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At least 37 records · Page 2

Plasma sources for advanced semiconductor applications

Semiconductors are the foundation of modern technology, used in our personal, industrial, and military-grade devices. Further, every aspect of U.S. society is closely tied to semiconductors, and our economy cannot progress at the current pace with existing chip manufacturing methods as chip features approach an atomistic scale.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Laser-driven plasma sources of intense, ultrafast, and coherent radiation

High-power lasers can deliver extreme light intensities, but avoiding damage in optical components requires large beam sizes, hindering further advances. The use of plasma as a medium for generating and manipulating light avoids the damage thresholds of solid materials and can support extraordinarily bright radiation. In this work, we discuss here how parametric plasma amplification and relativistic high-order harmonic generation offer paths to the development of light sources with peak powers beyond the capabilities of solid-state optics.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

The Materials Plasma Exposure eXperiment: Status of the Physics Basis Together With the Conceptual Design and Plans Forward

The Materials Plasma Exposure eXperiment (MPEX) is a linear plasma device that will address the plasma–material interaction (PMI) science for future fusion reactors and will enable testing of plasma-facing components (PFCs). It is designed as a steady-state device eventually delivering an ion fluence of up to 10 31 m -2 to the target. The device will be designed to handle neutron-activated materials. These capabilities should push the technical readiness level of PFCs up to six for some end-of-life aspects. In order to achieve the relevant plasma conditions, as they are expected in future fusion reactor divertors, MPEX will utilize a novel plasma source concept. This plasma source concept uses a high-power helicon (200 kW, 13.56 MHz), an electron cyclotron heating (ECH) system, which will heat electrons via electron Bernstein wave (EBW) heating (about 400 kW, 70 GHz), and an ion cyclotron heating (ICH) system (400 kW, 6–9 MHz). The physics basis for this plasma source concept including the heating physics and transport is based on experiments on Proto-MPEX. An overview of the experimental results and the physics basis will be given. The physics basis directly translates into functional requirements of MPEX and the conceptual design. The status of the conceptual design of MPEX will be shown.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Acceleration mechanisms of energetic ion debris in laser-driven tin plasma EUV sources

Laser-driven tin plasmas are driving new-generation nanolithography as sources of extreme ultraviolet (EUV) radiation centered at 13.5 nm. A major challenge facing industrial EUV source development is predicting energetic ion debris produced during the plasma expansion that may damage the sensitive EUV channeling multilayer optics. Gaining a detailed understanding of the plasma dynamics and ion acceleration mechanisms in these sources could provide critical insights for designing debris mitigation strategies in future high-power EUV sources. Here, we develop a fully kinetic model of tin-EUV sources using one-dimensional particle-in-cell simulations to study ion debris acceleration, which will be valuable for cross-validation of radiation-hydrodynamic simulations. An inverse-bremsstrahlung heating operator is used to model the interaction of a tin target with an Nd:YAG laser, and thermal conduction is included through a Monte Carlo Coulomb collision operator. While the large-scale evolution is in reasonable agreement with analogous hydrodynamic simulations, the significant timescale for collisional equilibration between electrons and ions allows for the development of prominent two-temperature features. A collimated flow of energetic ions is produced with a spectrum that is significantly enhanced at high energies compared to fluid simulations. The dominant acceleration mechanism is found to be a large-scale electric field supported mainly by the electron pressure gradient, which is enhanced in the kinetic simulations due to the increased electron temperature. We discuss the implications of these results for future modeling of tin-EUV sources and the development of debris mitigation schemes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

H - Ion Source RF Plasma Testing with 13 MHz and 27 MHz at the Spallation Neutron Source (SNS)

The baseline RF-driven H⁻ ion source configuration at the Spallation Neutron Source (SNS) facility uses a continuous wave (CW) 600 W 13 MHz RF system to ignite and maintain a low-density plasma inside the ion source vacuum chamber. After the continuous low-density 13 MHz plasma has been established, a pulsed (typical 1 ms pulse width and 60 Hz pulse repetition rate) 80 kW 2 MHz RF system is used to increase the plasma density to produce the pulsed H⁻ ion beam. Incremental upgrades and improvements to the SNS ion source systems have resulted in the ability to reliably operate an H⁻ ion source for SNS neutron production run cycles that can last up to four months. Conditions inside the SNS H⁻ ion source evolve throughout a four-month run cycle due to changes in impurity levels, sputtering, and erosion. As the internal ion source conditions change during the run cycle, there can also be changes in plasma stability and the 13 MHz RF power level required to ignite the plasma. This paper presents the preliminary results of testing performed on the SNS Ion Source Test Stand (ISTS) system where we looked at plasma ignition and plasma stability using 27 MHz RF in place of the baseline 13 MHz RF system.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Demonstration of a tandem lens for producing shaped laser-ionized plasmas for plasma wakefield acceleration

We demonstrate a tandem lens optical setup, comprising two diffractive optics, that focuses a high-power ultrafast laser with a shaped on-axis intensity profile, producing a meter-long Bessel focus. The intended use of the optical setup is to produce a laser-ionized plasma source for plasma wakefield acceleration. By controlling the on-axis intensity, the density profile of the plasma ramps at the entrance and exit of the plasma can be tailored to optimize the matching of the electron beam into the plasma. In addition to demonstrating the optical system, we describe the algorithm used to calculate the lens phases and present detailed calculations of the lenses’ expected performance.

Ariniello, Robert [SLAC National Accelerator Labor↗

Effect of magnetic field ripple on parallel electron transport during microwave plasma heating in the Proto-MPEX linear plasma device

The Prototype Material Plasma Exposure eXperiment (Proto-MPEX) is a linear plasma device located at Oak Ridge National Laboratory to develop the plasma source concept for the Materials Plasma Exposure eXperiment (MPEX). Recent experiments have demonstrated the heating of electrons in a high-density deuterium plasma (n e ~ 5 × 10 19 m -3 ) via electron Bernstein waves and source plasma production via helicon waves in this linear configuration. Moreover, experimental observations suggest that the magnetic ripple adversely affects the parallel transport of the heated electrons toward the target where material samples are to be exposed to the plasma. In order to understand the transport process during microwave application, a test-particle Monte-Carlo (MC) code has been developed that incorporates the effects of Coulomb collisions, magnetic mirror adiabatic trapping and electron cyclotron interaction via a quasilinear RF heating operator. MC calculations indicate that the absence of 2nd turning points along the trajectory of cyclotron heated electrons significantly reduces adiabatic trapping and maximizes power transport to the Target surface. Thermalization of cyclotron heating electrons is analyzed with the MC code and it is found that for conditions relevant to ProtoMPEX, a significant fraction of the absorbed heating power is coupled to the Target surface via ballistic fast electrons; however, under certain conditions, up to 60% of the absorbed RF power can be dissipated via thermalization of the fast electrons on the background plasma. Results are compared with experimental measurements. Finally, the implications of the results are discussed in the context of the upcoming MPEX device.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Design study for a compact, two-stage, laser-plasma-based source of positron beams

Owing to their large accelerating gradients, plasma-based accelerators have attracted considerable interest as potential drivers for future, compact electron–positron colliders. Despite great progress achieved in plasma-based electron acceleration, positron acceleration still remains a challenging task, with an efficient positron source being the prerequisite for such acceleration. Here a concept for a compact, two-stage plasma-based positron source is discussed. In the first stage the positrons are created by a multi GeV electron beam produced by a laser-plasma accelerator interacting with a solid density foil. In the second stage the positrons are captured and accelerated in a plasma wave driven by either an electron beam or a laser pulse. Three potential configurations of such a source are considered: (i) a single electron beam is used for both the creation of positrons in the foil and for driving the wakefield in the second stage; (ii) a train of two electron beams is used: the positrons produced by the trailing beam in the foil are captured and accelerated in the second stage by the plasma wave generated by the leading beam; and (iii) a single electron beam is used to produce positrons in the foil and an independent laser pulse is coupled to the second stage to drive the plasma wave. In conclusion, these three configurations show different degrees of effectiveness with positron capture efficiency, varying from less than a percent to almost half of all produced positrons.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Characterisation of a laser plasma betatron source for high resolution x-ray imaging

Abstract We report on the characterisation of an x-ray source, generated by a laser-driven plasma wakefield accelerator. The spectrum of the optimised source was consistent with an on-axis synchrotron spectrum with a critical energy of 13.8 − 1.9 + 2.2 keV and the number of photons per pulse generated above 1 keV was calculated to be 6 − 0.9 + 1.2 × 10 9 . The x-ray beam was used to image a resolution grid placed 37 cm from the source, which gave a measured spatial resolution of 4 µ m × 5 µ m. The inferred emission region had a radius and length of 0.5 ± 0.2 µ m and 3.2 ± 0.9 mm respectively. It was also observed that laser damage to the exit aperture of the gas cell led to a reduction in the accelerated electron beam charge and a corresponding reduction in x-ray flux due to the change in the plasma density profile.

plasma acceleration↗

X-ray spectrometer

An x-ray spectrometer includes: an x-ray plasma source that produces first x-rays; an x-ray optic in optical communication with the x-ray plasma source and that: receives the first x-rays from the x-ray plasma source; focuses the first x-rays to produce second x-rays; and communicates the second x-rays to a sample that produces product x-rays in response to receipt of the second x-rays and second light; and a microcalorimeter array detector in optical communication with the sample and that receives the product x-rays from the sample.

Ullom, Joel↗

Material erosion measurements and expected operational lifetime of a deployable photon sieve payload

Spacecraft operating in low-Earth orbit are subjected to a number of hazardous environmental constituents that can lead to decreased system performance and reduced operational lifetimes. Due to their thermal, optical, and mechanical properties, polymers are used extensively in space systems; however they are particularly susceptible to material erosion and degradation as a result of exposure to the LEO environment. The focus of this research is to examine the material erosion and mass loss experienced by a custom Kaptonlike polyimide due to exposure in a simulated low-earth orbit environment. The deployable membrane telescope design discussed in this research is named Peregrine and is the scientific payload for FalconSat-7, a 3U cubesat designed and developed at the United States Air Force Academy (USAFA) for the purpose of demonstrating the capability of deployable membrane telescope technology on a nanosatellite platform. In addition to the polymer samples, chrome, silver and gold specimens will be examined to measure the oxidation rate and act as a control specimen, respectively. A magnetically filtered atomic oxygen plasma source has previously been developed and characterized for the purpose of simulating the low-Earth orbit environment. The plasma source can be operated at a variety of discharge currents and gas flow rates, of which the plasma parameters downstream of the source are dependent. The characteristics of the generated plasma were examined as a function of these operating parameters to optimize the production of O + ions with energy relevant to LEO applications. The erosion yield of the Kapton-like polyimide was experimentally determined to be 2.84 x 10 -24 cm 3 per atom which is in close agreement when compared to the on-orbit measurement for reaction efficiency of Kapton HN. We report the experimentally determined reaction rate for the Kapton-like polyimide was used to estimate the operational lifetime of the photon sieve during the solar conditions expected beginning in May 2019. The effective lifetime is estimated between 126 and 153 days.

36 MATERIALS SCIENCE↗

Impurity transport in PISCES-RF

Linear plasma devices (LPD) utilizing a helicon plasma source, a high density light ion source, can generate impurities due to progressive erosion of the radio frequency (RF) transmission window caused by rectified sheath voltage. These source-born impurities can entrain and be transported by the plasma toward a target, affecting plasma-material interaction studies. Earlier work on material testing in Prototype-Materials Plasma Exposure eXperiment at ORNL revealed significant source impurity deposition on downstream targets. However, using a similar RF source, no target impurity deposition is observed in Plasma Interaction Surface Component Experimental Station (PISCES)-RF despite evidence of RF window erosion in the source region, thereby motivating the present work. Experimentally, using various magnetic field configurations upstream of the PISCES-RF plasma source and seeding titanium (Ti) impurities at various axial locations, impurity transport and deposition along the machine axis were investigated. It was found that Ti deposition was localized to the side of the plasma source where the Ti impurity was seeded. In contrast, aluminum (Al) deposition, originating from the sputtering of the helicon window, occurred predominantly upstream of the plasma source, suggesting an asymmetry in the axial transport of eroded RF window material. These observations suggest a stagnation of the parallel plasma flow immediately downstream of the plasma source, with impurity ions remaining unmagnetized near the source upstream. Al deposition in magnetic field-free regions in PISCES-RF indicates that sputtered Al impurities likely remained neutral due to their large ionization mean-free path under PISCES-RF conditions. Plasma modeling and simulation supported this, indicating that Al-neutrals transport toward the helicon source upstream for low electron density cases. It was found that the Larmor radius of the Al ions was greater than the plasma radius towards the source upstream and remained weakly magnetized in PISCES-RF, meaning that plasma source-born impurities are not efficiently entrained in the plasma flow. These findings provide critical insights into impurity transport in helicon plasma-based LPDs.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Review of the 1st EUV Light Sources Code Comparison Workshop

We review the results of the 1 st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop. The goal of this workshop was to provide a platform for specialists in EUV light source plasma modeling to benchmark and validate their numerical codes using well-defined case studies. Detailed consideration of a plethora of atomic collisional and radiative processes is required for modeling EUV light source plasmas. Eight institutions spanning four countries contributed data to the workshop. Two topics were addressed, namely (i) the atomic kinetics and radiative properties of tin plasmas under EUV-generating conditions and (ii) laser absorption in a fully ionized, one-dimensional hydrogen plasma. In this paper, we summarize the key findings of the workshop and outline plans for future iterations of the code comparison activity.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗