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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 253 records · Page 14
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

2 kV, 0.7 mΩ•cm2 Vertical Ga2O3 Superjunction Schottky Rectifier with Dynamic Robustness

We report the first experimental demonstration of a vertical superjunction device in ultra-wide bandgap (UWBG) Ga 2 O 3 . The device features 1.8 μm wide, 2×10 17 cm -3 doped n-Ga 2 O 3 pillars wrapped by the charge-balanced p-type nickel oxide (NiO). The sidewall NiO is sputtered through a novel self-align process. Benefited from the high doping in Ga 2 O 3 , the superjunction Schottky barrier diode (SJ-SBD) achieves a ultra-low specific on-resistance (R ON,SP ) of 0.7 mΩ•cm 2 with a low turn-on voltage of 1 V and high breakdown voltage (BV) of 2000 V. The R ON,SP ~BV trade-off is among the best in all WBG and UWBG power SBDs. The device also shows good thermal stability with BV > 1.8 kV at 175 °C. In the unclamped inductive switching tests, the device shows a dynamic BV of 2.2 kV and no degradation under 1.7 kV repetitive switching, verifying the fast acceptor depletion in NiO under dynamic switching. Such high-temperature and switching robustness are reported for the first time in a heterogeneous superjunction. These results show the great potential of UWBG superjunction power devices.

Qin, Yuan↗
DOE OSTI2022

Structural, Criticality, and Radiation Dose Calculations to Support SNF Loading into a DOE Standard Canister

The DOE Standard Canister Demonstration Project includes the development of an internal support structure (ISS) for the 4.6-m-long and 45.7-cm-diameter canister. This study presents structural evaluations, criticality safety assessments, and dose rate calculations conducted within the scope of the ISS design process to support smooth canister loading operations and to ensure safe storage, transportation, and disposal of Peach Bottom 1 Core II (PB2) and Fort St. Vrain (FSV) SNF, currently stored at INL’s CPP-603 facility. The ISS includes a 316L stainless-steel basket that holds 12 PB2 SNF rods. The PB2 basket rests on top of six individual, 78.7-cm-long, 316L stainless-steel columns that are equally spaced and welded to the inner canister wall at the lower end of the shell. These columns represent the FSV basket and can hold one FSV SNF element. An A92014 T6 aluminum spacer disc is bolted to the bottom plate of the PB2 basket to vertically restrain the FSV SNF element after the PB2 basket is placed inside the canister above the FSV basket. The structural evaluations of the ISS followed applicable ASME BPVC.III.3 guidelines and included finite element (FE) analyses of the PB2 basket structure; analyses of welds and bolds; buckling analyses of selected components, and acceptability assessments of the expected basket deformations under loading operations. The criticality safety assessments used the Monte Carlo N-Particle (MCNP) software architecture Version 6.2, including ENDF/B-V continuous-energy cross-section libraries, considering intact SNF in a single storage overpack or two multistorage overpack configurations and intact or failed SNF configured for disposal. The dose rate computations are based on source terms taken from the DOE Spent Fuel Database. The isotopic composition was decay corrected for the year 2022 using the ORIGEN module in the SCALE suite. A 19-group photon spectrum and a 27-group neutron-source spectrum were generated and used in MCNP to calculate estimated dose-equivalent rates, both on DOE Standard Canister contact and at a radial distance of 1 m from the canister surface. The results of this study indicate a structurally sound system that can uphold its criticality safety functions throughout its intended operational phases. Furthermore, this study provides confidence that sufficient radiological protection is technically achievable.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗
DOE OSTI2024

Exploring charge transport dynamics in a cryogenic P-type germanium detector

Abstract This study explores the dynamics of charge transport within a cryogenic P-type Ge particle detector, fabricated from a crystal cultivated at the University of South Dakota. By subjecting the detector to cryogenic temperatures and an Am-241 source, we observe evolving charge dynamics and the emergence of cluster dipole states, leading to the impact ionization process at 40 mK. Our analysis focuses on crucial parameters: the zero-field cross-section of cluster dipole states and the binding energy of these states. For the Ge detector in our investigation, the zero-field cross-section of cluster dipole states is determined to be 8.45 × 10 −11 ± 4.22 × 10 −12 cm 2 . Examination of the binding energy associated with cluster dipole states, formed by charge trapping onto dipole states during the freeze-out process, reveals a value of 0.034 ± 0.0017 meV. These findings shed light on the intricate charge states influenced by the interplay of temperature and electric field, with potential implications for the sensitivity in detecting low-mass dark matter.

Physics↗
DOE OSTI2024

Optical vibrational spectroscopic signatures related to U 3 O 8 production processes

Uranium ore concentrates are materials found early within the nuclear fuel cycle and contain high concentrations of uranium in an easily transported form, making the concentrates a likely target for illegal diversion. These concentrates are typically converted to U 3 O 8 for further processing and, therefore, may lose specific physicochemical characteristics in determining the materials’ source and processing history. In this work, we explore the Raman spectra of eight oxide samples produced from various uranium ore concentrates and processing pathways to examine the presence of spectroscopic signatures relating to each sample's process history. Samples produced from amine extraction and dialkylphosphoric acid extraction processes show unique characteristics due to high concentrations of α-UO 3 , whereas samples calcinated from metallic diuranates do not form pure α-U 3 O 8 because of metallic ion inclusions. Pure α-U 3 O 8 oxide samples are obtained through calcination of ammonium diuranate, ammonium uranyl carbonate, and metastudtite intermediates. The Raman spectra of these oxide samples show close agreement with pristine α-U 3 O 8 spectra. However, deviations from the pristine spectra are observed in the 300–460 cm -1 spectral range. In conclusion, these deviations are unique identifying signatures that were likely created by lasting effects from the process history. Spectral center of mass calculations indicate grouping of samples based on processing history.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2023

Time dependent chlorination of CeO 2 , La 2 O 3 and Nd 2 O 3 by ZrCl 4 dissolved in eutectic LiCl–KCl

Partial chlorination of CeO 2 , La 2 O 3 , and Nd 2 O 3 was achieved using ZrCl 4 dissolved in molten LiCl-KCl at 450°C over a period of 4-5 hr. ZrCl 4 was pre-volatilized into an argon stream to maintain a constant vapor pressure for equilibration with the salt. This approach was effective at maintaining the ZrCl 4 concentration at the solubility limit of 1.3 mol% in the molten salt throughout the duration of two of the chlorination experiments and within about 60% of the solubility limit in the third experiment. Based on the analysis of salt samples, fractional conversion after four hours of reaction for CeO 2 , and five hours for La 2 O 3 , and Nd 2 O 3 were calculated to be 0.97, 0.28, and 0.65 respectively. Assuming a shrinking core diffusion-limited model, the diffusivity of ZrCl 4 through the hypothesized ZrO 2 layer was calculated for the chlorination of CeO 2 , La 2 O 3 , and Nd 2 O 3 were 1.76 x 10 -10 cm 2 /sec, 7.85 x 10 -12 cm 2 /sec, and 7.42 x 10 -12 cm 2 /sec, respectively. Given the extremely low values calculated for diffusivity, it was concluded that the process is chemical reaction rate limited and that a complete reaction of each rare earth oxide could be achieved. Furthermore, a chemically controlled shrinking core model was shown to also fit the experimental data closely.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2020

Novel structured Sm 0.5 Sr 0.5 CoO 3-δ cathode for intermediate and low temperature solid oxide fuel cells

The performance of solid oxide fuel cell (SOFC) can be significantly enhanced using nanostructured cathode obtained by infiltration/impregnation method. However, this method has been limited due to multi-step preparation process and instability of the obtained nanoscale catalyst under long-term operation. We report here a simple, cost-effective and reproducible approach to fabricate nanostructured Sm 0.5 Sr 0.5 CoO 3-δ (SSC) cathode with enhanced performance and stability. The SSC powders were prepared by a freeze-drying method through a combustion route using Pluronic F-127 as the template. The SSC freeze-drying powders have unique morphology and a significant phase change at 750 °C. The oxygen non-stoichiometry (δ) of the SSC powders is 0.18 at room temperature, while the δ values are 0.66, 0.75 and 0.90 at 600 °C, 700 °C and 800 °C, respectively. The novel structured SSC cathode was prepared by screen-printing and one-step sintering process using the freeze-drying SSC powders. Maximum cell power densities of 0.83 and 1.13 W cm -2 are achieved at 550 °C and 600 °C, respectively for single cells with the novel structured SSC cathode. Moreover, single cells show excellent stability at 600 °C under a current density of 600 mA cm -2 over 250 h. This work expands opportunities to exploit nanotechnology in a wide range of intermediate and low temperature energy conversion devices.

25 ENERGY STORAGE↗
DOE OSTI2024

Experimental upper bounds for resonance-enhanced entangled two-photon absorption cross section of indocyanine green

Resonant intermediate states have been proposed to increase the efficiency of entangled two-photon absorption (ETPA). Although resonance-enhanced ETPA (r-ETPA) has been demonstrated in atomic systems using bright squeezed vacuum, it has not been studied in organic molecules. We investigate for the first time r-ETPA in an organic molecular dye, indocyanine green (ICG), when excited by broadband entangled photons in near-IR. Similar to many reported virtual state mediated ETPA (v-ETPA) measurements, no r-ETPA signals are measured, with an experimental upper bound for the cross section placed at 6(±2) × 10 −23 cm 2 . In addition, the classical resonance-enhanced two-photon absorption (r-TPA) cross section of ICG at 800 nm is measured for the first time to be 20(±13) GM, where 1 GM equals 10 −50 cm 4 s, suggesting that having a resonant intermediate state does not significantly enhance two-photon processes in ICG. Furthermore, the spectrotemporally resolved emission signatures of ICG excited by entangled photons are also presented to support this conclusion.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2024

Magnetically oriented nanosheet interlayer for dynamic regeneration in lithium metal batteries

Lithium (Li) metal has been recognized as a promising anode to advance the energy density of current Li-based batteries. However, the growth of the solid–electrolyte interphase (SEI) layer and dendritic Li microstructure pose significant challenges for the long-term operation of Li metal batteries (LMBs). Herein, we propose the utilization of a suspension electrolyte with dispersed magnetically responsive nanosheets whose orientation can be manipulated by an external magnetic field during cell operation for realizing in situ regeneration in LMBs. The regeneration mechanism arises from the redistribution of the ion flux and the formation of an inorganic-rich SEI for uniform and compact Li deposition. With the magnetic-field-induced regeneration process, we show that a Li||Li symmetric cell stably operates for 350 h at 2 mA cm −2 and 2 mA h cm −2 , ~5 times that of the cell with the pristine electrolyte. Furthermore, the cycling stability can be significantly extended in the Li||NMC full cell of 3 mA h cm −2 , showing a capacity retention of 67% after 500 cycles at 1C. The dynamic Li metal regeneration demonstrated here could bring useful design considerations for reviving the operating cells for achieving high-energy, long-duration battery systems.

Ju, Zhengyu↗
DOE OSTI2024

Improving tubular protonic ceramic fuel cell performance by compensating Ba evaporation via a Ba-excess optimized proton conducting electrolyte synthesis strategy

Protonic ceramic fuel cells (PCFCs) are emerging as a promising technology for reduced temperature ceramic energy conversion devices. The BaCe 0.4 Zr 0.4 Y 0.1 Yb 0.1 O 3–δ (BCZYYb4411) electrolyte is notable for its high proton conductivity. However, the tendency of barium to volatilize in BCZYYb4411 during high-temperature sintering compromises its chemical stability and performance. This study investigates the effects of intentionally incorporating excess barium into BCZYYb4411, formulated as Ba 1+x Ce 0.4 Zr 0.4 Y0.1Yb 0.1 O 3–δ (where x = 0, 0.1, 0.2, and 0.3), with the aim of compensating barium evaporation and enhancing the physical and chemical properties. We find that excess barium results in a greater shrinkage rate, facilitating a denser electrolyte structure. This barium-enriched electrolyte demonstrates improved electrochemical performance by effectively counteracting the deleterious effects of barium evaporation. Applying this strategy to tubular PCFCs, we achieved a peak power density of 480 mW•cm –2 at 600 °C. This unique approach provides a simple, tunable, and easy-to-implement processing modification to achieve high-performance tubular PCFC.

25 ENERGY STORAGE↗
DOE OSTI2020

Soil Water Content (m3 m-3) located in Santarem, Brazil K67, July 2000 - February 2004

Hourly data processed to monthly. Data collected from Eddy Covariance Flux Tower at the near-surface (0-10 cm). Site located at a latitude -3.02 deg N, longitude -54.97 deg E. Data was downloaded from the FluxNet soil moisture data network and is publicly available. Data from this site is referenced as Brazil (3) in Table 1 and Figure 4 of Solander et al., 2020, The pan-tropical soil moisture response to El Nino, Hydrol. Earth Syst. Sci., in press.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2023

The Fermilab SSR1 and HB650 Synoptic and EPICS remote cryogenic control system

The 325MHz Single Spoke Resonator 1 (SSR1) Cryomodule (CM) has a 5.3-meter length, and it has 288-liter liquid helium @ 4.5K mode. The High Beta 650 MHz (HB650) CM contains six elliptical cavity cryomodules, has a 9.9-meter overall length and it has 530-liter liquid helium. The SSR1 and HB650 CM had been tested at Fermilab Cryomodule Test Facility (CMTF). Their cryogenic control system includes the Siemens Process Control System S7-400, Automation Direct DL205 PLC, and remote synoptic HMI/EPICS Phoebus GUI. This paper presents a method which has been successfully used by Fermilab PIP2 IT cryogenic remote on-line, real-time control systems.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2023

A Guideline to Mitigate Interfacial Degradation Processes in Solid‐State Batteries Caused by Cross Diffusion

Abstract Diffusion of transition metals across the cathode–electrolyte interface is identified as a key challenge for the practical realization of solid‐state batteries. This is related to the formation of highly resistive interphases impeding the charge transport across the materials. Herein, the hypothesis that formation of interphases is associated with the incorporation of Co into the Li 7 La 3 Zr 2 O 12 lattice representing the starting point of a cascade of degradation processes is investigated. It is shown that Co incorporates into the garnet structure preferably four‐fold coordinated as Co 2+ or Co 3+ depending on oxygen fugacity. The solubility limit of Co is determined to be around 0.16 per formula unit, whereby concentrations beyond this limit causes a cubic‐to‐tetragonal phase transition. Moreover, the temperature‐dependent Co diffusion coefficient is determined, for example, D 700 °C = 9.46 × 10 −14 cm 2 s −1 and an activation energy E a = 1.65 eV, suggesting that detrimental cross diffusion will take place at any relevant process condition. Additionally, the optimal protective Al 2 O 3 coating thickness for relevant temperatures is studied, which allows to create a process diagram to mitigate any degradation with a minimum compromise on electrochemical performance. This study provides a tool to optimize processing conditions toward developing high energy density solid‐state batteries.

Chemistry↗
DOE OSTI2020

Correlating Macro and Atomic Structure with Elastic Properties and Ionic Transport of Glassy Li 2 S‐P 2 S 5 (LPS) Solid Electrolyte for Solid‐State Li Metal Batteries

Abstract A combination of high ionic conductivity and facile processing suggest that sulfide‐based materials are promising solid electrolytes that have the potential to enable Li metal batteries. Although the Li 2 S‐P 2 S 5 (LPS) family of compounds exhibit desirable characteristics, it is known that Li metal preferentially propagates through microstructural defects, such as particle boundaries and/or pores. Herein, it is demonstrated that a near theoretical density (98% relative density) LPS 75‐25 glassy electrolyte exhibiting high ionic conductivity can be achieved by optimizing the molding pressure and temperature. The optimal molding pressure reduces porosity and particle boundaries while preserving the preferred amorphous structure. Moreover, molecular rearrangements and favorable Li coordination environments for conduction are attained. Consequently, the Young's Modulus approximately doubles (30 GPa) and the ionic conductivity increases by a factor of five (1.1 mS cm −1 ) compared to conventional room temperature molding conditions. It is believed that this study can provide mechanistic insight into processing‐structure‐property relationships that can be used as a guide to tune microstructural defects/properties that have been identified to have an effect on the maximum charging current that a solid electrolyte can withstand during cycling without short‐circuiting.

Garcia‐Mendez, Regina↗
DOE OSTI2021

r-Process Radioisotopes from Near-Earth Supernovae and Kilonovae

The astrophysical sites where r-process elements are synthesized remain mysterious: it is clear that neutron star mergers (kilonovae (KNe)) contribute, and some classes of core-collapse supernovae (SNe) are also possible sources of at least the lighter r-process species. The discovery of 60Fe on the Earth and Moon implies that one or more astrophysical explosions have occurred near the Earth within the last few million years, probably SNe. Intriguingly, 244 Pu has now been detected, mostly overlapping with 60 Fe pulses. However, the 244 Pu flux may extend to before 12 Myr ago, pointing to a different origin. Here, motivated by these observations and difficulties for r-process nucleosynthesis in SN models, we propose that ejecta from a KN enriched the giant molecular cloud that gave rise to the Local Bubble, where the Sun resides. Accelerator mass spectrometry (AMS) measurements of 244 Pu and searches for other live isotopes could probe the origins of the r-process and the history of the solar neighborhood, including triggers for mass extinctions, e.g., that at the end of the Devonian epoch, motivating the calculations of the abundances of live r-process radioisotopes produced in SNe and KNe that we present here. Given the presence of 244 Pu, other r-process species such as 93 Zr, 107 Pd, 129 I, 135 Cs, 182 Hf, 236 U, 237 Np, and 247 Cm should be present. Their abundances and well-resolved time histories could distinguish between the SN and KN scenarios, and we discuss prospects for their detection in deep-ocean deposits and the lunar regolith. We show that AMS 129 I measurements in Fe–Mn crusts already constrain a possible nearby KN scenario.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2024

Failure Process During Fast Charging of Lithium Metal Batteries with Weakly Solvating Fluoroether Electrolytes

While improving the lithium metal (Li) Coulombic efficiency has been a focus for electrolyte design, the performance under high current densities is less studied yet highly relevant for practical applications. Here, we evaluate the charge-rate-dependent cycling stability using three types of weakly solvating fluoroether electrolytes. Although good cycle life was achieved in all three electrolytes under low current densities, they all exhibited a soft shorting behavior above various threshold current densities (between 2 and 5.2 mA cm –2 ). In this study, we attributed the current-dependent electrode morphology to both Li growth and residual solid electrolyte interface (rSEI) growth processes. In early cycles, Li morphology guided the formation of rSEI structures. In later cycles, the rSEI structure partially impacted Li growth. Under low current densities, the rSEI was inhomogeneous with large voids for subsequent bulky lithium growth. Under high current densities, the rSEI became more dense, which aggravated the high-surface/volume-ratio Li growth through and on the top of the rSEI. Among the three weakly solvating fluoroether electrolytes, the ones with lower ionic conductivity were observed to short within fewer cycles and at lower charge current densities. Our work suggests that fast ion transport in electrolytes may be a desirable feature for the stable operation at >1C charging in high-energy-density lithium metal batteries.

25 ENERGY STORAGE↗
DOE OSTI2024

Reactive transport modeling of the Aquifer Thermal Energy Storage (ATES) system at Stockton University, New Jersey during seasonal operations

Hydrogeochemical processes associated with Aquifer Thermal Energy Storage (ATES) operations can often impact the system performance owing to mineral precipitation either at the wellbore or in the aquifer owing to changes in temperature and fluid disequilibria. Although failure of ATES systems due to mineral precipitation ("fouling") is common, predictive reactive-transport models have rarely been applied to plan their design and operation. Here, the objective of this study is to develop a reactive-transport model by coupling thermal, hydrological, and chemical (THC) processes to evaluate effects of introduced atmospheric oxygen on water chemistry, mineral precipitation/dissolution, porosity, and permeability changes associated with an ATES system at Stockton University (New Jersey, USA). The THC model builds on a Thermal-Hydrological-Mechanical (THM) model of the site that evaluated system failure owing to possible fracturing in the caprock or around the wellbore. The causes of the system failure are not known – potential causes include hydraulic fracturing owing to elevated pump pressures that took place, a flow pathway created by one of the boreholes, or a pre-existing natural hydrologic connection between the upper unconfined aquifer and the ATES aquifer, any of which could have led to oxygenated water entering the reservoir and causing the observed Fe-oxide fouling on well screens. The THC model is used to evaluate some of the hypotheses and observations regarding system failure owing to geochemical processes. The reactive-transport code TOUGHREACT V4 was used to model the THC processes during seasonal heating and cooling operations at the Stockton ATES site over 6 years of operation. In the THC simulations, the primary effects on geochemistry were observed when the injection water is saturated with atmospheric oxygen. Simulations show greater precipitation of goethite near the cold wells as compared to the warm wells. Although volume fractions of Fe-hydroxides were relatively small, the model was aimed at processes in the aquifer at the scale of meters and larger rather than at the scale of mm or cm (i.e., a well screen). Kaolinite is the dominant precipitating phase, also around the cold wells. Illite dissolves near the cold wells and precipitates near the warm wells. There is a net decrease in the porosity near the cold wells and increase near the warm wells, although a slight amount of thermal contraction near the cold wells and expansion near the warm wells is responsible for a significant proportion of the porosity change. Owing to the coarse discretization of the numerical grid near the wells (compared to the screen thickness) the magnitude of permeability changes at the wellbore are likely underestimated. The reactive transport model in this study can be used for characterization of aquifers, optimizing the operational parameters (temperature, pressure, pH etc.), and planning of mitigation strategies for ATES systems.

15 GEOTHERMAL ENERGY↗
DOE OSTI2021

AlCl 3 -Dosed Si(100)-2 × 1: Adsorbates, Chlorinated Al Chains, and Incorporated Al

The adsorption of AlCl 3 on Si(100) and the effect of annealing the AlCl 3 -dosed substrate were studied to reveal key surface processes for the development of atomic-precision, acceptor-doping techniques. This investigation was performed via scanning tunneling microscopy (STM), X-ray photoelectron spectroscopy (XPS), and density functional theory (DFT) calculations. At room temperature, AlCl 3 readily adsorbed to the Si substrate dimers and dissociated to form a variety of species. Annealing the AlCl 3 -dosed substrate at temperatures below 450 °C produced unique chlorinated aluminum chains (CACs) elongated along the Si(100) dimer row direction. An atomic model for the chains is proposed with supporting DFT calculations. Al was incorporated into the Si substrate upon annealing at 450 °C and above, and Cl desorption was observed for temperatures beyond 450 °C. Al-incorporated samples were encapsulated in Si and characterized by secondary ion mass spectrometry (SIMS) depth profiling to quantify the Al atom concentration, which was found to be in excess of 10 20 cm –3 across a ~2.7 nm-thick δ-doped region. Here, the Al concentration achieved here and the processing parameters utilized promote AlCl 3 as a viable gaseous precursor for novel acceptor-doped Si materials and devices for quantum computing.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

An etching system based on the interaction of electrons extracted from a direct current (DC) hollow-cathode (HC) Ar plasma and injected towards a Si3N4 covered silicon substrate located in the downstream reactive environment created by an additional remote CF 4 /O 2 plasma source was developed and evaluated. By controlling the properties of the injected beam electrons, this approach allows to deliver energy to a surface functionalized by exposure to reactive species, and initiate surface etching. The energy of the primary beam electrons is controlled by the acceleration voltage relative to the HC discharge. Ar atoms flow from the high-pressure HC discharge into the low pressure downstream reactive environment in the process chamber. For an acceleration voltage greater than the ionization potential of Ar and/or process gas species, the energetic primary beam electrons produce a secondary plasma in the process chamber, and can also cause additional dissociation. We have characterized the properties of the secondary plasma and also surface etching of Si 3 N 4 as a function of process parameters, including acceleration voltage (0-80 V), discharge current of the HC discharge (1-2 A), pressure (3.5-20 mTorr), source to substrate distance (1.5 to 5 cm), and feed gas composition (20% and 80% O2 in CF 4 /O 2 ). The electron energy probability function (EEPF) measured with a Langmuir probe about 2.5 cm below the extraction ring suggests several major groups of electrons for this situation, including high energy primary beam electrons with an energy that varies as the acceleration voltage is changed and low energy electrons produced by beam electron-induced ionization of the Ar gas in the process chamber. When a remote CF 4 /O 2 plasma is additionally coupled to the process chamber, Si 3 N 4 surfaces can be functionalized, and by varying the energy of the beam electrons, Si 3 N 4 etching can be induced by electron-neutral synergy effect with plasma-surface interaction. For conditions without beam electron injection, the remote plasma etching rate (ER) of Si 3 N 4 depends strongly on the O 2 concentration in the CF 4 /O 2 processing gas mixture and can be suppressed for O 2 -rich process conditions by the formation of a SiONF passivation layer on the Si 3 N 4 surface. The combination of the HC electron beam source with the remote plasma source (HCEB-RP) makes it possible to induce Si 3 N 4 etching for O 2 -rich remote plasma conditions where remote plasma by itself produces negligible Si 3 N 4 etching. The electron enhanced etching of Si 3 N 4 depends strongly on O 2 /CF 4 mixing ratio reflecting changing arrival rates of O and F species at the surface. Optical emission spectroscopy was used to estimate the ratio of gas phase F and O densities and found to be controlled by the gas mixing ratio and independent of HC EB operating conditions. At this time the detailed sequence of events operative in the etching mechanism is unclear. While the increase of the electron energy is ultimately responsible for initiating surface etching, at present we cannot rule out a role of ions from the simultaneously produced secondary plasma in plasma surface interaction mechanisms.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗