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Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San Diego, CA, July 19-22, 1992

The present volume on multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography discusses AXAF grazing incidence mirrors, the theory and high throughput optics of grazing incidence optics, multilayer mirror fabrication and characterization, and multilayer optics for X-ray projection lithography. Attention is given to the VETA-I X-ray detection system, a motion detection system for AXAF X-ray ground testing, image analysis of the AXAF VETA-I X-ray mirror, and optical constants from mirror reflectivities measured at synchrotrons. Topics discussed include the application of aberration theory to calculate encircled energy of Wolter I-II telescopes, W/C multilayers deposited on plastic films, nonspecular X-ray scattering from Si/Mo multilayers, and multilayer thin-film design as FUV polarizers. Also discussed are thin-film filter lifetesting results in the EUV, chromospheric and coronal observations with multilayer optics, present and future requirements of soft X-ray projection lithography, and the imaging Schwarzschild multilayer X-ray microscope.

Hoover, Richard B.↗

Gamma rays from grazing incidence cosmic rays in the earth's atmosphere

Interactions of grazing incidence, ultra high-energy cosmic rays with the earth's atmosphere may provide a new method of studying energetic cosmic rays with gamma-ray satellites. It is found that these cosmic ray interactions may produce gamma-rays on millisecond timescales which may be detectable by satellites. An extremely low gamma-ray background for transient gamma-ray events and a large area of interaction, the earth's surface, make the scheme plausible. The effective cross section of detection of interactions for cosmic rays above 10(exp 20) eV is found to be more than two orders of magnitude higher than Earth-based detection techniques. This method may eventually offer an efficient way of probing this region of the cosmic-ray energy spectrum where events are scarce. In this paper, a conceptual model is presented for the production of short bursts of gamma-rays based on these grazing incidence encounters with the Earth's atmosphere.

Ulmer, Andrew↗

A grazing incidence extreme ultraviolet spectrometer for use with a diverging beam

Attention is given to the 100-350 A performance of a grazing incidence spectrometer configuration that accepts a diverging beam for the conduct of moderate resolution spectroscopy. Assuming a focal ratio of 10 for the diverging beam, the first optic of the configuration is an off-axis ellipsoid that is used at grazing incidence to refocus the diverging beam and increase the focal ratio. A detailed study is made of the performance of a plane, straight-groove, variable-line-space grating; the aberrations are evaluated analytically and verified by geometrical ray tracing. System resolution is a function of telescope image quality. An optimum design is found by varying six parameters and maximizing the average resolution over the bandpass. The spectrometer can be located far from the optical axis, and fed by a small grazing incidence pick-off mirror.

Hurwitz, Mark↗

Design, fabrication and performance of two grazing incidence telescopes for celestial extreme ultraviolet astronomy

The design and performance of grazing incidence telescopes for celestial extreme ultraviolet (EUV) astronomy are described. The telescopes basically consist of a star tracker, collimator, grazing incidence mirror, vacuum box lid, vacuum housing, filters, a ranicon detector, an electronics box, and an aspect camera. For the survey mirror a Wolter-Schwarzschild type II configuration was selected. Diamond-turning was used for mirror fabrication, a technique which machines surfaces to the order of 10 microns over the required dimensions. The design of the EUV spectrometer is discussed with particular reference to the optics for a primarily spectroscopic application and the fabrication of the f/10 optics.

Lampton, M.↗

Structured illumination for surface-resolved grazing-incidence X-ray scattering

Grazing-incidence (GI) scattering techniques are widely used to characterize thin films, offering high surface sensitivity and insight into morphology and structure. However, these approaches typically provide statistical averaged information due to elongated footprint or limited spatial resolution due to beam size. Here we introduce a method that combines structured illumination with GI X-ray scattering and leverages our computational imaging approach to resolve local structural details. We demonstrate that our method captures local features of an organic semiconductor thin film without the need for sample rotation as in tomography. The method expands GI techniques from statistical averaging to high-resolution imaging, thereby providing the capability for detailed analysis of local material properties, such as domain shape, orientation and polymorphism, which are critical for advancing material design towards more efficient and tailored materials.

97 MATHEMATICS AND COMPUTING↗

Development of a Grazing Incidence X-Ray Interferometer

A grazing incidence x-ray interferometer design capable of micro-arcsecond level resolution is discussed. This practical design employs a Michelson Stellar interferometer approach to create x-ray interference fringes without the use of Wolter style optics or diffraction crystals. Design solutions accommodating alignment, vibration, and thermal constraints are reviewed. We present the development and demonstration of a working experiment along with tolerance studies, data analysis, and results.

Shipley, Ann↗

Design of stigmatic grazing incidence telescopes with non-parabolic primaries

A two-mirror grazing-incidence telescope having a non-parabolic primary, and designed to be free of spherical aberration has been investigated. A method for determining the second surface equation is described, when the surface equation for one mirror is given. Application to grazing incidence systems such as used in X-ray and planed for EUV astronomy is discussed. Of special interest is the design of a secondary mirror when the hyperboloid of a conventional Wolter type I system is taken as the primary.

Winkler, C. E.↗

Deterministic Polishing of Replicating Grazing-Incidence Mandrels

In an effort to manufacture high-angular-resolution, grazing-incidence, x-ray optics, Marshall Space Flight Center (MSFC) is taking measures to improve its electroformed replicated optics. A key development is the use of computer-numerical control (CNC) polishing to deterministically improve the surface of electroless nickel mandrels used to replicate grazing- incidence optics. Metrology, control software and polishing parameters must function together seamlessly to reach the specifications required to replicate sub-arcsecond optics. Each change in polishing parameters effects the wear pattern of the polishing head. Using Richardson-Lucy deconvolution, the controller software fits the wear pattern to metrology data to calculate the changing feedrates across the mandrel. Here we present an overview of our process, and early results showing the effectiveness of deterministic polishing for replicated optics.

Davis, Jacqueline↗

Image defects from surface and alignment errors in grazing incidence telescopes

The rigid body motions and low frequency surface errors of grazing incidence Wolter telescopes are studied. The analysis is based on surface error descriptors proposed by Paul Glenn. In his analysis, the alignment and surface errors are expressed in terms of Legendre-Fourier polynomials. Individual terms in the expression correspond to rigid body motions (decenter and tilt) and low spatial frequency surface errors of mirrors. With the help of the Legendre-Fourier polynomials and the geometry of grazing incidence telescopes, exact and approximated first order equations are derived in this paper for the components of the ray intercepts at the image plane. These equations are then used to calculate the sensitivities of Wolter type I and II telescopes for the rigid body motions and surface deformations. The rms spot diameters calculated from this theory and OSAC ray tracing code agree very well. This theory also provides a tool to predict how rigid body motions and surface errors of the mirrors compensate each other.

Saha, Timo T.↗

Effects of the Grazing Incidence Geometry on X-ray Photon Correlation Spectroscopy Measurements

X-ray photon correlation spectroscopy (XPCS) is a versatile tool to measure dynamics on the nanometer to micrometer scale in bulk samples. XPCS has also been applied in grazing incidence (GI) geometry to examine the dynamics of surface layers. However, considering GI scattering experiments more universally, the GI geometry leads to a superposition of signals due to reflection and refraction effects, also known from the distorted-wave Born approximation (DWBA). In this paper, the impact of these reflection and refraction effects on the correlation analysis is determined experimentally by measuring grazing incidence transmission XPCS (GT-XPCS) and grazing incidence XPCS (GI-XPCS) simultaneously for a thin film sample, showing non-equilibrium dynamics. Here the results of the GI and GT geometry comparisons are combined within the framework of the standardly applied, simplified DWBA. These calculations allow identifying the main contributions of the detected signal from the leading scattering terms along the out-of-plane direction q z , which dominate the measured intensity pattern on the detector. In combination with the calculation of the non-linear effect of refraction in GTSAXS and GISAXS, it is possible to identify experimental conditions that can be chosen to run experiments and data analysis as close as possible to transmission XPCS and to explain which limitations for data interpretations are observed. Consequently, the beam exposure can be significantly reduced by using GI geometry only. Calculations of experimental settings prior to experiments are detailed to determine suitable q z regions for a variety of material systems measured in bulk-sensitive GI-XPCS experiments, allowing us to determine the scaling behavior of typical decay times as a function of q that is comparable to the scaling behavior obtained in distortion-free GT-XPCS or transmission XPCS experiments.

36 MATERIALS SCIENCE↗

Active Full-Shell Grazing-Incidence Optics

MSFC has a long history of developing full-shell grazing-incidence x-ray optics for both narrow (pointed) and wide field (surveying) applications. The concept presented in this paper shows the potential to use active optics to switch between narrow and wide-field geometries, while maintaining large effective area and high angular resolution. In addition, active optics has the potential to reduce errors due to mounting and manufacturing lightweight optics. The design presented corrects low spatial frequency error and has significantly fewer actuators than other concepts presented thus far in the field of active x-ray optics. Using a finite element model, influence functions are calculated using active components on a full-shell grazing-incidence optic. Next, the ability of the active optic to effect a change of optical prescription and to correct for errors due to manufacturing and mounting is modeled.

Full-shell↗

The Marshall Grazing Incidence X-ray Spectrometer (MaGIXS) Solar Sounding Rocket Campaign – Calibration and Performance

The Marshall Grazing Incidence X-ray Spectrometer (MaGIXS) is a sounding rocket experiment that is designed to observe, for the first time, soft X-ray spectra of high-temperature, low-emission plasma of coronal structures spatially resolved along a narrow slit.MaGIXS observation involves a set of high temperature spectral lines in soft X-rays from 0.5 - 2.0 keV from an active region core,which will extend the DEM coverage from 3MK to 10MK constraining the slope of the DEM fall-off. The novel instrument designincludes a Wolter-I type telescope and a 3-optic grazing-incidence spectrometer. The spectrometer consists of a finite conjugatemirror pair and a blazed planar, varied line spaced grating, which disperses the rays on to a CCD and provides a high spatial andspectral resolution. Component level instrument testing, integration of the instrument and end-to-end X-ray calibration are carriedout using the X-ray and Cryogenic Facility (XRCF) at NASA Marshall Space Flight Center. MaGIXS is scheduled for launch in2021. We will present the results of X-ray calibration tests for MaGIXS and discuss the expected inflight performance throughdifferent solar observation scenarios.

P. S. Athiray↗

Echelle spectrographs at grazing incidence

It is shown that by using the conical diffraction mount, existing echelle gratings can be used at grazing incidence to achieve high spectral resolution in the extreme UV and soft X rays. Design considerations for grazing incidence echelle spectrographs are examined, and two sample designs are discussed. The first, for use in the extreme UV, has a primary mirror and an entrance slit to the spectrograph. The system has a resolution of 10,000, operates at any wavelength longward of 100 A, and covers 30% of the spectrum at a single setting. The X-ray spectrograph uses objective gratings to obtain spectral resolution of 28,000 over any factor of 2 in. wavelength. It operates to wavelengths as short as 4 A.

Cash, W.↗

Grazing Incidence Optics for X-rays Interferometry

Grazing incidence mirror parameters and constraints for x-ray interferometry are described. We present interferometer system tolerances and ray trace results used to define mirror surface accuracy requirements. Mirror material, surface figure, roughness, and geometry are evaluated based on analysis results. We also discuss mirror mount design constraints, finite element analysis, environmental issues, and solutions. Challenges associated with quantifying high accuracy mirror surface quality are addressed and test results are compared with theoretical predictions.

Shipley, Ann↗

Grazing incidence telescopes - A new class for soft X-ray and EUV spectroscopy

A new class of grazing incidence telescopes is identified, and its advantages for stellar spectroscopy are discussed. In particular, three types of telescope geometry consisting of a primary and a secondary, both at grazing incidence, are proposed. Type I delivers a converging beam having a real focus; type II delivers a diverging beam from a virtual focus, and type III delivers a collimated beam concentrated relative to the primary aperture. The three telescope types are shown to possess unique properties which improve the efficiency and shorten the length of soft X-ray/EUV spectrographs.

Hettrick, M. C.↗

Grazing incidence technique to obtain spatially resolved spectra from laser heated plasmas

An experimental method is described in which a grazing incidence spectrograph is used to obtain spatially resolved spectra of laser heated plasmas in the 6-370-A region. In the experiment, small target spheres were irradiated by tightly focused laser beams. A tilted grazing incidence elliptical mirror placed 1.3 m from the target focuses the plasma radiation on the spectrograph slit at a distance of 0.7 m producing a useful degree of spatial resolution in the recorded spectral lines. The spectrum from a copper target is presented together with an X-ray pinhole camera image of the plasma.

Behring, W. E.↗

Figured grazing incidence mirrors from reheated float glass

High throughput grazing incidence mirrors have been fabricated from float glass using a new inexpensive technique. An array of twelve such mirrors including grazing angles from 3 to 15 deg has been fabricated and tested. Optical measurement of this array shows a line spread function of 6.3-min of arc FWHM with 90 percent of the energy enclosed within 13 min of arc. Three-mirror arrays are used to provide one-dimensional focusing for a diffuse extreme ultraviolet spectrometer. This paper presents the fabrication techniques and testing procedures used, as well as the mirror performance results.

Labov, Simon E.↗