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At least 271 records · Page 15

Microactuator production via high aspect ratio, high edge acuity metal fabrication technology

LIGA is a procession sequence which uses x-ray lithography on photoresist layers of several hundred micrometers to produce very high edge acuity photopolymer molds. These plastic molds can be converted to metal molds via electroplating of many different metals and alloys. The end results are high edge acuity metal parts with large structural heights. The LIGA process as originally described by W. Ehrfeld can be extended by adding a surface micromachining phase to produce precision metal parts which can be assembled to form three-dimensional micromechanisms. This process, SLIGA, has been used to fabricate a dynamometer on a chip. The instrument has been fully implemented and will be applied to tribology issues, speed-torque characterization of planar magnetic micromotors and a new family of sensors.

Guckel, H.↗

Design of fabric preforms for double diaphragm forming

Resin Transfer Molding (RTM) has the potential of becoming one of the most cost effective ways of producing composite structures since the raw materials used, resin and dry fabric, are less costly than prepregs. Unfortunately these low material costs are offset by the high labor costs incurred to layup the dry fabric into 3D shapes. To reduce the layup costs, double diaphragm forming is being investigated as a potential technique for creating a complex 3D preform from a simple flat layup. As part of our effort to develop double diaphragm forming into a production capable process, we have undertaken a series of experiments to investigate the interactions between process parameters, mold geometry, fabric weave, tow size, and the quality of the formed part. The results of these tests will be used to determine the forming geometry limitations of double diaphragm forming and to characterize the formability of fabric configurations. An important part of this work was the development of methods to measure and analyze fiber orientations, deformation angles, tow spreading, and shape conformation of the formed parts. This paper will describe the methods used to mark plies, the double diaphragm forming process, the techniques used to measure the formed parts, and the calculation of the parameters of interest. The results can be displayed as 3D contour plots. These experimental results have also been used to verify and improve a computer model which simulates the draping of fabrics over 3D mold shapes.

Luby, Steven↗

Advanced Technology Composite Fuselage - Manufacturing

The goal of Boeing's Advanced Technology Composite Aircraft Structures (ATCAS) program is to develop the technology required for cost-and weight-efficient use of composite materials in transport fuselage structure. Carbon fiber reinforced epoxy was chosen for fuselage skins and stiffening elements, and for passenger and cargo floor structures. The automated fiber placement (AFP) process was selected for fabrication of stringer-stiffened and sandwich skin panels. Circumferential and window frames were braided and resin transfer molded (RTM'd). Pultrusion was selected for fabrication of floor beams and constant-section stiffening elements. Drape forming was chosen for stringers and other stiffening elements cocured to skin structures. Significant process development efforts included AFP, braiding, RTM, autoclave cure, and core blanket fabrication for both sandwich and stiffened-skin structure. Outer-mold-line and inner-mold-line tooling was developed for sandwich structures and stiffened-skin structure. The effect of design details, process control and tool design on repeatable, dimensionally stable, structure for low cost barrel assembly was assessed. Subcomponent panels representative of crown, keel, and side quadrant panels were fabricated to assess scale-up effects and manufacturing anomalies for full-scale structures. Manufacturing database including time studies, part quality, and manufacturing plans were generated to support the development of designs and analytical models to access cost, structural performance, and dimensional tolerance.

Wilden, K. S.↗

Precision Casting via Advanced Simulation and Manufacturing

A two-year program was conducted to develop and commercially implement selected casting manufacturing technologies to enable significant reductions in the costs of castings, increase the complexity and dimensional accuracy of castings, and reduce the development times for delivery of high quality castings. The industry-led R&D project was cost shared with NASA's Aerospace Industry Technology Program (AITP). The Rocketdyne Division of Boeing North American, Inc. served as the team lead with participation from Lockheed Martin, Ford Motor Company, Howmet Corporation, PCC Airfoils, General Electric, UES, Inc., University of Alabama, Auburn University, Robinson, Inc., Aracor, and NASA-LeRC. The technical effort was organized into four distinct tasks. The accomplishments reported herein. Task 1.0 developed advanced simulation technology for core molding. Ford headed up this task. On this program, a specialized core machine was designed and built. Task 2.0 focused on intelligent process control for precision core molding. Howmet led this effort. The primary focus of these experimental efforts was to characterize the process parameters that have a strong impact on dimensional control issues of injection molded cores during their fabrication. Task 3.0 developed and applied rapid prototyping to produce near net shape castings. Rocketdyne was responsible for this task. CAD files were generated using reverse engineering, rapid prototype patterns were fabricated using SLS and SLA, and castings produced and evaluated. Task 4.0 was aimed at developing technology transfer. Rocketdyne coordinated this task. Casting related technology, explored and evaluated in the first three tasks of this program, was implemented into manufacturing processes.

Source record↗

Carbon-Carbon Piston Architectures

An improved structure for carbon-carbon composite piston architectures consists of replacing the knitted fiber, three-dimensional piston preform architecture described in U.S. Pat. No. 4.909,133 (Taylor et al.) with a two-dimensional lay-up or molding of carbon fiber fabric or tape. Initially. the carbon fabric or tape layers are prepregged with carbonaceous organic resins and/or pitches and are laid up or molded about a mandrel. to form a carbon-fiber reinforced organic-matrix composite part shaped like a "U" channel, a "T"-bar. or a combination of the two. The molded carbon-fiber reinforced organic-matrix composite part is then pyrolized in an inert atmosphere, to convert the organic matrix materials to carbon. At this point, cylindrical piston blanks are cored from the "U" channel, "T"-bar, or combination part. These blanks are then densified by reimpregnation with resins or pitches which are subsequently carbonized. Densification is also be accomplished by direct infiltration with carbon by vapor deposition processes. Once the desired density has been achieved, the piston billets are machined to final piston dimensions; coated with oxidation sealants; and/or coated with a catalyst. When compared to conventional steel or aluminum-alloy pistons, the use of carbon-carbon composite pistons reduces the overall weight of the engine; allows for operation at higher temperatures without a loss of strength; allows for quieter operation; reduces the heat loss; and reduces the level of hydrocarbon emissions.

Rivers, H. Kevin↗

Carbon-Carbon Piston Architectures

An improved structure for carbon-carbon composite piston architectures is disclosed. The improvement consists of replacing the knitted fiber, three-dimensional piston preform architecture described in U.S. Pat.No. 4,909,133 (Taylor et al.) with a two-dimensional lay-up or molding of carbon fiber fabric or tape. Initially, the carbon fabric of tape layers are prepregged with carbonaceous organic resins and/or pitches and are laid up or molded about a mandrel, to form a carbon-fiber reinforced organic-matrix composite part shaped like a "U" channel, a "T"-bar, or a combination of the two. The molded carbon-fiber reinforced organic-matrix composite part is then pyrolized in an inert atmosphere, to convert the organic matrix materials to carbon. At this point, cylindrical piston blanks are cored from the "U"-channel, "T"-bar, or combination part. These blanks are then densified by reimpregnation with resins or pitches which are subsequently carbonized. Densification is also accomplished by direct infiltration with carbon by vapor deposition processes. Once the desired density has been achieved, the piston billets are machined to final piston dimensions; coated with oxidation sealants; and/or coated with a catalyst. When compared to conventional steel or aluminum alloy pistons, the use of carbon-carbon composite pistons reduces the overall weight of the engine; allows for operation at higher temperatures without a loss of strength; allows for quieter operation; reduces the heat loss; and reduces the level of hydrocarbon emissions.

Rivers, H. Kevin↗

A Winning Cast

Howmet Research Corporation was the first to commercialize an innovative cast metal technology developed at Auburn University, Auburn, Alabama. With funding assistance from NASA's Marshall Space Flight Center, Auburn University's Solidification Design Center (a NASA Commercial Space Center), developed accurate nickel-based superalloy data for casting molten metals. Through a contract agreement, Howmet used the data to develop computer model predictions of molten metals and molding materials in cast metal manufacturing. Howmet Metal Mold (HMM), part of Howmet Corporation Specialty Products, of Whitehall, Michigan, utilizes metal molds to manufacture net shape castings in various alloys and amorphous metal (metallic glass). By implementing the thermophysical property data from by Auburn researchers, Howmet employs its newly developed computer model predictions to offer customers high-quality, low-cost, products with significantly improved mechanical properties. Components fabricated with this new process replace components originally made from forgings or billet. Compared with products manufactured through traditional casting methods, Howmet's computer-modeled castings come out on top.

Source record↗

Evaluation of Double-Vacuum-Bag Process For Composite Fabrication

A non-autoclave vacuum bag process using atmospheric pressure alone that eliminates the need for external pressure normally supplied by an autoclave or a press is an attractive method for composite fabrication. This type of process does not require large capital expenditures for tooling and processing equipment. In the molding cycle (temperature/pressure profile) for a given composite system, the vacuum application point has to be carefully selected to achieve the final consolidated laminate net shape and resin content without excessive resin squeeze-out. The traditional single-vacuum- bag (SVB) process is best suited for molding epoxy matrix based composites because of their superior flow and the absence of reaction by-products or other volatiles. Other classes of materials, such as polyimides and phenolics, generate water during cure. In addition, these materials are commonly synthesized as oligomers using solvents to facilitate processability. Volatiles (solvents and reaction byproducts) management therefore becomes a critical issue. SVB molding, without additional pressure, normally fails to yield void-free quality composites for these classes of resin systems. A double-vacuum- bag (DVB) process for volatile management was envisioned, designed and built at the NASA Langley Research Center. This experimental DVB process affords superior volatiles management compared to the traditional SVB process. Void-free composites are consistently fabricated as measured by C-scan and optical photomicroscopy for high performance polyimide and phenolic resins.

Hou, T. H.↗

Erosion Coatings for High-Temperature Polymer Composites: A Collaborative Project With Allison Advanced Development Company

The advantages of replacing metals in aircraft turbine engines with high-temperature polymer matrix composites (PMC's) include weight savings accompanied by strength improvements, reduced part count, and lower manufacturing costs. Successfully integrating high-temperature PMC's into turbine engines requires several long-term characteristics. Resistance to surface erosion is one rarely reported property of PMC's in engine applications because PMC's are generally softer than metals and their erosion resistance suffers. Airflow rates in stationary turbine engine components typically exceed 2.3 kg/sec at elevated temperatures and pressures. In engine applications, as shown in the following photos, the survivability of PMC components is clearly a concern, especially when engine and component life-cycle requirements become longer. Although very few publications regarding the performance of erosion coatings on PMC's are available particularly in high-temperature applications the use of erosion-resistant coatings to significantly reduce wear on metallic substrates is well documented. In this study initiated by the NASA Glenn Research Center at Lewis Field, a low-cost (less than $140/kg) graphite-fiber-reinforced T650 35/PMR 15 sheet-molding compound was investigated with various coatings. This sheet-molding compound has been compression molded into many structurally complicated components, such as shrouds for gas turbine inlet housings and gearboxes. Erosion coatings developed for PMC s in this study consisted of a two-layered system: a bondcoat sprayed onto a cleaned PMC surface, followed by an erosion-resistant, hard topcoat sprayed onto the bondcoat as shown in following photomicrograph. Six erosion coating systems were evaluated for their ability to withstand harsh thermal cycles, erosion resistance (ASTM G76 83 "Standard Practice for Conducting Erosion Tests by Solid Particle Impingement Using Gas Jets") using Al2O3, and adhesion to the graphite fiber polyimide composite (ASTM D 4541 95 "Pull Off Strength of Coatings"). Glenn and Allison Advanced Development Company collaborated to optimize erosion coatings for gas turbine fan and compressor applications. All the coating systems survived aggressive thermal cycling without spalling. During erosion tests (see the final photo), the most promising coating systems tested had Cr3C2-NiCr and WC-Co as the hard topcoats. In all cases, these coating systems performed significantly better than that with a TiN hard topcoat. When material depth (thickness) loss is considered, the Cr3C2-NiCr and WC-Co coating systems provided, on average, an erosion resistance 8.5 times greater than that for the uncoated PMR 15/T650 35 composite. Similarly, Cr3C2-NiCr and WC-Co coating systems adhered to the PMC substrate during tensile tests significantly better than systems containing a TiN topcoat. Differences in topcoats of Cr3C2-NiCr and WC-Co were determined by considering issues such as cost and environmental impact. The preferred erosion-resistant coating system for PMR 15/T650 35 has WC-Co as the hard topcoat. This system provides the following benefits in comparison to the coating system with Cr3C2-NiCr topcoat: lower powder material cost (15 to 20 percent), environmentally friendly materials (Cr3C2-NiCr is hazardous), and higher deposition yield (10 to 15 percent), which results in less waste.

Sutter, James K.↗

Fabrication and Characterization of High Temperature Resin/Carbon Nanofiber Composites

As part of ongoing efforts to develop multifunctional advanced composites, blends of PETI-330 and carbon nanofibers (CNF) were prepared and characterized. Dry mixing techniques were employed and the effect of CNF loading level on melt viscosity was determined. The resulting powders were characterized for degree of mixing, thermal and rheological properties. Based on the characterization results, samples containing 30 and 40 wt% CNF were scaled up to approx.300 g and used to fabricate moldings 10.2 cm x 15.2 cm x 0.32 cm thick. The moldings were fabricated by injecting the mixtures at 260-280 C into a stainless steel tool followed by curing for 1 h at 371 C. The tool was designed to impart high shear during the injection process in an attempt to achieve some alignment of CNFs in the flow direction. Moldings were obtained that were subsequently characterized for thermal, mechanical and electrical properties. The degree of dispersion and alignment of CNFs were investigated using high-resolution scanning electron microscopy. The preparation and preliminary characterization of PETI-330/CNF composites will be discussed.

Ghose, Sayata↗

Effect of High Temperature Storage in Vacuum, Air, and Humid Conditions on Degradation of Gold/Aluminum Wire Bonds in PEMs

Microcircuits encapsulated in three plastic package styles were stored in different environments at temperatures varying from 130 C to 225 C for up to 4,000 hours in some cases. To assess the effect of oxygen, the parts were aged at high temperatures in air and in vacuum chambers. The effect of humidity was evaluated during long-term highly accelerated temperature and humidity stress testing (HAST) at temperatures of 130 C and 150 C. High temperature storage testing of decapsulated microcircuits in air, vacuum, and HAST chambers was carried out to evaluate the role of molding compounds in the environmentally-induced degradation and failure of wire bonds (WB). This paper reports on accelerating factors of environment and molding compound on WB failures. It has been shown that all environments, including oxygen, moisture, and the presence of molding compounds reduce time-to-failures compared to unencapsulated devices in vacuum conditions. The mechanism of the environmental effect on KB degradation is discussed.

Teverovsky, Alexander↗

Electrooptic polymer voltage sensor and method of manufacture thereof

An optical voltage sensor utilizing an electrooptic polymer is disclosed for application to electric power distribution systems. The sensor, which can be manufactured at low cost in accordance with a disclosed method, measures voltages across a greater range than prior art sensors. The electrooptic polymer, which replaces the optical crystal used in prior art sensors, is sandwiched directly between two high voltage electrodes. Voltage is measured by fiber optical means, and no voltage division is required. The sample of electrooptic polymer is fabricated in a special mold and later mounted in a sensor housing. Alternatively, mold and sensor housing may be identical. The sensor housing is made out of a machinable polymeric material and is equipped with two opposing optical windows. The optical windows are mounted in the bottom of machined holes in the wall of the mold. These holes provide for mounting of the polarizing optical components and for mounting of the fiber optic connectors. One connecting fiber is equipped with a light emitting diode as a light source. Another connecting fiber is equipped with a photodiode as a detector.

Gottsche, Allan↗

Large structural, thin-wall castings made of metals subject to hot tearing, and their fabrication

An article, such as a gas turbine engine mixer, is made by providing a mold structure defining a thin-walled, hollow article, and a base metal that is subject to hot tear cracking when cast in a generally equiaxed polycrystalline form, such as Rene' 108 and Mar-M247. The article is fabricated by introducing the molten base metal into the mold structure, and directionally solidifying the base metal in the mold structure to form a directionally oriented structure. The directionally oriented structure may be formed of a single grain or oriented multiple grains.

Smashey, Russell W.↗

High Temperature Resin/Carbon Nanotube Composite Fabrication

For the purpose of incorporating multifunctionality into advanced composites, blends of phenylethynyl terminated imides-330 (PETI-330) and multi-walled carbon nanotubes (MWCNTs) were prepared, characterized and fabricated into moldings. PETI-330/MWCNT mixtures were prepared at concentrations ranging from 3 to 25 weight percent by dry mixing the components in a ball mill. The resulting powders were characterized for degree of mixing, thermal and rheological properties. Based on the characterization results, PETI-330/MWCNT samples were scaled up to approximately 300 g and used to fabricate moldings by injecting the mixtures at 260-280 deg C into a stainless steel tool followed by curing for 1 h at 371 deg C. The tool was designed to impart a degree of shear during the injection process in an attempt to achieve some alignment of the MWCNTs in the flow direction. Obtained moldings were subsequently characterized for thermal, mechanical, and electrical properties. The degree of dispersion and alignment of MWCNTs were investigated using high-resolution scanning electron microscopy. The preparation and preliminary characterization of PETI-330/MWCNT composites will be discussed.

Ghose, Sayata↗

Fabrication and Characterization of High Temperature Resin/Carbon Nanofiber Composites

Multifunctional composites present a route to structural weight reduction. Nanoparticles such as carbon nanofibers (CNF) provide a compromise as a lower cost nanosize reinforcement that yields a desirable combination of properties. Blends of PETI-330 and CNFs were prepared and characterized to investigate the potential of CNF composites as a high performance structural medium. Dry mixing techniques were employed and the effect of CNF loading level on melt viscosity was determined. The resulting powders were characterized for degree of mixing, thermal and rheological properties. Based on the characterization results, samples containing 30 and 40 wt% CNF were scaled up to approx.300 g and used to fabricate moldings 10.2 cm x 15.2 cm x 0.32 cm thick. The moldings were fabricated by injecting the mixtures at 260-280 C into a stainless steel tool followed by curing for 1 h at 371 C. The tool was designed to impart high shear during the process in an attempt to achieve some alignment of CNFs in the flow direction. Moldings were obtained that were subsequently characterized for thermal, mechanical and electrical properties. The degree of dispersion and alignment of CNFs were investigated using high-resolution scanning electron microscopy. The preparation and preliminary characterization of PETI-330/CNF composites are discussed. Keywords: resins, carbon nanofibers, scanning electron microscopy, electrical properties, thermal conductivity,injection

Ghose, Sayata↗

Thermal Conductivity of Ultem(TradeMark)/Carbon Nanofiller Blends

In an effort to improve polymer thermal conductivity (TC), Ultem(TradeMark) 1000 was compounded with nano-fillers of carbon allotropes. Ultem(TradeMark) 1000 was selected since it is both solution and melt processable. As-received and modified multiwalled carbon nanotubes (MWCNTs), vapor grown carbon nanofibers (CNF) and expanded graphite (EG) were investigated. MWCNTs were modified by functionalizing the surface through oxidization with concentrated acids, mixing with an alkyl bromide, and addition of alkyl and phosphorus compounds after initial treatment with n-butyl lithium. Functionalization was performed to improve the TC compatibility between the resin and MWCNTs. It was postulated that this may provide an improved interface between the MWCNT and the polymer which would result in enhanced TC. The nano-fillers were mixed with Ultem(TradeMark) 1000 in the melt and in solution at concentrations ranging from 5 to 40 wt%. Ribbons were extruded from the blends to form samples where the nano-fillers were aligned to some degree in the extrusion direction. Samples were also fabricated by compression molding resulting in random orientation of the nano-fillers. Thermal properties of the samples were evaluated by Differential Scanning Calorimetry (DSC) and Thermal Gravimetric Analyzer (TGA). Tensile properties of aligned samples were determined at room temperature. The specimens were cut from the ribbons in the extrusion direction; hence the nano-fillers are somewhat aligned in the direction of stress. Typically it was observed that melt mixed samples exhibited superior mechanical properties compared to solution mixed samples. As expected, increased filler loading led to increased modulus and decreased elongation with respect to the neat polymer. The degree of dispersion and alignment of the nano-fillers was determined by high-resolution scanning electron microscopy (HRSEM). HRSEM of the ribbons revealed that the MWCNTs and CNFs were predominantly aligned in the flow direction. The TC of the samples was measured using a Nanoflash(TradeMark) instrument. Since the MWCNTs and CNF are anisotropic, the TC was expected to be different in the longitudinal (parallel to the nanotube and fiber axis) and transverse (perpendicular to the nanotube and fiber axis) directions. The extruded ribbons provided samples for transverse TC measurements. However, to determine the TC in the longitudinal direction, the ribbons needed to be stacked and molded under 1.7 MPa and 270 C. Samples were then obtained by cutting the molded block with a diamond saw. The largest TC improvement was achieved for aligned samples when the measurement was performed in the direction of MWCNT and CNF alignment (i.e. longitudinal axis). Unaligned samples also showed a significant improvement in TC and may be potentially useful in applications when it is not possible to align the nano-filler. The results of this study will be presented.

Ghose, S.↗

Multifunctional, High-Temperature Nanocomposites

In experiments conducted as part of a continuing effort to incorporate multifunctionality into advanced composite materials, blends of multi-walled carbon nanotubes and a resin denoted gPETI-330 h (wherein gPETI h is an abbreviation for gphenylethynyl-terminated imide h) were prepared, characterized, and fabricated into moldings. PETI-330 was selected as the matrix resin in these experiments because of its low melt viscosity (<10 poise at a temperature of 280 C), excellent melt stability (lifetime >2 hours at 280 C), and high temperature performance (>1,000 hours at 288 C). The multi-walled carbon nanotubes (MWCNTs), obtained from the University of Kentucky, were selected because of their electrical and thermal conductivity and their small diameters. The purpose of these experiments was to determine the combination of thermal, electrical, and mechanical properties achievable while still maintaining melt processability. The PETI-330/MWCNT mixtures were prepared at concentrations ranging from 3 to 25 weight-percent of MWCNTs by dry mixing of the constituents in a ball mill using zirconia beads. The resulting powders were characterized for degree of mixing and thermal and rheological properties. The neat resin was found to have melt viscosity between 5 and 10 poise. At 280 C and a fixed strain rate, the viscosity was found to increase with time. At this temperature, the phenylethynyl groups do not readily react and so no significant curing of the resin occurred. For MWCNT-filled samples, melt viscosity was reasonably steady at 280 C and was greater in samples containing greater proportions of MWCNTs. The melt viscosity for 20 weightpercent of MWCNTs was found to be .28,000 poise, which is lower than the initial estimated allowable maximum value of 60,000 poise for injection molding. Hence, MWCNT loadings of as much as 20 percent were deemed to be suitable compositions for scale-up. High-resolution scanning electron microscopy (HRSEM) showed the MWCNTs to be well dispersed in the polymer matrices, while high-resolution transmission electron microscopy shows splits in the walls of the MWCNTs but no catastrophic breakage of tubes. To further assess processing characteristics prior to scale-up, samples containing 10, 15, and 20 weight-percent of MWCNTs were processed through a laboratory melting extruder. HRSEM of the extruded fibers shows significant alignment of MWCNTs in the flow direction (see figure). For the samples containing 20 weight-percent of MWCNTs, difficulties were encountered during feeding, and the temperature of a rotor in the extruder rose to 245 C because of buildup of frictional heat; this indicates that materials of this type having MWCNT concentrations .20 weight- percent may not be melt-processable. On the basis of the results from the foregoing characterizations, samples containing 10, 15, and 20 weight-percent of MWCNTs were scaled up to masses of .300 g and used to make specimens having dimensions of 10.2 by 15.2 by 0.32 cm. These specimens were molded by (1) injecting the mixtures, at temperatures between 260 and 280 C, into a tool made of the low-thermal-expansion alloy InvarR and then (2) curing for 1 hour at 371 C. The tool was designed to impart shear during the injection process in an attempt to achieve some alignment of the MWCNTs in the flow direction.

Connell, John W.↗

Miniature Inchworm Actuators Fabricated by Use of LIGA

Miniature inchworm actuators that would have relatively simple designs have been proposed for applications in which there are requirements for displacements of the order of microns or tens of microns and for the ability to hold their positions when electric power is not applied. The proposed actuators would be members of the class of microelectromechanical systems (MEMS), but would be designed and fabricated following an approach that is somewhat unusual for MEMS. Like other MEMS actuators, the proposed inchworm actuators could utilize thermoplastic, bimetallic, shape-memory-alloy, or piezoelectric actuation principles. The figure depicts a piezoelectric inchworm actuator according to the proposal. As in other inchworm actuators, linear motion of an extensible member would be achieved by lengthening and shortening the extensible member in synchronism with alternately clamping and releasing one and then the other end of the member. In this case, the moving member would be the middle one; the member would be piezoelectric and would be shortened by applying a voltage to it. The two outer members would also be piezoelectric; the release of the clamps on the upper or lower end would be achieved by applying a voltage to the electrodes on the upper or lower ends, respectively, of these members. Usually, MEMS actuators cannot be fabricated directly on the side walls of silicon wafers, yet the geometry of this actuator necessitates such fabrication. The solution, according to the proposal, would be to use the microfabrication technique known by the German acronym LIGA - "lithographie, galvanoformung, abformung," which means lithography, electroforming, molding. LIGA involves x-ray lithography of a polymer film followed by selective removal of material to form a three-dimensional pattern from which a mold is made. Among the advantages of LIGA for this purpose are that it is applicable to a broad range of materials, can be used to implement a variety of designs, including those of structures >1 mm high, affords submicron precision, and is amenable to mass production at relatively low unit cost. Fabrication of the proposed actuators would involve some technological risks - in particular, in the integration of electrode connection lines and placement of actuator elements. It will also be necessary to perform an intensive study of the feasibility of growing piezoelectric crystals onto LIGA molds.

Yang, Eui-Hyeok↗