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At least 37 records · Page 2

Future of plasma etching for microelectronics: Challenges and opportunities

Plasma etching is an essential semiconductor manufacturing technology required to enable the current microelectronics industry. Along with lithographic patterning, thin-film formation methods, and others, plasma etching has dynamically evolved to meet the exponentially growing demands of the microelectronics industry that enables modern society. At this time, plasma etching faces a period of unprecedented changes owing to numerous factors, including aggressive transition to three-dimensional (3D) device architectures, process precision approaching atomic-scale critical dimensions, introduction of new materials, fundamental silicon device limits, and parallel evolution of post-CMOS approaches. The vast growth of the microelectronics industry has emphasized its role in addressing major societal challenges, including questions on the sustainability of the associated energy use, semiconductor manufacturing related emissions of greenhouse gases, and others. The goal of this article is to help both define the challenges for plasma etching and point out effective plasma etching technology options that may play essential roles in defining microelectronics manufacturing in the future. The challenges are accompanied by significant new opportunities, including integrating experiments with various computational approaches such as machine learning/artificial intelligence and progress in computational approaches, including the realization of digital twins of physical etch chambers through hybrid/coupled models. These prospects can enable innovative solutions to problems that were not available during the past 50 years of plasma etch development in the microelectronics industry. To elaborate on these perspectives, the present article brings together the views of various experts on the different topics that will shape plasma etching for microelectronics manufacturing of the future.

Engineering

Demonstration of tokamak vertical stability control based on non-inductive Faraday-effect polarimetry measurements

Long-pulse or steady-state fusion reactors are envisioned to control vertical stability based on non-inductive measurements, i.e. that do not rely on temporal change of magnetic field. For the first time, vertical stability control using non-inductive Faraday-effect polarimetry measurements has been demonstrated. The Radial Interferometer-Polarimeter system on DIII-D is capable of microsecond resolution and was used to absolutely determine the vertical position of the plasma magnetic axis Z 0 . A vertical stability controller was developed to robustly stabilize diverted plasmas using Faraday-based measurements. The system was able to stabilize against vertical displacement events with growth rates up to 350 s -1 in elongated and elliptical plasma shapes, and instabilities with even higher growth rates are likely to be controllable with further improvements to controller tuning. Tests show that the Faraday-based controller remains effective and is capable of recovering from loss of control even when the plasma vertical position is far from the region where the linear model used to calculate Z 0 is most valid. Faraday control has also been activated during plasma ramp-up, demonstrating the robustness of the technique to larger systematic diagnostic uncertainty at low electron density.

Faraday-effect polarimetry

MMMnet: A Neural Network Surrogate for Real-Time Transport Prediction Based on the Updated Multi-Mode Model

The Multi-Mode Model (MMM) is a physics-based anomalous transport model integrated into TRANSP for predicting electron and ion thermal transport, electron and impurity particle transport, and toroidal and poloidal momentum transport. While MMM provides valuable predictive capabilities, its computational cost, although manageable for standard simulations, is too high for real-time control applications. MMMnet, a neural network-based surrogate model, is developed to address this challenge by significantly reducing computation time while maintaining high accuracy. Trained on TRANSP simulations of DIII-D discharges, MMMnet incorporates an updated version of MMM (9.0.10) with enhanced physics, including isotopic effects, plasma shaping via effective magnetic shear, unified correlation lengths for ion-scale modes, and a new physics-based model for the electromagnetic electron temperature gradient mode. A key advancement is MMMnet’s ability to predict all six transport coefficients, providing a comprehensive representation of plasma transport dynamics. MMMnet achieves a two-order-of-magnitude speed improvement while maintaining strong correlation with MMM diffusivities, making it well-suited for real-time tokamak control and scenario optimization.

DIII-D

Error field predictability and consequences for ITER

Abstract ITER coil tolerances are re-evaluated using the modern understanding of coupling to least-stable plasma modes and an updated center-line-traced model of ITER’s coil windings. This reassessment finds the tolerances to be conservative through a statistical, linear study of n = 1 error fields (EFs) due to tilted, shifted misplacements and nominal windings of central solenoid and poloidal field coils within tolerance. We also show that a model-based correction scheme remains effective even when metrology quality is sub-optimal, and compare this to projected empirical correction schemes. We begin with an analysis of the necessity of error field correction (EFC) for daily operation in ITER using scalign laws for the EF penetration threshold. We then consider the predictability of EF dominant mode overlap across early planned ITER scenarios and, as measuring EFs in high power scenarios can pose risks to the device, the potential for extrapolation to the ITER Baseline Scenario (IBS). We find that carefully designing a scenario matching currents proportionally to those of the IBS is far more important than plasma shape or profiles in accurately measuring an optimal correction current set.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Enhancing predictive capabilities in fusion burning plasmas through surrogate-based optimization in core transport solvers

Abstract This work presents the PORTALS framework (Rodriguez-Fernandez et al 2022 Nucl. Fusion 62 076036), which leverages surrogate modeling and optimization techniques to enable the prediction of core plasma profiles and performance with nonlinear gyrokinetic simulations at significantly reduced cost, with no loss of accuracy. The efficiency of PORTALS is benchmarked against standard methods, and its full potential is demonstrated on a unique, simultaneous 5-channel (electron temperature, ion temperature, electron density, impurity density and angular rotation) prediction of steady-state profiles in a DIII-D ITER Similar Shape plasma with GPU-accelerated, nonlinear CGYRO (Candy et al 2016 J. Comput. Phys. 324 73–93). This paper also provides general guidelines for accurate performance predictions in burning plasmas and the impact of transport modeling in fusion pilot plants studies.

Physics

Observation of a new pedestal stability regime in MAST Upgrade H-mode plasmas

Abstract The first pedestal stability and structure analysis on the new MAST Upgrade (MAST-U) spherical tokamak H-mode plasmas is presented. Our results indicate that MAST-U pedestals are close to the low toroidal mode number ( n ) peeling branch of the peeling-ballooning instability, in contrast with MAST H-mode pedestals which were deeply in the high- n ballooning branch. This offers the possibility of reaching the ELM-free quiescent H-mode (Burrell et al 2005 Plasma Phys. Control. Fusion 47 B37–B52) or high-performance super H-mode (Snyder et al 2015 Nucl. Fusion 55 083026; Snyder et al 2019 Nucl. Fusion 59 086017) regimes. In addition, the coupling between the peeling and ballooning branches is weak in MAST-U, suggesting that a path to very high pedestal pressure gradient at high density may exist with sufficient heating power. A possible explanation for the differences between MAST and MAST-U pedestal stability is given in terms of plasma shaping parameters, in particular squareness and elongation, as well as the pedestal top temperature and collisionality.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Piecewise Omnigenous Stellarators

In omnigenous magnetic fields, charged particles are perfectly confined in the absence of collisions and turbulence. For this reason, the magnetic configuration is optimized to be close to omnigenity in any candidate for a stellarator fusion reactor. However, approaching omnigenity imposes severe constraints on the spatial variation of the magnetic field. In particular, the topology of the contours of constant magnetic field strength on each magnetic surface must be such that there are no particles transitioning between different types of wells. This, in turn, usually leads to complicated plasma shapes and coils. This Letter presents a new family of optimized fields that display tokamak-like collisional energy transport while having transitioning particles. This result radically broadens the space of accessible reactor-relevant configurations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Upgrade of the Lyman-alpha diagnostic system on DIII-D for main chamber edge neutral studies

The LLAMA (Lyman Alpha Measurement Apparatus) pinhole camera diagnostic had previously been deployed on DIII-D to measure radial profiles of the Lyman-α (Ly-α) deuterium neutral line brightness across the plasma boundary in the lower chamber to infer neutral deuterium density and ionization rate profiles. This system has recently been upgraded with a new diagnostic head, named ALPACA, that also encloses two pinhole cameras and duplicates the LLAMA views in the upper chamber. Similar to LLAMA, ALPACA provides two times 20 lines of sight, viewing the plasma edge on the inboard and outboard sides with a radial resolution of ~2.5 cm (FWHM) and an effective time resolution of ~1 ms that allows for the investigation of inter-ELM dynamics. The extended Ly-α system provides better coverage to study neutrals in experiments with various plasma shapes utilizing both the upper and lower divertors. Furthermore, post-campaign calibration of the LLAMA diagnostic has successfully been demonstrated for the first time. This was facilitated by various upgrades to the calibration set-up and detailed measurements of the emissivity distribution of the Ly-α calibration source using a pinhole collimator. It was found that the sensitivity of the inboard LLAMA pinhole camera was reduced by a factor of 2.0 ± 0.2 over the course of six months of plasma operation in 2021. In conclusion, the upgraded Ly-α system, equipped with improved absolute calibration, will provide key input for neutral fueling and pedestal particle transport studies and for 2D edge transport code validation on the DIII-D tokamak.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Plasma performance and operational space with an RMP-ELM suppressed edge

Abstract The operational space and global performance of plasmas with edge-localized modes (ELMs) suppressed by resonant magnetic perturbations (RMPs) are surveyed by comparing AUG, DIII-D, EAST, and KSTAR stationary operating points. RMP-ELM suppression is achieved over a range of plasma currents, toroidal fields, and RMP toroidal mode numbers. Consistent operational windows in edge safety factor are found across devices, while windows in plasma shaping parameters are distinct. Accessed pedestal parameters reveal a quantitatively similar pedestal-top density limit for RMP-ELM suppression in all devices of just over 3 × 10 19 m −3 . This is surprising given the wide variance of many engineering parameters and edge collisionalities, and poses a challenge to extrapolation of the regime. Wide ranges in input power, confinement time, and stored energy are observed, with the achieved triple product found to scale like the product of current, field, and radius. Observed energy confinement scaling with engineering parameters for RMP-ELM suppressed plasmas are presented and compared with expectations from established H and L-mode scalings, including treatment of uncertainty analysis. Different scaling exponents for individual engineering parameters are found as compared to the established scalings. However, extrapolation to next-step tokamaks ITER and SPARC find overall consistency within uncertainties with the established scalings, finding no obvious performance penalty when extrapolating from the assembled multi-device RMP-ELM suppressed database. Overall this work identifies common physics for RMP-ELM suppression and highlights the need to pursue this no-ELM regime at higher magnetic field and different plasma physical size.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Global gyro-kinetic ion temperature gradient and trapped electron mode turbulence modelling in X -point geometry in negative and positive triangularity

Comparative modelling of ion temperature gradient (ITG)/trapped electron mode (TEM) turbulence in negative (NT) and positive (PT) triangularity plasma shapes was done using the nonlinear global full-f gyrokinetic particle code JOREK-GK in the realistic X-point tokamak geometry including the Scrape Off Layer (SOL) for TCV and DIII-D parameters. A comparison of JOREK-GK code with the gyrokinetic codes GS2 and GENE was done using NT/PT triangularity TCV L-modes parameters showing good agreement between codes in linear growth rates and clear beneficial effect of NT as compared to PT. Global non-linear modelling of the ITG/TEM saturated turbulence for realistic DIII-D NT pulses was done and compared with numerically constructed PT equilibrium with the same plasma profiles. Existence of longer correlation length of density fluctuations in PT compared to NT was demonstrated. Stronger and more sheared zonal flows are generated via Reynolds stress in NT compared to PT. These factors are stabilizing for TEM/ITG turbulence in NT and lead to smaller heat fluxes and heat conductivities in NT compared to PT configuration. Weak dependence of plasma confinement on collisionality and plasma rotation was found in modelling of DIII-D NT shots similar to the experiment. The confinement scaling with normalized ion gyro-radius ρ* was estimated both for NT and PT. Bohm-like scaling was obtained in both configurations, however with better confinement for NT compared to PT which could be favourable factor for reactor size machines.

ITG

Conceptual design of ELM control coils for the TCABR tokamak

An upgrade of the Tokamak à Chauffage Alfvén Brésilien (TCABR) is being designed to make it capable of creating a well controlled environment where the impact of resonant magnetic perturbation (RMP) fields on edge localised modes can be addressed over a wide range of (i) plasma shapes, (ii) divertor configurations, (iii) RMP coil geometries and (iv) perturbed magnetic field spectra. To this end, a unique set of in-vessel RMP coils is being designed and, in this work, their conceptual design is presented. This unique set of coils is composed of three toroidal arrays of coils on the low field side and three toroidal arrays of coils on the high field side. Each of these six toroidal arrays is composed of 18 coils thus allowing for the creation of RMP fields with toroidal mode numbers n ≤ 9 and with increased control of the poloidal mode number spectrum. To study dynamical effects of RMP fields of different toroidal mode numbers, all rotating simultaneously with different velocities, each of the 108 RMP coils will be powered independently by power supplies that can provide voltages of up to 4 kV and electric currents of up to 2 kA, with frequencies varying continuously from 0Hz up to 10kHz. A set of physical criteria were used to determine the optimal coil geometry and their respective number of turns to reduce the coil currents and voltages during operation with alternate current. Further, the conceptual design was carried out using both the vacuum approach (no plasma response) and the single-fluid response approach, which accounts for the response of a linear, single-fluid, visco-resistive plasma calculated using the M3D-C 1 code.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Demonstration of reconstruction-free static magnetic control of DIII-D plasma with deep reinforcement learning

This paper presents the development and experimental validation of a reinforcement learning (RL)-based magnetic controller on the DIII-D tokamak. The controller directly maps raw magnetic diagnostic signals to actuator commands, replacing the traditional isoflux control algorithm based on equilibrium reconstruction. Four RL controllers are trained using the Soft Actor–Critic algorithm with an asymmetric Actor–Critic architecture in the NSFsim simulator. All controllers are deployed in the DIII-D Plasma Control System and operated with a 4 kHz feedback loop. Two randomization strategies are evaluated during training: evolving kinetic profiles and fixed kinetic profiles within each episode. The latter approach is found to better capture experimental deviations in the current density profile and to provide overall improved control performance. Robust operation is demonstrated across heating power scans in both L- and H-mode plasmas, as well as during transient events such as L–H transitions and pellet injections. Control errors in plasma shape and radial position remained within 1.5–2.0 cm and 1 cm, respectively. A notable discrepancy was observed in the vertical X-point position, with errors of up to approximately 4 cm, attributed to the current density distribution mismatches between simulations and experiments.

DIII-D

Demonstration of a tandem lens for producing shaped laser-ionized plasmas for plasma wakefield acceleration

We demonstrate a tandem lens optical setup, comprising two diffractive optics, that focuses a high-power ultrafast laser with a shaped on-axis intensity profile, producing a meter-long Bessel focus. The intended use of the optical setup is to produce a laser-ionized plasma source for plasma wakefield acceleration. By controlling the on-axis intensity, the density profile of the plasma ramps at the entrance and exit of the plasma can be tailored to optimize the matching of the electron beam into the plasma. In addition to demonstrating the optical system, we describe the algorithm used to calculate the lens phases and present detailed calculations of the lenses’ expected performance.

Ariniello, Robert [SLAC National Accelerator Labor

Omnigenous umbilic stellarators

To better understand the dependence of the magnetic field structure in the plasma edge on the plasma boundary shape, in the context of X-point and island divertor designs, we define and develop a class of stellarators called umbilic stellarators. These equilibria are characterised by a single continuous high-curvature edge on the plasma boundary that goes around multiple times toroidally before meeting itself. We develop a technique that allows us to simultaneously optimise the plasma boundary along with a curve lying on the boundary on which we impose a high curvature while imposing omnigenity – a property of the magnetic field that ensures trapped particle confinement throughout the plasma volume. We find that umbilic stellarators naturally tend to favour piecewise omnigenity instead of omnigenity with a specific helicity. After generating omnigenous umbilic stellarators, we design coil sets for some of them and explore the fieldline structure in the edge and its sensitivity to small fluctuations in the plasma. Finally, using single-stage optimisation, we simultaneously modify the plasma and coil shape and propose an experiment to modify an existing tokamak to a finite-𝛽 stellarator using this technique and explore a potentially simpler way to convert a limited tokamak into a diverted stellarator.

fusion plasma

Compatibility of divertor detachment and ELM suppression in DIII-D high- β p plasmas with ITER-similar shape

Abstract Integration of transient and steady-state divertor heat fluxes control with a high-performance core is necessary for future fusion reactors. In recent DIII-D high- β p experiments, divertor detachment and simultaneous edge localized mode (ELM) suppression are demonstrated while the plasma confinement quality is maintained high in ITER-similar shape. By optimizing the neon injection in high- β p scenario with ITER-similar shape, deep detachment and ELM suppression are achieved with a high-performance core ( β N ∼ 2.8, β p ∼ 2.3) at q 95 ∼ 7.5. Partial divertor detachment and suppression of large ELMs are achieved at q 95 ∼ 6. The stability analyses suggest that with low neon injection, the density pedestal becomes higher and steeper and the T i profile also increases, therefore the increased edge pressure and higher current density destabilize the Peeling-Ballooning mode (PBM), which would lead to a large ELM collapse. With strong neon gas puffing, the significantly reduced pedestal pressure and current density, due to the degraded T e pedestal, lead to the stabilization of PBM and ELMs are suppressed. For both cases, the coupling between the large radius internal transport barrier (ITB) and edge pedestal is the key reason for maintaining high global performance. The formation of large radius ITB compensates for pedestal degradation. Such results could provide an attractive scenario to well control the transient and steady-state heat flux onto the divertor plates while maintaining good plasma performance, which is an important step toward the steady-state operation of future fusion reactors.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Predicted thresholds for RMP ELM suppression access in double-null configurations

Modeling of DIII-D plasmas spanning shapes from single to double-null (DN) reveals new insights into the nature of resonant magnetic perturbation (RMP) conditions necessary for edge-localized mode (ELM) suppression. The suppression of ELMs with RMPs has proven difficult in DN configurations, where no device has thus far reported any hints of suppression. Modeling using the GPEC code finds a reduced high-field side response closer to DN shaping. The resulting synthetic diagnostic measurements are consistent with what has been observed in experiments on DIII-D, validating the plasma response model in this regime. While common metrics for suppression do not illustrate a clear distinction between single-null (SN) and DN cases, the pedestal top resonant field does show a ∼20% decrease at DN shaping in modeling. Field penetration is assessed using linear tearing theory, which demonstrates a lack of sufficient pedestal top resonant flux in the DN shape, requiring at least 1.5 × greater RMP coil currents than what was used in experiment. Analysis from drift kinetic simulations further indicate up to 2 × larger critical island widths are required at the pedestal top for tearing mode growth compared to SN cases. Effective island widths inferred from 3D ideal MHD are also analyzed, where maximum widths in lab coordinates indicate a threshold of ∼18–24× the ion gyroradius for sufficient profile flattening for ELM suppression. These results suggest that ELM suppression may be possible in DN with sufficiently large RMP coil amplitude. Future prospects of achieving RMP ELM suppression in the DN configuration may involve going to lower triangularity, which is also highlighted in this work.

RMP ELM suppression

Doubling fusion power with volumetric optimization in magnetic confinement fusion devices

A technique, volumetric power optimization, is presented for enhancing the power output of magnetic confinement fusion devices. Applied to a tokamak, this approach involves shifting the burning plasma region to a larger plasma volume while introducing minimal perturbations to the plasma boundary shape. This edge perturbation—squareness—is analogous to pinching and stretching the edge boundary. Stability calculations confirm that this edge alteration is compatible with maintaining plasma stability. This optimization method for optimizing fusion power output could improve the performance of magnetic confinement fusion power plants.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

GaN-based W-band receiver chip development for fusion plasma diagnostics

Millimeter-wave diagnostics have proven effective on various magnetic fusion devices worldwide, yet the formidable challenges posed by the harsh environments of future burning plasma devices, characterized by extreme temperatures, pressures, and radiation levels, remain a significant hurdle. To address these challenges, the utilization of wide bandgap Gallium Nitride (GaN)-based millimeter-wave diagnostics is a most promising solution for fusion reactor safety monitoring and control. A noteworthy W-band GaN-based system-on-chip receiver has been the demonstrated by employing HRL T3 40 nm GaN technology. This receiver chip, compactly designed with dimensions of 3 × 5 mm 2 , incorporates essential components such as the 75–110 GHz RF Low-Noise Amplifier (LNA), mixer, Intermediate Frequency (IF) amplifier, and Local Oscillator (LO) chain. This receiver chip will be packaged as a millimeter-wave receiver module and applied on the DIII-D National Fusion Facility, for fusion plasma edge shape monitoring for operational safety and dangerous disruption prediction. The laboratory measurement results have demonstrated suitable performance. Furthermore, this advancement is pivotal for accurate analysis of plasma behavior in the extreme conditions of burning plasma devices, driving progress in fusion research and technology.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY