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At least 37 records · Page 2

Computational Modeling in Plasma Processing for 300 mm Wafers

Migration toward 300 mm wafer size has been initiated recently due to process economics and to meet future demands for integrated circuits. A major issue facing the semiconductor community at this juncture is development of suitable processing equipment, for example, plasma processing reactors that can accomodate 300 mm wafers. In this Invited Talk, scaling of reactors will be discussed with the aid of computational fluid dynamics results. We have undertaken reactor simulations using CFD with reactor geometry, pressure, and precursor flow rates as parameters in a systematic investigation. These simulations provide guidelines for scaling up in reactor design.

Meyyappan, Meyya↗

Plasma Processing for In-Situ Field Emission Mitigation of Superconducting Radiofrequency (SRF) Cryomodules

Field emission (FE) is one of the main limiting factors of superconducting radio-frequency (SRF) cavities operating in accelerators and it occurs whenever contaminants, like dust, metal flakes or even absorbates, are present on the surface of the cavity high electric field region. Field emission reduces the maximum achievable accelerating field and generates free electrons that may interact with the beam, damage or activate the beamline. One practical method that can be used to mitigate this problem is in-situ plasma cleaning, or plasma processing. The development of a processing that can be applied in-situ is extremely advantageous, since it enables the recovery of the cryomodule performance without the need of disassembling the whole cryomodule, which is an extremely expensive and time-consuming process. On the other hand, plasma processing only requires the cryomodule warm-up to room-temperature and the subsequent processing of the contaminated cavities. The entire process is reasonably quick and involves a limited number of personnel. For these reasons we would like to advocate for continuing to invest in the R&D of plasma processing to optimize its applicability in cryomodules and for extending the technique to other frequency ranges and cavities geometries.

43 PARTICLE ACCELERATORS↗

Plasma Processing for SSR Cavities

Overview of plasma processing setup for SSR1 cavities at IJCLab and for SSR2 cavities at Fermilab. Talk presented by Mattia Parise (Fermilab), Materials provided by Bianca Giaccone (Fermilab) and Camille Cheney (IJCLab).

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗

Experimental Investigation of Plasma Processing for PIP-II SSR2 Cavities

Field emission and multipacting are critical factors that limit the achievable operational gradient of superconducting radio frequency (SRF) cavities. Plasma processing (PP) has been demonstrated as an effective in-situ technique for mitigating hydrocarbon-induced field emission and multipacting across a range of cavity geometries. In this work, we present the initial development and subsequent application of plasma processing for PIP-II type II spoke resonators (SSR2). The process was carried out at room temperature on an SSR2 cavity equipped with the CM-style high-power coupler and installed in the cryostat. Cavity performance was evaluated through comparative cold tests conducted before and after plasma processing.

Giaccone, Bianca [Fermilab] (ORCID:000000027275846↗

In Situ Plasma processing of SRF cuperconducting cavities at JLAB, 2024 Update

Jefferson Lab has an ongoing R&D program in plasma processing. The experimental program investi-gated processing using argon/oxygen and heli-um/oxygen gas mixtures. Plasma processing is a com-mon technique where the free oxygen produced by the plasma breaks down and removes hydrocarbons from surfaces. This increases the work function and reduces the secondary emission coefficient. The initial focus of the effort was processing C100 cavities by injecting RF power into the high order mode (HOM) coupler ports. We also developed the methods for establishing a plasma in C75 cryomodules where the RF power is injected via the fundamental power-coupler. Four C100 cryomodules were in situ processed in the CE-BAF accelerator in May 2023 with the cryomodules returning to an operational status in Sept. 2023. The overall operational energy gain for the four cryomod-ules was 49 MeV. Methods, systems and results from processing cryomodules in the CEBAF accelerator and vertical test results are presented. Current status and future plans are discussed.

Powers, T.↗

Plasma processes driven by current sheets and their relevance to the auroral plasma

Plasma processes dealing with ac and dc electric fields, the formation of ion beams and conics, and electron acceleration are considered, and similarities between simulation results and satellite-based observations are discussed. Electrostatic shock-type electric fields are found to occur near the current sheet edges, and double layers having upward electric fields form inside the sheet and are distinguishable from the large perpendicular electric fields only in wide sheets with thicknesses much greater than the ion Larmor radius. It is found that the most energetic ions have pitch angles near 90 deg, indicating a large perpendicular acceleration of the ions, and that the downward accelerating electrons inside the sheet are neither monoenergetic nor perfectly field aligned.

Singh, Nagendra↗

Plasma Processing of SRF Cavities at Jefferson Lab

Jefferson Lab has an ongoing R&D program in plasma processing which is close to going into production pro-cessing in the CEBAF accelerator. Plasma processing is a common technique for removing hydrocarbons from surfaces, which increases the work function and reduces the secondary emission coefficient [1]. The initial focus of the effort is processing C100 cavities by injecting RF power into the HOM coupler ports. The goal will be to improve the operational gradients and the energy margin of the CEBAF linacs by processing cryomodules in situ. Results from processing a cryomodule in the cryomodule test bunker as well as cavity vertical test results will be presented. This work describes the systems and methods used at JLAB for processing cavities using an ar-gon/oxygen gas mixture.

Powers, T.↗

Plasma processing of SRF cavities at Jefferson Lab: Experiment results and simulation insight

Plasma processing of superconducting radio frequency (SRF) cavities has been an active research effort at Jefferson Lab (JLab) since 2019, aimed at enhancing cavity performance by removing hydrocarbon contaminants and reducing field emission. In this experiment, processing using argon-oxygen and helium-oxygen gas mixtures to find minimum ignition power at different cavity pressure was investigated. Ongoing simulations are contributing to a better understanding of the plasma surface interactions and the fundamental physics behind the process. These simulations, combined with experimental studies, guide the optimization of key parameters such as gas type, RF power, and pressure to ignite plasma using selected higher-order mode (HOM) frequencies. This paper presents experimental data from argon-oxygen and helium-oxygen gas mixture C75 and C100 cavity plasma ignition studies, as well as simulation results for the C100-type cavity based on the COMSOL model previously applied to the C75 cavity.

Accelerator Physics↗

Plasma processes in the inner coma

The physical processes that determine the plasma behavior in the inner coma region of active comets are reviewed. Results of observations of the plasma and fields inside the cometopause of Comets Halley and Giacobini-Zinner by instruments on board several spacecraft are presented. Several plasma populations are found to exist in the inner coma. The characteristics of a particular population are largely determined by how far upstream the population was created. All particle populations in the inner coma are strongly affected by collisional processes, such as charge-transfer, ion-neutral chemistry, ion-neutral friction, and thermal cooling. Plasma processes, in the form of magnetohydrodynamics, are also important in the inner coma.

Cravens, T. E.↗

Review of microscopic plasma processes of occurring during refilling of the plasmasphere

Refilling of the plasmashere after geomagnetic storms involves both macroscopic and microscopic plasma processes. The latter types of processes facilitate the refilling by trapping the plasma in the flux tube and by thermalizing the interhemispheric flow. A review of studies on microscopic processes is presented. The primary focus in this review is on the processes when the density is low and the plasma is collisionless. The discussion includes electrostatic shock formation, pitch angle scatterring extended ion heating and localized ion heating in the equatorial region.

Singh, N.↗

Double Layers in Expanding Plasmas and Their Relevance to the Auroral Plasma Processes

When a dense plasma consisting of a cold and a sufficiently warm electron population expands, a rarefaction shock forms. In the expansion of the polar wind in the magnetosphere, it has been previously shown that when a sufficiently warm electron population also exists, in addition to the usual cold ionospheric one, a discontinuity forms in the electrostatic potential distribution along the magnetic field lines. Despite the lack of spatial resolution and the assumption of quasi-neutrality in the polar wind models, such discontinuities have been called double layers (DLs). Recently similar discontinuities have been invoked to partly explain the auroral acceleration of electrons and ions in the upward current region. By means of one-dimensional Vlasov simulations of expanding plasmas, for the first time we make here the connection between (i) the rarefaction shocks, (ii) the discontinuities in the potential distributions, and (iii) DLs. We show that when plasmas expand from opposite directions into a deep density cavity with a potential drop across it and when the plasma on the high-potential side contains two electron populations, the temporal evolution of the potential and the plasma. distribution generates evolving multiple double layers with an extended density cavity between them. One of the DLs is the rarefaction-shock (RFS) and it forms by the reflections of the cold electrons coming from the high-potential side; it supports a part of the potential drop approximately determined by the hot electron temperature.

Singh, Nagendra↗

Double Layers in Expanding Plasmas and Their Relevance to the Auroral Plasma Processes

When a dense plasma consisting of a cold and a sufficiently warm electron population expands, a rarefaction shock forms [Bezzerides et al., 1978]. In the expansion of the polar wind in the magnetosphere, it has been previously shown that when a sufficiently warm electron population also exists, in addition to the usual cold ionospheric one, a discontinuity forms in the electrostatic potential distribution along the magnetic field lines [Barakat and Schunk, 1984]. Despite the lack of spatial resolution and the assumption of quasi-neutrality in the polar wind models, such discontinuities have been called double layers (DLs). Recently similar discontinuities have been invoked to partly explain the auroral acceleration of electrons and ions in the upward current region [Ergun et al., 2000]. By means of one-dimensional Vlasov simulations of expanding plasmas, for the first time we make here the connection between (1) the rarefaction shocks, (2) the discontinuities in the potential distributions, and (3) DLs. We show that when plasmas expand from opposite directions into a deep density cavity with a potential drop across it and when the plasma on the high-potential side contains hot and cold electron populations, the temporal evolution of the potential and the plasma distribution generates evolving multiple double layers with an ,extended density cavity between them. One of the DLs is the rarefaction-shock (RFS) and it forms by the reflections of the cold electrons coming from the high-potential side; it supports a part of the potential drop approximately determined by the hot electron temperature. The other DLs evolve from charge separations arising either from reflection of ions coming from the low-potential side or stemming from plasma instabilities; they support the rest of the potential drop. The instabilities forming these additional double layers involve electron-ion (e-i) Buneman or ion-ion (i-i) two-stream interactions. The electron-electron two-stream interactions on the high-potential side of the RFS generate electron-acoustic waves, which evolve into electron phase-space holes. The ion population originating from the low-potential side and trapped by the RFS is energized by the e-i and i-i instabilities and it eventually precipitates into the high-potential plasma along with an electron beam. Applications of these findings to the auroral plasma physics are discussed.

Singh, Nagendra↗

Plasma processes in the expansion of the solar wind and in the interplanetary medium

Recent research into plasma processes involved in the expansion of the solar wind and the interplanetary medium is reviewed. Emphasized topics deal primarily with processes that drive the solar wind, the gross expansion of the interplanetary medium between 0.5 and 5 AU, recent observational results in the vicinity of 1 AU, and the microstructure of the interplanetary medium. Satellite measurements of the radial profile of the interplanetary medium out to 5 AU are discussed together with model calculations of the solar wind and its possible driving mechanisms. Studies of Alfven and magnetoacoustic waves in the solar wind are summarized. Possible roles are considered for thermal conduction in coronal energy transport, and observations of ion velocity distributions near 1 AU are described.

Barnes, A.↗

Solar terrestrial and plasma processes experiments on space station

The currently planned utilization of the space station to perform investigations in solar terrestrial physics and plasma physics is outlined. The investigations and instrumentation planned for the Solar Terrestrial Observatory and its associated space station accommodation requirements are described. In addition, the planned placement of the Solar Terrestrial Observatory instruments are discussed along with typical operational scenarios. In the area of plasma physics, some preliminary plans for scientific investigations and for the accommodation of a plasma physics facility attached to the space station called the Plasma Processes Laboratory are outlined. These preliminary experiment concepts use the space environment around the space station as an unconfined plasma laboratory.

Roberts, W. T.↗