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At least 253 records · Page 14

MEMS Direct Chip Attach Packaging Methodologies and Apparatuses for Harsh Environments

Methods of bulk manufacturing high temperature sensor sub-assembly packages are disclosed and claimed. Sensors are sandwiched between a top cover and a bottom cover so as to enable the peripheries of the top covers, sensors and bottom covers to be sealed and bound securely together are disclosed and claimed. Sensors are placed on the bottom covers leaving the periphery of the bottom cover exposed. Likewise, top covers are placed on the sensors leaving the periphery of the sensor exposed. Individual sensor sub- assemblies are inserted into final packaging elements which are also disclosed and claimed. Methods of directly attach- ing wires or pins to contact pads on the sensors are disclosed and claimed. Sensors, such as pressure sensors and accelerometers, and headers made out of silicon carbide and aluminum nitride are disclosed and claimed. Reference cavities are formed in some embodiments disclosed and claimed herein where top covers are not employed.

Okojie, Robert S.↗

Finite Element Analysis of MEMS Devices

A side-slide actuator and a corrugated diaphragm actuator will be analyzed and optimized this summer. Coupled electrostatic and fluid analyses will also be initiated. Both the side-slide actuator and the corrugated diaphragm actuator will be used to regulate the flow of fuel in a jet engine. Many of the side-slide actuators will be placed on top of a fuel injector that is still in the developmental stage as well. The corrugated diaphragm actuator will also be used to regulate the flow of fuel in fuel injectors. A comparative analysis of the performance matrix of both actuators will be conducted. The side-slide actuator uses the concept of mechanical advantage to regulate the flow of fuel using electrostatic forces. It is made from Nickel, Silicon Carbide, and thin layers of Oxide. The slider will have a hole in the middle that will allow fuel to pass through the hole underneath it. The goal is to regulate the flow of fuel through the inlet. This means that the actuator needs to be designed so that when a voltage is applied to the push rod, the slider will deflect in the x-direction and be able to completely block the inlet and no fuel can pass through. Different voltage levels will be tested. The parameters that are being optimized are the thickness of the diaphragm, what kind of corrugation the diaphragm should have, the length, width, and thickness of the push rod, and what design should be used to return the slider. The current possibilities for a return rod are a built in spring on the slider, a return rod that acts like a spring, or a return rod that is identical to the push rod. The final actuator design should have a push rod that has rotational motion and no translation motion, a push rod thickness that prevents warping due to the slider, and a large ratio of the displacement on the bottom of the push rod to displacement on the top of the push rod. The corrugated diaphragm actuator was optimized last winter and this summer will be spent completing the optimization of the coupled electrostatic and fluid flow parameters. It was found that Nickel is the best material to use for the diaphragm because it has a higher yield strength and allows for a larger stress, deflection and applied pressure. The parameters that were optimized were the wavelength and thickness of the diaphragm.

Corrigan, Jennifer↗

Microelectromechanical Systems (MEMS) Actuator-Based, Polarization Reconfigurable Patch Antenna Demonstrated

A nearly square patch antenna with a contact actuator along a radiating edge for polarization reconfiguration was demonstrated at Ka-band frequencies at the NASA Glenn Research Center. The layout of the antenna is shown in the following sketch. This antenna has the following advantages: 1) It can be dynamically reconfigured to receive and transmit a linearly polarized signal or a circularly polarized signal. This feature allows the substitution of multiple antennas on a satellite by a single antenna, thereby resulting in significant cost savings. 2) In our approach, the polarization is switched between the two states without affecting the frequency of operation; thus, valuable frequency spectrum is conserved. 3) The ability to switch polarization also helps mitigate propagation effects due to adverse weather on the performance of a satellite-to-ground link. Hence, polarization reconfigurability enhances link reliability.

Simons, Rainee N.↗

Microelectromechanical Systems (MEMS) Broadband Light Source Developed

A miniature, low-power broadband light source has been developed for aerospace applications, including calibrating spectrometers and powering miniature optical sensors. The initial motivation for this research was based on flight tests of a Fabry-Perot fiberoptic temperature sensor system used to detect aircraft engine exhaust gas temperature. Although the feasibility of the sensor system was proven, the commercial light source optically powering the device was identified as a critical component requiring improvement. Problems with the light source included a long stabilization time (approximately 1 hr), a large amount of heat generation, and a large input electrical power (6.5 W). Thus, we developed a new light source to enable the use of broadband optical sensors in aerospace applications. Semiconductor chip-based light sources, such as lasers and light-emitting diodes, have a relatively narrow range of emission wavelengths in comparison to incandescent sources. Incandescent light sources emit broadband radiation from visible to infrared wavelengths; the intensity at each wavelength is determined by the filament temperature and the materials chosen for the filament and the lamp window. However, present commercial incandescent light sources are large in size and inefficient, requiring several watts of electrical power to obtain the desired optical power, and they emit a large percentage of the input power as heat that must be dissipated. The miniature light source, developed jointly by the NASA Glenn Research Center, the Jet Propulsion Laboratory, and the Lighting Innovations Institute, requires one-fifth the electrical input power of some commercial light sources, while providing similar output light power that is easily coupled to an optical fiber. Furthermore, it is small, rugged, and lightweight. Microfabrication technology was used to reduce the size, weight, power consumption, and potential cost-parameters critical to future aerospace applications. This chip-based light source has the potential for monolithic fabrication with on-chip drive electronics. Other uses for these light sources are in systems for vehicle navigation, remote sensing applications such as monitoring bridges for stress, calibration sources for spectrometers, light sources for space sensors, display lighting, addressable arrays, and industrial plant monitoring. Two methods for filament fabrication are being developed: wet-chemical etching and laser ablation. Both yield a 25-mm-thick tungsten spiral filament. The proof-of-concept filament shown was fabricated with the wet etch method. Then it was tested by heating it in a vacuum chamber using about 1.25 W of electrical power; it generated bright, blackbody radiation at approximately 2650 K. The filament was packaged in Glenn's clean-room facilities. This design uses three chips vacuum-sealed with glass tape. The bottom chip consists of a reflective film deposited on silicon, the middle chip contains a tungsten filament bonded to silicon, and the top layer is a transparent window. Lifetime testing on the package will begin shortly. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 mm.

Tuma, Margaret L.↗

MEMS based pumped liquid cooling systems for micro/nano spacecraft thermal control

The electronic and other payload power densities in future micro/nano spacecraft are expected to exceed 25 Watts/cm(sup 2) and require advanced thermal control concepts and technologies to keep their payload within allowable temperature limits. This paper presents background on the need for pumped liquid cooling systems for future micro/nano spacecraft and results from this ongoing experimental investigation.

cooling system thermal control microspacecraft↗