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Standing on the Shoulders of Apollo: MEMS seismometers for the Lunar Geophysical Network
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Mem-Models and State Event Location Algorithm for a Prototypical Aerospace System
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ExEP: High contrast imaging with MEMS deformable mirrors on the Decadal Survey Testbed
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High-Temperature MEMS Based Seismometer
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Meteor Workshop 2024: MEM in the Cloud Overview
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High-Temperature MEMS Based Venus Seismometer
Seismology is the method of choice for studying a planet’s interior and assessing current tectonic activity. With a single strategically placed seismometer, or preferably a network of seismometers, a variety of key aspects of a planet can be evaluated. The level and nature of seismicity observed provides a gauge of current geologic, especially tectonic, activity. Where tectonic activity is and is not occurring illuminates what regions and geologic features on the planet are currently active, thus, constraining global geodynamics. Larger distal earthquakes can be used to determine major compositional and structural boundaries within a planet’s interior, providing major constraints on planet formation and interior evolution. Seismometers have been deployed successfully on the Moon and Mars. Only small subsets of the scientific knowledge that can be gained from seismology can be obtained from alternative scientific approaches, such as global gravity solutions or repeat-pass interferometry. By virtue of its similar size to Earth, Venus is likely to be highly seismically active (Fig. 1). Even at Earth-like levels of seismology, returning meaningful data would require observation over a period that is at least 2–3 orders of magnitude longer than the 1–2 h lifetime of previous Soviet landers. Clever insulation could extend the lifetime of standard electronics in a modern lander to perhaps 24 h. While active cooling of electronics for a Venusian lander is plausible, this approach would require considerable technological advancement and will likely come at a high monetary and mass cost. The high density of the Venusian atmosphere at the surface should mean that there is good coupling of seismic energy into the atmosphere, such that seismology using infrasound from a balloon platform is currently being explored, and observations of the upper levels of the atmosphere from orbit has also been proposed [3]. Besides losing all shear wave information with these two methods, calibrating and interpreting seismic information that has been distorted by, and convolved with, atmospheric phenomena will be challenging without existing seismology data collected through surface seismometers (optimally, simultaneous surface seismological observations would be made).
A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air
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Magnetoelastically actuated MEMS device and methods for its manufacture
A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.
Fabrication of multilayered carbon MEMS devices
The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).
The Computational Capacity of Mem-LRC Networks
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MEMS metal-quartz gyroscope
The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.