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Amorphous metallic films in silicon metallization systems

The general objective was to determine the potential of amorphous metallic thin films as a means of improving the stability of metallic contacts to a silicon substrate. The specific objective pursued was to determine the role of nitrogen in the formation and the resulting properties of amorphous thin-film diffusion barriers. Amorphous metallic films are attractive as diffusion barriers because of the low atomic diffusivity in these materials. Previous investigations revealed that in meeting this condition alone, good diffusion barriers are not necessarily obtained, because amorphous films can react with an adjacent medium (e.g., Si, Al) before they recrystallize. In the case of a silicon single-crystalline substrate, correlation exists between the temperature at which an amorphous metallic binary thin film reacts and the temperatures at which the films made of the same two metallic elements react individually. Amorphous binary films made of Zr and W were investigated. Both react with Si individually only at elevated temperatures. It was confirmed that such films react with Si only above 700 C when annealed in vacuum for 30 min. Amorphous W-N films were also investigated. They are more stable as barriers between Al and Si than polycrystalline W. Nitrogen effectively prevents the W-Al reaction that sets in at 500 C with polycrystalline W.

Nicolet, M. A.↗

The Metastable Persistence of Vapor-Deposited Amorphous Ice at Anomalously High Temperatures

Studies of the gas release, vaporization behavior and infrared (IR) spectral properties of amorphous and crystalline water ice have direct application to cometary and planetary outgassing phenomena and contribute to an understanding of the physical properties of astrophysical ices. Several investigators report anomalous phenomena related to the warming of vapor-deposited astrophysical ice analogs. However gas release, ice volatilization and IR spectral features are secondary or tertiary manifestations of ice structure or morphology. These observations are useful in mimicking the bulk physical and chemical phenomena taking place in cometary and other extraterrestrial ices but do not directly reveal the structural changes which are their root cause. The phenomenological interpretation of spectral and gas release data is probably the cause of somewhat contradictory explanations invoked to account for differences in water ice behavior in similar temperature regimes. It is the microstructure, micromorphology and microchemical heterogeneity of astrophysical ices which must be characterized if the mechanisms underlying the observed phenomena are to be understood. We have been using a modified Transmission Electron Microscope to characterize the structure of vapor-deposited astrophysical ice analogs as a function of their deposition, temperature history and composition. For the present experiments, pure water vapor is deposited at high vacuum onto a 15 K amorphous carbon film inside an Hitachi H-500H TEM. The resulting ice film (approx. 0.05 micrometers thick) is warmed at the rate of 1 K per minute and diffraction patterns are collected at 1 K intervals. These patterns are converted into radial intensity distributions which are calibrated using patterns of crystalline gold deposited on a small part of the carbon substrate. The small intensity contributed by the amorphous substrate is removed by background subtraction. The proportions of amorphous and crystalline material in each pattern are determined by subtracting a percentage of crystalline component relative to amorphous and pure crystalline endmembers. Vapor-deposited water ice undergoes two amorphous to amorphous structural transformations in the temperature range 15-130 K with important astrophysical implications. The onset of cubic crystallization occurs at 142-160 K (at 1K per minute heating rates) during which the 220 and 311 diffraction maxima appear and 0.1 micrometer crystallites can be seen in bright field images. This transition is time dependent.

Blake, David F.↗

Systems and Methods for Fabricating Objects Including Amorphous Metal Using Techniques Akin to Additive Manufacturing

Systems and methods in accordance with embodiments of the invention fabricate objects including amorphous metals using techniques akin to additive manufacturing. In one embodiment, a method of fabricating an object that includes an amorphous metal includes: applying a first layer of molten metallic alloy to a surface; cooling the first layer of molten metallic alloy such that it solidifies and thereby forms a first layer including amorphous metal; subsequently applying at least one layer of molten metallic alloy onto a layer including amorphous metal; cooling each subsequently applied layer of molten metallic alloy such that it solidifies and thereby forms a layer including amorphous metal prior to the application of any adjacent layer of molten metallic alloy; where the aggregate of the solidified layers including amorphous metal forms a desired shape in the object to be fabricated; and removing at least the first layer including amorphous metal from the surface.

Hofmann, Douglas↗

X-Ray Amorphous Sulfur-Bearing Phases in Sedimentary Rocks of Gale Crater, Mars

The Curiosity rover in Gale crater is investigating a mineral transition observed from orbit—an older “clay unit” to a younger “sulfate unit”—hypothesized to reflect the aridification of Mars' climate. Below this transition, the rover detected crystalline Ca-sulfates with minor Fe-sulfates but also found that some fraction of a rock's bulk SO 3 is often in the poorly constrained X-ray amorphous component. Here, we characterize the abundances and compositions of the X-ray amorphous sulfur-bearing phases in 19 drilled samples using a mass balance approach, and in a subset of 5 samples using evolved SO 2 gas measured using the SAM instrument. We find that ∼20–90 wt% of a sample's bulk SO 3 is in the X-ray amorphous state and that X-ray amorphous sulfur-bearing phase compositions are consistent with mixtures of Mg-S, Fe-S, and possibly Ca-S phases, likely sulfates or sulfites. These phases reside in the bedrock, perhaps as cementing agents deposited with detrital sediments or during early diagenesis, and in diagenetic alteration halos deposited after lithification during late diagenesis. The likely presence of highly soluble Mg-sulfates in the rocks suggests negligible fluid flow through the bedrock post-Mg-sulfate deposition. The X-ray amorphous sulfur-bearing phases probably became amorphous through dehydration in the current Martian atmosphere or inside the CheMin instrument. X-ray amorphous sulfur-bearing materials likely contribute to orbital spectral detections of sulfates, and so our results help form multiple hypotheses to be tested in the sulfate unit and are important for understanding the evolution of the Martian surface environment at Gale crater.

R. J. Smith↗

Reaction of amorphous Ni-W and Ni-N-W films with substrate silicon

Wiley et al. (1982) have studied sputtered amorphous films of Nb-Ni, Mo-Ni, Si-W, and Si-Mo. Kung et al. (1984) have found that amorphous Ni-Mo films as diffusion barriers between multilayer metallizations on silicon demonstrate good electrical and thermal stability. In the present investigation, the Ni-W system was selected because it is similar to the Ni-Mo system. However, W has a higher silicide formation temperature than Mo. Attention is given to aspects of sample preparation, sample characterization, the interaction between amorphous Ni-W films and Si, the crystallization of amorphous Ni(36)W(64) films on SiO2, amorphous Ni-N-W films, silicide formation and phase separation, and the crystallization of amorphous Ni(36)W(64) and Ni(30)N(21)W(49) layers.

Zhu, M. F.↗

Amorphous-silicon module hot-spot testing

Hot spot heating occurs when cell short-circuit current is lower than string operating current. Amorphous cell hot spot are tested to develop the techniques required for performing reverse bias testing of amorphous cells. Also, to quantify the response of amorphous cells to reverse biasing. Guidelines are developed from testing for reducing hot spot susceptibility of amorphous modules and to develop a qualification test for hot spot testing of amorphous modules. It is concluded that amorphous cells undergo hot spot heating similarly to crystalline cells. Comparison of results obtained with submodules versus actual modules indicate heating levels lower in actual modules. Module design must address hot spot testing and hot spot qualification test conducted on modules showed no instabilities and minor cell erosion.

Gonzalez, C. C.↗

Radiation-Induced Amorphization of Crystalline Ice

We study radiation-induced amorphization of crystalline ice, ana lyzing the resu lts of three decades of experiments with a variety of projectiles, irradiation energy, and ice temperature, finding a similar trend of increasing resistance of amorphization with temperature and inconsistencies in results from different laboratories. We discuss the temperature dependence of amorphization in terms of the 'thermal spike' model. We then discuss the common use of the 1.65 micrometer infrared absorption band of water as a measure of degree of crystallinity, an increasingly common procedure to analyze remote sensing data of astronomical icy bodies. The discussion is based on new, high quality near-infrared refl ectance absorption spectra measured between 1.4 and 2.2 micrometers for amorphous and crystalline ices irradiated with 225 keV protons at 80 K. We found that, after irradiation with 10(exp 15) protons per square centimeter, crystalline ice films thinner than the ion range become fully amorphous, and that the infrared absorption spectra show no significant changes upon further irradiation. The complete amorphization suggests that crystalline ice observed in the outer Solar System, including trans-neptunian objects, may results from heat from internal sources or from the impact of icy meteorites or comets.

Fama, M.↗

Amorphous Analogs of Martian Global Soil: Pair Distribution Function Analyses and Implications for Scattering Models of Chemin X-ray Diffraction Data

Soils on Mars have been analyzed by the Mars Exploration Rovers (MER) and most recently by the Mars Science Laboratory (MSL) rover. Chemical analyses from a majority of soil samples suggest that there is a relatively uniform global soil composition across much of the planet. A soil site, Rocknest, was sampled by the MSL science payload including the CheMin X-ray diffractometer and the Alpha Particle X-ray Spectrometer (APXS). Che- Min X-ray diffraction (XRD) data revealed crystalline phases and a broad, elevated background, indicating the presence of amorphous or poorly ordered materials (Fig 1). Based on the chemical composition of the bulk soil measured by APXS and the composition of crystalline phases derived from unit-cell parameters determined with CheMin data, the percentages of crystalline and amorphous phases were calculated at 51% and 49%, respectively. Attempts to model the amorphous contribution to CheMin XRD patterns were made using amorphous standards and full-pattern fitting methods and show that the broad, elevated background region can be fitted by basaltic glass, allophane, and palagonite. However, the modeling shows only that these phases have scattering patterns similar to that for the soil, not that they represent unique solutions. Here, we use pair distribution function (PDF) analysis to determine the short-range order of amorphous analogs in martian soils and better constrain the amorphous material detected by CheMin.

Achilles, C. N.↗

X-ray Amorphous Components of Antarctica Dry Valley Soils: Weathering Implications for Mars

The Antarctic Dry Valleys (ADV) comprise the largest ice-free region of Antarctica. Precipitation usually occurs as snow, relative humidity is frequently low, and mean annual temperatures are about -20°C [1]. Substantial work has focused on soil formation in the ADVs [2], however, little work has focused on the mineralogy of secondary alteration phases. The dominant weathering process in the ADV region is physical weathering, however, chemical weathering has been well documented [3]. The occurrence of chemical weathering processes are suggested by the presence of clay minerals and iron and titanium oxides in soil. Previously we have investigated soils from two sites in the ADV’s and have shown evidence of chemical weathering by the presence of clay minerals (vermiculite, smectite), short-range ordered (SRO) and/or X-ray amorphous materials, and Fe- and Tioxides as well as the presence of discrete calcite crystals [4, 5]. The Chemistry and Mineralogy (CheMin) instrument onboard the Mars Curiosity rover has detected abundant amounts (approx. 25-30 wt. %) of X-ray amorphous materials in a windblown deposit or “soil” (Rocknest) and in a sedimentary rocks [6,7,8]. The occurrence of large amounts of X-ray amorphous materials in Mars sediments is surprising because these materials are usually present in small quantities in terrestrial environments. The objective of this study is to further characterize the chemistry and mineralogy, specifically the secondary alteration mineralogy and the presence of X-ray amorphous material, of soils from two sites we have previously studied, a subxerous soil in Taylor Valley, and an ultraxerous soil in University Valley. While the chemical alteration processes and mineralogy of the ADV has been documented previously, there has been limited discussion on the occurrence and formation of X-ray amorphous and SRO materials in Antarctica soils. The process of aqueous alteration in the ADVs may have implications for pedogenic processes on Mars, and may lead to a better understanding to the abundance of amorphous material found in sediments in Gale crater.

Quinn, J. E.↗

Constraining the Hydration of X-Ray Amorphous and Clay Mineral Phases in Gale Crater, Mars

Clay minerals and salts in the Gale crater stratigraphy investigated by the Mars Science Laboratory (MSL) Curiosity rover preserve information about sediment sources, depositional environment, and post-depositional alteration history. The compositions of amorphous components in samples have bearing on the redox potential, pH, and chemistry of alteration fluids, and on the heterogeneity of these conditions. Interlayer clay hydration in present-day Gale crater could be an indication of high water/rock ratios of late-stage fluid alteration events, which increases the potential habitability of these post-depositional environments. The MSL Dynamic Albedo of Neutrons instrument (DAN) measures bulk hydration and here we attempt to determine the hydration states of both clay minerals and amorphous components throughout the Curiosity traverse to constrain the abundance of individual amorphous phases and determine if clay interlayer water is present today. These implications are also more broadly applicable to similar sedimentary successions outside Gale crater. In this study, we compare hydration results from DAN to mineralogical results from the MSL Chemistry and Mineralogy instrument (CheMin) for 16 different fluvio-lacustrine sample locations. These samples typically contain one or more hydrated crystalline phases, a hydrated X-ray amorphous fraction composed of multiple amorphous phases, and one or more clay mineral phases which CheMin has consistently measured as collapsed (i.e., no interlayer water). However, Gale samples are known to dehydrate during sample acquisition and handling, and because DAN measures hydration to a depth of tens of cm, we can test for the presence of clay interlayer water in situ by comparing DAN bulk hydration to CheMin mineralogy. We can also constrain the hydration of the samples’ amorphous fractions, and with geochemical data from the ChemCam and APXS instruments, this will allow us to better define the phases which compose this fraction.

S Czarnecki↗

A kinetic study of hydrous alteration of amorphous MgSiO smokes - Implications for cometary particles and chondrite matrix

Measurements of the rate of hydrous alteration of amorphous Mg-SiO smokes are reported as a function of temperature, as inferred by observing changes in the infrared spectra of these materials. It is shown that under the conditions reported for the nucleus of Comet Halley, based on measurements made by the Vega and Giotto missions, amorphous, anhydrous Mg-SiO smokes would become hydrated within several weeks in the dusty regolith observed on the surface. However, if such grains were released in 'jets' or from loose ice fragments, then previously amorphous grains would retain their anhydrous nature. Similarly, brief periods of aqueous activity on meteorite parent bodies would convert amorphous, fine-grained material to hydrated phyllosilicates much more rapidly than coarse mineral grains. A kinetic model might therefore be developed to explain the observed textural relationships in the matrices of carbonaceous chondrites such as Mokoia, where amorphous phyllosilicates are intimately associated with coarse anhydrous grains.

Nelson, Robert↗

Direct measurement of free-energy barrier to nucleation of crystallites in amorphous silicon thin films

A method is introduced to measure the free-energy barrier W(sup *), the activation energy, and activation entropy to nucleation of crystallites in amorphous solids, independent of the energy barrier to growth. The method allows one to determine the temperature dependence of W(sup *), and the effect of the preparation conditions of the initial amorphous phase, the dopants, and the crystallization methds on W(sup *). The method is applied to determine the free-energy barrier to nucleation of crystallites in amorphous silicon (a-Si) thin films. For thermally induced nucleation in a-Si thin films with annealing temperatures in the range of from 824 to 983 K, the free-energy barrier W(sup *) to nucleation of silicon crystals is about 2.0 - 2.1 eV regardless of the preparation conditions of the films. The observation supports the idea that a-Si transforms into an intermediate amorphous state through the structural relaxation prior to the onset of nucleation of crystallites in a-Si. The observation also indicates that the activation entropy may be an insignificant part of the free-energy barrier for the nucleation of crystallites in a-Si. Compared with the free-energy barrier to nucleation of crystallites in undoped a-Si films, a significant reduction is observed in the free-energy barrier to nucleation in Cu-doped a-Si films. For a-Si under irradiation of Xe(2+) at 10(exp 5) eV, the free-energy barrier to ion-induced nucleation of crystallites is shown to be about half of the value associated with thermal-induced nucleation of crystallites in a-Si under the otherwise same conditions, which is much more significant than previously expected. The present method has a general kinetic basis; it thus should be equally applicable to nucleation of crystallites in any amorphous elemental semiconductors and semiconductor alloys, metallic and polymeric glasses, and to nucleation of crystallites in melts and solutions.

Shi, Frank G.↗

Crystallization of amorphous water ice in the solar system

Electron diffraction studies of vapor-deposited water ice have characterized the dynamical structural changes during crystallization that affect volatile retention in cometary materials. Crystallization is found to occur by nucleation of small domains, while leaving a significant part of the amorphous material in a slightly more relaxed amorphous state that coexists metastably with cubic crystalline ice. The onset of the amorphous relaxation is prior to crystallization and coincides with the glass transition. Above the glass transition temperature, the crystallization kinetics are consistent with the amorphous solid becoming a "strong" viscous liquid. The amorphous component can effectively retain volatiles during crystallization if the volatile concentration is approximately 10% or less. For higher initial impurity concentrations, a significant amount of impurities is released during crystallization, probably because the impurities are trapped on the surfaces of micropores. A model for crystallization over long timescales is described that can be applied to a wide range of impure water ices under typical astrophysical conditions if the fragility factor D, which describes the viscosity behavior, can be estimated.

NASA Center ARC↗

Amorphous Rover

A proposed mobile robot, denoted the amorphous rover, would vary its own size and shape in order to traverse terrain by means of rolling and/or slithering action. The amorphous rover was conceived as a robust, lightweight alternative to the wheeled rover-class robotic vehicle heretofore used in exploration of Mars. Unlike a wheeled rover, the amorphous rover would not have a predefined front, back, top, bottom, or sides. Hence, maneuvering of the amorphous rover would be more robust: the amorphous rover would not be vulnerable to overturning, could move backward or sideways as well as forward, and could even narrow itself to squeeze through small openings.

Curtis, Steven A.↗

Transmission X-ray Diffraction (XRD) Patterns Relevant to the MSL Chemin Amorphous Component: Sulfates And Silicates

The Mars Science Laboratory (MSL) CheMin instrument on the Curiosity rover is a transmission X-ray diffractometer (Co-Kalpha radiation source and a approx.5deg to approx.52deg 2theta range) where the analyzed powder samples are constrained to have discrete particle diameters <150 microns by a sieve. To date, diffraction patterns have been obtained for one basaltic soil (Rocknest (RN)) and four drill fines of coherent rock (John Klein (JK), Cumberland (CB), Windjana (WJ), and Confidence Hills (CH)). The CheMin instrument has detected and quantified the abundance of both primary igneous (e.g., feldspar, olivine, and pyroxene) and secondary (e.g., Ca-sulfates, hematite, akaganeite, and Fe-saponite) minerals. The diffraction patterns of all CheMin samples are also characterized by a broad diffraction band centered near 30deg 2theta and by increasing diffraction intensity (scattering continuum) from approx.15deg to approx.5deg, the 2theta minimum. Both the broad band and the scattering continuum are attributed to the presence of an XRD amorphous component. Estimates of amorphous component abundance, based on the XRD data itself and on mass-balance calculations using APXS data crystalline component chemistry derived from XRD data, martian meteorites, and/or stoichiometry [e.g., 6-9], range from approx.20 wt.% to approx.50 wt.% of bulk sample. The APXSbased calculations show that the amorphous component is rich in volatile elements (esp. SO3) and is not simply primary basaltic glass, which was used as a surrogate to model the broad band in the RN CheMin pattern. For RN, the entire volatile inventory (except minor anhydrite) is assigned to the amorphous component because no volatile-bearing crystalline phases were reported within detection limits [2]. For JK and CB, Fesaponite, basanite, and akaganeite are volatile-bearing crystalline components. Here we report transmission XRD patterns for sulfate and silicate phases relevant to interpretation of MSL-CheMin XRD amorphous components.

Morris, R. V.↗

Infrared Spectra and Optical Constants of Elusive Amorphous Methane

New and accurate laboratory results are reported for amorphous methane (CH4) ice near 10 K for the study of the interstellar medium (ISM) and the outer Solar System. Near- and mid-infrared (IR) data, including spectra, band strengths, absorption coefficients, and optical constants, are presented for the first time for this seldom-studied amorphous solid. The apparent IR band strength near 1300 cm(exp −1) (7.69 micrometer) for amorphous CH4 is found to be about 33% higher than the value long used by IR astronomers to convert spectral observations of interstellar CH4 into CH4 abundances. Although CH4 is most likely to be found in an amorphous phase in the ISM, a comparison of results from various laboratory groups shows that the earlier CH4 band strength at 1300 cm(exp −1) (7.69 micrometer) was derived from IR spectra of ices that were either partially or entirely crystalline CH4 Applications of the new amorphous-CH4 results are discussed, and all optical constants are made available in electronic form.

ISM: abundances↗

Cold Conditions Promote Mg and Si Incorporation in Fe/Si-Rich and Al-Poor X-Ray Amorphous Material in Mars-Relevant Field Environments

X-ray amorphous material that is variably Fe/Si-rich, Al-poor, and volatile containing is prevalent (~15-73 wt.%) within ancient fluvial-lacustrine and eolian sediments examined by the CheMin instrument in Gale crater. Al-rich X-ray amorphous material within Mars-analog environments on Earth has previously been proposed to result from aqueous alteration under cold and icy conditions. However, to the best of our knowledge, no work to date has examined the effects of climate upon the formation of Al-poor and Fe/Si-rich X-ray amorphous material. This study therefore investigates the production of Al-poor and Fe-containing X-ray amorphous material and the chemical heterogeneity within that material under varying temperature conditions to better interpret the formation of Fe-containing X-ray amorphous material detected on Mars.

A D Feldman↗

Solar system ice - Amorphous or crystalline?

The meteoritic bombardment of icy surfaces is discussed, focusing on the formation of amorphous ice and its thermal, mechanical, and optical properties. A numerical code has been developed for evaluating the ratio of the volume of the melted and vaporized ice target to the volume of the projectile that has impacted the surface and left a crater. However, water will only vaporize with impact speeds over 4 to 6 km/sec, and subsequent condensation into ice below 150 K will produce amorphous ice. A denser form of amorphous ice exists below 10 K, with the transition into a crystalline form occurring above 150 K. Maximum impact velocities have been defined for all major bodies in the solar system, with the finding that crystalline ice will form in the crater while amorphous ice will form on the ejecta. The amount of each is dependent on the ratio of solidified water to condensed water vapor and on the fraction of solid ejecta.

Smoluchowski, R.↗