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At least 343 records · Page 19

Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering

Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.

36 MATERIALS SCIENCE↗

ALESQP: An Augmented Lagrangian Equality-Constrained SQP Method for Optimization with General Constraints

Here we present a new algorithm for infinite-dimensional optimization with general constraints, called ALESQP. In short, ALESQP is an augmented Lagrangian method that penalizes inequality constraints and solves equality-constrained nonlinear optimization subproblems at every iteration. The subproblems are solved using a matrix-free trust-region sequential quadratic programming (SQP) method that takes advantage of iterative, i.e., inexact linear solvers, and is suitable for large-scale applications. A key feature of ALESQP is a constraint decomposition strategy that allows it to exploit problem-specific variable scalings and inner products. We analyze convergence of ALESQP under different assumptions. We show that strong accumulation points are stationary. Consequently, in finite dimensions ALESQP converges to a stationary point. In infinite dimensions we establish that weak accumulation points are feasible in many practical situations. Under additional assumptions we show that weak accumulation points are stationary. We present several infinite-dimensional examples where ALESQP shows remarkable discretization-independent performance in all of its iterative components, requiring a modest number of iterations to meet constraint tolerances at the level of machine precision. Also, we demonstrate a fully matrix-free solution of an infinite-dimensional problem with nonlinear inequality constraints.

97 MATHEMATICS AND COMPUTING↗

An Online Dynamic Amplitude-Correcting Gradient Estimation Technique to Align X-ray Focusing Optics

High-brightness X-ray pulses, as generated at synchrotrons and X-ray free electron lasers (XFELs), are used in a variety of scientific experiments. At these facilities, measurements often require optical equipment, e.g Compound Refractive Lenses (CRLs) to be precisely aligned and focused. The lateral alignment of CRLs to a beamline requires precise positioning along four axes: two translational, and the two rotational. At a synchrotron, alignment is often accomplished manually. However, XFEL beamlines present a beam brightness that fluctuates stochastically, making manual alignment a time-consuming endeavor. Automation using simplex or classic stochastic descent often fails, given the errant gradient estimates. Herein we present a dynamic-amplitude correction to the usual gradient based on the combination of a generalized finite difference stencil and a time-dependent sampling pattern. Intensity is recorded periodically, then used to normalize numerical derivatives against fluctuations. Error expectation is analyzed, and efficacy is demonstrated on classic benchmarks. We provide a proof of concept by laterally aligning optics on a simulated XFEL beamline using data recorded at both synchrotron and XFEL facilities.

97 MATHEMATICS AND COMPUTING↗

An Exact and Near-Exact Distribution Approach to the Behrens–Fisher Problem

The Behrens–Fisher problem occurs when testing the equality of means of two normal distributions without the assumption that the two variances are equal. This paper presents approaches based on the exact and near-exact distributions for the test statistic of the Behrens–Fisher problem, depending on different combinations of even or odd sample sizes. We present the exact distribution when both sample sizes are odd and the near-exact distribution when one or both sample sizes are even. The near-exact distributions are based on a finite mixture of generalized integer gamma (GIG) distributions, used as an approximation to the exact distribution, which consists of an infinite series. The proposed tests, based on the exact and the near-exact distributions, are compared with Welch’s t-test through Monte Carlo simulations, in particular for small and unbalanced sample sizes. The results show that the proposed approaches are competent solutions to the Behrens–Fisher problem, exhibiting precise sizes and better powers than Welch’s approach for those cases. Numerical studies show that the Welch’s t-test tends to be a bit more conservative than the test statistics based on the exact or near-exact distribution, in particular when sample sizes are small and unbalanced, situations in which the proposed exact or near-exact distributions obtain higher powers than Welch’s t-test.

Hong, Serim↗

Packaging, deployment, and panel design concepts for a truss-stiffened 7-panel precision deployable reflector with feed boom

A concept is presented for achieving a remotely deployable truss-stiffened reflector consisting of seven integrated sandwich panels that form the reflective surface, and an integrated feed boom. The concept has potential for meeting aperture size and surface precision requirements for some high-frequency microwave remote sensing applications. The packaged reflector/feed boom configuration is a self-contained unit that can be conveniently attached to a spacecraft bus. The package has a cylindrical envelope compatible with typical launch vehicle shrouds. Dynamic behavior of a deployed configuration having a 216-inch focal length and consisting of 80-inch-diameter, two-inch-thick panels is examined through finite-element analysis. Results show that the feed boom and spacecraft bus can have a large impact on the fundamental frequency of the deployed configuration. Two candidate rib-stiffened sandwich panel configurations for this application are described, and analytical results for panel mass and stiffness are presented. Results show that the addition of only a few rib stiffeners, if sufficiently deep, can efficiently improve sandwich panel stiffness.

Heard, Walter L., Jr.↗

Nondestructive Evaluation of Stress Corrosion Cracking in a Welded Steel Plate Using Guided Ultrasonic Waves

Stress corrosion cracking (SCC) had occurred in early-generation high-level nuclear waste tanks constructed by welding carbon steel. This paper describes an ultrasonic inspection system and its fundamental ability to detect and quantify the length of SCC on thick welded steel plates. The finite element method (FEM) was applied to simulate the welding process to estimate the welding residual stress field. Growth of stress corrosion cracks is driven by crack stress intensities exceeding the subcritical cracking threshold intensity. The subject plate was experimentally inspected with ultrasonic nondestructive evaluation (NDE) techniques to characterize the extent of SCC. The NDE system uses a piezoelectric transducer to generate guided waves in the thick steel plate, and a scanning laser Doppler vibrometer (SLDV) to measure multidimensional time–space wavefield data over a user-defined scanning area in the plate surface. The measured wavefield data can show wave interactions in a localized area in the plate due to the presence of the discontinuities of the SCC. To generate an inspection image that can precisely show the crack’s location and/or the dimension, the wavefield data are further processed to generate inspection image that maps the entire sample plate so the crack can be clearly identified in the plate while its length can be readily estimated. In conclusion, the ultrasonic test results for crack length agree well with the visually estimated length and are close to that predicted by the FEM for cracks in the weld residual stress field.

36 MATERIALS SCIENCE↗

Low-dissipation centred schemes for hyperbolic equations in conservative and non-conservative form

We propose a one-parameter family of low-dissipation centred numerical schemes for solving hyperbolic equations in conservative or non-conservative form, using finite volume or discontinuous Galerkin finite element methods. The new schemes spring out from the multi-dimensional FORCE method and are determined by a single parameter α ≥ 1. Given an increasing sequence of real numbers 1 ≤ α 1 < α 2 < . . . < α K , there corresponds a sequence of numerical schemes with stability restriction associated to a decreasing sequence of Courant numbers 1 > c 1 > c 2 > . . . > c K > 0 and a decreasing sequence of corresponding numerical viscosity functions d 1 > d 2 > . . . > d K . For a given Courant number c k ≤ 1 there is a real number α k > 0 and a corresponding stable scheme with minimal numerical viscosity d k . The proposed schemes suit very well the family of high-order discontinuous Galerkin finite element methods and the recently proposed class of ADER-TR schemes, whose orders of accuracy define decreasing sequences of Courant numbers, as the order of accuracy increases. The centred methods of this paper are stable in 2D and 3D in the frame of simultaneous updating formulae, unlike other centred methods, such as 1D FORCE, which are not. Furthermore, the schemes are highly accurate for slowly-moving waves, which is precisely the kind of waves that traditional centred methods smear disastrously. Additional features of the proposed schemes include ease of implementation and applicability to any hyperbolic system either in conservative or non-conservative form. Here, the proposed schemes are analysed and computationally assessed through a suite of test problems for a linear model system, for the Euler equations in one and two space dimensions, and for the Baer-Nunziato equations for compressible two-phase flow.

97 MATHEMATICS AND COMPUTING↗

Computing Edge States without Hard Truncation

We present a numerical method which accurately computes the discrete spectrum and associated bound states of semi-infinite Hamiltonians which model electronic “edge” states localized at boundaries of one- and two-dimensional crystalline materials. The problem is nontrivial since arbitrarily large finite “hard” (Dirichlet) truncations of the Hamiltonian in the infinite bulk direction tend to produce spurious bound states partially supported at the truncation. Our method, which overcomes this difficulty, is to compute the Green's function of the semi-infinite Hamiltonian by imposing an appropriate boundary condition in the bulk direction; then, the spectral data is recovered via Riesz projection. We demonstrate our method's effectiveness by studies of edge states at a graphene zig-zag edge in the presence of defects modeled both by a discrete tight-binding model and a continuum PDE model under finite difference discretization. Our method may also be used to study states localized at domain wall-type edges in one- and two-dimensional materials where the edge Hamiltonian is infinite in both directions; we demonstrate this for the case of a tight-binding model of distinct honeycomb structures joined along a zig-zag edge. Here, we expect our method to be useful for designing novel devices based on precise wave-guiding by edge states.

97 MATHEMATICS AND COMPUTING↗

Comprehensive characterization of the structure of Zr-based metallic glasses

Structure of metallic glasses fascinates as the generic amorphous structural template for ubiquitous systems. Its specification necessitates determination of the complete hierarchical structure, starting from short-range-order (SRO) → medium-range-order (MRO) → bulk structure and free volume (FV) distribution. This link has largely remained elusive since previous investigations adopted one-technique-at-a-time approach, focusing on limited aspects of any one domain. Reconstruction of structure from experimental data inversion is non-unique for many of these techniques. As a result, complete and precise structural understanding of glass has not emerged yet. In this work, we demonstrate the first experimental pathway for reconstruction of the integrated structure, for and glasses. Our strategy engages diverse (×7) multi-scale techniques [XAFS, 3D-APT, ABED/NBED, FEM, XRD, PAS, FHREM] on the same glass. This strategy complemented mutual limitations of techniques and corroborated common parameters to generate complete, self-consistent and precise parameters. Further, MRO domain size and inter-void separation were correlated to identify the presence of FV at MRO boundaries. This enabled the first experimental reconstruction of hierarchical subset: SRO → MRO → FV → bulk structure. The first ever image of intermediate region between MRO domains emerged from this link. We clarify that determination of all subsets is not our objective; the essence and novelty of this work lies in directing the pathway towards finite solution, in the most logical and unambiguous way.

36 MATERIALS SCIENCE↗

Covariant Density Functional Theory in Nuclear Physics and Astrophysics

How does subatomic matter organize itself? Neutron stars are cosmic laboratories uniquely poised to answer this fundamental question that lies at the heart of nuclear science. Newly commissioned rare isotope facilities, telescopes operating across the entire electromagnetic spectrum, and ever more sensitive gravitational wave detectors will probe the properties of neutron-rich matter with unprecedented precision over an enormous range of densities. A coordinated effort between observation, experiment, and theoretical research is of paramount importance for realizing the full potential of these investments. Theoretical nuclear physics provides valuable insights into the properties of neutron-rich matter in regimes that are not presently accessible to experiment or observation. In particular, nuclear density functional theory is likely the only tractable framework that can bridge the entire nuclear landscape by connecting finite nuclei to neutron stars. This compelling connection is the main scope of the present review.

79 ASTRONOMY AND ASTROPHYSICS↗

Accuracy and convergence of a finite element algorithm for laminar boundary layer flow

The Galerkin-weighted residuals formulation is employed to derive an implicit finite element solution algorithm for a generally non-linear initial-boundary value problem. Solution accuracy and convergence with discretization refinement are quantized in several error norms, for the non-linear parabolic partial differential equation system governing laminar boundary layer flow, using linear, quadratic and cubic functions. Richardson extrapolation is used to isolate integration truncation error in all norms, and Newton iteration is employed for all equation solutions performed in double-precision. The mathematical theory supporting accuracy and convergence concepts for linear elliptic equations appears extensible to the non-linear equations characteristic of laminar boundary layer flow.

Soliman, M. O.↗

Scattering and Diffraction of Electromagnetic Radiation: An Effective Probe to Material Structure

Scattered electromagnetic waves from material bodies of different forms contain, in an intricate way, precise information on the intrinsic, geometrical and physical properties of the objects. Scattering theories, ever deepening, aim to provide dependable interpretation and prediction to the complicated interaction of electromagnetic radiation with matter. There are well-established multiple-scattering formulations based on classical electromagnetic theories. An example is the Generalized Multi-particle Mie-solution (GMM), which has recently been extended to a special version ̶ the GMM-PA approach, applicable to finite periodic arrays consisting of a huge number (e.g., >>106) of identical scattering centers [1]. The framework of the GMM-PA is nearly complete. When the size of the constituent unit scatterers becomes considerably small in comparison with incident wavelength, an appropriate array of such small element volumes may well be a satisfactory representation of a material entity having an arbitrary structure. X-ray diffraction is a powerful characterization tool used in a variety of scientific and technical fields, including material science. A diffraction pattern is nothing more than the spatial distribution of scattered intensity, determined by the distribution of scattering matter by way of its Fourier transform [1]. Since all linear dimensions entered into Maxwell's equations are normalized by wavelength, an analogy exists between optical and X-ray diffraction patterns. A large set of optical diffraction patterns experimentally obtained can be found in the literature [e.g., 2,3]. Theoretical results from the GMM-PA have been scrutinized using a large collection of publically accessible, experimentally obtained Fraunhofer diffraction patterns. As far as characteristic structures of the patterns are concerned, theoretical and experimental results are in uniform agreement; no exception has been found so far. Closely connected with the spatial distribution of scattered intensities are cross sections, such as for extinction, scattering, absorption, and radiation pressure, as a critical type of key quantity addressed in most theoretical and experimental studies of radiative scattering. Cross sections predicted from different scattering theories are supposed to be in general agreement. For objects of irregular shape, the GMM-PA solutions can be compared with the highly flexible Discrete Dipole Approximation (DDA) [4,5] when dividing a target to no more than ~106 unit cells. Also, there are different ways to calculate the cross sections in the GMM-PA, providing an additional means to examine the accuracy of the numerical solutions and to unveil potential issues concerning the theoretical formulations and numerical aspects. To solve multiple scattering by an assembly of material volumes through classical theories such as the GMM-PA, the radiative properties of the component scatterers, the complex refractive index in particular, must be provided as input parameters. When using a PA to characterize a material body, this involves the use of an adequate theoretical tool, an effective medium theory, to connect Maxwell's phenomenogical theory with the atomistic theory of matter. In the atomic theory, one regards matter as composed of interacting particles (atoms and molecules) embedded in the vacuum [6]. However, the radiative properties of atomic-scaled particles are known to be substantially different from bulk materials. Intensive research efforts in the fields of cluster science and nanoscience attempt to bridge the gap between bulk and atom and to understand the transition from classical to quantum physics. The GMM-PA calculations, which place virtually no restriction on the component-particle size, might help to gain certain insight into the transition.

Xu, Yu-Lin↗

Back-to-back inclusive dijets in DIS at small x : Sudakov suppression and gluon saturation at NLO

Back-to-back dijet cross-sections in deeply inelastic scattering (DIS) at small xBj are suppressed by many-body multiple scattering and screening effects arising from gluon saturation at high parton densities. They are similarly sensitive in these kinematics to large Sudakov logarithms from soft gluon radiation. Uncovering novel physics in this DIS channel therefore requires understanding the interplay of the two phenomena. In this work, we compute the small $x_\text{Bj}$ inclusive dijet DIS cross-section in back-to-back kinematics at next-to-leading order (NLO) in the Color Glass Condensate effective field theory (CGC EFT). Our result includes, for the first time, all real and virtual NLO contributions to the impact factor. These include all Sudakov double and single logarithm contributions, as well as all other finite $\mathcal{O}(α_s)$ terms that contribute at this order. We demonstrate explicitly that resummations of small x and Sudakov logarithms can be performed simultaneously in the CGC EFT. This requires that the JIMWLK kernel for small x evolution of the Weizsäcker-Williams (WW) gluon distribution satisfies a kinematic constraint imposed by lifetime ordering of successive gluon emissions; the corresponding modifications to the kernel, corresponding to resummations of large double transverse logarithms, are precisely of the type required to stabilize JIMWLK evolution beyond leading logarithmicaccuracy. We compute the azimuthal harmonics of the NLO back-to-back distributions and show their sensitivity to both the unpolarized and linearly polarized WW gluon distributions. Finally, we discuss how TMD factorization is broken by an emergent saturation scale at small $x$.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Spatial modeling algorithms for reactions and transport in biological cells

Biological cells rely on precise spatiotemporal coordination of biochemical reactions to control their functions. Such cell signaling networks have been a common focus for mathematical models, but they remain challenging to simulate, particularly in realistic cell geometries. Here we present Spatial Modeling Algorithms for Reactions and Transport (SMART), a software package that takes in high-level user specifications about cell signaling networks and then assembles and solves the associated mathematical systems. SMART uses state-of-the-art finite element analysis, via the FEniCS Project software, to efficiently and accurately resolve cell signaling events over discretized cellular and subcellular geometries. We demonstrate its application to several different biological systems, including yes-associated protein (YAP)/PDZ-binding motif (TAZ) mechanotransduction, calcium signaling in neurons and cardiomyocytes, and ATP generation in mitochondria. Throughout, we utilize experimentally derived realistic cellular geometries represented by well-conditioned tetrahedral meshes. These scenarios demonstrate the applicability, flexibility, accuracy and efficiency of SMART across a range of temporal and spatial scales.

59 BASIC BIOLOGICAL SCIENCES↗

Using adaptive grid in modeling rocket nozzle flow

The mechanical behavior of a rocket motor internal flow field results in a system of nonlinear partial differential equations which cannot be solved analytically. However, this system of equations called the Navier-Stokes equations can be solved numerically. The accuracy and the convergence of the solution of the system of equations will depend largely on how precisely the sharp gradients in the domain of interest can be resolved. With the advances in computer technology, more sophisticated algorithms are available to improve the accuracy and convergence of the solutions. An adaptive grid generation is one of the schemes which can be incorporated into the algorithm to enhance the capability of numerical modeling. It is equivalent to putting intelligence into the algorithm to optimize the use of computer memory. With this scheme, the finite difference domain of the flow field called the grid does neither have to be very fine nor strategically placed at the location of sharp gradients. The grid is self adapting as the solution evolves. This scheme significantly improves the methodology of solving flow problems in rocket nozzles by taking the refinement part of grid generation out of the hands of computational fluid dynamics (CFD) specialists and place it into the computer algorithm itself.

Chow, Alan S.↗

Probabilistic Prediction of Lifetimes of Ceramic Parts

ANSYS/CARES/PDS is a software system that combines the ANSYS Probabilistic Design System (PDS) software with a modified version of the Ceramics Analysis and Reliability Evaluation of Structures Life (CARES/Life) Version 6.0 software. [A prior version of CARES/Life was reported in Program for Evaluation of Reliability of Ceramic Parts (LEW-16018), NASA Tech Briefs, Vol. 20, No. 3 (March 1996), page 28.] CARES/Life models effects of stochastic strength, slow crack growth, and stress distribution on the overall reliability of a ceramic component. The essence of the enhancement in CARES/Life 6.0 is the capability to predict the probability of failure using results from transient finite-element analysis. ANSYS PDS models the effects of uncertainty in material properties, dimensions, and loading on the stress distribution and deformation. ANSYS/CARES/PDS accounts for the effects of probabilistic strength, probabilistic loads, probabilistic material properties, and probabilistic tolerances on the lifetime and reliability of the component. Even failure probability becomes a stochastic quantity that can be tracked as a response variable. ANSYS/CARES/PDS enables tracking of all stochastic quantities in the design space, thereby enabling more precise probabilistic prediction of lifetimes of ceramic components.

Nemeth, Noel N.↗

Pronghorn Porous Media Model Validation with Pressure Drop Measurements

The verification and validation (V&V) of Pronghorn is imperative to assert its accuracy when predicting the fluid velocity, temperature, and pressure in high temperature gas-cooled reactors. Pronghorn is a coarse-mesh, intermediate-fidelity, and multidimensional thermal-hydraulics (TH) code developed by the Idaho National Laboratory (INL). New pebble bed experiments are used to observe the details of the fluid motion and pressure drop in the porous bed under the reactor normal operation. This paper focuses on the validation of the Pronghorn compressible and incompressible Navier-Stokes equations using the pressure drop measurements performed at the engineering-scale pebble bed facility at the Texas A&M university (TAMU). Various pressure drop correlations and porosity functions are implemented in both Pronghorn and STAR-CCM+ to compare the pressure drop due to the combined viscous and inertial resistances in the porous bed. The correlations accounting for the near-wall effect are also utilized to observe if the pressure drop estimates can be improved. Pronghorn porous media models predict the pressure drop well relative to the STAR-CCM+ simulation results and 1D correlations, and both the finite element method (FEM) and finite volume method (FVM) perform accurately. Pronghorn models are also validated with the experimental measurements given the different Reynolds number ranges and specific aspect ratios. The likelihood of the statistical significance between the pressure drop measurements and specific correlations or simulations is low provided that the overlap of their confidence intervals is more than the half of a single arm. Several validation metrics are reasonable in regard to the similar studies from other literature. The precise average pebble bed porosity estimation has much impact on the pressure drop, and the Foumeny and Montillet (dense packing) models carry out the accurate pressure drop prediction by considering the near-wall effect.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

Strain energy release rates of composite interlaminar end-notch and mixed-mode fracture: A sublaminate/ply level analysis and a computer code

A computer code is presented for the sublaminate/ply level analysis of composite structures. This code is useful for obtaining stresses in regions affected by delaminations, transverse cracks, and discontinuities related to inherent fabrication anomalies, geometric configurations, and loading conditions. Particular attention is focussed on those layers or groups of layers (sublaminates) which are immediately affected by the inherent flaws. These layers are analyzed as homogeneous bodies in equilibrium and in isolation from the rest of the laminate. The theoretical model used to analyze the individual layers allows the relevant stresses and displacements near discontinuities to be represented in the form of pure exponential-decay-type functions which are selected to eliminate the exponential-precision-related difficulties in sublaminate/ply level analysis. Thus, sublaminate analysis can be conducted without any restriction on the maximum number of layers, delaminations, transverse cracks, or other types of discontinuities. In conjunction with the strain energy release rate (SERR) concept and composite micromechanics, this computational procedure is used to model select cases of end-notch and mixed-mode fracture specimens. The computed stresses are in good agreement with those from a three-dimensional finite element analysis. Also, SERRs compare well with limited available experimental data.

Valisetty, R. R.↗