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Results for “Microelectromechanical systems”
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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A piezoelectric bimorph deformable mirror concept by wafer transfer for ultra large space telescopes
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MEMS adaptive optics
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MEMS Packaging and Reliability Challenges
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Comparison of IC and MEMS packaging reliability approaches
This paper reviews the current status of IC and MEMS packaging technology with emphasis on reliability, compares the norm for IC packaging reliability evaluation and identifies challenges for development of reliability methodologies for MEMS, and finally, proposes the use of COTS MEMS in order to start generating statistically meaningful reliability data as a vehicle for future standardization of reliability test methodology for MEMS packaging.
Microfabricated force-detected nuclear magnetic resonance spectrometer
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COTS Gyro evaluation for PICOSAT
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NEPP Cots Mems Programs
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Isolated post resonator mesogyroscope
A new symmetric vibratory gyroscope principle has been devised in which a central post proof mass is counter-rocked against an outer sensing plate such that the motion is isolated from the gyroscope case. Prototype gyroscopes have been designed and fabricated with micromachined silicon at mesoscale (20-cm resonator width), vs. microscale (e.g., 2-mm resonator width) to achieve higher sensitivity and machined precision. This novel mesogyro design arose out of an ongoing technical cooperation between JPL and Boeing begun in 1997 to advance the design of micro-inertial sensors for low-cost space applications. This paper describes the theory of operation of the mesogyro and relationships with other vibratory gyroscopes, the mechanical design, closed loop electronics design, bulk silicon fabrication and packaged gyroscope assembly and test methods. The initial packaged prototype test results are reported for what is believed to be the first silicon mesogyroscope.
MEMS-Based Micro Instruments for In-Situ Planetary Exploration
NASA's planetary exploration strategy is primarily targeted to the detection of extant or extinct signs of life. Thus, the agency is moving towards more in-situ landed missions as evidenced by the recent, successful demonstration of twin Mars Exploration Rovers. Also, future robotic exploration platforms are expected to evolve towards sophisticated analytical laboratories composed of multi-instrument suites. MEMS technology is very attractive for in-situ planetary exploration because of the promise of a diverse and capable set of advanced, low mass and low-power devices and instruments. At JPL, we are exploiting this diversity of MEMS for the development of a new class of miniaturized instruments for planetary exploration. In particular, two examples of this approach are the development of an Electron Luminescence X-ray Spectrometer (ELXS), and a Force-Detected Nuclear Magnetic Resonance (FDNMR) Spectrometer.
Tuning of MEMS Devices using Evolutionary Computation and Open-loop Frequency Response
We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.
Evolutionary Computation Applied to the Tuning of MEMS Gyroscopes
We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.
Reliability Issues of COTS MEMS for Aerospace Applications
This paper reviews the current status of MEMS packaging technology from COTS to specific application provides lessons learned, and finally, identifies a need for systematic approach for this purpose.
The Micro-Isolation Valve: Introduction of Concept and Preliminary Results
Strong recent interest with the aerospace community to build smaller spacecraft necessitates the development of space hardware able to fit the unique requirements with respect to mass, size, and power.
Proof-of-Concept Demonstration of a Vaporizing Liquid Micro-Thruster
Proof-of-concept testing of a microfabricated vaporizing liquid thruster was performed.
Radiation Response of a MEMS Accelerometer: An Electrostatic Force
Particle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage.
Multi-Dimensional Sensors and Sensing Systems
A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.