ExEP: High contrast imaging with MEMS deformable mirrors on the Decadal Survey Testbed
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Seo, B.↗
SEARCH · Engineering Papers
Results for “mems”
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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High-Temperature MEMS Based Seismometer
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Seismometer Venus High Temperature↗
Meteor Workshop 2024: MEM in the Cloud Overview
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Meteor↗
High-Temperature MEMS Based Venus Seismometer
Seismology is the method of choice for studying a planet’s interior and assessing current tectonic activity. With a single strategically placed seismometer, or preferably a network of seismometers, a variety of key aspects of a planet can be evaluated. The level and nature of seismicity observed provides a gauge of current geologic, especially tectonic, activity. Where tectonic activity is and is not occurring illuminates what regions and geologic features on the planet are currently active, thus, constraining global geodynamics. Larger distal earthquakes can be used to determine major compositional and structural boundaries within a planet’s interior, providing major constraints on planet formation and interior evolution. Seismometers have been deployed successfully on the Moon and Mars. Only small subsets of the scientific knowledge that can be gained from seismology can be obtained from alternative scientific approaches, such as global gravity solutions or repeat-pass interferometry. By virtue of its similar size to Earth, Venus is likely to be highly seismically active (Fig. 1). Even at Earth-like levels of seismology, returning meaningful data would require observation over a period that is at least 2–3 orders of magnitude longer than the 1–2 h lifetime of previous Soviet landers. Clever insulation could extend the lifetime of standard electronics in a modern lander to perhaps 24 h. While active cooling of electronics for a Venusian lander is plausible, this approach would require considerable technological advancement and will likely come at a high monetary and mass cost. The high density of the Venusian atmosphere at the surface should mean that there is good coupling of seismic energy into the atmosphere, such that seismology using infrasound from a balloon platform is currently being explored, and observations of the upper levels of the atmosphere from orbit has also been proposed [3]. Besides losing all shear wave information with these two methods, calibrating and interpreting seismic information that has been distorted by, and convolved with, atmospheric phenomena will be challenging without existing seismology data collected through surface seismometers (optimally, simultaneous surface seismological observations would be made).
silicon carbide↗
A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air
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Savannah R. Eisner↗
Vision for Micro Technology Space Missions
It is exciting to contemplate the various space mission applications that Micro Electro Mechanical Systems (MEMS) technology could enable in the next 10-20 years. The primary objective of this chapter is to both stimulate ideas for MEMS technology infusion on future NASA space missions and to spur adoption of the MEMS technology in the minds of mission designers. This chapter is also intended to inform non-space oriented MEMS technologists, researchers and decision makers about the rich potential application set that future NASA Science and Exploration missions will provide. The motivation for this chapter is therefore to lead the reader down a path to identify and it is exciting to contemplate the various space mission applications that Micro Electro Mechanical Systems (MEMS) technology could enable in the next 10-20 years. The primary objective of this chapter is to both stimulate ideas for MEMS technology infusion on future NASA space missions and to spur adoption of the MEMS technology in the minds of mission designers. This chapter is also intended to inform non-space oriented MEMS technologists, researchers and decision makers about the rich potential application set that future NASA Science and Exploration missions will provide. The motivation for this chapter is therefore to lead the reader down a path to identify and consider potential long-term, perhaps disruptive or revolutionary, impacts that MEMS technology may have for future civilian space applications. A general discussion of the potential for MEMS in space applications is followed by a brief showcasing of a few selected examples of recent MEMS technology developments for future space missions. Using these recent developments as a point of departure, a vision is then presented of several areas where MEMS technology might eventually be exploited in future Science and Exploration mission applications. Lastly, as a stimulus for future research and development, this chapter summarizes a set of barriers to progress, design challenges and key issues that must be overcome in order for the community to move on, from the current nascent phase of developing and infusing MEMS technology into space missions, in order to achieve its full future potential.
Dennehy, Neil↗
Surface Gravimetry Using Rover Navigation Systems
This prototype seeks to demonstrate the utility of repurposing a Micro-ElectroMechancical (MEMS) Inertial measurement Unit (IMU) to perform surface gravimetry on a rover. Gravimetry is a common analytical tool used for probing density distributions in the subsurface of a planetary body. Historically, extraterrestrial gravimetry has been confined to orbital platforms. While orbital surveys allow for the construction of global gravity models, the spatial resolution of the data is constrained by the platform’s orbital altitude and high inherent speed. Data collected at or near the surface would increase spatial resolution and allow finer-scale crustal structure to be resolved. To date, there have been only two extraterrestrial surface gravity surveys: the Apollo 17 Traverse Gravimeter Experiment and a survey using the MEMS accelerometers contained within the Curiosity rover’s IMUs. The Curiosity survey highlighted the potential of using MEMS technology to perform planetary gravimetry, albeit with lower sensitivities than traditional surface gravimeters. MEMS accelerometers are included on every rover platform as part of the IMU navigation systems. MEMS accelerometers have low mass, cost, and power requirements while being robust across a range of environments, whereas traditional gravimeters are fragile, costly, and relatively massive (≥8kg versus ≈50g for MEMS IMUs). Thus, the emergence of MEMS gravimeters provides a low-risk and cost-effective method for performing planetary surface gravimetry [3,4]. Here, we present a method to recalibrate the MEMS accelerometers in rover IMUs to collect gravimetric measurements. Such measurements could assist current and future rover missions and support wider efforts to mature MEMS gravimeters.
C S Lawson↗
Vehicle Design for Mars Landing and Return to Mars Orbit
This paper briefly describes three modes for accomplishing the Mars landing mission and compares them on a gross basis to indicate their probable order of merit and to identify design requirements placed on the Mars-excursion module (MEM) by the choice of mode. The paper shows that a flyby-rendezvous mode requiring low weight in earth orbit requires the MEM to enter the Mars atmosphere at velocities ranging from 20,000 to 30,000 ft/sec. The MEM for the flyby-rendezvous mode is not covered in this paper but merits further study. The MEM for the other modes of mission accomplishment begins its active operational sequence in Mars orbit and need not be greatly influenced by the method of delivery to Mars orbit. Parametric studies of the entry problem for two vehicles typifying a ballistic-type and a lifting-body-type were conducted to identify the problems associated with design of a MEM to accommodate the extremes of Mars atmospheric density presently predicted. This brief study indicates that: (a) the presently predicted density extremes of the Mars atmosphere present no serious design problems for a MEM which can operate across the entire band of predicted densities; (b) details of operational requirements and mission objectives will control the choice of configuration rather than entry requirements; and (c) the ballistic-type MEM is lighter and simpler but has less operational flexibility than a high L/D MEM.
Hammock, D. M.↗
Phase Calibration of Microphones by Measurement in the Free-field
Over the past several years, significant effort has been expended at NASA Langley developing new Micro-Electro-Mechanical System (MEMS)-based microphone directional array instrumentation for high-frequency aeroacoustic measurements in wind tunnels. This new type of array construction solves two challenges which have limited the widespread use of large channel-count arrays, namely by providing a lower cost-per-channel and a simpler method for mounting microphones in wind tunnels and in field-deployable arrays. The current generation of array instrumentation is capable of extracting accurate noise source location and directivity on a variety of airframe components using sophisticated data reduction algorithms [1-2]. Commercially-available MEMS microphones are condenser-type devices and have some desirable characteristics when compared with conventional condenser-type microphones. The most important advantages of MEMS microphones are their size, price, and power consumption. However, the commercially-available units suffer from certain important shortcomings. Based on experiments with array prototypes, it was found that both the bandwidth and the sound pressure limit of the microphones should be increased significantly to improve the performance and flexibility of the microphone array [3]. It was also desired to modify the packaging to eliminate unwanted Helmholtz resonance s exhibited by the commercial devices. Thus, new requirements were defined as follows: Frequency response: 100 Hz to 100 KHz (+/-3dB) Upper sound pressure limit: Design 1: 130 dB SPL (THD less than 5%) Design 2: 150-160 dB SPL (THD less than 5%) Packaging: 3.73 x 6.13 x 1.3 mm can with laser-etched lid. In collaboration with Novusonic Acoustic Innovation, NASA modified a Knowles SiSonic MEMS design to meet these new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size [4]. Hence a substitution based, free-field method was developed to calibrate these microphones at frequencies up to 80 kHz. The technique relied on the use of a random, ultrasonic broadband centrifugal sound source located in a small anechoic chamber. The free-field sensitivity (voltage per unit sound pressure) was obtained using the procedure outlined in reference 4. Phase calibrations of the MEMS microphones were derived from cross spectral phase comparisons between the reference and test substitution microphones and an adjacent and invariant grazing-incidence 1/8-inch standard microphone. The free-field calibration procedure along with representative sensitivity and phase responses for the new high-frequency MEMS microphones are presented here.
Shams, Qamar A.↗
Vibration-based health characterization of multiple IMUs in UAV applications
Inertial measurement units (IMUs) are vital in UAV navigation for vehicle attitude and position estimation, especially in the frequently-occurring case of temporary loss of GPS capabilities. Degradation in these units could yield inaccurate position estimates, resulting in incorrect input for vehicle control systems. A wide variety of these units exist to meet the needs of UAV operators, general aviation, and military vehicles. In recent decades, lightweight and inexpensive MEMS sensors have grown in popularity with respect to UAVs. Studies into the failure modes of MEMS devices suggest that vibration is one of the leading causes of MEMS degradation. MEMS sensors are generally encased in their own hermetic packaging, as their small size and sensitivity cause them to be particularly vulnerable to air damping and particulate contamination when exposed. Exposure to excessive vibration can cause cracking in this packaging as well as damage to connecting electronics, with recorded results that cause sensors to act outside of their specifications, potentially providing unreliable input to controllers. A prior study from the Politecnico di Torino looked into the degradation of MEMS IMUs, specifically the AXIS-AIS402, for aerospace and vibrating environments. In the study, the authors found that after exposing MEMS IMUs to simulated vibrations from working conditions of aerospace applications, the sensors showed increased noise and increased bias instability. At NASA Ames, several widely-used MEMS IMUs were selected for a new IMU degradation study, comparing accelerometer performance before and after exposure to similar levels of vibration simulating aerospace conditions. The IMUs were selected from the Pixhawk autopilot systems, hobby sUAS, or prior experimental studies at NASA. Additionally, the industrial grade VectorNav-100 IMU was selected as a ground truth reference point to which the performance of the test sensors can be compared. In the study, each sensor is exposed to functional levels of UAV vibration as replicated on a single-frequency vibratory table in the NASA Ames SHARP Laboratory, and each accelerometer is characterized for bias, drift, and noise characteristics both before and after vibratory exposure. The focus of this study is to monitor the health of the IMU sensors and determine if sensor degradation can be detected from output error and frequency spectrum analysis, rather than from microscopic examination of the sensors. In this case, sensor degradation and faulty data can be more easily detectable by non-experts hoping to use these sensors as an important piece of an integrated package. In addition, specific sensor degradation modes potentially leading to in-flight hazards could be identified, such as accelerated levels of drift and altered temperature response. The overall goal of this work is to increase levels of safety for future users of these sensors and to provide a clear analysis of sensor limitations currently lacking in most sensor specification documentation.
IMUs↗
Microelectromechanical Systems for Aerodynamics Applications
Microelectromechanical systems (MEMS) embody the integration of sensors, actuators, and electronics on a single substrate using integrated circuit fabrication techniques and compatible micromachining processes. Silicon and its derivatives form the material base for the MEMS technology. MEMS devices, including micro-sensors and micro-actuators, are attractive because they can be made small (characteristic dimension about microns), be produced in large numbers with uniform performance, include electronics for high performance and sophisticated functionality, and be inexpensive. MEMS pressure sensors, wall-shear-stress sensors, and micromachined hot-wires are nearing application in aeronautics. MEMS actuators face a tougher challenge since they have to be scaled (up) to the physical phenomena that are being controlled. MEMS actuators are proposed, for example, for controlling the small structures in a turbulent boundary layer, for aircraft control, for cooling, and for mixing enhancement. Data acquisition or control logistics require integration of electronics along with the transducer elements with appropriate consideration of analog-to-digital conversion, multiplexing, and telemetry. Altogether, MEMS technology offers exciting opportunities for aerodynamics applications both in wind tunnels and in flight
Mehregany, Mehran↗
Semiautonomous Avionics-and-Sensors System for a UAV
Unmanned Aerial Vehicles (UAVs) autonomous or remotely controlled pilotless aircraft have been recently thrust into the spotlight for military applications, for homeland security, and as test beds for research. In addition to these functions, there are many space applications in which lightweight, inexpensive, small UAVS can be used e.g., to determine the chemical composition and other qualities of the atmospheres of remote planets. Moreover, on Earth, such UAVs can be used to obtain information about weather in various regions; in particular, they can be used to analyze wide-band acoustic signals to aid in determining the complex dynamics of movement of hurricanes. The Advanced Sensors and Electronics group at Langley Research Center has developed an inexpensive, small, integrated avionics-and-sensors system to be installed in a UAV that serves two purposes. The first purpose is to provide flight data to an AI (Artificial Intelligence) controller as part of an autonomous flight-control system. The second purpose is to store data from a subsystem of distributed MEMS (microelectromechanical systems) sensors. Examples of these MEMS sensors include humidity, temperature, and acoustic sensors, plus chemical sensors for detecting various vapors and other gases in the environment. The critical sensors used for flight control are a differential- pressure sensor that is part of an apparatus for determining airspeed, an absolute-pressure sensor for determining altitude, three orthogonal accelerometers for determining tilt and acceleration, and three orthogonal angular-rate detectors (gyroscopes). By using these eight sensors, it is possible to determine the orientation, height, speed, and rates of roll, pitch, and yaw of the UAV. This avionics-and-sensors system is shown in the figure. During the last few years, there has been rapid growth and advancement in the technological disciplines of MEMS, of onboard artificial-intelligence systems, and of smaller, faster, and smarter wireless telemetry systems. The major attraction of MEMS lies in orders-of-magnitude reductions of power requirements relative to traditional electronic components that perform equivalent functions. In addition, the compactness of MEMS, relative to functionally equivalent traditional electronics systems, makes MEMS attractive for UAV applications. Recent advances in MEMS have made it possible to produce pressure, acceleration, humidity, and temperature sensors having masses in subgram range and possessing sensitivities and accuracies comparable to those of larger devices.
Shams, Qamar↗
JTEC Panel report on microelectromechanical systems in Japan
This report summarizes recent activities in the development of microelectromechanical systems (MEMS) in Japan. For the purposes of this study, 'MEMS' means batch-fabricated miniature devices that convert physical parameters to or from electrical signals and that depend on mechanical structures or parameters in important ways for their operation. The report covers advanced materials and process technology; sensors and sensing microstructures; microactuators and actuation mechanisms; sensor-circuit integration and system partitioning; advanced packaging, microassembly, and testing technologies; and MEMS design techniques, applications, and infrastructure. The panel found that Japanese industry is emphasizing approaches to MEMS that are similar to those taken by U.S. industry (i.e., approaches based on silicon integrated-circuit technology); these efforts are comparable in their level of development to those in the United States. However, the ten-year, $250 million, MITI-sponsored program in micromachines emphasizes the miniaturization of more traditional (nonlithographic) machining processes, an area in which there is no comparable U.S. effort. Packaging technology and applications for batch-fabricated MEMS devices is considered a major challenge in both countries. The panel concluded that these and other issues will require global leadership and international cooperation to realize the benefits of MEMS in a timely way.
Wise, Kensall D.↗
Meteoroid Environment Modeling: the Meteoroid Engineering Model and Shower Forecasting
The meteoroid environment is often divided conceptually into meteor showers plus a sporadic background component. The sporadic complex poses the bulk of the risk to spacecraft, but showers can produce significant short-term enhancements of the meteoroid flux. The Meteoroid Environment Office (MEO) has produced two environment models to handle these cases: the Meteoroid Engineering Model (MEM) and an annual meteor shower forecast. Both MEM and the forecast are used by multiple manned spaceflight projects in their meteoroid risk evaluation, and both tools are being revised to incorporate recent meteor velocity, density, and timing measurements. MEM describes the sporadic meteoroid complex and calculates the flux, speed, and directionality of the meteoroid environment relative to a user-supplied spacecraft trajectory, taking the spacecraft's motion into account. MEM is valid in the inner solar system and offers near-Earth and cis-lunar environments. While the current version of MEM offers a nominal meteoroid environment corresponding to a single meteoroid bulk density, the next version of MEMR3 will offer both flux uncertainties and a density distribution in addition to a revised near-Earth environment. We have updated the near-Earth meteor speed distribution and have made the first determination of uncertainty in this distribution. We have also derived a meteor density distribution from the work of Kikwaya et al. (2011). The annual meteor shower forecast takes the form of a report and data tables that can be used in conjunction with an existing MEM assessment. Fluxes are typically quoted to a constant limiting kinetic energy in order to comport with commonly used ballistic limit equations. For the 2017 annual forecast, the MEO substantially revised the list of showers and their characteristics using 14 years of meteor flux measurements from the Canadian Meteor Orbit Radar (CMOR). Defunct or insignificant showers were removed and the temporal profiles of many showers were improved. In 2016 the MEO also adapted the forecast to the cislunar environment for the first time. We plan to make additional improvements to the model in the next two years using optical meteor flux measurements and mass indices.
Moorhead, Althea V.↗
Meteoroid Environment Modeling: the Meteoroid Engineering Model and Shower Forecasting
The meteoroid environment is often divided conceptually into meteor showers plus a sporadic background component. The sporadic complex poses the bulk of the risk to spacecraft, but showers can produce significant short-term enhancements of the meteoroid flux. The Meteoroid Environment Office (MEO) has produced two environment models to handle these cases: the Meteoroid Engineering Model (MEM) and an annual meteor shower forecast. Both MEM and the forecast are used by multiple manned spaceflight projects in their meteoroid risk evaluation, and both tools are being revised to incorporate recent meteor velocity, density, and timing measurements. MEM describes the sporadic meteoroid complex and calculates the flux, speed, and directionality of the meteoroid environment relative to a user-supplied spacecraft trajectory, taking the spacecraft's motion into account. MEM is valid in the inner solar system and offers near-Earth and cis-lunar environments. While the current version of MEM offers a nominal meteoroid environment corresponding to a single meteoroid bulk density, the next version of MEMR3 will offer both flux uncertainties and a density distribution in addition to a revised near-Earth environment. We have updated the near-Earth meteor speed distribution and have made the first determination of uncertainty in this distribution. We have also derived a meteor density distribution from the work of Kikwaya et al. (2011). The annual meteor shower forecast takes the form of a report and data tables that can be used in conjunction with an existing MEM assessment. Fluxes are typically quoted to a constant limiting kinetic energy in order to comport with commonly used ballistic limit equations. For the 2017 annual forecast, the MEO substantially revised the list of showers and their characteristics using 14 years of meteor flux measurements from the Canadian Meteor Orbit Radar (CMOR). Defunct or insignificant showers were removed and the temporal profiles of many showers were improved. In 2016 the MEO also adapted the forecast to the cislunar environment for the first time. We plan to make additional improvements to the model in the next two years using optical meteor flux measurements and mass indices.
Moorhead, Althea V.↗
Advanced packaging for Integrated Micro-Instruments
The relationship between packaging, microelectronics, and micro-electrical-mechanical systems (MEMS) is an important one, particularly when the edges of performance boundaries are pressed, as in the case of miniaturized systems. Packaging is a sort of physical backbone that enables the maximum performance of these systems to be realized, and the penalties imposed by conventional packing approaches is particularly limiting for MEMS devices. As such, advanced packaging approaches, such as multi-chip modules (MCM's) have been touted as a true means of electronic 'enablement' for a variety of application domains. Realizing an optimum system of packaging, however, in not as simple as replacing a set of single chip packages with a substrate of interconnections. Research at Phillips Laboratory has turned up a number of integrating options in the two- and three-dimensional rending of miniature systems with physical interconnection structures with intrinsically high performance. Not only do these structures motivate the redesign of integrated circuits (IC's) for lower power, but they possess interesting features that provide a framework for the direct integration of MEMS devices. Cost remains a barrier to the application of MEMS devices, even in space systems. Several innovations are suggested that will result in lower cost and more rapid cycle time. First, the novelty of a 'constant floor plan' MCM which encapsulates a variety of commonly used components into a stockable, easily customized assembly is discussed. Next, the use of low-cost substrates is examined. The anticipated advent of ultra-high density interconnect (UHDI) is suggested as the limit argument of advanced packaging. Finally, the concept of a heterogeneous 3-D MCM system is outlined that allows for the combination of different compatible packaging approaches into a uniformly dense structure that could also include MEMS-based sensors.
Lyke, James L.↗
Reliability Modeling of Microelectromechanical Systems Using Neural Networks
Microelectromechanical systems (MEMS) are a broad and rapidly expanding field that is currently receiving a great deal of attention because of the potential to significantly improve the ability to sense, analyze, and control a variety of processes, such as heating and ventilation systems, automobiles, medicine, aeronautical flight, military surveillance, weather forecasting, and space exploration. MEMS are very small and are a blend of electrical and mechanical components, with electrical and mechanical systems on one chip. This research establishes reliability estimation and prediction for MEMS devices at the conceptual design phase using neural networks. At the conceptual design phase, before devices are built and tested, traditional methods of quantifying reliability are inadequate because the device is not in existence and cannot be tested to establish the reliability distributions. A novel approach using neural networks is created to predict the overall reliability of a MEMS device based on its components and each component's attributes. The methodology begins with collecting attribute data (fabrication process, physical specifications, operating environment, property characteristics, packaging, etc.) and reliability data for many types of microengines. The data are partitioned into training data (the majority) and validation data (the remainder). A neural network is applied to the training data (both attribute and reliability); the attributes become the system inputs and reliability data (cycles to failure), the system output. After the neural network is trained with sufficient data. the validation data are used to verify the neural networks provided accurate reliability estimates. Now, the reliability of a new proposed MEMS device can be estimated by using the appropriate trained neural networks developed in this work.
Perera. J. Sebastian↗
Nanoionics-Based Switches for Radio-Frequency Applications
Nanoionics-based devices have shown promise as alternatives to microelectromechanical systems (MEMS) and semiconductor diode devices for switching radio-frequency (RF) signals in diverse systems. Examples of systems that utilize RF switches include phase shifters for electronically steerable phased-array antennas, multiplexers, cellular telephones and other radio transceivers, and other portable electronic devices. Semiconductor diode switches can operate at low potentials (about 1 to 3 V) and high speeds (switching times of the order of nanoseconds) but are characterized by significant insertion loss, high DC power consumption, low isolation, and generation of third-order harmonics and intermodulation distortion (IMD). MEMS-based switches feature low insertion loss (of the order of 0.2 dB), low DC power consumption (picowatts), high isolation (>30 dB), and low IMD, but contain moving parts, are not highly reliable, and must be operated at high actuation potentials (20 to 60 V) generated and applied by use of complex circuitry. In addition, fabrication of MEMS is complex, involving many processing steps. Nanoionics-based switches offer the superior RF performance and low power consumption of MEMS switches, without need for the high potentials and complex circuitry necessary for operation of MEMS switches. At the same time, nanoionics-based switches offer the high switching speed of semiconductor devices. Also, like semiconductor devices, nanoionics-based switches can be fabricated relatively inexpensively by use of conventional integrated-circuit fabrication techniques. More over, nanoionics-based switches have simple planar structures that can easily be integrated into RF power-distribution circuits.
Nessel, James↗