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At least 271 records · Page 15

Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering

Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.

36 MATERIALS SCIENCE↗

TIMED Doppler Interferometer

The Timed Doppler Interferometer (TIDI) will accurately and precisely determine the global vector MLTI (Mesosphere and Lower Thermosphere) wind, temperature, and density profiles. It will measure characteristics of the gravity wave and planetary wave spectra. The tidal characteristics of temperature, density, and wind in the MLTI will be determined. The neutral and ion winds will be measured to characterize the electrodynamical behavior of the MLTI. Oxygen and O2 abundances and nocticulent cloud activity will be measured. This review goes into the calibration and error sources, optical design, mechanisms design, detector design, electronics design, microprocessor and flight software design, and quality assurance and parts.

Killeen, Timothy L.↗

Characterizing NWP Model Errors Using Doppler-Lidar Measurements of Recurrent Regional Diurnal Flows: Marine-Air Intrusions into the Columbia-River Basin

Ground-based Doppler-lidar instrumentation provides atmospheric wind data at dramatically improved accuracies and spatial/temporal resolutions. These capabilities have provided new insights into atmospheric flow phenomena, but they also should have a strong role in NWP model improvement. Insight into the nature of model errors can be gained by studying recurrent atmospheric flows, here a regional summertime diurnal sea breeze and subsequent marine-air intrusion into the arid interior of Oregon-Washington, where these winds are an important windenergy resource. These marine intrusions were sampled by three scanning Doppler lidars in the Columbia-River Basin as part of the Second Wind Forecast Improvement Project (WFIP2), using data from summer 2016. Lidar time-height cross sections of wind speed identified eight days when the diurnal-flow cycle, (peak wind speeds at midnight, afternoon minima) was obvious and strong. Eight-day composite time-height cross sections of lidar wind speeds are used to validate those generated by the operational NCEP-HRRR model. HRRR simulated the diurnal wind cycle, but produced errors in the timing of onset and significant errors due to a premature nighttime demise of the intrusion flow, producing low-bias errors of 6 m s-1 . Day-to-day and in the composite, whenever a marine intrusion occurred, HRRR made these same errors. The errors occurred under a range of gradient wind conditions indicating that they resulted from the misrepresentation of physical processes within a limited region around the measurement locations. Because of their generation within a limited geographical area, field-measurement programs can be designed to find and address the sources of these NWP errors.

Banta, Robert M.↗

Onboard Autonomous Rock Shape Analysis for Mars Rovers

In the quest to maximize the scientific return of future robotic missions, it is imperative that our rovers be capable of determining the importance of the science they collect so that they may prioritize the acquisition and relay of that data. As an important step in this process, we present an automated technique to allow a rover to classify the shape and other geologic characteristics of rocks from two-dimensional photographic images and three-dimensional stereographically produced data. Experiments were conducted in the Matlab environment using images returned by JPL's Mars Pathfinder mission. Our method begins by first segmenting the rocks from the background using a combination of image intensity and height data. Various metrics are then used to classify the region's sphericity, roundness, and other geometric properties. Preliminary experiments to determine the most useful metrics were conducted by characterizing the two-dimensional rock shape while the three-dimensional shape was later studied with metrics derived from these two-dimensional techniques. Seven measures were developed and implemented. The performance of each measure was characterized by analyzing imagesfrom the Pathfinder mission and ranking the rocks according to the measured properties. Combined, the measures would provide a tool by which an automated rover could discover a greater amount of information about the data it collects, leading to a more productive mission.

image segmentation↗

New Submount Requirement of Conductively Cooled Laser Diodes for Lidar Applications

New submount technology is essential for the development of conductively cooled high power diode laser. The simulation and experimental results indicate that thermal conductivity of submount for high power laser-diode must be at least 600 W/m/k or higher for stable operation. We have simulated several theoretical thermal model based on new submount designs and characterized high power diode lasers to determine temperature effects on the performances of laser diodes. The characterization system measures the beam power, output beam profile, temperature distribution, and spectroscopic property of high power diode laser. The characterization system is composed of four main parts: an infrared imaging camera, a CCD camera, a monochromator, and a power meter. Thermal characteristics of two commercial-grade CW 20-W diode laser bars with open heat-sink type were determined with respect to the line shift of emission spectra and beam power stability. The center wavelength of laser emission has a tendency to shift toward longer wavelength as the driving current and heat sink temperature are increased. The increase of heat sink temperature decreases the output power of the laser bar too. Such results lay the guidelines for the design of new submount for high power laser-diodes.

Mo, S. Y.↗

Neutron Coincidence Measurements of Uranium-233 Oxide

Renewed international interest in thorium-fueled advanced reactors has challenged the safeguards community to address future proliferation concerns. Thorium-based technology presents many benefits but does not eliminate the proliferation risks associated with producing and processing fissile material. A byproduct of thorium-fueled reactors is uranium-233, which is classified as a direct-use material. As a result, the development of new or improved methods to characterize and measure materials containing 233U must mirror the pace of development of reactors and facilities that produce such material. Research is underway to assess, develop, and test approaches for safeguarding nuclear materials within the thorium fuel cycle. Neutron signatures from the nondestructive assay (NDA) of materials containing 233U are being quantified to inform the potential characterization of these materials. Using a traditional neutron coincidence counter and a series of well-documented 233U oxide samples, initial measurements have been made to assess the feasibility of 233U characterization and discrimination from other uranium isotopes, primarily 235U, using a combination of measurement techniques and analysis methods. Data acquisition is performed in list mode, allowing for a variety of analyses to be performed on the raw data that is not available using traditional shift register technology. Measurements were performed in passive and active configurations to quantify the strength of signal and to validate simulations in support of this work. This paper presents and discusses the results of the initial measurements of 233U oxide performed at Oak Ridge National Laboratory.

Lockhart, Madeline↗

Measurement of third-order elastic constants using thermal modulation of ultrasonic waves

Third-order elastic constants (TOEC) play an important role in nonlinear material characterization, but measurements of TOEC are laborious with large error margins. This Letter presents the equations of wave velocity changes caused by homogeneous temperature variation and uniaxial stress in isotropic media and the expression of TOEC in terms of thermally induced velocity change and thermal strain. TOEC of an aluminum sample were experimentally determined by measuring ultrasonic wave velocity changes in the uniaxial loading test and the thermal modulation test. Experimental results showed good agreement between the two test methods. Owing to the simple test setup and high measurement sensitivity, the thermal modulation test is a potential experimental method to determine TOEC and absolute acoustic nonlinearity parameters.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Characterization of the CTS 12 and 14 GHz communications links - Preliminary measurements and evaluation

The Communications Link Characterization Experiment is designed to characterize the radio frequency links of the Communications Technology Satellite. The experiment is twofold: (1) it will study the natural characteristics in the CTS frequency bands (14 GHz uplink, and 12 GHz downlink) including attenuation and signal degradation due primarily to absorption and scattering induced by precipitation, and (2) it will perform environmental measurements for the characterization of man-made, earth-based signals which could interfere with the uplink frequency bands of the satellite.

Ippolito, L. J.↗

Uranium Dust Cloud Combustion: Burning Characteristics and Absorption Spectroscopy Measurements

This study characterized uranium metal dust cloud combustion using absorption spectroscopy, imaging, and broadband emission measurements. Other metals were similarly combusted to establish correlations between results from this study and those found in the literature. It was determined that the burn temperature of uranium was limited to the volatilization temperature of uranium dioxide. Combustion behavior was similar to that of other refractory metals in terms of burn time and the observation of exploding particle behavior.

42 ENGINEERING↗

Growth of Homoepitaxial ZnO Semiconducting Films

As a high temperature wide-band-gap (3.3 eV at room temperature) semiconductor, ZnO has been used for many applications such as wave-guides, solar cells, and surface acoustic wave devices, Since ZnO has a 60 meV excitonic binding energy that makes it possible to produce excitonic lasing at room temperature, a recent surge of interest is to synthesize ZnO films for UV/blue/green laser diodes. These applications require films with a smooth surface, good crystal quality, and low defect density. Thus, homoepitaxial film growth is the best choice. Homoepitaxial films have been studied in terms of morphology, crystal structure, and electrical and optical properties. ZnO single crystal substrates grown by the hydrothermal method are mechanically polished and annealed in air for four hours before the films are deposited. The annealing temperature-dependence on ZnO substrate morphology and electrical properties is investigated. Films are synthesized by off-axis reactive sputtering deposition. This produces films that have very smooth surfaces with roughness less than or equal to 5 nm on a 5 microns x 5 microns area. The full width at half maximum of film theta rocking curves measured by the x-ray diffraction is slightly larger than that of the crystal substrate. Films are also characterized by measuring resistivity, optical transmittance, and photoluminescence. The properties of ZnO films grown on (0001) ZnO and (0001) sapphire substrates will also be compared and discussed.

Zhu, Shen↗

Characterization of High Ge Content SiGe Heterostructures and Graded Alloy Layers Using Spectroscopic Ellipsometry

Si(x)Ge(1-x)heterostructures on Si substrates have been widely studied due to the maturity of Si technology. However, work on Si(x)Ge)1-x) heterostructures on Ge substrates has not received much attention. A Si(x)Ge(1-x) layer on a Si substrate is under compressive strain while Si(x)Ge(1-x) on Ge is under tensile strain; thus the critical points will behave differently. In order to accurately characterize high Ge content Si(x)Ge(1-x) layers the energy shift algorithm used to calculate alloy compositions, has been modified. These results have been used along with variable angle spectroscopic ellipsometry (VASE) measurements to characterize Si(x)Ge(1-x)/Ge superlattices grown on Ge substrates. The results agree closely with high resolution x-ray diffraction measurements made on the same samples. The modified energy shift algorithm also allows the VASE analysis to be upgraded in order to characterize linearly graded layers. In this work VASE has been used to characterize graded Si(x)Ge(1-x) layers in terms of the total thickness, and the start and end alloy composition. Results are presented for a 1 micrometer Si(x)Ge(1-x) layer linearly graded in the range 0.5 less than or equal to x less than or equal to 1.0.

Heyd, A. R.↗

Estimating Antenna Shape From Far-Field Measurements

Amplitude and phase measurements help characterize nearly paraboloidal reflectors. Deviation of microwave reflector from ideal paraboloidal shape deduced from far-field amplitude and phase measurements with help of theoretical technique referred to as microwave holographic metrology. Technique enables estimation of antenna-surface figure from measurements taken at prescribed number of field points. After determining amount of surface deviation, performance of antenna then improved by properly adjusting surface panels.

Rahmat-Samii, Y.↗

Characterization of nitrogen-containing species produced from nitric acid/water systems

The speciation of gases formed in the vapor phase above HNO 3 -H 2 O mixtures at room temperature is measured and characterized using Fourier-transform infrared (FTIR) spectroscopy. Although studies of speciation of compounds have been performed in the solution phase, in this study we focus solely on the gas phase species formed over HNO 3 -H 2 O mixtures and their concentrations as a function of time. The nitric acid concentration in the experiments range from 14 to 4 M. The NO 2 , NO, and N 2 O (collectively known at NOx) gases are measured by FTIR at 1585, 1850, and 2208 wavenumbers, respectively. The concentrations of these NOx species ranges from 0 to 3 ppm and change over time as a function of acid concentration. Two purities of commercially available HNO 3 are used to prepare the HNO 3 -H 2 O mixtures. An analysis of thermodynamic data shows that the formation of NOx gases without the presence of a catalyst are thermodynamically favorable.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Spot-based measurement of the brighter-fatter effect on a Roman Space Telescope H4RG detector and comparison with flat-field data

Here, we present the measurement and characterization of the brighter-fatter effect (BFE) on a NASA Roman Space Telescope development Teledyne H4RG-10 near-infrared detector using laboratory measurements with projected point sources. After correcting for other interpixel non-linearity effects such as classical non-linearity and inter-pixel capacitance, we quantify the magnitude of the BFE by calculating the fractional area change per electron of charge contrast. We also introduce a mathematical framework to compare our results with the BFE measured on similar devices using autocorrelations from flat-field images. We find an agreement of 18 ± 5% between the two methods. We identify potential sources of discrepancy and discuss future investigations to characterize and address them.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

High-Fidelity Velocity and Concentration Measurements of Turbulent Buoyant Jets

Accurate models of turbulent buoyant flows are essential for the design of the cooling circuit of nuclear reactors and passive safety systems. However, available models fail to fully capture the physics of turbulent mixing when buoyancy becomes predominant with respect to momentum. Therefore, high-fidelity experiments of well-controlled fundamental flows are needed to develop and validate more accurate models. We analyze experiments of positive and negative turbulent buoyant jets, both in uniform and stratified environments, with the aim of understanding the thermal hydraulics of turbulent mixing with variable density and providing high-fidelity data for the development and validation of turbulence models. Non-intrusive, simultaneous particle image velocimetry and laser-induced fluorescence measurements were carried out to acquire instantaneous velocity and concentration fields on a vertical section parallel to the axis of a jet in the self-similar region. The refractive index matching method was applied to measure high-resolution buoyant jets with up to 8.6% density difference. These data are free of the typical errors that characterize optical measurements of buoyancy-driven flows (e.g. natural and mixed convection) where the refractive index of the fluid is inhomogeneous throughout the measurement domain. Turbulent statistics and entrainment of buoyant jets in uniform and stratified environments are presented. These data are compared with non-buoyant jets in a uniform environment, as a reference to investigate the effects of buoyancy and stratification on turbulent mixing. The results will be used for the assessment of current turbulence models and as a basis for the development of a new model that captures turbulent mixing.

laser induced fluorescence↗

Instrument for Aircraft-Icing and Cloud-Physics Measurements

The figure shows a compact, rugged, simple sensor head that is part of an instrumentation system for making measurements to characterize the severity of aircraft-icing conditions and/or to perform research on cloud physics. The quantities that are calculated from measurement data acquired by this system and that are used to quantify the severity of icing conditions include sizes of cloud water drops, cloud liquid water content (LWC), cloud ice water content (IWC), and cloud total water content (TWC). The sensor head is mounted on the outside of an aircraft, positioned and oriented to intercept the ambient airflow. The sensor head consists of an open housing that is heated in a controlled manner to keep it free of ice and that contains four hot-wire elements. The hot-wire sensing elements have different shapes and sizes and, therefore, exhibit different measurement efficiencies with respect to droplet size and water phase (liquid, frozen, or mixed). Three of the hot-wire sensing elements are oriented across the airflow so as to intercept incoming cloud water. For each of these elements, the LWC or TWC affects the power required to maintain a constant temperature in the presence of cloud water.

Lilie, Lyle↗

High-fidelity Experiments of Turbulent Buoyant Jets from Simultaneous Particle Image Velocimetry and Laser Induced Fluorescence

Accurate models of turbulent buoyant flows are essential for the design of nuclear reactors thermal hydraulics and passive safety systems. However, available models fail to fully capture the physics of turbulent mixing when buoyancy becomes predominant with respect to momentum. Therefore, high-fidelity experiments of well-controlled fundamental flows are needed to develop and validate more accurate models. We performed experiments of positive and negative turbulent buoyant jets, both in uniform and stratified environments, with the aim of understanding the thermal hydraulics of turbulent mixing with variable density and providing high-fidelity data for the development and validation of turbulence models. Non-intrusive, simultaneous Particle Image Velocimetry and Laser Induced Fluorescence measurements were carried out to acquire instantaneous velocity and concentration fields on a vertical section parallel to the axis of a jet in the self-similar region. The Refractive Index Matching method was applied to measure high-resolution buoyant jets with up to 8.6% density difference. These data are free of the typical errors that characterize optical measurements of buoyancy driven flows (e.g., natural and mixed convection) where the refractive index of the fluid is inhomogeneous throughout the measurement domain. Turbulent statistics and entrainment of buoyant jets in uniform and stratified environments are presented. These data are compared with non-buoyant jets in uniform environment, as a reference to investigate the effects of buoyancy and stratification on turbulent mixing. The results will be used for the assessment of current turbulence models and as basis for the development of a new one that captures turbulent mixing.

42 ENGINEERING↗

Lidar measurements of yawed-wind-turbine wakes: characterization and validation of analytical models

Abstract. Wake measurements of a scanning Doppler lidar mounted on the nacelle of a full-scale wind turbine during a wake-steering experiment were used for the characterization of the wake flow, the evaluation of the wake-steering set-up, and the validation of analytical wake models. Inflow-scanning Doppler lidars, a meteorological mast, and the supervisory control and data acquisition (SCADA) system of the wind turbine complemented the set-up. Results from the wake-scanning Doppler lidar showed an increase in the wake deflection with the yaw angle and that the wake deflection was not in all cases beneficial for the power output of a downstream turbine due to a bias of the inflow wind direction perceived by the yawed wind turbine and the wake-steering design implemented. Both observations could be reproduced with an analytical model that was initialized with the inflow measurements. Error propagation from the inflow measurements that were used as model input and the power coefficient of a waked wind turbine contributed significantly to the model uncertainty. Lastly, the span-wise cross section of the wake was strongly affected by wind veer, masking the effects of the yawed wind turbine on the wake cross sections.

17 WIND ENERGY↗