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Piezoelectric cantilever sensors

A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

Shih, Wan Y.

Circuit for Driving Piezoelectric Transducers

The figure schematically depicts an oscillator circuit for driving a piezoelectric transducer to excite vibrations in a mechanical structure. The circuit was designed and built to satisfy application-specific requirements to drive a selected one of 16 such transducers at a regulated amplitude and frequency chosen to optimize the amount of work performed by the transducer and to compensate for both (1) temporal variations of the resonance frequency and damping time of each transducer and (2) initially unknown differences among the resonance frequencies and damping times of different transducers. In other words, the circuit is designed to adjust itself to optimize the performance of whichever transducer is selected at any given time. The basic design concept may be adaptable to other applications that involve the use of piezoelectric transducers in ultrasonic cleaners and other apparatuses in which high-frequency mechanical drives are utilized. This circuit includes three resistor-capacitor networks that, together with the selected piezoelectric transducer, constitute a band-pass filter having a peak response at a frequency of about 2 kHz, which is approximately the resonance frequency of the piezoelectric transducers. Gain for generating oscillations is provided by a power hybrid operational amplifier (U1). A junction field-effect transistor (Q1) in combination with a resistor (R4) is used as a voltage-variable resistor to control the magnitude of the oscillation. The voltage-variable resistor is part of a feedback control loop: Part of the output of the oscillator is rectified and filtered for use as a slow negative feedback to the gate of Q1 to keep the output amplitude constant. The response of this control loop is much slower than 2 kHz and, therefore, does not introduce significant distortion of the oscillator output, which is a fairly clean sine wave. The positive AC feedback needed to sustain oscillations is derived from sampling the current through the piezoelectric transducer. This positive AC feedback, in combination with the slow feedback to the voltage-variable resistors, causes the overall loop gain to be just large enough to keep the oscillator running. The positive feedback loop includes two 16-channel multiplexers, which are not shown in the figure. One multiplexer is used to select the desired piezoelectric transducer. The other multiplexer, which is provided for use in the event that there are significant differences among the damping times of the 16 piezoelectric transducers, facilitates changing the value of one of the resistors in the positive-feedback loop to accommodate the damping time of the selected transducer.

Randall, David P.

Giant piezoelectricity in fluoropolymer fiber mats achieved by corona poling in water

Polymer piezoelectrics hold great potential for energy harvesting and wearable electronics. Efforts have been dedicated to enhancing piezoelectric coefficients and thermostability for several decades, but most of these have not been successful. In this report, we demonstrate a straightforward way to achieve high piezoelectric coefficients and output voltages while maintaining high thermostability at temperatures over 110 °C. Poly(vinylidene fluoride-co-trifluoroethylene) [P(VDF-TrFE)] 80/20 mol.% nanofiber mats (made by electrospinning) with extremely high crystallinity and Curie temperatures were obtained via a two-step annealing process, from which large ferroelectric domains were formed in extended-chain crystals. After corona poling using water, which is a high dielectric constant medium, giant piezoelectricity (apparent d 33 = 1045 ± 20 pC/N) and high output voltages (29.9 ± 0.5 V) were achieved. It is found that the dimensional effect induced significant polarization changes, which is the key requirement for piezoelectricity. Our finding in this work paves a way to further improve high-performance polymer piezoelectrics.

36 MATERIALS SCIENCE

Tailoring Piezoelectricity of 3D Printing PVDF-MoS 2 Nanocomposite via In Situ Induced Shear Stress

3D printing of unique structures with tunable properties offers significant advantages in the fabrication of complex and customized electronic devices. Here, this study introduces a process-microstructure–property-guided manufacturing route to fabricate PVDF-2D MoS 2 piezoelectric nanocomposites with tunable piezoelectric properties without having a postprocess. We control PVDF’s microstructure through direct ink writing (DIW) 3D printing while tuning PVDF-MoS 2 interfacial strain by controlling rheology and 3D printing parameters, such as nozzle size and printing speed. Our approach demonstrates tunable piezoelectricity in PVDF-MoS 2 , achieving a 15-fold increase in the piezoelectric coefficient (d 33 ) at a printing-induced shear stress of 6685 Pa. This enhancement arises from the electrostatic interactions between PVDF and MoS 2 and the filler distribution and alignment caused by the in situ shear stress in 3D printing, as confirmed by XPS and Raman mapping analyses. Our findings advance the understanding of piezoelectric mechanisms in PVDF-based nanocomposites, laying the foundation for 3D printing of piezoelectric sensors in wearable device applications with enhanced performance and customization capabilities.

2D MoS2

A piezoelectric transformer

This work describes a modeling and design method whereby a piezoelectric system is formulated by two sets of second-order equations, one for the mechanical system, and the other for the electrical system, coupled through the piezoelectric effect. The solution to this electromechanical coupled system gives a physical interpretation of the piezoelectric effect as a piezoelectric transformer that is a part of the piezoelectric system, which transfers the applied mechanical force into a force-controlled current source, and short circuit mechanical compliance into capacitance. It also transfers the voltage source into a voltage-controlled relative velocity input, and free motional capacitance into mechanical compliance. The formulation and interpretation simplify the modeling of smart structures and lead to physical insight that aids the designer. Due to its physical realization, the smart structural system can be unconditional stable and effectively control responses. This new concept has been demonstrated in three numerical examples for a simple piezoelectric system.

Won, C. C.

Coupled mixed-field laminate theory and finite element for smart piezoelectric composite shell structures

Mechanics for the analysis of laminated composite shells with piezoelectric actuators and sensors are presented. A new mixed-field laminate theory for piezoelectric shells is formulated in curvilinear coordinates which combines single-layer assumptions for the displacements and a layerwise representation for the electric potential. The resultant coupled governing equations for curvilinear piezoelectric laminates are described. Structural mechanics are subsequently developed and an 8-node finite-element is formulated for the static and dynamic analysis of adaptive composite structures of general laminations containing piezoelectric layers. Evaluations of the method and comparisons with reported results are presented for laminated piezoelectric-composite plates, a closed cylindrical shell with a continuous piezoceramic layer and a laminated composite semi-circular cantilever shell with discrete cylindrical piezoelectric actuators and/or sensors.

Saravanos, Dimitris A.

High Performance Piezoelectric Thin Films for Shape Control in Large Inflatable Structures

The objective of this research and development program was to develop PbZr(1-x)Ti(x)O3 (PZT) and Pb(1-x)Ba(x)Nb2O6 (PBN) materials with large piezoelectric response which are suitable for shape control in large inflatable structures. Two approaches were to be considered: (1) direct deposition of PZT and PBN films on flexible plastic or thin metal foil substrates, and (2) deposition on Si followed by fabrication of hybrid structures on mylar or kapton. Testing in shape control concepts was carried out at JPL and based on their results, the required modifications were made in the final film compositions and deposition techniques. The program objective was to identify and then optimize piezoelectric materials for NASA shape control applications. This involved the bulk piezoelectric and photovoltaic responses and the compatibility of the thin films with appropriate substrate structures. Within the PZT system, Rockwell has achieved the highest reported piezoelectric coefficient (d(sub 33) greater than 100 pC/N) of any ceramic composition. We used this experience in piezoelectric technology to establish compositions that can effectively address the issues of this program. The performance of piezoelectric thin films depends directly on d(sub ij) and Epsilon. The challenge was to find PZT compositions that maintained high d(sub ij) and Epsilon, while also exhibiting a large photovoltaic effect and integrate thin films of this composition into the system structure necessary to meet shape control applications. During the course of this program, several PZT and PLZT compositions were identified that meet these requirements. Two such compositions were successfully used in electrical and optical actuation studies of thin film structures.

Neurgaonkar, R. R.

High Performance Piezoelectric Thin Films for Shape Control in Large Inflatable Structures

The objective of this research and development program was to develop PbZr(1-x)Ti(x)O3 (PZT) and Pb(1-x)Ba(x)Nb2O6 (PBN) materials with large piezoelectric response which are suitable for shape control in large inflatable structures. Two approaches were to be considered: (1) direct deposition of PZT and PBN films on flexible plastic or thin metal foil substrates, and (2) deposition on Si followed by fabrication of hybrid structures on mylar or kapton. Testing in shape control concepts was carried out at JPL and based on their results, the required modifications were made in the final film compositions and deposition techniques. The program objective was to identify and then optimize piezoelectric materials for NASA shape control applications. This involved the bulk piezoelectric and photovoltaic responses and the compatibility of the thin films with appropriate substrate structures. Within the PZT system, Rockwell has achieved the highest reported piezoelectric coefficient (d(sub 33) greater than 100 pC/N) of any ceramic composition. We used this experience in piezoelectric technology to establish compositions that can effectively address the issues of this program. The performance of piezoelectric thin films depends directly on d(sub ij) and epsilin. The challenge was to find PZT compositions that maintained high d(sub ij) and epsilon, while also exhibiting a large photovoltaic effect and integrate thin films of this composition into the system structure necessary to meet shape control applications. During the course of this program, several PZT and PLZT compositions were identified that meet these requirements. Two such compositions were successfully used in electrical and optical actuation studies of thin film structures.

Neurgaonkar, R. R.

Structure-Property Study of Piezoelectricity in Polyimides

High performance piezoelectric polymers are of interest to NASA as they may be useful for a variety of sensor applications. Over the past few years research on piezoelectric polymers has led to the development of promising high temperature piezoelectric responses in some novel polyimides. In this study, a series of polyimides have been studied with systematic variations in the diamine monomers that comprise the polyimide while holding the dianhydride constant. The effect of structural changes, including variations in the nature and concentration of dipolar groups, on the remanent polarization and piezoelectric coefficient is examined. Fundamental structure-piezoelectric property insight will enable the molecular design of polymers possessing distinct improvements over state-of-the-art piezoelectric polymers including enhanced polarization, polarization stability at elevated temperatures, and improved processability.

Ounaies, Zoubeida

Ground and Flight Test Structural Excitation Using Piezoelectric Actuators

A flight flutter experiment at the National Aeronautics and Space Administration (NASA) Dryden Flight Research Center, Edwards, California, used an 18-inch half-span composite model called the Aerostructures Test Wing (ATW). The ATW was mounted on a centerline flight test fixture on the NASA F-15B and used distributed piezoelectric strain actuators for in-flight structural excitation. The main focus of this paper is to investigate the performance of the piezoelectric actuators and test their ability to excite the first-bending and first-torsion modes of the ATW on the ground and in-flight. On the ground, wing response resulting from piezoelectric and impact excitation was recorded and compared. The comparison shows less than a 1-percent difference in modal frequency and a 3-percent increase in damping. A comparison of in-flight response resulting from piezoelectric excitation and atmospheric turbulence shows that the piezoelectric excitation consistently created an increased response in the wing throughout the flight envelope tested. The data also showed that to obtain a good correlation between the piezoelectric input and the wing accelerometer response, the input had to be nearly 3.5 times greater than the turbulence excitation on the wing.

Voracek, David F.

Piezoelectric Power Requirements for Active Vibration Control

This paper presents a method for predicting the power consumption of piezoelectric actuators utilized for active vibration control. Analytical developments and experimental tests show that the maximum power required to control a structure using surface-bonded piezoelectric actuators is independent of the dynamics between the piezoelectric actuator and the host structure. The results demonstrate that for a perfectly-controlled system, the power consumption is a function of the quantity and type of piezoelectric actuators and the voltage and frequency of the control law output signal. Furthermore, as control effectiveness decreases, the power consumption of the piezoelectric actuators decreases. In addition, experimental results revealed a non-linear behavior in the material properties of piezoelectric actuators. The material non- linearity displayed a significant increase in capacitance with an increase in excitation voltage. Tests show that if the non-linearity of the capacitance was accounted for, a conservative estimate of the power can easily be determined.

Brennan, Matthew C.

Layerwise Analysis of Thermal Shape Control in Graded Piezoelectric Beams

A layerwise finite element formulation developed for piezoelectric materials is used to investigate the displacement and stress response of a functionally graded piezoelectric bimorph actuator. The formulation is based on the principles of linear thermopiezoelectricity and accounts for the coupled mechanical, electrical, and thermal response of piezoelectric materials. The layerwise laminate theory is implemented into a linear beam element in order to provide a more accurate representation of the transverse and shear effects that are induced by increased inhomogeneities introduced through-the-thickness by using functionally graded materials. The accuracy of the formulation is verified with previously published experimental results for a piezoelectric bimorph actuator. Additional studies are conducted to analyze the impact of electric and thermal loads on the deflections and stresses in a bimorph actuator. Results of the study help demonstrate the capability of the layerwise theory to provide a more complete representation of shear effects that are no longer negligible even in thin piezoelectric beams. In addition, the effects of varying piezoelectric properties through-the-thickness of the beam are shown to provide additional benefits in minimizing the induced deformations and stresses.

Lee, Ho-Jun

Using Piezoelectric Devices to Transmit Power through Walls

A method denoted wireless acoustic-electric feed-through (WAEF) has been conceived for transmitting power and/or data signals through walls or other solid objects made of a variety of elastic materials that could be electrically conductive or nonconductive. WAEF would make it unnecessary to use wires, optical fibers, tubes, or other discrete wall-penetrating signal-transmitting components, thereby eliminating the potential for structural weakening or leakage at such penetrations. Avoidance of such penetrations could be essential in some applications in which maintenance of pressure, vacuum, or chemical or biological isolation is required. In a basic WAEF setup, a transmitting piezoelectric transducer on one side of a wall would be driven at resonance to excite ultrasonic vibrations in the wall. A receiving piezoelectric transducer on the opposite side of the wall would convert the vibrations back to an ultrasonic AC electric signal, which would then be detected and otherwise processed in a manner that would depend on the modulation (if any) applied to the signal and whether the signal was used to transmit power, data, or both. An electromechanical-network model has been derived as a computationally efficient means of analyzing and designing a WAEF system. This model is a variant of a prior model, known in the piezoelectric-transducer art as Mason's equivalent-circuit model, in which the electrical and mechanical dynamics, including electromechanical couplings, are expressed as electrical circuit elements that can include inductors, capacitors, and lumped-parameter complex impedances. The real parts of the complex impedances are used to account for dielectric, mechanical, and coupling losses in all components (including all piezoelectric-transducer, wall, and intermediate material layers). In an application to a three-layer piezoelectric structure, this model was shown to yield the same results as do solutions of the wave equations of piezoelectricity and acoustic propagation in their full complexity.

Sherrit, Stewart

Radial-Electric-Field Piezoelectric Diaphragm Pumps

In a recently invented class of piezoelectric diaphragm pumps, the electrode patterns on the piezoelectric diaphragms are configured so that the electric fields in the diaphragms have symmetrical radial (along-the-surface) components in addition to through-the-thickness components. Previously, it was accepted in the piezoelectric-transducer art that in order to produce the out-of-plane bending displacement of a diaphragm needed for pumping, one must make the electric field asymmetrical through the thickness, typically by means of electrodes placed on only one side of the piezoelectric material. In the present invention, electrodes are placed on both sides and patterned so as to produce substantial radial as well as through-the-thickness components. Moreover, unlike in the prior art, the electric field can be symmetrical through the thickness. Tests have shown in a given diaphragm that an electrode configuration according to this invention produces more displacement than does a conventional one-sided electrode pattern. The invention admits of numerous variations characterized by various degrees of complexity. Figure 1 is a simplified depiction of a basic version. As in other piezoelectric diaphragm pumps of similar basic design, the prime mover is a piezoelectric diaphragm. Application of a suitable voltage to the electrodes on the diaphragm causes it to undergo out-of-plane bending. The bending displacement pushes a fluid out of, or pulls the fluid into, a chamber bounded partly by the diaphragm. Also as in other diaphragm pumps in general, check valves ensure that the fluid flows only in through one port and only out through another port.

Bryant, Robert G.

Miniature Piezoelectric Shaker for Distribution of Unconsolidated Samples to Instrument Cells

The planned Mars Science Laboratory mission requires inlet funnels for channeling unconsolidated powdered samples from the sampling and sieving mechanisms into instrument test cells, which are required to reduce cross-contamination of the samples and to minimize residue left in the funnels after each sample transport. To these ends, a solid-state shaking mechanism has been created that requires low power and is lightweight, but is sturdy enough to survive launch vibration. The funnel mechanism is driven by asymmetrically mounted, piezoelectric flexure actuators that are out of the load path so that they do not support the funnel mass. Each actuator is a titanium, flextensional piezoelectric device driven by a piezoelectric stack. The stack has Invar endcaps with a half-spherical recess. The Invar is used to counteract the change in stress as the actuators are cooled to Mars ambient temperatures. A ball screw is threaded through the actuator frame into the recess to apply pre-stress, and to trap the piezoelectric stack and endcaps in flexure. During the vibration cycle of the flextensional actuator frame, the compression in the piezoelectric stack may decrease to the point that it is unstressed; however, because the ball joint cannot pull, tension in the piezoelectric stack cannot be produced. The actuators are offset at 120 . In this flight design, redundancy is required, so three actuators are used though only one is needed to assist in the movement. The funnel is supported at three contact points offset to the hexapod support contacts. The actuator surface that does not contact the ring is free to expand. Two other configurations can be used to mechanically tune the vibration. The free end can be designed to drive a fixed mass, or can be used to drive a free mass to excite impacts (see figure). Tests on this funnel mechanism show a high density of resonance modes between 1 and 20 kHz. A subset of these between 9 and 12 kHz was used to drive the CheMin actuators at 7 V peak to peak. These actuators could be driven by a single resonance, or swept through a frequency range to decrease the possibility that a portion of the funnel surface was not coincident with a nodal line (line of no displacement). The frequency of actuation can be electrically controlled and monitored and can also be mechanically tuned by the addition of tuning mass on the free end of the actuator. The devices are solid-state and can be designed with no macroscopically moving parts. This design has been tested in a vacuum at both Mars and Earth ambient temperatures ranging from 30 to 25 C

Sherrit, Stewart

Piezoelectric Resonator with Two Layers

A piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top layer and a second one of the electrodes in the bottom layer are coupled to a second contact.

Stephanou, Philip J.

Design and Experimental Evaluation of Flextensional-Cantilever Based Piezoelectric Transducers for Flow Energy Harvesting

Cantilever type piezoelectric harvesters, such as bimorphs, are typically used for vibration induced energy harvesting. However, a major drawback of a piezoelectric bimorph is its brittle nature in harsh environments, resulting in short life-times as well as output power degradation. The emphasis in this work is to design robust, highly efficient piezoelectric harvesters that are capable of generating electrical power in the milliwatt range. Various harvesters have been modeled, designed and prototyped, and the flextensional actuator based harvester, where the metal cantilever is mounted and coupled between two flextensional actuators, was found to be a viable alternative to the cantilever type piezoelectric harvesters. Preliminary tests showed that these devices equipped with 5x5x36 mm two piezoelectric PZT stacks can produce greater than 50 mW of power under air flow induced vibrations.

fluid structure interaction

Developing a self-diagnostic system for piezoelectric sensors

Measurement techniques for developing a self-diagnostic system for piezoelectric sensors are presented. The self-diagnostic system uses two types of measurement techniques based on passive and active evaluation of the piezoelectric element. Both hard and soft failures can be detected by this system. Hard failures such as loss of sensor signal and change in sensor output resistance are determined by monitoring the sensor's output resistance, voltage or current. These are passive measurements of the sensor's output condition. Soft failures include changes in sensor calibration and mounting conditions. Soft failures are detected by measuring structural/electrical impedance of the piezoelectric sensor. Active measurement techniques are used to calculate changes in piezoelectric element properties related to soft failures. This paper describes the general operating principles of a self-diagnostic system and discusses the design of an active/passive measurement technique required for this system to function. Experimental results using two types of piezoelectric accelerometers are presented.

Flanagan, Patrick M.