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At least 397 records · Page 22

Work function tuning of plasma-enhanced atomic layer deposited WC{sub x}N{sub y} electrodes for metal/oxide/semiconductor devices

One of the main challenges facing the integration of metals as gate electrodes in advanced MOS devices is control over the Fermi level position at the metal/dielectric interface. In this study, we demonstrate the ability to tune the effective work function (EWF) of W-based electrodes by process modifications of the atomic layer deposited (ALD) films. Tungsten carbo-nitrides (WC{sub x}N{sub y}) films were deposited via plasma-enhanced and/or thermal ALD processes using organometallic precursors. The process modifications enabled us to control the stoichiometry of the WC{sub x}N{sub y} films. Deposition in hydrogen plasma (without nitrogen based reactant) resulted in a stoichiometry of WC{sub 0.4} with primarily W-C chemical bonding, as determined by x-ray photoelectron spectroscopy. These films yielded a relatively low EWF of 4.2 ± 0.1 eV. The introduction of nitrogen based reactant to the plasma or the thermal ALD deposition resulted in a stoichiometry of WC{sub 0.1}N{sub 0.6–0.8} with predominantly W-N chemical bonding. These films produced a high EWF of 4.7 ± 0.1 eV.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

A three-dimensional hierarchical structure of cyclized-PAN/Si/Ni for mechanically stable silicon anodes

Here, the main challenges associated with silicon anodes are their poor conductivity and severe structural degradation during cycling. Here we design a three-dimensional sandwich hierarchical structure that tackles these problems, and we demonstrate its use in flexible, large-area silicon anode assemblies. The design of the electrode is achieved via plasma enhanced chemical vapor deposition of silicon nanoparticles onto three-dimensional nickel foam followed by conformal coating of cyclized-PAN on the silicon surface, thus forming a sandwiched cyclized-PAN/Si/Ni hierarchical structure. The three-dimensional networks provide abundant electroactive zones and conductive transport paths, the conformal coating of cyclized-PAN accommodates volume change during cycling, and the monolithic electrode configuration without additional binders or conductive agents improves the energy density of the whole electrode. Furthermore, as a result of the sandwich hierarchical arrangement, the solid-electrolyte interface of the anode remains stable and spatially confined, leading to an increased reversible capacity and improved cycling stability (910 mA h g –1 after 100 cycles at 1.0 A g –1 ).

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Development of a versatile multiaperture negative ion source

A 60 kV ion source (9 beamlets of 15 mA each of H{sup -}) and plasma generators are being developed at Consorzio RFX and INFN-LNL, for their versatility in experimental campaigns and for training. Unlike most experimental sources, the design aimed at continuous operation. Magnetic configuration can achieve a minimum |B| trap, smoothly merged with the extraction filter. Modular design allows for quick substitution and upgrading of parts such as the extraction and postacceleration grids or the electrodes in contact with plasma. Experiments with a radio frequency plasma generator and Faraday cage inside the plasma are also described.

43 PARTICLE ACCELERATORS↗

Inclusion of Biological Targets in the Analysis of Electrical Characteristics of Non-Thermal Plasma Discharge

In Plasma Medicine studies, the effect of non-thermal plasma (NTP) on biological targets is typically correlated with the amount of stable reactive oxygen and nitrogen species produced in a liquid medium. The effect of NTP and the response of the biological target on cellular redox mechanisms is overlooked in these investigations. Additionally, the influence of electrical properties of cells on the physical properties of NTP is neglected. Therefore, we used a floating electrode dielectric barrier discharge plasma to explore the impact of cell structure, size, and viability of the biological target on the physical properties of NTP. Lissajous figures were used to determine circuit capacitance and energy per cycle during NTP exposure of different cell suspensions. We show that both, structural integrity and active enzymic processes of cells change the electrical properties of NTP. Correlations were also drawn between NTP-produced hydrogen peroxide and nitrite with measured capacitance. Our studies indicate that the observed changes between different cell suspensions may be due to a feedback loop between the biological target and the NTP source. In future studies, a more detailed analysis is needed to improve the control of clinical NTP devices.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Shivalik Plasma Device-I, a glow discharge device to study the collective dynamics of dusty plasma

Using a uniquely configured glow discharge-based Shivalik Plasma Device-I, we demonstrate a variety of collective phenomena in dusty plasma away from the glow discharge region. The cylindrical glass device produces plasma using parallel disc-shaped electrodes with a smaller anode size than the cathode. The dust microparticles are initially sprinkled over the grounded cathode. These particles acquire a significant negative charge upon plasma formation, resulting in their levitation due to the balance between the Coulomb force and gravity. The new device supports the levitation of a big-sized (10 × 8 × 5 cm 3 ) three-dimensional dust cloud over the glass surface. It contrasts the dusty plasma formations in-between electrodes reported earlier. As the discharge voltage varies from high to low, the dust cloud travels from over the glass surface to between the electrodes. A complex interplay of dust void over the cathode, a sharp density gradient, and gravity lead to self-excitation of collective dust phenomena. It includes dust density waves (phase velocity, v ph ~4 cm/s), dust cloud oscillation (frequency, f = 5 Hz), sheared flow (flow velocity, v f ~ 1 cm/s), and multiple-sized dust vortices. These dust vortices provided an excellent platform for studying turbulent mixing phenomena. The power spectrum analysis agreed with two-dimensional Kolmogorov power-law scaling. This is an ideal dusty plasma apparatus where we can create or move the dust cloud to a location of choice from the glass surface to in-between the electrodes and excite one among many collective dust dynamics.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Considerations For Contractile Electroactive Materials and Actuators

Electroactive polymers (EAPs) that bend, swell, ripple (first generation materials), and now contract with low electric input (new development) have been produced. The mechanism of contraction is not well understood. Radionuclide-labeled experiments, molecular modeling, electrolyte experiments, pH experiments, and an ionic concentration experiment were used to determine the chain of events that occur during contraction and, reciprocally, expansion when the polarity is reversed, in these ionic EAPs. Plasma treatment of the electrodes, along with other strategies, allows for the embedded electrodes and the EAP material of the actuator to work and move as a unit, with no detachment, by significantly improving the metal-polymer interface, analogous to nerves and tendons moving with muscles during movement. Challenges involved with prototyping actuation using contractile EAPs are also discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Cl atom recombination on silicon oxy-chloride layers deposited on chamber walls in chlorine-oxygen plasmas

Chlorine atom recombination coefficients were measured on silicon oxy-chloride surfaces deposited in a chlorine inductively coupled plasma (ICP) with varying oxygen concentrations, using the spinning wall technique. A small cylinder embedded in the walls of the plasma reactor chamber was rapidly rotated, repetitively exposing its surface to the plasma chamber and a differentially pumped analysis chamber housing a quadruple mass spectrometer for line-of-sight desorbing species detection, or an Auger electron spectrometer for in situ surface analysis. The spinning wall frequency was varied from 800 to 30 000 rpm resulting in a detection time, t (the time a point on the surface takes to rotate from plasma chamber to the position facing the mass or Auger spectrometer), of {approx}1-40 ms. Desorbing Cl{sub 2}, due to Langmuir-Hinshelwood (LH) Cl atom recombination on the reactor wall surfaces, was detected by the mass spectrometer and also by a pressure rise in one of the differentially pumped chambers. LH Cl recombination coefficients were calculated by extrapolating time-resolved desorption decay curves to t = 0. A silicon-covered electrode immersed in the plasma was either powered at 13 MHz, creating a dc bias of -119 V, or allowed to electrically float with no bias power. After long exposure to a Cl{sub 2} ICP without substrate bias, slow etching of the Si wafer coats the chamber and spinning wall surfaces with an Si-chloride layer with a relatively small amount of oxygen (due to a slow erosion of the quartz discharge tube) with a stoichiometry of Si:O:Cl = 1:0.38:0.38. On this low-oxygen-coverage surface, any Cl{sub 2} desorption after LH recombination of Cl was below the detection limit. Adding 5% O{sub 2} to the Cl{sub 2} feed gas stopped etching of the Si wafer (with no rf bias) and increased the oxygen content of the wall deposits, while decreasing the Cl content (Si:O:Cl = 1:1.09:0.08). Cl{sub 2} desorption was detectable for Cl recombination on the spinning wall surface coated with this layer, and a recombination probability of {gamma}{sub Cl} = 0.03 was obtained. After this surface was conditioned with a pure oxygen plasma for {approx}60 min, {gamma}{sub Cl} increased to 0.044 and the surface layer was slightly enriched in oxygen fraction (Si:O:Cl = 1:1.09:0.04). This behavior is attributed to a mechanism whereby Cl LH recombination occurs mainly on chlorinated oxygen sites on the silicon oxy-chloride surface, because of the weak Cl-O bond compared to the Cl-Si bond.

36 MATERIALS SCIENCE↗

Electric Field Measurements to Investigate Sheath Formation in a Nanosecond Pulsed Discharge

The objective of the research was to study the temporally and spatially resolved dynamics of sheath formation in a nanosecond pulsed plasma generated in a parallel plate electrode geometry at near atmospheric pressures. We have performed LIF dip measurements at the Sandia Low-Temperature Plasma Research Facility showing the capability to measure electric fields in near atmospheric pressure plasmas although with insufficient spatial resolution near the electrodes. Stark polarization spectroscopy implemented at the University of Minnesota was shown to be able to probe the formation of the sheaths in nanosecond pulsed plasmas. Within 30 ns, a reduction of the sheath thickness to about 250 μm is observed, coinciding with a gradual increase of the discharge current and proportional increase in electric field at the cathode. The electric field evolution as obtained by the fluid model is in excellent agreement with the measurements and shows that an enhanced ionization near the cathode is causing the space charge formation responsible for the increase in electric field. High resolution Stark polarization spectroscopy showed sheaths with dimensions of the order of 50 μm underlining the need of micrometer spatial resolution for sheath characterization in near atmospheric pressure.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Electron dynamics and plasma jet formation in a helium atmospheric pressure dielectric barrier discharge jet

The excitation dynamics within the main plasma production region and the plasma jets of a kHz atmospheric pressure dielectric barrier discharge (DBD) jet operated in helium was investigated. Within the dielectric tube, the plasma ignites as a streamer-type discharge. Plasma jets are emitted from both the powered and grounded electrode end; their dynamics are compared and contrasted. Ignition of these jets are quite different; the jet emitted from the powered electrode is ignited with a slight time delay to plasma ignition inside the dielectric tube, while breakdown of the jet at the grounded electrode end is from charging of the dielectric and is therefore dependent on plasma production and transport within the dielectric tube. Present streamer theories can explain these dynamics.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Tracking nanoparticle growth in pulsed carbon arc discharge

The dynamics of nanoparticle growth in pulsed anodic arc discharge has been studied in time-resolved mode. To this end, a fast moving probe was employed to extract the material generated in a pulsed arc plasma held between two graphite electrodes. The probe motion was synchronized with the pulse phase and the exposure time to the plasma was set to 10 ms. The graphite anode was eroded in a helium atmosphere (300 Torr) by an arc plasma pulsed at 1 Hz with a 10% duty cycle and showing 250 A of peak current. The structure and morphology of the probe depositions were characterized by Raman spectroscopy, scanning electron microscopy, and focused ion beam. A maximal deposition rate of 260 μm/s was measured 5 mm away from the arc core during the active 0.1 s of the pulse. Such a rate yields a growth flux of 1.3 × 10 21 cm –2 s –1 , rich in carbon nanostructures (graphene platelets, nanotubes) with a characteristic aggregate size within 1–10 μm. The deposition during the inactive 0.9 s of the pulse was several orders of magnitude slower and consisted of amorphous carbon traces. Furthermore, the nanoparticle distribution along the collecting probe is correlated with the pulse phase, thereby providing information on particle transport. Pulsed nanosynthesis can be modeled as a periodical growth process, where the volume and propagation velocity of the growth region can be adjusted through modulation of the pulse signal waveform. The proposed model constitutes a suitable framework to investigate the pulsed arc synthesis of nanomaterials with tailored physical and chemical properties.

42 ENGINEERING↗

Solid expellant plasma generator

An improved solid expellant plasma generator has been developed. The plasma generator includes a support housing, an electrode rod located in the central portion of the housing, and a mass of solid expellant material that surrounds the electrode rod within the support housing. The electrode rod and the solid expellant material are made of separate materials that are selected so that the electrode and the solid expellant material decompose at the same rate when the plasma generator is ignited. This maintains a point of discharge of the plasma at the interface between the electrode and the solid expellant material.

Stone, Nobie H.↗

An experimental platform for investigating astrophysically relevant magnetized plasma jets on the COBRA facility

A new platform has been developed for the 1-MA COBRA generator to investigate the physical processes affecting the formation, collimation, and stability of high-speed outflows in magnetically driven laboratory plasma jets. Such experiments serve as diagnostically accessible surrogates for astrophysical jets under the assumption that the underlying dynamics are scale invariant. In contrast to previous current driven high energy density laboratory jet experiments that use radial/conical wire arrays or foils, the platform described here uses azimuthally symmetric gas-puff injection. This avoids the ablation phase from a solid target, allowing the jets to develop earlier and be driven longer without depleting their mass source and disrupting. A permanent magnet provides an initial poloidal magnetic field, which links the two concentric electrodes and mimics the boundary conditions of a star-accretion disk system. Extended magnetohydrodynamic effects can be assessed using a polarity convolute, which allows for reversal of the electrode bias. The resulting plasma jets exhibit remarkable stability, persisting for hundreds of nanoseconds and achieving aspect ratios ≳30:1.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Atomic layer etching of SiO 2 with Ar and CHF 3 plasmas: A self-limiting process for aspect ratio independent etching

With ever increasing demands on device patterning to achieve smaller critical dimensions, the need for precise, controllable atomic layer etching (ALE) is steadily increasing. In this work, a cyclical fluorocarbon/argon plasma is successfully used for patterning silicon oxide by ALE in a conventional inductively coupled plasma tool. The impact of plasma parameters and substrate electrode temperature on the etch performance is established. We achieve the self-limiting behavior of the etch process by modulating the substrate temperature. We find that at an electrode temperature of -10°C, etching stops after complete removal of the modified surface layer as the residual fluorine from the reactor chamber is minimized. Finally, we demonstrate the ability to achieve independent etching, which establishes the potential of the developed cyclic ALE process for small scale device patterning.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Array of surface-confined glow discharges in atmospheric pressure helium: Modes and dynamics

Array of atmospheric pressure surface discharges confined by a two-dimensional hexagon electrode mesh is studied for its discharge modes and temporal evolution so as to a theoretical underpinning to their growing applications in medicine, aerodynamic control, and environmental remediation. Helium plasma surface-confined by one hexagon-shaped rim electrode is shown to evolve from a Townsend mode to a normal and abnormal glow mode, and its evolution develops from the rim electrodes as six individual microdischarges merging in the middle of the hexagon mesh element. Within one hexagon element, microdischarges remain largely static with the mesh electrode being the instantaneous cathode, but move towards the hexagon center when the electrode is the instantaneous anode. On the entire array electrode surface, plasma ignition is found to beat an unspecific hexagon element and then spreads to ignite surrounding hexagon elements. The spreading of microdischarges is in the form of an expanding circle at a speed of about 3 × 10{sup 4} m/s, and their quenching starts in the location of the initial plasma ignition. Plasma modes influence how input electrical power is used to generate and accelerate electrons and as such the reaction chemistry, whereas plasma dynamics are central to understand and control plasma instabilities. The present study provides an important aspect of plasma physics of the atmospheric surface-confined discharge array and a theoretical underpinning to its future technological innovation.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Scalable High-Throughput Open-Air Spray-Plasma Manufacturing of Solid-State Lithium Batteries

This final technical report presents a comprehensive analysis of a novel plasma-based in-line manufacturing process for large-area, LLZO-separator-based, solid-state lithium-ion batteries, demonstrating both technical feasibility and economic advantages over conventional vacuum deposition methods. The technical validation shows that spray-deposition with plasma curing achieves comparable electrode and separator quality to vacuum techniques while enabling continuous processing of components and industrially relevant film areas. Critical material interfaces maintain low porosity and high ionic conductivities, which confirm the process's ability to overcome the primary limitation of conventional methods - the trade-off between deposition quality and economically-viable production scale.

25 ENERGY STORAGE↗

Laboratory observations of ion cyclotron waves associated with a double layer in an inhomogeneous magnetic field

Observations of coherent electrostatic ion cyclotron (EIC) waves associated with a strong, magnetized double layer are presented. The double layers are produced in a weakly ionized argon plasma by applying a positive potential to an electrode plate located in the diverging magnetic field region of a cylindrical plasma column. Ionization within the electrode sheath is essential to the formation of these double layers. The resulting V-shaped potential structures have extended parallel, oblique and perpendicular (to B) electric field components. The frequency of the ion cyclotron instability is dependent upon the magnetic field strength at the position of the parallel potential structure. The properties of EIC waves in the presence of the double layer are discussed in relation to the possible excitation mechanisms (field-aligned currents, ion and electron beams, and perpendicular E fields).

Alport, M. J.↗

Ternary gas plasma welding torch

A plasma arc welding torch is discussed. A first plasma gas is directed through the body of the welding torch and out of the body across the tip of a welding electrode disposed at the forward end of the body. A second plasma gas is disposed for flow through a longitudinal bore in the electrode. The second plasma gas enters one end of the electrode and exits the electrode at the tip thereof for co-acting with the electric welding arc to produce the desired weld. A shield gas is directed through the torch body and circulates around the head of the torch adjacent to the electrode tip.

Rybicki, Daniel J.↗

Image Rotation in Plasmas

Because of the speed of light compared to material motion, the dragging of light is difficult to observe under laboratory conditions. Furthermore we report on the first observation of image rotation, i. e. a dragging by the medium of the wave’s transverse structure, of Alfv´en waves in plasmas. Exploiting the naturally slow group velocity of these waves, significant wave rotation is achieved for modest angular frequency. Control over the rotation of the wave’s structure is demonstrated through the plasma rotation imposed by biased electrodes. Remarkably, experimental results are well reproduced by light dragging theory derived for isotropic media, even if magnetized plasmas are anisotropic. In addition to offering new insights into the fundamental issue of angular momentum coupling between waves and media, these findings also open possibilities for new remote rotation sensing tools.

Alfvén waves↗