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DOE OSTI2026

Theoretical background for a fast flow liquid metal divertor experiment

Tokamak Energy has developed a liquid metal experiment featuring a lithium loop that circulates lithium through the HIDRA stellarator at the University of Illinois at Urbana-Champaign. The loop includes a replaceable divertor module, designed to demonstrate fast, steady, open-surface liquid metal flow. The first-generation divertor module was deliberately kept simple—an open-surface chute—to enable modelling validation and establish a benchmark for future design iterations. This paper presents the theoretical foundations of the experimental design. Specifically, we identify module overflooding as the primary challenge and determine the limits of fluid velocity and magnetic field strength necessary to prevent it. The steady-state flow patterns are expected to exhibit relatively slow surface velocities, which do not fully align with the fast-flow concept. Nevertheless, the experiment is designed to achieve controllable, continuous open-surface flow within an operational fusion device, representing a significant step toward the development of liquid metal divertor technology.

Experiment↗

DOE OSTI2020

CO 2 induced changes in Mount Simon sandstone: Understanding links to post CO 2 injection monitoring, seismicity, and reservoir integrity

The purpose of this study is to quantify geochemical reactions of CO 2 and brine with subsurface samples taken from the Mt. Simon sandstone and identify any potential alterations of the geomechanical rock properties that could lead to changes observable in seismic monitoring or result in changes of micro seismicity such as those observed at the Illinois Basin-Decatur Project (IBDP) site. Two Mt. Simon sandstone samples from 6919.3 feet (2109.0 m) and 6926.1 feet (2111.1 m) depth were exposed to supercritical CO 2 (scCO 2 ) dissolved in brine at in-situ reservoir conditions for one month. Geochemical, spectral, scanning electron microscopy, and petrophysical methods were used to analyze the samples before and after the one-month exposure. Significant changes were observed. Multiple geomechanical properties were chosen to form the framework against which to interrogate the petrophysical data: Young’s modulus (E), Poisson’s ratio (ν), lambda·rho (λρ), and mu·rho (μρ). In this study we conclude that framework composition, porosity, heterogeneities, effective pressure, and reactive geochemistry are first order controls on trends in the E-μ and λρ-μρ cross plot spaces. Changes in porosity, permeability, dynamic moduli, and brittleness with exposure to these fluids were observed. No change in ultrasonic P-wave attenuation (Q P ) was observed. Geochemical alteration causes a distinct shift in λρ-μρ in both samples as well as changes in E, ν, and P and S wave seismic velocity values. Furthermore, these observations could provide insight into subsurface monitoring using seismic methods including amplitude variation with offset (AVO) classification.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2020

A Repositioning Method for Shared Autonomous Vehicles Operation

Shared fully-automated, or autonomous, mobility (SAVs) is anticipated to be the likely choice for future urban travel. SAVs boast many operational benefits but will add congestion in the form of unoccupied miles. The fleet's success further depends on service measures like the wait times for pickup trips. Agent-based simulation tools have closely looked at SAV operations but typically lack the integration between the supply and demand sides when simulating a population at scale. This paper focuses on the impact of SAV relocation on traveler wait times using a novel algorithm for repositioning. POLARIS, an agent-based tool, is used for a case study of Bloomington, Illinois to quantify the benefits of allowing SAV repositioning. On average, the wait times were lower with repositioning for all adequate fleet sizes. SAVs were available more uniformly across the region's zones, and proportional to trip-making at different times of day. In addition, with repositioning enable a higher share of demands were served. Finally, the increase in empty fleet miles from SAV repositioning may be justified with more trips being served, and an overall improvement in SAV wait times. (C) 2020 The Authors. Published by Elsevier B.V.

Agent-Based Simulation↗

DOE OSTI2022

Cross-scale sensing of field-level crop residue cover: Integrating field photos, airborne hyperspectral imaging, and satellite data

Conservation tillage practices can bring benefits to agricultural sustainability. Accurate spatial and temporal resolved information of field-scale crop residue cover, which reflects tillage intensity, is highly valuable for evaluating the outcomes of government conservation programs and voluntary ecosystem service markets, as well as facilitating agroecosystem modeling to quantify cropland biogeochemical processes. Remote sensing has the potential to cost-effectively detect crop residue cover, however, existing regional-scale studies were limited by insufficient ground truth data, scale mismatch between coarse satellite pixels and ground data, and the lack of key spectral data for detecting crop residues. Therefore, this study developed an innovative cross-sensing framework to integrate proximal sensing, airborne hyperspectral imaging, and satellite Earth Observation through deep learning to quantify field-level crop residue cover fractions at the regional scale. Specifically, we have collected intensive ground orthographic photos and conducted airborne hyperspectral surveys at corn and soybean fields of Champaign and nearby counties in Illinois, the heartland of the U.S. Corn Belt. Through semi-automatic labeling aided by ResNet-50 and superpixel image segmentation, we obtained 6719 records of ground residue fractions. With these ground data, we developed the 1-dimensional convolution neural network (CNN) model using airborne hyperspectral reflectance, which has 0.5m spatial resolution and 3–5 nm spectral resolution from 400 to 2400 nm, to predict residue fractions. By applying the CNN model to airborne pixels, we augmented “ground truth” data of crop residues and further combined them with Harmonized Landsat and Sentinel-2 (HLS) satellite data to quantify regional residue fractions at 30 m resolution. Results show that airborne hyperspectral imagery with CNN can accurately detect residue fractions (R 2 = 0.82, relative RMSE = 11.73%) to effectively generate quasi “ground truth” data to support satellite upscaling to all fields. With independent ground data for testing, we found that the ground-airborne-satellite integrative framework achieved better predictions in estimating crop residue cover (R 2 = 0.67, relative RMSE = 17.53%) than the conventional ground-satellite upscaling (R 2 = 0.22, relative RMSE = 32.09%). Here we also found that the shortwave infrared wavelengths, particularly 2100–2300 nm, are vital for predicting crop residue cover. Sentinel-2 and Landsat-8 data have a comparable capability to track residue fractions due to similar shortwave infrared wavelengths. This study highlights the high accuracy of hyperspectral imaging to detect agroecosystem tillage management practices and the advantages of cross-scale sensing to cost-effectively integrate multi-source data to quantify field-level agroecosystem variables across scales.

60 APPLIED LIFE SCIENCES↗

DOE OSTI2022

Airborne hyperspectral imaging of cover crops through radiative transfer process-guided machine learning

Cover cropping between cash crop growing seasons is a multifunctional conservation practice. Timely and accurate monitoring of cover crop traits, notably aboveground biomass and nutrient content, is beneficial to agricultural stakeholders to improve management and understand outcomes. Currently, there is a scarcity of spatially and temporally resolved information for assessing cover crop growth. Remote sensing has a high potential to fill this need, but conventional empirical regression operated with coarse-resolution multispectral data has large uncertainties. Therefore, this study utilized airborne hyperspectral imaging techniques and developed new process-guided machine learning approaches (PGML) for cover crop monitoring. Specifically, we deployed an airborne hyperspectral system covering visible to shortwave-infrared wavelengths (400–2400 nm) to acquire high spatial (0.5 m) and spectral (3–5 nm) resolution reflectance over 23 cover crop fields across Central Illinois in March and April of 2021. Airborne hyperspectral surface reflectance with high spectral and spatial resolution can be well matched with field data to quantify cover crop traits. Furthermore, the PGML models were pre-trained by synthetic data from soil-vegetation radiative transfer modeling (one million records), and then fine-tuned with field data of cover crop biomass and nutrient content. Results show that airborne hyperspectral data with PGML can achieve high accuracy to predict cover crop aboveground biomass (R 2 = 0.72, relative RMSE = 15.16%) and nitrogen content (R 2 = 0.69, relative RMSE = 16.59%) through leave-one-field-out cross-validation. Unlike the pure data-driven approach (e.g., partial least-squares regression), PGML incorporated radiative transfer knowledge and obtained higher predictive performance with fewer field data. Meanwhile, with field data for model fine-tuning, PGML predicted biomass more accurately than the inversion of radiative transfer models. Here we also found that the red edge has a high contribution in quantifying aboveground biomass and nitrogen content, followed by green and shortwave spectra. This study demonstrated the first attempt of utilizing hyperspectral remote sensing to accurately quantify cover crop traits. We highlight the strength of PGML in exploiting sensing data to quantify ecosystem variables to advance agroecosystem monitoring for sustainable agricultural management.

60 APPLIED LIFE SCIENCES↗

DOE OSTI2022

An agent-based modeling tool supporting bioenergy and bio-product community communication regarding cellulosic bioeconomy development

The emergence of the cellulosic bioeconomy requires not only adequate technological, economic, and policy advances, but also effective communication and coordination among the multiple stakeholders in the bioeconomy community. Aiming to facilitate stakeholder communication and collaboration for cellulosic bioeconomy growth, an agent-based model is developed as a community communication tool in this study. The tool simulates the behaviors and interactions of key stakeholders, as well as the responses and interactions between the stakeholders and biophysical, socioeconomic, and environmental conditions. The agent behavior rules are developed and validated based on behavior and economic theories and information attained from a stakeholder focus group study and a land use survey. A pilot study in a Central Illinois watershed shows stakeholder synergies, i.e., positive feedback loops across multiple stakeholders. The modeling tool's role in facilitating community communication is demonstrated via the focus group study. A comparison of policy scenarios suggests that the cellulosic bioeconomy development is fastest under a portfolio of policies combining the views of the multiple stakeholders. Critically, subsidy for small-scale bio-facilities is essential as it rapidly initializes an early market for cellulosic feedstocks and the adoption of Miscanthus. As a result, the communication tool is applied to bringing stakeholders and researchers together to develop shared visions, assess barriers, and explore solution portfolios to initialize and speed up the regional cellulosic bioeconomy.

09 BIOMASS FUELS↗

DOE OSTI2020

Hand me the franchise agreement: municipalities add another policy tool to their clean energy toolbox

A growing list of the more than 20,000 municipalities in the United States are considering pathways to achieve renewable energy goals. One emerging trend is for municipalities to incorporate energy objectives into their franchise agreements with an electric service provider. Franchise agreements are contracts between municipalities and utilities that grant the utility authority to serve customers in the municipality. In some cases, municipalities have negotiated renewable energy objectives into these agreements. It is still unclear how many municipalities have exercised this authority and to what effect. From a national dataset of 3500 franchise agreements, we selected five cities that adopted renewable energy or energy efficiency objectives into or alongside their franchise agreements for deeper analysis: Chicago, Illinois; Denver, Colorado; Sarasota, Florida; Minneapolis, Minnesota; and Salt Lake City, Utah. We generated seven key takeaways for other cities considering this pathway to achieve their energy objectives. In summary, municipalities can leverage franchise negotiations to pursue both modest and ambitious clean energy goals (i.e. 100% renewable electricity). This study provides municipalities with critical insight on how they can use this potentially formidable tool to achieve their own energy objectives.

14 SOLAR ENERGY↗

DOE OSTI2021

Tribute to Lawrence R. Pratt

Lawrence Pratt’s career following completion of his Ph.D. at the University of Illinois Urbana Champaign has taken him from Harvard University, to the University of California, Berkeley, and Los Alamos National Laboratory. Most recently, he joined the faculty of the Department of Chemical and Biomolecular Engineering at Tulane University in 2008. Over his career Lawrence has been a leader in theoretical physical chemistry, making influential contributions to a number of areas including the theory of the hydrophobic effect, the development of transition path sampling, contributions to orbital free density functional theory, and the theory of liquids and solutions.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2021

Innovative and Economically Beneficial Use of Corn and Corn Products in Electrochemical Energy Storage Applications

The United States is by far the largest corn producer worldwide, with corn yields steadily increasing for the past decades. In many midwestern U.S. states such as Iowa, Illinois, and Nebraska, corn farmers currently grow more corn than consumers can utilize as human food or animal feed. To sustain the economic viability of corn farmers, it is critical that new uses and markets for corn, corn byproducts from harvesting, corn industrial products, and corn byproducts from industrial processing should be discovered, giving the highest return to corn producers. With the increasing popularity of electric vehicles and grid-level energy storage systems for renewable energy, there has been an ever-growing interest in improving existing energy storage technologies as well as developing new ones. During this development, a great amount of effort has been focused on exploiting cost-effective solutions utilizing sustainable materials derived from renewable biomass. Here, innovative and economically beneficial uses of corn and corn products in various energy storage applications, such as lithium-ion batteries, solid-state batteries, and redox flow batteries, are looked at comprehensively, which may shed light on how to establish an environmentally sustainable, technically feasible, and economically beneficial solution to support the corn industry.

25 ENERGY STORAGE↗

DOE OSTI2022

Bioprocessing, Recovery, and Mass Balance of Vegetative Lipids from Metabolically Engineered “Oilcane” Demonstrates Its Potential as an Alternative Feedstock for Drop-In Fuel Production

Plant oils are increasingly in demand as renewable feedstocks for biodiesel and biochemicals. Currently, oilseeds are the primary source of plant oils. Although the vegetative tissues of plants express lipid metabolism pathways, they do not hyper- accumulate lipids. Elevated synthesis, storage, and accumulation of lipids in vegetative tissues have been achieved by metabolic engineering of sugarcane to produce “oilcane”. This study evaluates the potential of oilcane as a renewable feedstock for the co- production of lipids and fermentable sugars. Oilcane was grown under favorable climatic and field conditions in Florida (FLOC) as well as during an abbreviated growing season, outside its typical growing region, in Illinois (ILOC). The potential lipid yield of 0.35 tons/ha was projected from the hyperaccumulation of fatty acids in the stored vegetative biomass of FLOC, which is approaching the lipid yield of soybean (0.44 tons/ha). Processing of the vegetative tissues of oilcane recovered 0.20 tons/ha, which represents the recovery of 55% of the total lipids from FLOC. Chemical-free hydrothermal bioprocessing of ILOC and FLOC bagasse and leaves at 180 °C for 10 min prevented the degeneration of in situ plant lipids. Here, this allowed the recovery of lipids at the end of the bioprocess with a major fraction of lipids remaining in the biomass residues after pretreatment and saccharification. Improvements through refined biomass processing, crop management, and metabolic engineering are expected to boost lipid yields and make oilcane a prime feedstock for the production of biodiesel.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2025

Future Intensity‐Duration‐Frequency Curves of Extreme Precipitation in the Midwest United States From Convection‐Permitting Modeling

Abstract During the last four decades, global warming has statistically significant intensified extreme precipitation events in the Midwestern United States (defined here as the region covering Illinois, Indiana, Ohio, and Kentucky), leading to increased risks to human life, property, and infrastructure. To enable climate change adaptation and resilience across various economic and social sectors in this region, updated information about future climate changes, specifically at finer spatial scales, is essential. Leveraging a new 150‐year dynamical downscaling data set at convection‐permitting resolution, this study introduces a framework to construct the projected future intensity‐duration‐frequency (IDF) curves of heavy precipitation, which are prominent tools for infrastructure design and water resources management. This framework generates IDF curves at both sub‐daily and multi‐day duration utilizing hourly in situ observations as well as quantile‐based statistical techniques in bias‐correction and return levels selection. The assumption of non‐stationarity in the distribution parameter fitting process is also implemented in this workflow. Compared to historical IDF curves for 1980–2022, future projected IDF curves for 2058–2100 under Representative Concentration Pathway (RCP) 4.5 and RCP 8.5 scenarios indicate an average intensity increase of approximately 15% and 25%, respectively, across 74 stations, considering both annual and seasonal timescales. Future projections suggest that extreme precipitation events may become more severe across six investigated return periods, with longer return periods showing a greater increase. The frequency of future extreme precipitation events in the Midwest region is also projected to double. Furthermore, current results reveal spatial heterogeneity of future trends across stations owing to the high‐resolution input data set. Plain Language Summary This study investigates the evolving nature of extreme precipitation events in the Midwestern United States under a changing climate. By leveraging a high‐resolution dynamical downscaling data set, we construct projected intensity‐duration‐frequency (IDF) curves for future extreme rainfall events. These curves serve as vital tools for infrastructure planning and water resource management. Our analysis reveals a significant increase in both the intensity and frequency of extreme precipitation events in the region. Future projected IDF curves for the late century indicate an average intensity increase of approximately 15%–25% compared to historical values. Moreover, the frequency of such events is expected to double. Spatial heterogeneity in future trends is observed across different stations within the Midwest, highlighting the importance of high‐resolution modeling in capturing localized climate variability. These findings underscore the urgent need for climate adaptation strategies to mitigate the increasing risks associated with extreme precipitation events in the region. Key Points This study introduces a workflow to construct future intensity‐duration‐frequency (IDF) curves over the Midwest United States using a new convection‐permitting modeling data set The current IDF construction workflow reproduces well the historical observed IDF 30 curves in summer months with median relative errors of 2.4% among 74 stations and 6 investigated durations The projected IDF curves show diverse future trends of extreme precipitation across stations, with intensity increases of approximately 15% and 25% under RCP4.5 and RCP8.5 climate scenarios, respectively, and a doubling of frequency on average

Nguyen, Trung↗

DOE OSTI2022

Mitigation of SARS-CoV-2 transmission at a large public university

In Fall 2020, universities saw extensive transmission of SARS-CoV-2 among their populations, threatening health of the university and surrounding communities, and viability of in-person instruction. Here we report a case study at the University of Illinois at Urbana-Champaign, where a multimodal “SHIELD: Target, Test, and Tell” program, with other non-pharmaceutical interventions, was employed to keep classrooms and laboratories open. The program included epidemiological modeling and surveillance, fast/frequent testing using a novel low-cost and scalable saliva-based RT-qPCR assay for SARS-CoV-2 that bypasses RNA extraction, called covidSHIELD, and digital tools for communication and compliance. In Fall 2020, we performed >1,000,000 covidSHIELD tests, positivity rates remained low, we had zero COVID-19-related hospitalizations or deaths amongst our university community, and mortality in the surrounding Champaign County was reduced more than 4-fold relative to expected. This case study shows that fast/frequent testing and other interventions mitigated transmission of SARS-CoV-2 at a large public university.

60 APPLIED LIFE SCIENCES↗

DOE OSTI2026

Citywide indoor air sampling mirrors wastewater and clinical for environmental surveillance of respiratory viruses

Wastewater surveillance of respiratory pathogens can provide timely estimates of viral activity and disease trends in a population. Indoor air surveillance could be used similarly with some advantages but remains largely unvalidated at the community -scale. Here, an indoor air surveillance program was employed as part of public health environmental surveillance in Chicago, Illinois, USA. Ten air samplers were placed in healthcare and congregate living settings across the city. Weekly air samples were evaluated for influenza A, influenza B, respiratory syncytial virus, and SARS -CoV-2 over two respiratory virus seasons (2023 -2025). Citywide, aggregated air sample positivity and viral load were closely correlated with local clinical case and wastewater surveillance data across all respiratory viruses. Virus trends in air data often preceded clinical and wastewater, although this varied across pathogens and respiratory virus seasons. Further, whole -genome sequencing of SARS -CoV-2 showed close correlation of variant proportions across all datasets. At the building -scale, air samples obtained from a single sampling device provided efficient respiratory virus surveillance, with respiratory pathogen levels mirroring citywide clinical surveillance data. These data demonstrate that air surveillance can provide respiratory virus case and variant trend data at a building or community -scale, serving as an alternative or complementary tool for public health environmental surveillance.

Wilton, Rosemarie↗

DOE OSTI2023

Two decades of fumigation data from the Soybean Free Air Concentration Enrichment facility

Abstract The Soybean Free Air Concentration Enrichment (SoyFACE) facility is the longest running open-air carbon dioxide and ozone enrichment facility in the world. For over two decades, soybean, maize, and other crops have been exposed to the elevated carbon dioxide and ozone concentrations anticipated for late this century. The facility, located in East Central Illinois, USA, exposes crops to different atmospheric concentrations in replicated octagonal ~280 m 2 Free Air Concentration Enrichment (FACE) treatment plots. Each FACE plot is paired with an untreated control (ambient) plot. The experiment provides important ground truth data for predicting future crop productivity. Fumigation data from SoyFACE were collected every four seconds throughout each growing season for over two decades. Here, we organize, quality control, and collate 20 years of data to facilitate trend analysis and crop modeling efforts. This paper provides the rationale for and a description of the SoyFACE experiments, along with a summary of the fumigation data and collation process, weather and ambient data collection procedures, and explanations of air pollution metrics and calculations.

60 APPLIED LIFE SCIENCES↗

DOE OSTI2022

Cubic-meter scale laboratory fault re-activation experiments to improve the understanding of induced seismicity risks

Abstract To understand fluid induced seismicity, we have designed a large-scale laboratory experiment consisting of a one-cubic-meter sandstone with an artificial fault cut and fluid-injection boreholes. The sandstone block is assembled in a true triaxial loading frame and equipped with 38 piezoelectric sensors to locate and characterise acoustic emission events. The differential stress on the artificial fault is increased in stages to bring it towards a critically stressed state. After each stage of differential stress increase, fluids are injected at low pressures through boreholes to test the potential of fault re-activation. In addition, a high-pressure injection was conducted that created a hydraulic fracture from the injection borehole towards the artificial fault. The newly generated fluid pathway resulted in an activation of the complete block through a stick–slip movement. We compare acoustic emission measurements from the laboratory experiment with seismicity observations from the field-scale CO 2 injection at Decatur, Illinois, U.S., and conclude that the existence of fluid pathways plays a decisive role for the potential of induced seismicity.

47 OTHER INSTRUMENTATION↗

DOE OSTI2024

A graph embedding‐based approach for automatic cyber‐physical power system risk assessment to prevent and mitigate threats at scale

Abstract Power systems are facing an increasing number of cyber incidents, potentially leading to damaging consequences to both physical and cyber aspects. However, the development of analytical methods for the study of large‐scale power infrastructures as cyber‐physical systems is still in its early stages. Drawing inspiration from machine‐learning techniques, the authors introduce a method inspired by the principles of graph embedding that is tailored for quantitative risk assessment and the exploration of possible mitigation strategies of large‐scale cyber‐physical power systems. The primary advantage of the graph embedding approach lies in its ability to generate numerous random walks on a graph, simulating potential access paths. Meanwhile, it enables capturing high‐dimensional structures in low‐dimensional spaces, facilitating advanced machine‐learning applications, and ensuring scalability and adaptability for comprehensive network analysis. By employing this graph embedding‐based approach, the authors present a structured and methodical framework for risk assessment in cyber‐physical systems. The proposed graph embedding‐based risk analysis framework aims to provide a more insightful perspective on cyber‐physical risk assessment and situation awareness for power systems. To validate and demonstrate its applicability, the method has been tested on two cyber‐physical power system models: the Western System Coordinating Council (WSCC) 9‐Bus System and the Illinois 200‐Bus System , thereby showing its advantages in enhancing the accuracy of risk analysis and comprehensiveness of situational awareness.

Sun, Shining↗

DOE OSTI2021

Lithium, a path to make fusion energy affordable

In this tutorial article, we review the technological, physics, and economic basis for a magnetic fusion device utilizing a flowing liquid lithium divertor (molten metal velocity in the range of cm/s) and operating in a low-recycling plasma regime. When extrapolated to magnetic fusion reactor scale, the observed effects of a liquid lithium boundary on recycling reduction, confinement increase, and anomalous heat transport mitigation may offer a fundamentally distinct and promising alternative route to fusion energy production. In addition, this lithium-driven low recycling regime could accelerate fusion’s commercial viability since such a device would be smaller, dramatically decreasing plant and electricity costs if all technological complexities are solved. First, the theoretical basis of the energy confinement and fusion performance as well as the related possibilities of low recycling regimes driven by flowing lithium plasma-facing components are reviewed. Then the paper emphasizes the technological obstacles that need to be overcome for developing the necessary systems for such a flowing liquid lithium solution at reactor scale and details how many of these have been overcome at laboratory and/or proof-of-concept scale. Finally, the current and planned scientific and engineering endeavors being performed at the University of Illinois at Urbana-Champaign regarding this alternative reactor option are discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2022

Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source

Tin contamination of the collector mirror surface remains one of the crucial issues of EUV (Extreme Ultraviolet) sources, directly impacting the availability of the tool. Hydrogen plasma-based tin removal processes employ hydrogen radicals and ions to interact with tin deposits to form gaseous tin hydride (SnH 4 ), which can be removed through pumping. An annular surface wave plasma (SWP) source developed at the University of Illinois—Urbana Champaign is integrated into the cone and perimeter of the collection mirror for in situ tin removal. The SWP is characterized by high ion and radical densities, low electron temperature, and local generation where etching is needed. This method has the potential to significantly reduce downtime and increase mirror lifetime. Radical probe measurements show hydrogen radical densities in the order of 10 19 m -3 , while Langmuir probe measurements show electron temperatures of up to 6 eV and plasma densities on the order of 10 17–18 m -3 . The generated ions are essential to the tin cleaning and have sufficiently low energy to cause no damage to the collector capping layer. Tin etch rates of up to 270 nm/min were observed in a variety of experimental conditions, including various powers, pressures, flowrates, and temperatures. In conclusion, the high etch rates demonstrated in this study exceed the expected contamination rate of the EUV source.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗