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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 37 records · Page 2
All sourcesNASA NTRSDOE OSTI
NASA NTRS1998

In situ CF3 Detection in Low Pressure Inductive Discharges by Fourier Transform Infrared Spectroscopy

The detection of CF(x) (x=1-3) radicals in low pressure discharges using source gases such as CF4 and CHF3 is of importance to the understanding of their chemical structure and relevance in plasma based etching processes. These radicals are known to contribute to the formation of fluorocarbon polymer films, which affect the selectivity and anisotropy of etching. In this study, we present preliminary results of the quantitative measurement of trifluoromethyl radicals, CF3, in low pressure discharges. The discharge studied here is an inductively (transformer) coupled plasma (ICP) source in the GEC reference cell, operating on pure CF4 at pressures ranging from 10 - 100 mTorr, This plasma source generates higher electron number densities at lower operating pressures than obtainable with the parallel-plate capacitively coupled version of the GEC reference cell. Also, this expanded operating regime is more relevant to new generations of industrial plasma reactors being used by the microelectronics industry. Fourier transform infrared (FTIR) spectroscopy is employed to observe the absorption band of CF3 radicals in the electronic ground state X2Al in the region of 1233-1270/cm. The spectrometer is equipped with a high sensitivity HgCdTe (MCT) detector and has a fixed resolution of 0.125/cm. The CF3 concentrations are measured for a range of operating pressures and discharge power levels.

Kim, J. S.↗
NASA NTRS2014

On the Variability of Wilson Currents by Storm Type and Phase

Storm total conduction currents from electrified clouds are thought to play a major role in maintaining the potential difference between the earth's surface and the upper atmosphere within the Global Electric Circuit (GEC). However, it is not entirely known how the contributions of these currents vary by cloud type and phase of the clouds life cycle. Estimates of storm total conduction currents were obtained from data collected over two decades during multiple field campaigns involving the NASA ER-2 aircraft. In this study the variability of these currents by cloud type and lifecycle is investigated. We also compared radar derived microphysical storm properties with total storm currents to investigate whether these storm properties can be used to describe the current variability of different electrified clouds. The ultimate goal is to help improve modeling of the GEC via quantification and improved parameterization of the conduction current contribution of different cloud types.

Deierling, Wiebke↗
NASA NTRS1986

Translucent molecular clouds: Theory and observations

Few suitable stars behind molecular clouds have been identified. A limited survey was performed of interstellar lines toward highly reddened stars in the southern sky, using the ESO 1.4 m CAT telescope with a Reticon detector, and the Cerro Tololo 4 m telescope equipped with a GEC charge coupled device (CCD) detector. Because of the reduced extinction at longer wavelengths, molecules were searched for with transitions in the red part of the spectrum such as C2 and CN. For some lines-of-sight for which C2 was detected, the 4300 A line of CH was also observed. Absorption lines of interstellar C2 around 8750 A were detected in the spectra of about 1/4 of the 36 observed stars. The inferred C2 column densities range between 10 to the 13th power and 10 to the 14th power sq. cm., and are up to an order of magnitude larger than those found for diffuse clouds. The observed column densities of CH correlate very well with those of C2 over this range. In contrast, the measured column densities of CN vary by orders of magnitude between the various regions, and they do not correlate with those of C2 and CH. The observed rotational population distribution of C2 also provides information about the physical conditions in the clouds. Models of translucent molecular clouds have been constructed along the lines described by van Dishoeck and Black (1986) for diffuse clouds. The models compute accurately the fractions of atomic and molecular hydrogen as functions of depth into the clouds, as well as the excitation of H2 by ultraviolet pumping. They also incorporate a detailed treatment of the photodissociation processes of the molecules (cf. van Dishoeck 1986), which play an important role in the chemistry up to depths of about 3 mag.

Vandishoeck, E. F.↗
NASA NTRS1990

Unexpected effects of a trap in CCD echelle spectra of B-type stars

Because of the nature of echelle spectra, cosmetic defects such as traps may mimic real spectral features. An example from spectra taken at CTIO with a GEC CCD is presented, and it is shown how the affected pixels can be eliminated from the reduced spectrum, at a slight cost in signal-to-noise ratio.

Morrison, Nancy D.↗
NASA NTRS1992

The e-Beam Sustained Laser Technology for Space-based Doppler Wind Lidar

An overview is presented of GEC Avionics activities relating to the Spaceborne Doppler Wind Lidar. In particular, the results of design studies into the use of an e-beam sustained CO2 laser for spaceborne applications, and experimental work on a test bed system are discussed.

Brown, M. J.↗
NASA NTRS1991

Geostationary earth climate sensor: Scientific utility and feasibility, phase A

The possibility of accurate broad band radiation budget measurements from a GEO platform will provide a unique opportunity for viewing radiation processes in the atmosphere-ocean system. The CSU/TRW team has prepared a Phase 1 instrument design study demonstrating that measurements of radiation budget are practical from geosynchronous orbit with proven technology. This instrument concept is the Geostationary Earth Climate Sensor (GECS). A range of resolutions down to 20 km at the top of the atmosphere are possible, depending upon the scientific goals of the experiment. These tradeoffs of resolution and measurement repeat cycles are examined for scientific utility. The design of a flexible instrument is shown to be possible to meet the two goals: long-term, systematic monitoring of the diurnal cycles of radiation budget; and high time and space resolution studies of regional radiation features.

Campbell, G. Garrett↗
NASA NTRS1999

Design Challenges of Power Systems for Instrumented Spacecraft with Very Low Perigees in the Earth's Ionosphere

Designing a solar array to power a spacecraft bus supporting a set of instruments making in situ plasma and neutral atmosphere measurements in the ionosphere at altitudes of 120km or lower poses several challenges. The driving scientific requirements are the field-of-view constraints of the instruments resulting in a three-axis stabilized spacecraft, the need for an electromagnetically unperturbed environment accomplished by designing an electrostatically conducting solar array surface to avoid large potentials, making the spacecraft body as small and as symmetric as possible, and body-mounting the solar array. Furthermore, the life and thermal constraints, in the midst of the effects of the dense atmosphere at low altitude, drive the cross-sectional area of the spacecraft to be small particularly normal to the ram direction. Widely varying sun angles and eclipse durations add further complications, as does the growing desire for multiple spacecraft to resolve spatial and temporal variations packaged into a single launch vehicle. Novel approaches to insure adequate orbit-averaged power levels of approximately 250W include an oval-shaped cross section to increase the solar array collecting area during noon-midnight orbits and the use of a flywheel energy storage system. The flywheel could also be used to help maintain the spacecraft's attitude, particularly during excursions to the lowest perigee altitudes. This paper discusses the approaches used in conceptual power designs for both the proposed Dipper and the Global Electrodynamics Connections (GEC) Mission currently being studied at the NASA/Goddard Space Flight Center.

Moran, Vickie Eakin↗
NASA NTRS2000

Langmuir Probe Measurements in an Inductively Coupled Ar/CF4 Plasmas

Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

Rao, M. V. V. S.↗
NASA NTRS2000

Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

Absolute fluxes and energy distributions of ions in inductively coupled plasmas of Ar, CHF3/Ar, and CHF3/Ar/O2 have been measured. These plasmas were generated in a Gaseous Electronics Conference (GEC) cell modified for inductive coupling at pressures 10-50 mTorr and 100-300 W of 13.56 MHz radio frequency (RF) power in various feedgas mixtures. In pure Ar plasmas, the Ar(+) flux increases linearly with pressure as well as RF-power. Total ion flux in CHF3 mixtures decreases with increase in pressure and also CHF3 concentration. Relative ion fluxes observed in the present studies are analyzed with the help of available cross sections for electron impact ionization and charge-exchange ion-molecule reactions. Measurements of plasma potential, electron and ion number densities, electron energy distribution function, and mean electron energy have also been made in the center of the plasma with a RF compensated Langmuir probe. Plasma potential values are compared with the mean ion energies determined from the measured ion energy distributions and are consistent. Electron temperature, plasma potential, and mean ion energy vary inversely with pressure, but increase with CHF3 content in the mixture.

Kim, J. S.↗
NASA NTRS2000

Simulation and Experimental Measurements of Inductively Coupled CF4 and CF4/Ar Plasmas

The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

Hash, D. B.↗
NASA NTRS2000

Langmuir Probe Measurements of Inductively Coupled CHF3/Ar and Ar/CHF3/O2 Plasmas

Plasma parameters, such as, electron number density (ne), electron temperature (Te), y electron energy distribution function (EEDF), mean electron energy (Ee), ion number density (ni), and plasma potential (Vp), have been measured by using Langmuir probe in low-pressure (10-50 mTorr) inductively coupled CHF3/Ar and CHF3/Ar/O2 plasmas generated in the GEC cell. The measurements were made at the center of the plasma, keeping the lower electrode grounded, for various CHF3/Ar and Ar/CHF3/O2 mixtures operating at 10-50 mTorr pressures and two input RF power levels, 200 and 300 W. EEDF data show a strong Druyvesteyn distribution with relatively lower number of low energy electrons as compared to a Maxwell distribution and a large electron population with energies higher than the plasma potential. The results further show that at low CHF3 concentrations (less than 50%) the electron number density remains nearly constant with increase in pressure. At higher CHF3 concentrations, however, it decreases with increase in pressure. Plasma potential and electron temperature increase with decrease in pressure and with increase in CHF3 concentration. An analysis of the above observations and mechanisms will be presented.

Sharma, S. P.↗
NASA NTRS2001

Langmuir Probe and Mass Spectroscopic Measurements in Inductively Coupled CF4 Plasmas

Abstract Electron and ion energy distribution functions and other plasma parameters such as plasma potential (V(sub p)) , electron temperature (T(sub e)), and electron and ion number densities (n (sub e) and n(sub i)) in low pressure CF4 plasmas have been measured. The experiments were conducted in a GEC cell using an inductively coupled plasma (ICP) device powered by a 13.56 MHz radio-frequency (rf) power source. The measurements were made at 300 W of input rf power at 10, 30 and 50 mTorr gas pressures. Langmuir probe measurements suggest that n(sub e), n(sub i) and V(sub p) remain constant over 60% of the central electrode area, beyond which they decrease. Within the limits of experimental error (+/- 0.25 eV), T(sub e) remains nearly constant over the electrode area. T(sub e) and V(sub p) increase with a decrease in pressure. n(sub e) and n(sub i) are not affected as significantly as T(sub e) or V(sub p) by variation in the gas pressure. The electron energy distribution function (EEDF) measurements indicate a highly non-Maxwellian plasma. CF3+ is the most dominant ion product of the plasma, followed by CF2+ and CF+. The concentrations of CF2+ and CF+ are much larger than that is possible from direct electron impact ionization of the parent gas. The cross-section data suggest that the direct electron impact ionization of fragment neutrals and negative ion production by electron attachment may be responsible for increase of the minor ions.

Rao, M. V. V. S.↗
NASA NTRS2001

Detection of Chamber Conditioning Through Optical Emission and Impedance Measurements

During oxide etch processes, buildup of fluorocarbon residues on reactor sidewalls can cause run-to-run drift and will necessitate some time for conditioning and seasoning of the reactor. Though diagnostics can be applied to study and understand these phenomena, many of them are not practical for use in an industrial reactor. For instance, measurements of ion fluxes and energy by mass spectrometry show that the buildup of insulating fluorocarbon films on the reactor surface will cause a shift in both ion energy and current in an argon plasma. However, such a device cannot be easily integrated into a processing system. The shift in ion energy and flux will be accompanied by an increase in the capacitance of the plasma sheath. The shift in sheath capacitance can be easily measured by a common commercially available impedance probe placed on the inductive coil. A buildup of film on the chamber wall is expected to affect the production of fluorocarbon radicals, and thus the presence of such species in the optical emission spectrum of the plasma can be monitored as well. These two techniques are employed on a GEC (Gaseous Electronics Conference) Reference Cell to assess the validity of optical emission and impedance monitoring as a metric of chamber conditioning. These techniques are applied to experimental runs with CHF3 and CHF3/O2/Ar plasmas, with intermediate monitoring of pure argon plasmas as a reference case for chamber conditions.

Cruden, Brett A.↗
NASA NTRS1999

Measurements of Ion Energy and Ion Flux Distributions in Inductively Coupled Plasmas in CF4/O2/Ar Mixtures

We report mass spectrometric studies of energy distributions and absolute concentrations of ions generated in CF4/O2/Ar inductively coupled rf plasmas. The ions were collected through a 100 mm orifice in the grounded and water cooled lower electrode in a GEC cell configuration. The measurements were made at gas pressures in the 10-50 mTorr range and rf coil power in the 100-300 W range. The observed ions are CF3(+), CF2(+), CF(+), C(+), F(+), COF(+), CO(+), O2(+), and O(+). The relative abundance of these ions varies with pressure and rf power. The energy distribution and absolute concentrations are correlated with electron number density and floating plasma potential measured by a compensated Langmuir probe.

Rao, M. V. V. S.↗
NASA NTRS1999

Feature Profile Evolution of SiO2 Trenches In Fluorocarbon Plasmas

Etching of silicon microstructures for semiconductor manufacturing in chlorine plasmas has been well characterized. The etching proceeds in a two-part process, where the chlorine neutrals passivate the Si surface and then the ions etch away SiClx. However, etching in more complicated gas mixtures and materials, such as etching of SiO2 in Ar/C4F8, requires knowledge of the ion and neutral distribution functions as a function of angle and velocity, in addition to modeling the gas surface reactions. In order to address these needs, we have developed and integrated a suite of models to simulate the etching process from the plasma reactor level to the feature profile evolution level. This arrangement allows for a better understanding, control, and prediction of the influence of equipment level process parameters on feature profile evolution. We are currently using the HPEM (Hybrid Plasma Equipment Model) and PCMCM (Plasma Chemistry Monte Carlo Model) to generate plasma properties and ion and neutral distribution functions for argon/fluorocarbon discharges in a GEC Reference Cell. These quantities are then input to the feature scale model, Simulation of Profile Evolution by Level Sets (SPELS). A surface chemistry model is used to determine the interaction of the incoming species with the substrate material and simulate the evolution of the trench profile. The impact of change of gas pressure and inductive power on the relative flux of CFx and F to the wafer, the etch and polymerization rates, and feature profiles will be examined. Comparisons to experimental profiles will also be presented.

Hwang, Helen↗
NASA NTRS2001

Langmuir Probe Measurements of Inductively Coupled Plasma in CF4/AR/O2 Mixtures

Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i)), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad lip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

Rao, M. V. V. S.↗
NASA NTRS2001

Langmuir Probe Measurements of Inductively Coupled Plasmas in CF4/Ar/O2 Mixtures

Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF (radio frequency) power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad dip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

Rao, M. V. V. S.↗
NASA NTRS1997

A DSMC Study of Low Pressure Argon Discharge

Work toward a self-consistent plasma simulation using the DSMC (Direct Simulation Monte Carlo) method for examination of the flowfields of low-pressure high density plasma reactors is presented. Presently, DSMC simulations for these applications involve either treating the electrons as a fluid or imposing experimentally determined values for the electron number density profile. In either approach, the electrons themselves are not physically simulated. Self-consistent plasma DSMC simulations have been conducted for aerospace applications but at a severe computational cost due in part to the scalar architectures on which the codes were employed. The present work attempts to conduct such simulations at a more reasonable cost using a plasma version of the object-oriented parallel Cornell DSMC code, MONACO, on an IBM SP-2. Due to availability of experimental data, the GEC reference cell is chosen to conduct preliminary investigations. An argon discharge is chosen to conduct preliminary investigations. An argon discharge is examined thus affording a simple chemistry set with eight gas-phase reactions and five species: Ar, Ar(+), Ar(*), Ar(sub 2), and e where Ar(*) is a metastable.

Hash, David B.↗