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At least 361 records · Page 20

Joint Optics Structures Experiment (JOSE)

The objectives of the JOSE program is to develop, demonstrate, and evaluate active vibration suppression techniques for Directed Energy Weapons (DEW). DEW system performance is highly influenced by the line-of-sight (LOS) stability and in some cases by the wave front quality. The missions envisioned for DEW systems by the Strategic Defense Initiative require LOS stability and wave front quality to be significantly improved over any current demonstrated capability. The Active Control of Space Structures (ACOSS) program led to the development of a number of promising structural control techniques. DEW structures are vastly more complex than any structures controlled to date. They will be subject to disturbances with significantly higher magnitudes and wider bandwidths, while holding higher tolerances on allowable motions and deformations. Meeting the performance requirements of the JOSE program requires upgrading the ACOSS techniques to meet new more stringent requirements, the development of requisite sensors and acturators, improved control processors, highly accurate system identification methods, and the integration of hardware and methodologies into a successful demonstration.

Founds, David↗

Combustion instability analysis

A theory and computer program for combustion instability analysis are presented. The basic theoretical foundation resides in the concept of entropy-controlled energy growth or decay. Third order perturbation expansion is performed on the entropy-controlled acoustic energy equation to obtain the first order integrodifferential equation for the energy growth factor in terms of the linear, second, and third order energy growth parameters. These parameters are calculated from Navier-Stokes solutions with time averages performed on as many Navier-Stokes time steps as required to cover at least one peak wave period. Applications are made for a 1-D Navier-Stokes solution for the Space Shuttle Main Engine (SSME) thrust chamber with cross section area variations taken into account. It is shown that instability occurs when the mean pressure is set at 2000 psi with 30 percent disturbances. Instability also arises when the mean pressure is set at 2935 psi with 20 percent disturbances. The system with mean pressures and disturbances more adverse that these cases were shown to be unstable.

Chung, T. J.↗

Electric power processing, distribution and control for advanced aerospace vehicles.

The results of a current study program to develop a rational basis for selection of power processing, distribution, and control configurations for future aerospace vehicles including the Space Station, Space Shuttle, and high-performance aircraft are presented. Within the constraints imposed by the characteristics of power generation subsystems and the load utilization equipment requirements, the power processing, distribution and control subsystem can be optimized by selection of the proper distribution voltage, frequency, and overload/fault protection method. It is shown that, for large space vehicles which rely on static energy conversion to provide electric power, high-voltage dc distribution (above 100 V dc) is preferable to conventional 28 V dc and 115 V ac distribution per MIL-STD-704A. High-voltage dc also has advantages over conventional constant frequency ac systems in many aircraft applications due to the elimination of speed control, wave shaping, and synchronization equipment.

Krausz, A.↗

Voltage waveform tailoring for high aspect ratio plasma etching of SiO 2 using Ar/CF 4 /O 2 mixtures: Consequences of ion and electron distributions on etch profiles

The quality of high aspect ratio (HAR) features etched into dielectrics for microelectronics fabrication using halogen containing low temperature plasmas strongly depends on the energy and angular distribution of the incident ions (IEAD) onto the wafer, as well as potentially that of the electrons (EEAD). Positive ions, accelerated to high energies by the sheath electric field, have narrow angular spreads and can penetrate deeply into HAR features. Electrons typically arrive at the wafer with nearly thermal energy and isotropic angular distributions and so do not directly penetrate deeply into features. These differences can lead to positive charging of the insides of the features that can slow etching rates and produce geometric defects such as twisting. In this work, we computationally investigated the plasma etching of HAR features into SiO 2 using tailored voltage waveforms in a geometrically asymmetric capacitively coupled plasma sustained in an Ar/CF 4 /O 2 mixture at 40 mTorr. The tailored waveform consisted of a sinusoidal wave and its higher harmonics with a fundamental frequency of 1 MHz. We found that some degree of control of the IEADs and EEADs is possible by adjusting the phase of higher harmonics φ through the resulting generation of electrical asymmetry and electric field reversal. However, the IEADs and EEADs cannot easily be separately controlled. The control of IEADs and EEADs is inherently linked. The highest quality feature was obtained with a phase angle φ = 0° as this value generated the largest (most negative) DC self-bias and largest electric field reversal for accelerating electrons into the feature. That said, the consequences of voltage waveform tailoring (VWT) on etched features are dominated by the change in the IEADs. Although VWT does produce EEADs with higher energy and narrower angular spread, the effect of these electrons on the feature compared to thermal electrons is not large. Finally, this smaller impact of VWT produced EEADs is attributed to thermal electrons being accelerated into the feature by electric fields produced by the positive in-feature charging.

47 OTHER INSTRUMENTATION↗

Atmospheric condition identification in multivariate data through a metric for total variation

Identification of atmospheric conditions within a multivariable atmospheric data set is a necessary step in the validation of emerging and existing high-fidelity models used to simulate wind plant flows and operation.Atmospheric conditions relevant for wind energy research include stationary conditions, given the need for well-converged statistics for model validation, as well as conditions observed less frequently, such as extreme atmospheric events, which are used in wind turbine and wind plant design.Aggregation of observations without regard to covariance between time series discounts the dynamical nature of the atmosphere and is not sufficiently representative of atmospheric conditions.Identification and characterization of continuous time periods with atmospheric conditions that have a high value for analysis or simulation set the stage for more advanced model validation and the development of real-time control and operational strategies.The current work explores a single metric for variation in a multivariate data sample that quantifies variability within each channel as well as covariance between channels.The total variation is used to identify conditions of interest that conform to desired objective functions, such as stationary conditions, ramps or waves of wind speed, and changes in wind direction.Total variation is somewhat sensitive to the presence of outliers in the input data, and the method is best complemented by quality-control procedures to ensure reliable results.The direct detection and classification of events or conditions of interest within atmospheric data sets is vital to developing our understanding of wind plant response and to the formulation of forecasting and control models.

17 WIND ENERGY↗

Enhanced collisionless laser absorption in strongly magnetized plasmas

We report that strongly magnetizing a plasma adds a range of waves that do not exist in unmagnetized plasmas and enlarges the laser-plasma interaction (LPI) landscape. In this paper, we use particle-in-cell simulations to investigate strongly magnetized LPI in one dimension under conditions relevant for magneto-inertial fusion experiments, focusing on a regime where the electron-cyclotron frequency is greater than the plasma frequency and the magnetic field is at an oblique angle with respect to the wave vectors. We show that when electron-cyclotron-like hybrid wave frequency is about half the laser frequency, the laser light resonantly decays to magnetized plasma waves via primary and secondary instabilities with large growth rates. These distinct magnetic-field-controlled instabilities, which we collectively call two-magnon decays, are analogous to two-plasmon decays in unmagnetized plasmas. Since additional phase mixing mechanisms are introduced by the oblique magnetic field, collisionless damping of large-amplitude magnetized waves substantially broadens the electron distribution function, especially along the direction of the magnetic field. During this process, energy is transferred efficiently from the laser to plasma waves and then to electrons, leading to a large overall absorptivity when strong resonances are present. The enhanced laser energy absorption may explain hotter-than-expected temperatures observed in magnetized laser implosion experiments and may also be exploited to develop more efficient laser-driven x-ray sources.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Starting-point-independent quantum Monte Carlo calculations of iron oxide

Quantum Monte Carlo (QMC) methods are useful for studies of strongly correlated materials because they are many body in nature and use the physical Hamiltonian. Typical calculations assume as a starting point a wave function constructed from single-particle orbitals obtained from one-body methods, e.g., density functional theory. However, mean-field-derived wave functions can sometimes lead to systematic QMC biases if the mean-field result poorly describes the true ground state. In this study, we examine the accuracy and flexibility of QMC trial wave functions using variational and fixed-node diffusion QMC estimates of the total spin density and lattice distortion of antiferromagnetic iron oxide (FeO) in the ground state B1 crystal structure. We found that for relatively simple wave functions the predicted lattice distortion was controlled by the choice of single-particle orbitals used to construct the wave function, rather than by subsequent wave function optimization techniques within QMC. By optimizing the orbitals with QMC, we then demonstrate starting-point independence of the trial wave function with respect to the method by which the orbitals were constructed by demonstrating convergence of the energy, spin density, and predicted lattice distortion for two qualitatively different sets of orbitals. The results suggest that orbital optimization is a promising method for accurate many-body calculations of strongly correlated condensed phases.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Vertical tilts of tropospheric waves - Observations and theory

Two methods are used to investigate the vertical tilts of planetary waves as functions of zonal wavenumber and frequency. The vertical tilts are computed by cross-spectral analysis of the geopotential heights at different pressures. In the midlatitude troposphere, the eastward-moving waves had a westward tilt with height, as expected, but the westward-moving waves with frequencies higher than 0.2/d showed statistically significant eastward vertical tilts. For a free Rossby wave, this implies that the Eliassen-Palm flux is downward along with its energy propagation. A downward energy propagation suggests an upper-level source of these waves. It is proposed that the eastward-tilting waves were forced by the nonlinear interaction of stationary waves and baroclinically unstable cyclone-scale waves. The predicted vertical tilt and phase speed were consistent with the observations. In addition, simulations of a general circulation model were analyzed. In the control run, eastward-tilting waves disappeared when the sources of stationary waves were removed. This is consistent with the present theory.

Ebisuzaki, Wesley↗

The Geospace Dynamics Observatory; a Mission of Discovery for Geospace

A few examples of potential advances include: 1. Unparalleled advances in the connection of the upper atmosphere to the Sun. In the aurora and lower latitudes, extending the duration of uninterrupted images would advance understanding of the transfer of energy from the Sun to the upper atmosphere and the response of the space environment. 2. Advances in the influence of waves and tides on the upper atmosphere. Increasing both the signal to noise and the duration ofthe observations would reveal contributions that are not identifiable using other approaches. 3. The ability to probe the mechanisms that control the evolution of planetary atmospheres. The vantage point provided by this mission allows the flux of hydrogen (which is tied to the escape of water from a planet) to be mapped globally. It also allows unique observations of changes in the atmospheric structure and their causes.

Spann, James↗

Efficient excitation and control of integrated photonic circuits with virtual critical coupling

Critical coupling in integrated photonic devices enables the efficient transfer of energy from a waveguide to a resonator, a key operation for many applications. This condition is achieved when the resonator loss rate is equal to the coupling rate to the bus waveguide. Carefully matching these quantities is challenging in practice, due to variations in the resonator properties resulting from fabrication and external conditions. Here, we demonstrate that efficient energy transfer to a non-critically coupled resonator can be achieved by tailoring the excitation signal in time. We rely on excitations oscillating at complex frequencies to load an otherwise overcoupled resonator, demonstrating that a virtual critical coupling condition is achieved if the imaginary part of the complex frequency equals the mismatch between loss and coupling rate. We probe a microring resonator with tailored pulses and observe a minimum intensity transmission T = 0.11 in contrast to a continuous-wave transmission T = 0.58, corresponding to 8 times enhancement of intracavity intensity. Our technique opens opportunities for enhancing and controlling on-demand light-matter interactions for linear and nonlinear photonic platforms.

42 ENGINEERING↗

UNH TDP - Concurrent Measurements of Inflow, Power Performance, and Loads for a Grid-Synchronized Vertical Axis Cross-Flow Turbine Operating in a Tidal Estuary

This data was collected between October 12 and December 15 of 2021 at the University of New Hampshire (UNH) and Atlantic Marine Energy Center (AMEC) turbine deployment platform (TDP). This data set includes over 29 days of grid connected turbine operation during this 65 day time frame. The priority for this measurement campaign was to collect data while the turbine was electrically connected to the grid by means of a rectifier and inverter. The Fall_2021_UNH_Measurement_Timeline.png highlights when each instrument was functioning and the Fall_2021_UNH_Test_Log.jpg indicates the four main regions for analysis available from this measurement campaign. The TDP is a floating structure moored on the Portsmouth facing side of Memorial Bridge pier #2, which spans the Piscataqua River between Portsmouth, NH and Kittery, ME. The Piscataqua River connects the Great Bay Estuary to the Gulf of Maine and the river currents are dominated by tidal forcing with water velocities exceeding 2.5 m/s during spring ebb tides at this site which were previously characterized by Kaelin Chancey (Assessment Of The Localized Flow And Tidal Energy Conversion System At An Estuarine Bridge - UNH MS Thesis 2019). The turbine under test was a modified New Energy Corporation (Calgary, CA) model EVG-025 4-blade H-Darrius type vertical axis cross flow turbine that rotates in the clockwise direction with a rotor diameter of 3.2m and blade length of 1.7m. The hydro-foil profile was a NACA 0021 with a 10 inch chord length and a blade preset pitch angle of +4deg with a positive angle corresponding with the toe in direction. The standard EVG-025 has a rotor diameter of 3.4m and its rated power output is 25kW at 3 m/s. The rotor diameter was reduced to accommodate the size of the existing TDP moon-pool. This project was pursued to quantify device performance for cross flow turbines operating in a marine environment. Accurate physical models, to characterize cross flow turbine performance, require real operational data sets due to the complexity of blade fluid interactions. This data can help support model development which will help predict turbine performance when analyzing perspective project locations in the future. Instrumentation was deployed to measure; water speed/direction, electrical power output, turbine shaft speed, turbine thrust force, and platform motion. Concurrent measurements of these parameters allow for correlations (cause and affect) to be inferred, allowing for characterization of device performance over a range of operating conditions. Water currents were measured using Acoustic Doppler Current Profilers (ADCP's) and Acoustic Doppler Velocimeters (ADV's) directly upstream and downstream of the turbine for inflow, wake and turbulence measurements. Electrical power output was measured using the Voltsys rectifier and the Shark power meter. Shaft speed was calculated based on the Voltsys measurements of the permanent magnet three phase generator AC generation frequency, coupled directly to the cross flow turbine under test (i.e., no gear box). Platform motions were captured using a Yost IMU (inertial measurement unit). Turbine thrust loading was measured using a reaction arm about the turbine deployment platform spanning beam, where two bi-directional load cells were connected to the system via a pinned connection. This submission includes zipped folders for each instrument containing quality controlled (QC'd) data in daily .csv files for the relevant duration specific to each instrument, along with separate .csv file that contains the units for each variable. Some instrument daily files are quite large and can pose a challenge for a visual spreadsheet editor to open. A processing software like MATLAB or Python is recommended. Note the degree of QC varied between each instrument due to time constraints. Particular time and attention was given to perform quality control tests on the acoustic based instruments that are particularly suscep...

16 TIDAL AND WAVE POWER↗

Open-Loop Control of Adjustable Tuned Mass Dampers for Floating Wind Turbine Platforms: Preprint

Floating offshore wind turbines have several advantages over their land-based counterparts, including access to stronger, more consistent winds and proximity to population centers. However, increased costs from the platform have been a challenge inhibiting their widespread adoption. New damping technologies with tunable target frequencies and damping ratios promise a greater degree of control over platform motions, allowing hulls to be designed smaller and reducing the overall cost of the turbines. In this work, a control strategy is proposed for these adjustable tuned mass dampers (TMDs). A frequency-domain model of the system is developed, from which response amplitude operators (RAOs) for the platform's rigid-body modes can be obtained for different natural frequencies and damping ratios of the dampers. Using these RAOs, and JONSWAP spectrums of operational and extreme sea states, the performance of the various damper settings are compared by evaluating the standard deviation of a rigid-body motion of interest (platform pitch or heave). By finding the optimal damper setting for a range of representative design load cases (DLCs), a lookup function is made to return the damper target frequency given the peak period of the sea state. To determine the current sea state, we propose a simple estimator that uses wave measurements (e.g., from a measurement buoy) to determine the peak period and significant wave height. The significant wave height is determined using the statistics of the past 100 seconds of wave elevation information and the peak period is computed using a frequency locked loop. Initial results show that we can use these estimated values to control the TMD natural frequency with an open loop controller. The controlled system is tested in a range of environmental conditions determined by the International Electrotechnical Commission design load cases (DLCs), which include normal and extreme wind and wave models. In these tests, we compare the performance of 4 cases: (1) no TMD, (2) a constant TMD based on the worst case DLC, (3) a controlled TMD based on known wind and wave environments, and (4) a real-time controlled TMD using estimated wind and wave environments. The effect of hull-based TMD control is also compared to changes in traditional wind turbine control via blade pitch.

control↗

An imaging vector magnetograph for the next solar maximum

Researchers describe the conceptual design of a new imaging vector magnetograph currently being constructed at the University of Hawaii. The instrument combines a modest solar telescope with a rotating quarter-wave plate, an acousto-optical tunable prefilter as a blocker for a servo-controlled Fabry-Perot etalon, CCD cameras, and on-line digital image processing. Its high spatial resolution (1/2 arcsec pixel size) over a large field of view (5 by 5 arcmin) will be sufficient to significantly measure, for the first time, the magnetic energy dissipated in major solar flares. Its millisecond tunability and wide spectral range (5000 to 7000 A) enable nearly simultaneous vector magnetic field measurements in the gas-pressure-dominated photosphere and magnetically-dominated chromosphere, as well as effective co-alignment with Solar-A's X ray images. Researchers expect to have the instrument in operation at Mees Solar Observatory (Haleakala) in early 1991. They have chosen to use tunable filters as wavelength-selection elements in order to emphasize the spatial relationships between magnetic field elements, and to permit construction of a compact, efficient instrument. This means that spectral information must be obtained from sequences of images, which can cause line profile distortions due to effects of atmospheric seeing.

Mickey, D. L.↗

Thermal Mechanical Stability of Single-Crystal-Oxide Refractive Concentrators Evaluated for High-Temperature Solar-Thermal Propulsion

Recently, refractive secondary solar concentrator systems were developed for solar thermal power and propulsion (ref. 1). Single-crystal oxides-such as yttria-stabilized zirconia (Y2O3-ZrO2), yttrium aluminum garnet (Y3Al5O12, or YAG), magnesium oxide (MgO), and sapphire (Al2O3)-are candidate refractive secondary concentrator materials. However, the refractive concentrator system will experience high-temperature thermal cycling in the solar thermal engine during the sun/shade transition of a space mission. The thermal mechanical reliability of these components in severe thermal environments is of great concern. Simulated mission tests are important for evaluating these candidate oxide materials under a variety of transient and steady-state heat flux conditions. In this research at the NASA Lewis Research Center, a controlled heat flux test approach was developed for investigating the thermal mechanical stability of the candidate oxide. This approach used a 3.0-kW continuous-wave (wavelength, 10.6 mm) carbon dioxide (CO2) laser (ref. 2). The CO2 laser is especially well-suited for single-crystal thermal shock tests because it can directly deliver well-characterized heat energy to the oxide surfaces. Since the oxides are opaque at the 10.6-mm wavelength of the laser beam, the light energy is absorbed at the surfaces rather than transmitting into the crystals, and thus generates the required temperature gradients within the specimens. The following figure is a schematic diagram of the test rig.

Jacobson, Nathan S.↗

Applied Uses of MERRA Reanalyses: Current and Future Prospects

During the initial planning of the Modern Era Retrospective-analysis for Research and Applications (MERRA), the project was envisioned to become a tool for applied sciences and decision makers, as well as weather and climate research. MERRA was the first reanalysis to provide data at 1 hourly frequencies. After discussions with wind energy users, 50m above the surface winds were included in the data collection to begin to represent the environment at the turbine height. MERRA-2 was the first reanalysis to include interactive and assimilated aerosols. From these, PM 1, 2.5 and 10 records have been computed and contribute to the climate and health sector. The US Center for Disease Control is accessing MERRA-2 data for comparison along with their health data. MERRA-2 Extreme Indices have been computed from the high frequency data (e.g. precipitation maxima, heat waves and fire weather). These have been used to characterize the changing extremes in the United States and around the globe as well as the weather associated with the extremes. The next-generation, MERRA-21C, includes increased resolution (25km) and continues to provide innovative Earth system data. For example, a boundary layer collection will provide constant height level data starting at 100m, continuing up to 4000m. This will provide detailed information about the boundary layer processes that greatly affect the biosphere. Chemical tracers for constituents are included in the system. The ensemble data assimilation is run with 32 members, and the variance for critical variables are stored. We will explore the use of this variance as one measure of uncertainty relevant for applied uses, which has not been included in any MERRA reanalysis. We will discuss use case scenarios developed to engage with the energy and financial sectors, to better understand their needs for climate data. Prospects for further downscaling of reanalyses will also be explored.

Michael Bosilovich↗

Flexoelectricity and New Phenomena

It is easy to miss the scientific implications of our recent work on Triboelectricity. Everyone knows that rubbing and contact can produce static electricity; less appreciated is that the thermodynamic driver has been an open question since static electricity was first observed by Thales of Miletus around 585 BC. People think they understand it, for instance one common explanation that can still be found in the current literature is that differences in the work function drives charge transfer, often called the Volta-Helmholtz hypothesis. As summarized in 1967 by Harper, this fails to explain many experimental observations, for instance that charging can occur when two pieces of the same material are rubbed against each other. We are the first to place triboelectricity on a solid foundation rooted in quantum mechanics – the flexoelectric effect. We were able to explain a significant number of previously unexplained phenomena: 1) Bipolar tribocurrents associated with stick-slip, due to the change in sign of the strain gradients. 2) A one-third power scaling of tribocurrents with indentation force. 3) Tribocharging when two identical materials are used, these being due to local variations in the asperities so there are usually local potential differences. 4) Inhomogeneous charging of insulators, related to the statistical nature of asperities. 5) An experimentally observed reversal in the sign of charge transfer for negative and positive curvature, which is related to a change in the sign of the strain gradient. Exploiting our DOE prior funded work on flexoelectricity, we obtained semi-quantitative matching to existing experimental measurements of the surface charge in triboelectric experiments. The work has been well received in the literature. The work has been the focus of a number of popular science press articles, and also formed the basis for a Podcast for children 6-10 “The Rise and Fall of Static Man” posted in December 2019 by NPR as part of their “Wow in the World” series. I was also briefly interviewed by the Chicago PBS station in January 2020. This work are significant for a wide range of energy applications; to quote from an independent source: "Triboelectric power has plenty of potential, says Wenzhuo Wu, an assistant professor of engineering at Purdue. If the basics of static electricity are better understood, we could maximize the efficiency of wind or wave power generators, Wu says. The body's own movement could be used to power internal medical devices. Imagine being able to create a roof shaped to harness the power of a raindrop — the friction of the rain passing over the surface — to generate triboelectricity, powering the building below it." This is the start of new science, some of which we already partially understand such as the role of band bending in charge transfer. We need to understand charge transfer combining elasticity, quantum mechanics, band bending and defect states. These directly involve several of the DOE Grand Challenges: "How do we control material processes at the level of electrons? How do remarkable properties of matter emerge from complex correlations of the atomic or electronic constituents and how can we control these properties? How do we characterize and control matter away—especially very far away— from equilibrium?" I will argue that this work truly falls into the class of disruptive science; it is not just a simple extension, linear science. Not everyone will accept the approach. Since we explain far more about triboelectricity than anyone before, the preponderance of evidence supports the model. The feedback I have received is that many agree with the work, to quote: "The model makes sense, says Michael McAlpine, a professor of engineering at the University of Minnesota. "It's such a simple explanation, I was surprised I didn't put my finger on that," McAlpine says." The proposal received strong reviews. It was also publicized on the Department of Energy Web Site.

16 TIDAL AND WAVE POWER↗

Revisiting Theoretical Limits for One-Degree-of-Freedom Wave Energy Converters: Preprint

This work revisits the theoretical limits of one-degree of freedom wave energy converters (WECs). This paper considers the floating sphere used in the Ocean Energy Systems (OES) Task 10 Wave Energy Converter modeling and verification effort for analysis. Analytical equations are derived to determine bounds on the motion amplitude, time-averaged power, and power take-off (PTO) force. A unique result was found that shows the time-averaged power absorbed by a WEC can be defined solely by the inertial properties and the radiation hydrodynamic coefficients. In addition, a unique expression for the PTO force amplitude was derived which has provided upper and lower bounds when resistive control is used to maximize power generation. For complex conjugate control, this same expression can only provide a lower bound as there is theoretically no upper bound. These bounds are used to compare the performance of a floating sphere if it were to extract energy using surge or heave motion. The analysis shows that because of the differences in hydrodynamic coefficients of each oscillating mode there will be different frequency ranges that provide better power capture efficiency. The influence of a motion constraint on power absorption while also utilizing a nonideal power take-off is examined and found to reduce the losses associated with bidirectional energy flow. The expression to calculate the time-averaged power with a nonideal PTO is modified by the mechanical-to-electrical efficiency and the ratio of the PTO spring and damping coefficients. These were separated in the expression which allows for limits to be set on the possible values of PTO coefficients to ensure a net flow of power to the grid.

50 EE - Wind and Water Power Program - Water (EE-4↗

Electric field reversals resulting from voltage waveform tailoring in Ar/O 2 capacitively coupled plasmas sustained in asymmetric systems

The etching of nanometer scale high-aspect-ratio (HAR) features into dielectric materials in low pressure radio frequency excited plasmas is often accompanied by charge accumulation inside the features which can slow etching rates and produce distortions such as twisting. The intra feature charging is at least partially produced by differences in electron and ion energy and angular distributions (EADs). Positive ions, accelerated to high energies having narrow angular spreads by the sheath electric field, can penetrate deeply into HAR features. Electrons typically arrive at the wafer with nearly thermal and isotropic distributions and do not penetrate deeply into HAR features. These disparities lead to differential charging of the inside of the feature, which can lead to reductions in etch rate and feature distortion due to ion deflection. With in-creasing aspect ratio of features, charging challenges are expected to continue for the foreseeable future. In this work, the use of tailored voltage waveforms in geometrically asymmetric capacitively coupled plasmas sustained in Ar/O 2 at 40 mTorr was computationally investigated with the goal of shaping the EAD of electrons incident onto the substrate to address differential charging. The tailored waveform consisted of a sinusoidal wave and its higher harmonics with a fundamental frequency of 1 MHz. Further, we found that electric field reversals in the sheath and presheath can occur during the anodic portion of the cycle. The electric field reversal increases the energy and decreases the angular spread of electrons incident onto the substrate. The magnitude of the electric field reversal can be controlled by the phase angle of the even harmonics and the gas composition. Due to its electronegative nature, increasing mole fractions of O 2 impedes electron transport to the surface which further increases the electric field reversal.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗