NEPP Cots Mems Programs
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COTS Microelectromechanical Systems MEMS reliabili↗
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Results for “mems”
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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Automated MEMs Gyroscope Characterization
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green charts↗
MEMS Gyroscope Lifetime Characterization
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MEMS micro gyroscope lifetime long term analysis f↗
Temperature Dependent Characteristics of the JPL Silcon MEMS Gyroscope
Advances in aeronautics and space technology have created a need for miniaturized navigation instruments such as gyroscopes, a need wich is currently beig addressed by a number of micromachined designs.
temperature MEMS gyro characteristics gyroscope↗
Advancements in MEMS Materials and Processing Technology
From achievements in display imaging to air bag deployment, microelectromechanical systems are becoming more commonplace in everyday life. With an abundance of opportunities for innovative R&D in the field, the research trends are not only directed toward novel sensor and actuator development, but also toward further miniaturization, specifically achieving micro- and nanoscaled intergrated systems.
MEMS Materials Microelectromechanical↗
Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device for Nondestructive Evaluation (NDE) Health Monitoring Applications for International Space Station (ISS)
This paper discusses the fabrication aspects of an accelerometer device that is based on a sputter deposited, multilayer, and giant magnetoresistive field sensor.
Mission Assurance accelerometer Giant Magnetoresis↗
Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device for Nondestructive Evaluation (NDE) Health Monitoring Applications for International Space Station (ISS)
This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited, multilayer, giant magnetoresistive field sensor.
Code Q Nondestructive Evaluation Program JPL NASA ↗
Reliability of COTS MEMS accelerometer under shock and thermomechanical cycling
A comparison of the data from microaccelerometers of the same type and between several types will be presented. Self-test output signals and X-ray evaluation test data after completion of 182 thermal cycles will also be presented.
MEMS thermal cycling microaccelerometers↗
A Wafer Transfer Technology for MEMS Adaptive Optics
Adaptive optics systems require the combination of several advanced technologies such as precision optics, wavefront sensors, deformable mirrors, and lasers with high-speed control systems. The deformable mirror with a continuous membrane is a key component of these systems. This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. This technology is developed for the fabrication of a compact deformable mirror with a continuous facet. A 1 (mu)m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers (i.e. wax, epoxy, or photoresist). Smaller or larger diameter membranes can also be transferred using this technique. The fabricated actuator membrane with an electrode gap of 1.5 (mu)m shows a vertical deflection of 0.37 (mu)m at 55 V.
Micro Electro Mechanical Systems (MEMS)↗
MEMS-Based Force-Detected Nuclear Magnetic Resonance (FDNMR) Spectrometer
Nuclear Magnetic Resonance (NMR) spectroscopy allows assignment of molecular structure by acquiring the energy spectrum of nuclear spins in a molecule, and by interpreting the symmetry and positions of resonance lines in the spectrum. As such, NMR has become one of the most versatile and ubiquitous spectroscopic methods. Despite these tremendous successes, NMR experiments suffer from inherent low sensitivity due to the relatively low energy of photons in the radio frequency (rt) region of the electromagnetic spectrum. Here, we describe a high-resolution spectroscopy in samples with diameters in the micron range and below. We have reported design and fabrication of force-detected nuclear magnetic resonance (FDNMR).
force detected nuclear magnetic resonance (FDNMR)↗
MEMS Micro Valve for Space Applications
We report on the development of silicon micro valves for micro-propulsion and other space applications here at JPL.
valves↗
Scaling Laws of Microactuators and Potential Applications of Electroactive Polymers in MEMS
Besides the scale factor that distinguishes the various spices fundamentally biological muscles changes little between species indicating a highly optimized system. Electroactive polymer actuators offer the closest resemblance to biological muscles however beside the large actuation displacement these materials are falling short with regards to the actuation force.
MEMS↗
Total Dose Effects on Microelectromechanical Systems (MEMS): Accelerometers
Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers, which are fabricated with surface micromachining techniques are characterized for total dose radiation. An unusual failure mechanism that appears to be associated with the sensor was observed and presented in this paper.
mems↗
Radiation Response of a MEMS Accelerometer: An Electrostatic Force
Particle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage.
Particle↗