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At least 37 records · Page 2
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

On the importance of excited state species in low pressure capacitively coupled plasma argon discharges

In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo collision (PIC/MCC) simulations have been proven to be an important tool for the understanding of the physics of low pressure capacitive discharges. However, there is a long-standing issue that the plasma density determined by PIC/MCC simulations shows quantitative deviations from experimental measurements, even in argon discharges, indicating that certain physics may be missing in previous modeling of the low pressure radio frequency (rf) driven capacitive discharges. In this work, we report that the energetic electron-induced secondary electron emission (SEE) and excited state atoms play an important role in low pressure rf capacitive argon plasma discharges. The ion-induced secondary electrons are accelerated by the high sheath field to strike the opposite electrode and produce a considerable number of secondary electrons that lead to additional ionizing impacts and further increase of the plasma density. Importantly, the presence of excited state species even further enhances the plasma density via excited state neutral and resonant state photon-induced SEE on the electrode surface. The PIC/MCC simulation results show good agreement with the recent experimental measurements in the low pressure range (1–10 Pa) that is commonly used for etching in the semiconductor industry. At the highest pressure (20 Pa) and driving voltage amplitudes 250 and 350 V explored here, the plasma densities from PIC/MCC simulations considering excited state neutrals and resonant photon-induced SEE are quantitatively higher than observed in the experiments, requiring further investigation on high pressure discharges.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS2010

Mapping Capacitive Coupling Among Pixels in a Sensor Array

An improved method of mapping the capacitive contribution to cross-talk among pixels in an imaging array of sensors (typically, an imaging photodetector array) has been devised for use in calibrating and/or characterizing such an array. The method involves a sequence of resets of subarrays of pixels to specified voltages and measurement of the voltage responses of neighboring non-reset pixels.

Seshadri, Suresh↗
NASA NTRS1980

Production of pulsed electric fields using capacitively coupled electrodes

It is shown that pulsed electric fields can be produced over extended volumes by taking advantage of the internal capacitances in a stacked array of electrodes. The design, construction, and performance of practical arrays are discussed. The prototype arrays involved fields of 100-1000 V/cm extending over several centimeters. Scaling to larger physical dimensions is straightforward.

Kendall, B. R. F.↗
DOE OSTI2021

Erosion of focus rings in capacitively coupled plasma etching reactors

In plasma etching reactors, the structure surrounding the wafer, often called a focus ring (FR), plays an important role in maintaining uniform fluxes of reactants across the wafer. The FR is typically made of dielectric materials. During the plasma etching process, the sheath that forms over the wafer to accelerate ions anisotropically into the surface extends over the FR. Electrical charging of the FR modifies the sheath relative to that over the wafer. On the one hand, one wants the sheath to be uniform across the wafer-FR boundary to enable uniform fluxes to the edge of the wafer. On the other hand, maintaining a high voltage sheath over the FR will erode the FR, which is undesirable as the FR is a consumable component that must be periodically replaced in high volume manufacturing. In this work, we computationally investigated the consequences of dielectric constant ε of the FR materials on erosion of the FR. The series capacitance of the FR and its underlying structure is typically smaller than that of the wafer and its underlying structure. As a result, the FR charges quickly relative to the wafer, which then reduces the voltage across the sheath on top of the FR. The ion energy and angular distributions (IEADs) striking the FR are, therefore, generally lower in energy with a broader angular distribution. With ε = 2, the ion energies striking the middle to the outer edge of the FR are 30–180 eV, whereas for ε = 100, the ion energies are 120–380 eV. At the transition between the wafer and the FR, there is a skew in the IEAD as large as 15° that results from the difference in sheath thickness above the wafer and the FR. This skew and the erosion rate across the FR are functions of the dielectric constant of the FR material. With low ε, the FR charges quickly, less plasma is produced above the FR, and there is less voltage across the sheath that results in less FR erosion. Increasing ε of the FR produces a higher sheath voltage as well as higher ion fluxes over the FR, which increases erosion, while the skew at the edge of the wafer is less severe. Further, the material of the subsurface portion of the FR, which dominates its capacitance, is an important consideration in the design of the substrate assembly.

36 MATERIALS SCIENCE↗
NASA NTRS1977

Capacitively-coupled data receiver clipper stage

Circuit technique compensates for dc offset and asymmetry in dc clipping levels, negates unbalance in input waveform that causes voltage offset at end of data word, blocks any dc component that is generated by asymmetrical operation of clipper, and improves data threshold detection.

Saunders, F. W.↗
DOE OSTI2021

Capacitively Coupled LAPPDs with 2D Pixelated Readout Planes for Time of Flight and Ring Imaging Cherenkov Applications

Large Area Picosecond Photon Detectors (LAPPDs) are micro-channel plate based photosensors featuring hundreds of square centimeters of sensitive area in a single package and capable of providing timing resolution on the order of 50 ps for single photon detection. However, LAPPDs currently do not exist in finely pixelated 2D readout configurations which, in addition to ighresolution timing, would also provide high spatial resolution required for Ring Imaging CHerenkov (RICH) detectors. One of the recent LAPPD models (Gen II) provides the opportunity to overcome the lack of pixellation by coupling an external readout to the sealed detector itself. The readout plane in this case is a simple printed circuit board (PCB) that can be laid out in a custom application-specific way for 1D or 2D sensitive area pixellation. This allows for a much shorter readout-plane prototyping cycle and provides unprecedented flexibility in choosing an appropriate segmentation that can be optimized for any particular detector need in terms of pad size, orientation, and shape.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
NASA NTRS2003

Detecting Conductive Liquid Leaking from Nonconductive Pipe

A method that can be implemented with relatively simple electronic circuitry provides a capability for detecting leakage of an electrically conductive liquid from an electrically nonconductive underground pipe. Alternatively or in addition, the method can be applied to locate the pipe, whether or not there is a leak. Although the method is subject to limitations (some of which are described below), it is still attractive as an additional option for detecting leaks and locating pipes without need for extensive digging. The method is based on capacitive coupling of an alternating electrical signal from the liquid to a portable electronic unit that resembles a metal detector. A signal voltage is applied to the liquid at some convenient point along the pipe: for example, the signal could be coupled into the liquid via an aboveground metal pipe fitting, the interior surface of which is in contact with the liquid. The signal is conducted through the liquid in the pipe; in the case of diffusive leak of liquid into the surrounding ground, the signal is conducted through the leak, into the portion of the adjacent ground that has become soaked with the liquid. (A drip leak cannot be detected by this method because there is no conductive path between the liquid inside and the liquid outside the pipe.) The portable unit includes an electrically conductive plate connected to the input terminal of an amplifier. When the plate is brought near the pipe or the leaked liquid, a small portion of the signal power is coupled capacitively from the liquid to the plate. The user scans the plate near the ground surface to find the locus of maximum signal strength. The leak can be identified as a relatively wide area, contiguous with the location of the pipe, over which the signal is detectable.

Youngquist, Robert C.↗
DOE OSTI2022

8-Plate Multi-Resonant Coupling Using a Class-E 2 Power Converter for Misalignments in Capacitive Wireless Power Transfer

Misalignment is a common issue in wireless power transfer systems. It shifts the resonant frequency away from the operating frequency that affects the power flow and efficiency from the charging station to the load. This work proposes a novel capacitive wireless power transfer (CPT) using an 8-plate multi-resonant capacitive coupling to minimize the effect of misalignments. A single-active switch class-E 2 power converter is utilized to achieve multi-resonance through the selection of different resonant inductors. Simulations show a widening of the resonant frequency band which offers better performance than a regular 4-plate capacitive coupling for misalignments. The hardware results of the 8-plate multi-resonant coupling show an efficiency of 88.5% for the 20.8 W test, which is 18.3% higher than that of the regular 4-plate coupling. Because of the wider resonant frequency band {455–485 kHz}, compared with the regular 4-plate coupling, the proposed design minimized the output voltage drop by 15% for a 10% misalignment. Even for large misalignments, the 8-plate performance improved by 40% compared with the 4-plate coupling.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗
NASA NTRS2011

Circuit for Communication Over Power Lines

Many distributed systems share common sensors and instruments along with a common power line supplying current to the system. A communication technique and circuit has been developed that allows for the simple inclusion of an instrument, sensor, or actuator node within any system containing a common power bus. Wherever power is available, a node can be added, which can then draw power for itself, its associated sensors, and actuators from the power bus all while communicating with other nodes on the power bus. The technique modulates a DC power bus through capacitive coupling using on-off keying (OOK), and receives and demodulates the signal from the DC power bus through the same capacitive coupling. The circuit acts as serial modem for the physical power line communication. The circuit and technique can be made of commercially available components or included in an application specific integrated circuit (ASIC) design, which allows for the circuit to be included in current designs with additional circuitry or embedded into new designs. This device and technique moves computational, sensing, and actuation abilities closer to the source, and allows for the networking of multiple similar nodes to each other and to a central processor. This technique also allows for reconfigurable systems by adding or removing nodes at any time. It can do so using nothing more than the in situ power wiring of the system.

Krasowski, Michael J.↗
DOE OSTI2024

Superionic fluoride gate dielectrics with low diffusion barrier for two-dimensional electronics

Exploration of new dielectrics with a large capacitive coupling is an essential topic in modern electronics when conventional dielectrics suffer from the leakage issue near the breakdown limit. Here, to address this looming challenge, we demonstrate that rare-earth metal fluorides with extremely low ion migration barriers can generally exhibit an excellent capacitive coupling over 20 μF cm -2 (with an equivalent oxide thickness of ~0.15 nm and a large effective dielectric constant near 30) and great compatibility with scalable device manufacturing processes. Such a static dielectric capability of superionic fluorides is exemplified by MoS 2 transistors exhibiting high on/off current ratios over 10 8 , ultralow subthreshold swing of 65 mV dec -1 and ultralow leakage current density of ~10 -6 A cm -2 . Therefore, the fluoride-gated logic inverters can achieve notably higher static voltage gain values (surpassing ~167) compared with a conventional dielectric. Furthermore, the application of fluoride gating enables the demonstration of NAND, NOR, AND and OR logic circuits with low static energy consumption. In particular, the superconductor–insulator transition at the clean-limit Bi 2 Sr 2 CaCu 2 O 8+δ can also be realized through fluoride gating. In conclusion, our findings highlight fluoride dielectrics as a pioneering platform for advanced electronic applications and for tailoring emergent electronic states in condensed matter.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗