the highest-ranked issues included turbine collision risk for volant species (birds and bats), cumulative effects on species and ecosystems, and indirect effects such as avoidance and displacement. For offshore wind, the highest-ranked issues included cumulative effects, turbine collision risk, underwater noise (e.g. marine mammals and fish), and displacement. Emerging considerations for these priorities include potential application to future technologies (e.g. larger turbines and floating turbines), new stressors and species in frontier regions, and cumulative effects for multiple projects at a regional scale. For both land-based and offshore wind, effectiveness of minimization measures (e.g. detection and deterrence technologies) and costs for monitoring, minimization, and mitigation were identified as overarching challenges. Social media summary Turbine collisions and cumulative effects among the international environmental priorities for wind energy development.

17 WIND ENERGY↗

Synthesis, Processing, and Use of Isotopically Enriched Epitaxial Oxide Thin Films

Isotopic engineering has emerged as a key approach to study the nucleation, diffusion, phase transitions, and reactions of materials at an atomic level. It aims to uncover mass transport pathways, kinetics, and operational and failure mechanisms of functional materials and devices. Understanding these phenomena leads to deeper insights into important physical processes, such as the transport of ions in energy conversion and storage devices and the role of active sites and supports during heterogeneous catalytic reactions. Likewise, isotopic engineering is being pursued as a means of modifying functionality to enable future technological applications. In this Account, we summarize our recent work employing isotope labeling (e.g., 18 O 2 and 57 Fe) during thin film synthesis and postgrowth processing to reveal growth mechanisms, defect chemistry, and elemental diffusion under working and extreme conditions. Isotope-resolved analysis techniques with nanometer-scale spatial resolution, such as time-of-flight secondary ion mass spectrometry and atom probe tomography, facilitate the accurate quantification of isotopic placement and concentration in our well-defined heterostructures with precisely positioned, isotope-enriched layers. By measuring the nanometer-scale redistribution between natural abundance and isotopically enriched oxygen layers during the deposition of Fe 2 O 3 and Cr 2 O 3 by molecular beam epitaxy, we identified intermixing processes driven by surface adatoms occurring both at the film growth surface and within the first few layers below the surface. Further insights into synthesis mechanisms were gained by studying the tungsten oxide thin films grown by evaporating WO 3 powder in the presence of background 18 O 2 , revealing minimal incorporation of background oxygen during the film formation process. Thermal and radiation-enhanced diffusion in epitaxial Fe and Cr oxides were precisely tracked using 18 O and 57 Fe tracer layers incorporated into model epitaxial oxide thin films. This approach has allowed us to access thermal diffusion behavior at lower temperatures than previously measured, revealing a potential changeover in diffusion mechanism. Understanding radiation-enhanced diffusion in model oxides that represent the surface layers on the structural components of nuclear reactors informs our understanding of their corrosion behavior under irradiation. Isotopic labeling can also provide unique insights into the surface exchange reactions and defect chemistry of electrocatalysts. For instance, tracking the change in 18 O concentration at the surface of an epitaxial LaNiO 3 thin film after the electrocatalytic oxygen evolution reaction revealed the participation of lattice oxygen, confirming a hypothesis that had been proposed previously. Lastly, we highlight a new direction wherein we perform in situ processing studies utilizing isotopic tracers in conjunction with model epitaxial thin films within the atom probe tomography instrument. Additionally, this Account illustrates the great potential of isotopic engineering to enable fundamental mechanistic insights into physical processes and engineer functional properties in epitaxial films, heterostructures, and superlattices.

36 MATERIALS SCIENCE↗

Doping Induced Magnetic and Electronic Phase Transitions in the Ferrimagnetic Half-Metallic Mn 4 Al 11 Compound

The future of spintronics and semiconductor applications demands materials with tailored electronic and magnetic properties. Here, this study uses density functional theory to investigate the electronic structure of the half-metallic compound Mn 4 Al 11 under uniaxial strain and in its Ge-substituted derivatives. Strain analysis shows that although the half-metallic band gap collapses under strain beyond −2%, the ferrimagnetic character remains stable. Ge substitution at six inequivalent Al sites in Mn 4 Al 11 results in varying degrees of metallicity and magnetic properties. Substitution at Al═ (000) induces a metal-to-insulator transition with an indirect semiconducting gap of 0.14 eV. Bonding and hybridization analyses reveal that local Mn–Al interactions due to Ge substitution significantly modify the local electronic structure, causing both electronic and magnetic phase transitions. This work highlights the effectiveness of substitutional doping in tuning half-metallicity and magnetic properties in inorganic solids, enabling the design of materials for future technological applications.

alloys↗

Presence of Delocalized Ti 3d Electrons in Ultrathin Single-Crystal SrTiO 3

Strontium titanate (STO), with a wide spectrum of emergent properties such as ferroelectricity and superconductivity, has received significant attention in the community of strongly correlated materials. In the strain-free STO film grown on the SrRuO 3 buffer layer, the existing polar nanoregions can facilitate room-temperature ferroelectricity when the STO film thickness approaches 10 nm. Here we show that around this thickness scale, the freestanding STO films without the influence of a substrate show the tetragonal structure at room temperature, contrasting with the cubic structure seen in bulk form. Further, the spectroscopic measurements reveal the modified Ti-O orbital hybridization that causes the Ti ion to deviate from its nominal 4+ valency (3d o configuration) with excess delocalized 3d electrons. Additionally, the Ti ion in TiO 6 octahedron exhibits an off-center displacement. The inherent symmetry lowering in ultrathin freestanding films offers an alternative way to achieve tunable electronic structures that are of paramount importance for future technological applications.

36 MATERIALS SCIENCE↗

Compressibility Studies of Copper Selenides Obtained by Cation Exchange Reaction Revealing the New CsCl Phase

In this study, we conducted a high-pressure investigation of Cu 2-x Se nanostructures with pyramid- and plate-like morphologies, created through cation exchange from zinc-blende CdSe nanocrystals and wurtzite CdSe nanoplatelets respectively. Using a diamond anvil cell setup at the APS synchrotron, we observed the phase transitions in the Cu 2-x Se nanostructures up to 40 GPa, identifying a novel CsCl-type lattice with Pm-3m symmetry above 4 GPa. This CsCl-type structure, previously unreported in copper selenides, was partially retained after decompression. Our results indicate that the initial crystalline structure of CdSe does not affect the stability of Cu 2-x Se nanostructures formed via cation exchange. Both morphologies of Cu 2-x Se sintered under compression, potentially contributing to the stabilization of the high-pressure phase through interfacial defects. These findings are significant for discovering new phases with potential applications in future technologies.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗