Properties of large area ErBa2Cu3O(7-x) thin films deposited by ionized cluster beams
Ionized cluster beam (ICB) deposition is employed to produce ErBa2Cu3O(7-x) films on different substrates without post-annealing. Films with diameters of up to 70 mm are grown on SrTiO3 100 plane and exhibit Tc values of 84-87 K, Jc of about 10 exp 6 A/sq m at 77 K. These films are epitaxial with the c-axis perpendicular to the plane of the substrate surface, and they can be routinely produced by ICB with good Jc and Tc.