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Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering
Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.
Observations On Submicropulse Electron-beam Effects From Short-range Wakefields In Tesla-type Superconducting RF Cavities
aExperiments were performed at The Fermilab Accelerator Science and Technology (FAST) facility to elucidate the effects of short-range wakefields (SRWs) in TESLA-type rf cavities. FAST has a unique configuration of a photocathode rf gun beam injecting two TESLA-type single cavities (CC1 and CC2) in series prior to the cryomodule. To investigate short-range wakefield effects, we have steered the beam to minimize the signals in the higher-order mode (HOM) detectors of CC1 and CC2 for a baseline, and then selected a vertical corrector to steer the beam off axis at an angle into CC1 or CC2. A Hamamatsu synchro-scan streak camera viewing a downstream OTR screen provided an image of y-t effects within the micropulses with ~10-micron spatial resolution and 2-ps temporal resolution. At 500 pC/b, 50 b, and 2 mrad off-axis steering into CC2, we observed an ~ 100-micron head-tail centroid shift in the streak camera image y(t)-profiles. This centroid shift value is consistent wit h a calculated short-range wakefield effect using ASTRA simulations.
High-latitude electron beam effective for remediating an artificial belt at IRIDIUM! [Slides]
Abstract not provided.
DIRECT OBSERVATIONS OF SUBMICROPULSE ELECTRON-BEAM EFFECTS FROM SHORT-RANGE WAKEFIELDS IN TESLA-TYPE SUPERCONDUCTING RF CAVITIES
Experiments were performed at The Fermilab Accelerator Science and Technology (FAST) facility to elucidate the effects of short-range wakefields (SRWs) in TESLA-type rf cavities. FAST has a unique configuration of a photocathode rf gun beam injecting two TESLA-type single cavities (CC1 and CC2) in series prior to the cryomodule. To investigate short-range wakefield effects, we have steered the beam to minimize the signals in the higher-order mode (HOM) detectors of CC1 and CC2 for a baseline, and then used a vertical corrector between the two cavities to steer the beam off axis at an angle into CC2. A Hamamatsu synchroscan streak camera viewing a downstream OTR screen provided an image of y-t effects within the micropulses with ~10-micron spatial resolution and 2-ps temporal resolution. At 500 pC/b, 50 b, and 4 mrad off-axis steering into CC2, we observed an ~ 100-micron head-tail centroid shift in the streak camera image y(t)-profiles. This centroid shift value is 5 times l arger than the observed HOM-driven centroid oscillation within the macropulse, and it is consistent with a calculated short-range wakefield effect using ASTRA simulations.
Study of Ion Generation by a ps-laser for External Injection into Electron Beam Ion Source
We investigated ion generation from Al, Ti, Cu, Nb and Ta target elements by a picosecond-laser in the range of 10 11 – 10 13 W/cm 2 power densities at the target surface. A ps-laser with 1.27 mJ maximum energy within a 8 ps pulse and repetition rate up to 400 Hz has been used to generate a laser-ablated plasma. Dependencies of ion current vs time, total charge of registered ions as well as ion kinetic energy distributions are characterized using a Faraday cup. Significant difference in ion current dynamics between first, second and following shots onto the same target spot was found for all five target elements. The total charge of ions registered by the Faraday cup increase linearly with increasing laser pulse energy and are almost independent on the target element and number of shots onto the same target spot for all five target elements studied. Target craters have been examined using a commercially available microscope (Nikon Eclipse LV150) and crater cross section areas were found to be in the range of 0.0076 – 0.0172 mm 2 within the first five shots onto the same target spot for different target elements. A linear dependence of crater cross section square on laser pulse energy has been observed for the Ta target. Ion energy distributions for all target elements have a plateau or a slight peak in the energy range of 10 - 100 eV and long low-intensity energy tail up to tens of keV.
Energy I-Corps Electron Beam (EB) Potential for International Trade of Logs
The purpose of this document is to capture the potential from Fermilab’s “Team EB Treement” at the DOE Energy I-Corps program. Energy I-Corps, a key initiative of the Office of Technology Transitions, pairs teams of researchers with industry mentors for an intensive two-month training where the researchers define technology value propositions, conduct customer discovery interviews, and develop viable market pathways for their technologies. The team was composed prior to the Energy I-Corp program; however, the program was a catalyst for education and information exchange between the team members and stakeholders, customers, and regulators. These exchanges were captured in the evolution of a Business Model Canvas (BMC) and a Value Proposition (VP). The BMC and VP underwent numerous transformations based on feedback from the conversations between members of the team and forest or agriculture industry stakeholders and the program instructors.
End-point Energy Determination of Electron Beams from the Saturn Accelerator 3-Ring Pinched Beam Diode.
Abstract not provided.
First Results from Diamagnetic Loop Measurements of the DARHT-I Electron Beam [Slides]
Diamagnetic-loop (DML) measurements can inform efforts to improve radiographic resolution. DML is non-invasive, so time-resolved data is available on every shot while tuning or executing a hydrotest. The time-resolved beam size can be deduced from the DML data. LIA beam-transport dynamics affecting beam size can be monitored while testing mitigation measures (e.g., beam halo suppression). Time-resolved beam size at final focus provides immediate information about spot size enlargement due to blur, and effectiveness of mitigation efforts. DML measures magnetic flux produced by a rotating beam, so it also enables monitoring of Larmor emittance that can enlarge the spot size. Beam rotation adds in quadrature with emittance, hence “Larmor emittance." Observing zero bias-field DML flux monitors beam rotation resulting from imperfect nulling of flux linking the cathode, and/or broken LIA transport symmetry (e.g., steering, quads, etc.).
GENIE Adaptations for Electron Beam and Simulation Comparisons [Poster]
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Modeling of Relativistic Electron Beams in the Atmosphere [Slides]
Abstract not provided.
Exploring the Effectveness of Electron Beam Treatment for Ballast Water Management at Fermi Natonal Accelerator Laboratory [Poster]
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Design of a superconducting RF electron beam accelerator for wastewater treatment [Poster]
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Transverse properties of the electron beam emitted from a diamond nanotip.
Abstract not provided.