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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 289 records · Page 16
All sourcesNASA NTRSDOE OSTI
DOE OSTI2019

Surface Treatment of Powder-Bed Fusion Additive Manufactured Metals for Improved Fatigue Life

High-cycle fatigue (HCF) tests were conducted on samples fabricated by two powder-bed additive manufacturing techniques. Samples were tested with as-produced surfaces and after various non-contact surface improvement treatments. Ti-6Al-4V samples were made using both electron beam melting (EBM) and selective laser melting (SLM), while Inconel 625 was fabricated using SLM. Ti-6Al-4V was treated with a commercial chemically accelerated vibratory polishing process, with target material removal of approximately 200 µm from each surface for EBM samples and 100 µm for SLM samples. This technique led to increases in both the number of cycles before failure at a given loading condition and endurance limit (at 10{sup 7} cycles) compared to samples with as-produced surfaces. The results are interpreted as the reduction in elastic stress concentration factor associated with surface defects where fatigue cracks initiate. SLM 625 was treated with both an abrasive polishing method and laser surface remelting. Both methods led to improvements in surface roughness, but these did not lead to improvements in fatigue properties of SLM 625. For abrasive polished samples, the combination of improved measured surface roughness without fatigue property enhancement suggests that surface material is removed, but the roots of surface defects, where fatigue cracks initiate, were left intact. For laser treatment, the remelted surface layer retained a rapidly solidified microstructure that did not increase the number of cycles before crack initiation even though the surface was smoother compared to the surface prior to polishing.

36 MATERIALS SCIENCE↗
DOE OSTI2019

Tribocorrosion Behavior of SAF 2205 Duplex Stainless Steel in Artificial Seawater

Tribocorrosion behaviors of SAF 2205 duplex stainless steel sliding against an Al{sub 2}O{sub 3} counterpart were investigated in artificial seawater. The tribocorrosion mechanisms and synergistic actions between corrosion and wear were analyzed in this work. The results indicated that a higher load was beneficial for the formation of the σ intermetallic phase and strain hardening; thus, the hardness increased first, and then the pure mechanical wear resistance of SAF 2205 was improved by the hardening effect. The wear mechanisms of SAF 2205 were dominated by abrasive wear under lower loads and by abrasive wear and plastic deformation under higher loads. Furthermore, galvanic corrosion was established between the σ intermetallic phase/ferritic/austenitic and passive film (cathode)/fresh surface, which caused corrosion-accelerated wear. Thus, the total damage to SAF 2205 during tribocorrosion in artificial seawater was determined by the mechanical wear and synergetic effects between corrosion and wear. Therefore, improving hardness was an effective way to increase the tribocorrosion properties of metal materials, such as SAF 2205 and 316L.

36 MATERIALS SCIENCE↗
DOE OSTI2019

Dry Sliding Behavior of a TiZr-Based Alloy under Air and Vacuum Conditions

In this study, dry sliding tribological properties of a TiZr-based alloy with the chemical composition Ti-20Zr-6.5Al-4V (wt.%) were tested in air and vacuum under different normal loads (10, 20, and 30 N) at various sliding velocities. Results showed that the coefficient of friction in air was lower than that in vacuum, whereas the wear volume at sliding velocity presented an opposite trend. The surfaces and cross-sectional morphology of wear scar on the TiZrAlV alloy was analyzed through scanning electron microscopy to determine the wear mechanisms. The observations showed that abrasive wear and delamination wear were dominant in air. In vacuum, the main wear mechanism changed from slightly abrasive and adhesive wear to severe adhesive wear and delamination wear as the normal load increased. Wear mechanism maps were also constructed and compared. The comparison showed that severe wear (including delamination wear) was prevalent in air.

36 MATERIALS SCIENCE↗
DOE OSTI2019

Effect of Tungsten Inert Gas Arc Remelting on Microstructure and Wear Properties of Plasma-Sprayed NiCr-Cr{sub 3}C{sub 2} Coating

In this work, a NiCr-Cr{sub 3}C{sub 2} coating was prepared on an AISI 1045 steel substrate by plasma spraying and then remelted with the tungsten inert gas (TIG) arc method. The purpose was to study the effects of TIG remelting treatment on the microstructure, mechanical properties and wear properties of a plasma-sprayed NiCr-Cr{sub 3}C{sub 2} coating. The results show that after TIG remelting, the density of the coating increased, the internal porosity decreased from 8.1 to 0.2%, and the number of cracks and inclusions greatly reduced. The hardness of the coating also became uniform and increased from 1007 to 1141 HV{sub 0.1}, with an obvious increase of 13.3%, and the fracture toughness increased by 321.3%. The wear volume after TIG remelting at room temperature was reduced by 59.5%, and the wear pattern changed from brittle fracture and abrasive wear to abrasive wear and adhesive wear. The wear loss at 700 °C was also reduced by 43.6%, and the wear pattern was transformed from brittle fracture and fatigue wear caused by oxidation to oxidative wear and adhesive wear. Therefore, TIG remelting treatment can effectively improve the microstructure, mechanical properties and wear resistance of a plasma-sprayed NiCr-Cr{sub 3}C{sub 2} coating.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Industrial scale mesofluidic particle separation

Here we explore the potential of a mesofluidic separator that fits within industrial piping and is designed to remove large aspherical particles out of an abrasive slurry at fast flow rates. Mesofluidic separators have recently demonstrated separation of spherical particles at flow rates of ~1 gallon/min (gpm) (6.3.10 -5 m 3 /s). Yet, the performance of these separators at flow rates achievable within industrial piping have not been explored. Here we evaluate the permeate flowrate fraction, large particle mass fraction, and pressure drop from approximately 35-100 gpm (2.2.10-3-6.3.10-3 m 3 /s) in a three inch tube using an abrasive and modestly non-spherical slurry. Faster flow rates may be achieved with larger pumps and larger diameters. We find the permeate fraction and pressure drop both increase with flow rate, though the pressure drop remains modest. Only two feet of inserts removed 97.6±2.1% of large particles for conditions tested. Separation was demonstrated in both vertical and horizontal orientations with the horizontal orientation benefiting marginally from gravitational settling.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

A novel fiber-fretting test for tribological characterization of the fiber/matrix interface

Ceramic matrix composites exhibit excellent high temperature properties and are candidate materials for structural applications from jet engines to nuclear fuel cladding. The strength and deformation behavior of these composites are intrinsically tied to the properties of the fiber/matrix interface. This research introduces a novel technique to evaluate the fundamental friction and wear characteristics of these interfaces. A case study on SiC f /PyC/SiC m composites applies in situ fiber fretting to investigate the kinetic friction coefficient and cyclic wear characteristics of the interphase. The experimental methodology is presented in explicit detail to encourage other researchers to explore the capabilities of this technique. Additionally, testing was carried out as a function of fiber roughness, PyC thickness (≈10, 500, 1200 nm), cycle count (10, 100, 1000), and frequency (1, 5, and 10 Hz). The friction coefficient and wear behavior changed with cycle length due to a transition from adhesive to abrasive mechanisms. SEM fractography provided insights to tribological evolution from adhesive sliding to three-body abrasive wear. The structural disorder at the tribo-surface relating to graphitic content and dangling bond density was investigated using Raman spectroscopy. Properties are contextualized with comparison to uniaxial tensile behavior of the parent composite.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Selective laser melting of oxide dispersion strengthened MA956 alloy and its surface finishing by magnetic field assisted finishing

Selective laser melting (SLM) is a prominent metal additive manufacturing (AM) capable of processing a myriad of engineering materials with high precision and design freedom. However, similar to other AM processes, poor surface finishing has been an omnipresent problem in SLM technology. In this study, magnetic field assisted finishing (MAF) was used to finish SLM fabricated oxide dispersion strengthened (ODS) MA956, an iron-chromium-aluminum alloy. The effect of laser processing parameters on part density and surface roughness was first studied. Using a multi-objective optimization technique, the optimal parameters to obtain the highest density and lowest surface roughness were determined. Finally, MAF was applied to the parts built with the obtained optimal SLM parameters, but without significant improvement on the surfaces of as-printed samples. Hence, the surfaces of as-printed samples were post-processed (ground) to yield better initial surface conditions prior to MAF. The effect of initial roughness, iron particles size, and abrasive size on MAF performance was studied. Initial roughness had the most dominant effect followed by abrasive size. The underlying mechanism behind the dependency on initial roughness on final surface quality was analyzed by studying the change on the surface profiles with different starting initial roughness. The initial roughness required for MAF to be effective was determined. In conclusion, using the optimal processing conditions, MAF was applied to the post-processed samples to attain the final average surface roughness (R a ) as little as 0.36 μm starting from initial average roughness (R a ) of 1.53 μm.

36 MATERIALS SCIENCE↗
DOE OSTI2016

Structure and tribological properties of steel after non-vacuum electron beam cladding of Ti, Mo and graphite powders

The non-vacuum electron beam cladding technique was used to fabricate layers alloyed with Ti, Mo and C on the surface of low-alloyed steel. Two types of experiments were carried out. In the first experiment, a mixture of Ti and graphite powders was used for cladding; in the second, a mixture of Ti, Mo and graphite powders was used for cladding. CaF{sub 2} powder or a mixture of CaF{sub 2} and LiF powders was used as flux. The thickness of the cladded layers was in the range of 2–2.2 mm. The structure of the layers was studied using optical microscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD). The microhardness after cladding of the layers fabricated by cladding of Ti and graphite powders was 8–9 GPa, while the microhardness of layers with Mo additions reached 11–12 GPa. The highest wear resistance at sliding friction and friction in abrasive environment was reached in the samples fabricated using Ti, Mo and graphite mixture due to the higher hardness and the martensite–austenite structure of the matrix. The wear resistance against fixed abrasive particles was 2.4 times higher compared to that of carburized and quenched steel. - Highlights: • Ti, C and Mo mixture of powders was cladded using non-vacuum electron beam treatment. • The depth of the cladded layers was 2.0 … 2.2 mm. • The microhardness of layer with Mo, Ti and C additions reached ~ 11 … 12 GPa. • The hardening of the layers caused by the formation of TiC particles and martensitic matrix • Wear resistance of cladded coatings was 2.4 higher than carburized steel.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Modification of microstructure and properties of Ti-47Al-2Cr-4Nb-0.3W alloys fabricated by SPS with trace multilayer graphene addition

Highlights: • The TiAl alloys with different content addition of multilayer graphene were fabricated. • When the graphene content is 0.8 at.%, the mean grain size decreases to 8.2 μm. • The bending and fracture strength increase to 1000 MPa and 2347 MPa, respectively. • The friction coefficient decreased from 0.6 to 0.4, with a decrease by 1/3. - Abstract: In this paper, Ti-47Al-2Cr-4Nb-0.3W alloys with trace multilayer graphene addition were fabricated by spark plasma sintering to enhance both mechanical properties and tribological property simultaneously. With the addition of multilayer graphene, bending strength, compressive strength and tribological property of TiAl alloys are all improved. When graphene content increases from zero to 0.8 at.%, the mean grain size decreases from 14.8 ± 1.4 μm to 8.2 ± 0.8 μm. The bending strength reaches almost 1000 MPa and the fracture strength increases to 2347 ± 12 MPa, an increase of 15% compared with TiAl alloy. The friction coefficient also decreases from about 0.6 to 0.4, a decrease by 1/3 compared with TiAl alloy. The reasons for the improved mechanical properties and tribological property are the in-situ reaction plate-shape Ti{sub 2}AlC phase, fine needle-like Ti{sub 3}AlC phase as well as fine and homogeneous microstructure. The wear mechanism changes from abrasive wear to abrasive wear plus adhesive wear with the increased graphene content.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2018

Effect of equal channel angular pressing on the mechanical and tribological behavior of Al-Zn-Mg-Cu alloy

Highlights: • The correlation of microstructure, mechanical and wear properties has been studied. • The correlation between tensile properties and shear properties has been also studied. • Mechanical and tribological properties have been improved through the ECAP process of the Al-7075 alloy. • The dominant wear mechanisms in the initial material were adhesive and oxidative wear as well as delamination. • Abrasive and oxidative wear were the dominant wear mechanisms in ECAP processed specimens. - Abstract: Microstructure, mechanical properties and wear behavior of severely deformed Al-7075 alloy by equal channel angular pressing (ECAP) were studied. Microhardness, tensile and shear strength tests were performed to evaluate the mechanical properties of the material. The relationship between tensile and shear strength was also extracted. In addition, with the aim of study the wear behavior, the wear tests were performed by using a pin-on-disk machine under different normal loads. The microscopic observations i.e. transmission electron microscopy (TEM) and scanning electron microscope (SEM), were used to analyze the microstructure of specimens as well as the surface, subsurface and debris of worn specimens. Mechanical properties results showed that the hardness and strength (tensile and shear) of the ECAP-processed alloy were higher than that of the annealed alloy and increased with the increment of pass number. The wear test data revealed that the wear rate and friction coefficient decreased with increasing ECAP passes. The SEM analysis of worn specimens demonstrated that the dominant wear mechanisms of the annealed alloy were adhesion wear and delamination and the dominant wear mechanisms of ECAP processed alloy were abrasive wear and plowing bands. Oxidative wear was also observed at both annealed and ECAPed alloy. Totally, these results demonstrated that ultrafine-grained structure fabricated by ECAP, improves the wear resistance of the Al-7075 alloy.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Comparative investigation on microstructures and mechanical properties of (TiB + TiC)/Ti-6Al-4V composites from Ti-B4C-C and Ti-TiB2-TiC systems

Highlights: • The (TiB{sub w}+TiC{sub p})/Ti-6Al-4V composites were fabricated from Ti-B{sub 4}C-C and Ti-TiB{sub 2}-TiC systems by reactive hot-pressed sintering. • Microstructures and mechanical properties of the two kinds of composites were comparatively investigated. • The composites from Ti-TiB{sub 2}-TiC system possess higher elastic modulus and Vickers hardness than those from Ti-B{sub 4}C-C system. • The composites from Ti-TiB{sub 2}-TiC system have higher bending strength than the other system while employing same conditions. • The composites from Ti-B{sub 4}C-C system present better abrasion resistance than those from Ti-TiB{sub 2}-TiC system. - Abstract: Two percentages of TiB + TiC reinforced Ti-6Al-4V composites from Ti-B{sub 4}C-C and Ti-TiB{sub 2}-TiC systems were fabricated by reactive hot-pressed sintering. Their microstructures and mechanical properties involving elastic modulus, Vickers hardness, bending strength and wear property were investigated comparatively. The experimental results show that needle-like TiB whiskers and near-equiaxed TiC particles are evenly distributed in the Ti-6Al-4V matrix. The mechanical properties of the (TiB + TiC)/Ti-6Al-4V composites are closely related with the nominal composition and synthesis system of TiB + TiC reinforcement and the microstructures of composites. With increasing the nominal volume fraction of reinforcement, both elastic modulus and Vickers hardness increase more or less and the bending strength decreases in varying degrees. A certain increase of pores in the composites with the sintering temperature increasing to 1300 °C can markedly affect the bending strength. Moreover, no matter what the sintering temperature and nominal volume fraction of reinforcement, the elastic modulus and Vickers hardness of composites from the Ti-TiB{sub 2}-TiC system are higher than those from the Ti-B{sub 4}C-C system. Similarly, the composites from the Ti-B{sub 4}C-C system present better abrasion resistance than those from the Ti-TiB{sub 2}-TiC system due to the difference of interfacial bonding between the TiC particles and Ti-6Al-4V matrix in the two kinds of composites.

36 MATERIALS SCIENCE↗
DOE OSTI2018

On visualizing material flow and precipitate evolution during probeless friction stir spot welding of an Al-Li alloy

Highlights: • Severe thermal cycle and deformation refined grains and intermetallic particles in SZ. • T{sub 1} phases fully dissolved in SZ followed by re-precipitation of GP zone and δ′ phases. • The predominant flow direction remained in spiral-like pattern during P-FSSW. • Local abrasion existed in the lap-weld interface due to flow difference, forming joining. - Abstract: The precipitate evolution and material flow visualization during probeless friction stir spot welding (P-FSSW) of an Al-Li alloy has been investigated experimentally and numerically in this work. Due to severe heat input during welding, the main strengthening phases of T{sub 1} fully dissolved in the stir zone followed by the re-precipitation of GP zone and δ′ phases, assisted with the refinement of the intermetallic particles and grains. The history of material flow was three-dimensionally visualized with a tracer, studied with X-ray tomography. The experiments and the simulation results provided a consistent interpretation of a circumferential material flow which moved inwards radially near the top surface. Upward flow in the bottom sheet improved with dwell time, causing the interface to bend. Local abrasion between the two sheets due to flow difference led to the disruption of oxide layer, and formed a connection at the interface.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Effects of surface treatments on ABS mechanical properties from fused filament fabrication

This paper examines the influence of surface treatments on the mechanical properties of acrylonitrile butadiene styrene (ABS) samples printed by fused filament fabrication (FFF). Prior efforts have applied brushing, painting, solvent dipping, infiltration, and vapor smoothing as post-processing surface treatments to improve the mechanical properties of FFF components. Additionally, because FFF can produce components with undesirable surface roughness, mechanical abrasion, epoxy coating, and acetone treatment may increase tensile strength by decreasing stress concentrations. Ridged surface texture may provide desirable tribological or handling properties. Based on these opportunities, this paper investigates abrasive media blasting, epoxy coating, acetone immersion, and ridged texturing surface treatments on the tensile strength and other mechanical properties of FFF ABS samples. ASTM D638-14 Type-I samples were printed, treated on all sample sides, and tested. From tensile tests, the elastic modulus, tensile strength, and fracture strain for both the untreated and treated ABS samples were calculated. For each sample, the surface finish and fracture macromorphology were observed with optical microscopy and the roughness values for the surface finish were calculated from profilometer data. Furthermore, samples were submerged in water and weighed periodically to measure mass changes due to water absorption. From surface profilometry and optical miscopy data, mechanical media blasting, epoxy coating, and immersion in all concentrations of acetone decreased surface roughness. Overall, on average, grit blasting with large beads and epoxy coating led to 2.6% and 1.2% increases in tensile strength, respectively; immersion in 40% acetone led to a 1.9% increase in tensile strength while treatment in 60% and 80% acetone decreased tensile strength by 4.9% and 1.9%, respectively. The study concludes that only grit blasting with large beads, immersion in 60% acetone, and the ridged texture significantly affected the tensile strength.

36 MATERIALS SCIENCE↗
DOE OSTI2021

The subsurface structure of abraded Al–Zn–Mg–Cu alloy

Surface abrasion has been shown to introduce heavy shear stress and produce a few hundred nanometers thick altered surface layer (ASL) on Al alloys. Such ASLs exhibit microstructural changes at room temperature and different corrosion resistance than the underlying substrate. Here, we report how sample dimensions and temperature affect the deformed subsurface microstructure evolution on an abraded Al–Zn–Mg–Cu alloy using transmission electron microscopy (TEM) and atom probe tomography. The ASL microstructure evolves differently in the bulk sample than in the thin TEM specimen. In the freshly abraded ASL, the original η'/η precipitates and grain boundaries were deformed toward the abrasion direction. After 7-day natural aging of the freshly abraded bulk sample, well-defined subgrains formed locally in the ASL, and unusual Al 2 Cu (θ) and Mg x Zn y phases precipitated at the subgrain boundaries. However, during natural aging of this TEM specimen taken from the abraded and aged bulk samples, much faster changes occurred, including the continued formation of subgrains and θ particles in the entire ASL, and the diffusion of Zn atoms out of Mg x Zn y particles to form a Zn particle. On the other hand, no obvious microstructural changes occurred in the ASL during 3-month natural aging of the TEM specimen immediately taken from the freshly abraded sample. Finally, this work advances the understanding of how Al alloy microstructures respond during and following any shear deformation, and complex and unexpected effects of sample dimensions on the behavior.

36 MATERIALS SCIENCE↗
DOE OSTI2023

The characterization of wear-causing particles and silica sand in particular

Erodants and abradants are two types of wear-causing particles (WCP). Despite their effects on the severity and rate of wear, WCP are inadequately characterized in a surprising number of publications, especially those involving impingement erosion and three-body abrasion. That shortfall makes it difficult to correlate features of WCP with the details of worn surfaces, or to develop wear models that account for those features. It is argued that the documentation of WCP should go beyond simply reporting their composition and mean particle size. In late 1985, ASTM Committee G2 on Wear and Erosion established a task group on the characterization of WCP. At that time, image analysis was slower and less sophisticated than it is today. While that ASTM task group failed to produce a consensus standard, computerized particle characterization methods were developing in fields other than tribology, fields like geoscience, heavy sand mining, materials processing, and pharmaceuticals. A notable exception to this is ferrography, which is a widely-used diagnostic for lubricated tribosystems. In the context of dry wear, it is useful to identify which features of WCP would be beneficial to document, and to identify some techniques and scales of detail appropriate to particular tribosystems. In this paper, examples are presented for the morphological and mechanical characterization of silica sand grains, as prompted by a triboanalysis of the abrasive and erosive wear of biomass pre-processing equipment. The authors propose a minimum level of documentation for WCP, one that can enrich tribosystem analysis both in laboratory tests and field studies.

36 MATERIALS SCIENCE↗
DOE OSTI2026

Laser interference structuring of Cu for adhesive joining of HVAC equipment

Due to potential energy and cost savings benefits, adhesive joining has been recently considered for heating, ventilation, air conditioning, and refrigeration (HVAC&R) systems. HVAC adhesive bonding requires cost-effective and adequate surface preparations of adherents. Here, this article investigates the use of abrasion, traditional single-beam laser, and a laser-interference technique as surface preparations of copper surfaces. Surface morphology is characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Effective submicrometer peak-to-valley structuring with a periodicity of ∼2.7μ⁢m was demonstrated for laser-interference processing. Single-lap shear tests were conducted for 89 joints made with bondline thicknesses of 0.15 and 0.3 mm. Data on process variables and measured variables included open-time, bond length, maximum load, displacement at failure, shear lap strength, and failure mode. A statistical analysis was conducted on each lot to determine the lower limit with 95% confidence intervals for displacements at failure and shear lap strengths. A comparison is presented between the properties of laser-structured joints with respect to those prepared by abrasion, which is considered the baseline surface preparation technique. Based on this comparison, one single-beam laser technique and two laser-interference techniques were shown to exhibit vastly superior performance over the joints made with abraded specimens.

Sabau, Adrian S. [Oak Ridge National Laboratory (O↗
DOE OSTI2013

Fabrics coated with lubricated nanostructures display robust omniphobicity

The development of a stain-resistant and pressure-stable textile is desirable for consumer and industrial applications alike, yet it remains a challenge that current technologies have been unable to fully address. Traditional superhydrophobic surfaces, inspired by the lotus plant, are characterized by two main components: hydrophobic chemical functionalization and surface roughness. While this approach produces water-resistant surfaces, these materials have critical weaknesses that hinder their practical utility, in particular as robust stain-free fabrics. For example, traditional superhydrophobic surfaces fail (i.e., become stained) when exposed to low-surface-tension liquids, under pressure when impacted by a high-velocity stream of water (e. g., rain), and when exposed to physical forces such as abrasion and twisting. We have recently introduced slippery lubricant-infused porous surfaces (SLIPS), a self-healing, pressure-tolerant and omniphobic surface, to address these issues. Herein we present the rational design and optimization of nanostructured lubricant-infused fabrics and demonstrate markedly improved performance over traditional superhydrophobic textile treatments: SLIPS-functionalized cotton and polyester fabrics exhibit decreased contact angle hysteresis and sliding angles, omni-repellent properties against various fluids including polar and nonpolar liquids, pressure tolerance and mechanical robustness, all of which are not readily achievable with the state-of-the-art superhydrophobic coatings.

Shillingford, C↗
DOE OSTI2021

Investigation on nanoscale material removal process of BK7 and fused silica glass during chemical‐mechanical polishing

Abstract Understanding the nanoscale material removal process in chemical mechanical polishing (CMP) is of fundamental importance for the operation and further development of CMP. In this study, the nanoscale material removal processes of both fused silica glass and BK7 glass were investigated based on single‐pad‐asperity polishing experiments. The results indicate that the material removal characteristics are highly dependent on the composition and structure of glass materials. In the mechanically induced chemical bonding removal mode, only atoms locate near the outermost several layers can participate in the formation and breakage of interfacial bridge bonds. Moreover, the force on the abrasive particle must exceed a threshold value to induce significant removal of Si atoms from the glass substrate, because as the breakage of Si glass –O backbonds does not occur in low‐stress conditions. We reveal for the first time that the chemical and mechanical properties of the topmost layer, which is recognized as densification, hydrated, or redeposition layer, have not been significantly affected by the mechanical action of the abrasive particles when polishing in this kind of material removal mode. The results are expected to provide a deeper insight into the nanoscale material removal mechanism during glass CMP.

Wang, Lin↗