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294 records · Page 14

A Data-Driven Method for Modeling Creep-Fatigue Stress- Strain Behavior Using Neural ODEs

In this paper, we introduce a data-driven machine learning approach for modeling one-dimensional stress–strain behavior under cyclic loading, utilizing experimental data from the nickel-based Alloy 617. The study employs uniaxial creep–fatigue test data acquired under various loading histories and compares two distinct neural network-based ODE models. The first model, known as the black-box model, comprehensively describes the strain–stress relationship using a Neural ODE equation. To interpret this black-box model, we apply the Sparse Identification of Nonlinear Dynamical Systems (SINDy) technique, transforming the black-box model into an equation-based model using symbolic regression. The second model, the Neural flow rule model, incorporates Hooke’s Law for the linear elastic component, with the nonlinear part characterized by a Neural ODE. Both models are trained with experimental data to accurately reflect the observed stress–strain behavior. We conduct a detailed comparison with the standard Chaboche model, which includes three back stresses. Our results demonstrate that the neural network-based ODE models precisely capture the experimental creep–fatigue mechanical behavior, exceeding the standard Chaboche model’s accuracy. Furthermore, an interpretable model derived from the black-box neural ODE model through symbolic regression achieves accuracy comparable to the Chaboche model, enhancing its interpretability. The results highlight the potential of neural network-based ODE models to depict complex creep–fatigue behavior, eliminating the necessity for experts to define a specific, material-focused model form.

creep-fatigue

HTGR Multiphysics Application Drivers FY26 Updates

This report summarizes FY26 progress under the Nuclear Energy Advanced Modeling and Simulation (NEAMS) program's high-temperature gas-cooled reactor (HTGR) application driver work, covering a wide range of activities such as code validation and multi-physics code assessment. 1) A detailed SAM model of the High-Temperature Engineering Test Reactor (HTTR) was developed using a unique-block grouping approach, with an extended parallel thermal network method to capture block-to-block conduction and radiation heat transfer, and applied to steady-state simulations of the HTTR 30~MW and 9~MW cases. 2) In another activity, SAM's newly implemented multi-component gas flow model was validated against the Natural convection Shutdown heat removal Test Facility (NSTF) argon ingress experiment, correctly capturing the density-driven suppression and thermal recovery of natural circulation observed when argon is introduced into the air-cooled Reactor Cavity Cooling System (RCCS) loop. 3) For the OECD/NEA High Temperature Test Facility (HTTF) benchmark, we co-led the international benchmark activities as well as the OECD/NEA final benchmark report to be released at the end of this year. 4) Finally, the coupled Griffin-SAM modeling capability for pebble-bed HTGRs was advanced by verifying the Griffin neutronics solution against Serpent Monte Carlo for a realistic non-uniform temperature distribution, resolving several deficiencies in the SAM-to-Griffin temperature transfer scheme, and enabling distinct fuel kernel, moderator, and coolant temperatures for cross section feedback. These new features were demonstrated in a PBR load-following transient.

Lee, Alvin

Assessment of Near-Angle Scatter on Exo-Earth Coronagraphy

Near-Angle Scatter (NAS) of the host star’s light into the coronagraph dark hole may limit the ability of a potential Habitable Worlds Observatory (HWO) to detect and characterize an Earth-like planet around a Sun-like star. This paper summarizes a 5-year investigation of the impact of NAS on high-contrast coronagraphy. Science requirements were flowed down to a draft flux ratio noise ratio (FRN) error budget with allocations for NAS. The modeled sources of NAS include correlated (low and mid-spatial) surface structure, uncorrelated surface microroughness and coating structure, particulate contamination, micrometeoroid impacts and polarization leakage. The paper develops specifications for these sources of scattered light that meet their FRN error budget allocations, distinguishing between scatter that can and cannot be modulated. The development process utilizes an analytical expression that predicts scatter throughput into the dark hole based on BRDF/BSDF. Using this relationship, Photon Engineering performed a FRED® straylight analysis of the HWO EAC-1 (Exploratory Analytical Case #1) coronagraph to parametrically study predicted scattered light contrast in the dark hole. The model revealed that primary mirror microroughness or contamination is not a significant source of scattered light; the most critical surfaces are the smallest and those located closest to the coronagraph focal plane mask. The assessment found that uncorrelated microstructure, contamination, and micrometeoroid impacts require more investigation and potential significant sources of unmodulated scattered light, and highlights that slow thermal wavefront drift is an order of magnitude more impactful than fast mechanical jitter.

coronagraphy

Optimizing Porous Transport Layer Porosity for Proton Exchange Membrane Water Electrolysis

An empirical model is presented that describes anode-side losses related to porous transport layer (PTL) morphology in proton exchange membrane water electrolysis (PEMWE). The model is based on an advanced voltage breakdown analysis that links various overpotentials to PTL morphology. Custom Ti PTLs, spanning uncommonly low porosities (22 - 31%), were fabricated and analyzed with X-ray CT to obtain pore and particle size distributions. Particle size distributions were consistent across samples with an average particle diameter of 12.0?..mu..m, whereas average pore diameters ranged from 6.0 to 7.0?..mu..m. The PTLs were tested in standard PEMWE cell assemblies with anode catalyst loadings of 0.1 mgIr cm-2 to obtain polarization curves, electrochemical impedance spectra, and augmented Tafel analysis. The PTL-dependent anode side losses were deconvoluted and assigned to excess utilization, concentration, ion transport resistance, and electrical contact resistance overpotentials. The data and model reveal an optimal 20 - 28% PTL porosity region where utilization and contact resistance overpotentials are minimized without triggering concentration and ion transport losses related to water deprivation. The optimal PTL porosity depends on the operating current density and is demonstrated at realistic PEMWE water flow rates to establish PTL design guidance for operation at scale.

08 HYDROGEN

Osmotic and phoretic competition explains chemotaxic assembly and sorting

Microscale objects responding to chemical gradients by migrating toward or away from a preferred species is a simple yet constitutive mechanism by which transport occurs in biological organisms. Synthetic chemotaxis provides key physical descriptions of simplified systems that can be used in biological models, or in the creation of advanced responsive material systems. In this article, we provide a quantitative framework for understanding synthetic chemotaxis of microparticles which involves a competition between phoresis and osmosis. We present separate quantitative measurements of phoresis and osmosis acting on individual taxing particles, finding that phoresis follows the long-predicted v ∼ 1 / r 2 scaling while the osmotic contribution depends on the geometry and details of the system, and must be solved on a case-by-case basis. Through this, we are able to develop a more accurate picture of particle transport at the single particle level. Equipped with this approach, we go on to describe how high concentrations of particles in a symmetric chemical gradient grow close-packed hives that reach a steady-state size tunable through light intensity or particle size. Last, we demonstrate that mixed particles experiencing the same chemical gradient will selectively migrate toward or away depending on the nature of the particle surface, thereby locally sorting out a particular species. We anticipate these results will be important in describing both biological and synthetic chemotaxis in phoretic systems and should bring a wealth of studies that take advantage of competing osmotic flows to illicit unexpected dynamic active behavior.

Science & Technology - Other Topics

A Full-Induction Magnetohydrodynamics Solver for Liquid Metal Fusion Blankets in Vertex-CFD

Multiphysics modeling of liquid metal fusion blankets, which produce tritium and convert energy of neutrons created via fusion reactions into heat, is crucial for predicting performance, ensuring structural integrity, and optimizing energy production. While traditional blanket modeling of liquid metal flows during normal steady operating conditions commonly employs the inductionless approximation of the magnetohydrodynamics (MHD) equations, transient scenarios, when the plasma-confining magnetic field varies on millisecond time scales, require a full-induction MHD approach that dynamically evolves the magnetic field via the time-dependent induction equation. This paper presents the formulation, implementation, and initial verification of a full-induction MHD solver integrated within the open-source Vertex-CFD framework, which aims to achieve tight multiphysics coupling, a flexible software design enabling easy extension and addition of physics models, and performance portability across computing platforms. The solver utilizes finite element spatial discretization, implicit Runge–Kutta time integration, and an inexact Newton method to solve the resulting discrete nonlinear system, leveraging Trilinos packages for efficient computation. Verification against selected benchmark problems demonstrates accuracy and robustness of the solver. Furthermore, when the solver is applied to an idealized blanket model in 2.5D and full 3D, results obtained with Vertex-CFD are in good agreement with recently published quasi-2D simulations. These findings establish a computational foundation for future simulations of transient MHD phenomena in liquid metal blankets with Vertex-CFD, and open avenues for future extensions and performance optimizations.

Endeve, Eirik [ORNL] (ORCID:0000000312519507)

Time-History Statistics of Soot Formation in A Model Gas Turbine Combustor

Soot formation is a complex dynamic and intermittent process determined by properties of the fuel, combustor design, and combustor operation. Although the major steps in soot formation (i.e., formation of precursors, inception, growth and evolution) are similar for a variety of carbonaceous fuels, applications, and operating conditions, it remains unclear when the temporal transition between these steps occurs. An engineering prediction tool coupled with computational fluid physics (CFD), therefore needs to accurately model all these complex steps. To develop such a model, we propose the time-history concept for understanding the time dependency of soot formation as a function of local properties (i.e., temperature, velocity, local fuel air ratio, etc.). We continue our previous work with modeling the DLR aero-combustor [1] with our updated in-house CFD code, Open National Combustion Code (OpenNCC), that now includes a Multiple Time-Scale Flamelet Progress Variable approach and a the semi-empirical two-equation soot model. We injected massless tracer particles upstream of the injector region of the combustor to collect time-history statistics of the solution variables. The correlations between the collected statistics with respect to the experimental soot volume fraction data showed that time-history effect of certain flow variables, including turbulent kinetic energy (TKE), and multiple species is indeed important for soot formation. We then conducted a time-history based correlation analysis to determine the key species and the concentration ranges critical for soot formation (C6H5-based nucleation, acetylene-based surface growth, and oxidation with OH and O2). Based on the time-history correlation coefficient (THCC) analysis, we propose possible modifications to improve the current two-equation model.

LES

Mass Economy Evaluation for Integrated ECLSS and Propulsion Architecture

As missions in Low Earth Orbit (LEO) lengthen and extend to deep space, minimizing resupply needs becomes vital for sustaining crewed operations. Traditional life support systems depend on consumables resupplied from Earth, a method that is increasingly impractical for missions beyond LEO, such as lunar outposts or Mars transit. Long-duration missions require more efficient, autonomous systems that can recycle essential resources, particularly water and oxygen, to minimize the frequency and mass of resupply missions. The Environmental Control and Life Support System (ECLSS) is essential to such missions, with the International Space Station (ISS) serving as a testbed for advanced water recovery and partial oxygen recycling via physico-chemical methods. Yet, ECLSS and propulsion subsystems generally operate independently, despite overlapping requirements and potential areas for synergy. For instance, ECLSS byproducts, water, CO₂, and hydrogen, could be repurposed for propulsion, potentially reducing dedicated propellant mass and increasing overall system efficiency. One promising approach is to develop shared-resource architectures that integrate ECLSS with propulsion systems. This study examines the potential of such integration through the Sabatier CO₂ reduction process, focusing on water management as a key factor in system mass trade-offs. The Sabatier reaction produces water and methane from metabolic CO₂ and electrolytic hydrogen, partially closing the life support loop and providing methane, which could serve as a propellant. This integration could minimize waste, reduce resupply requirements, and enhance mission mass efficiency. A dynamic modeling framework will be used to simulate resource flows over long missions, capturing interactions between life support and propulsion. By comparing integrated versus separate system configurations, the study aims to quantify mass benefits and penalties, informing future habitat designs and trade studies for missions prioritizing autonomy and mass efficiency.

ECLSS

High Energy Hydroforming Friction Stir Welded 2050 Al-Li Blanks for Aerospace Domes and Cones

Friction stir welded (FSW) aluminum blanks offer larger preform sizes than available from the mill in single width plates. Large blanks made from aerospace-grade aluminum alloys are essential for making large domes and cones for launch vehicles and crew vehicles. Previous research efforts have demonstrated >5m FSW blanks can be formed into large domes or cones using spin forming, but the subsequent solution heat treatment consistently led to abnormal grain growth (AGG). The AGG phenomenon occurs because the FSW blanks must be spin formed in the -O annealed temper to withstand the high strain process without cracking. Subsequently, the solution heat treatment process leads to the onset of AGG, whereby a small number of grains grow much larger than the surrounding matrix. Ultimately, the large grains and bimodal grain-size distribution leads to unacceptable ductility in the short-transverse direction of the part. Alternatively, explosive hydroforming is a nascent process that can be applied to large and thick aerospace-grade aluminum alloy blanks in the -T3 temper and only require a post-forming artificial aging process to a -T8. Avoiding the solution heat treatment (SHT) process mitigates AGG, and also eliminates the need for very rare drop-furnace quench baths that can accommodate a part size larger than 5m in diameter. This presentation summarizes a Lockheed Martin-led effort that demonstrated explosive hydroforming of a 1.9m diameter, 39mm thick 2050 aluminum lithium FSW blank. Details will be provided on the process flow, mechanical properties, and metallographic analyses. This work was performed in partnership with NASA Langley Research Center (LaRC) under a NASA Announcement of Collaboration Opportunities program.

Friction stir welded blank

Mass Economy Evaluation for Integrated ECLSS and Propulsion Architecture

As missions in low Earth orbit (LEO) lengthen and extend to deep space, minimizing resupply needs becomes vital for sustaining crewed operations. Traditional life support systems depend on consumables resupplied from Earth, a method that is increasingly impractical for missions beyond LEO, such as lunar outposts or Mars transit. Long-duration missions require more efficient, autonomous systems that can recycle essential resources, particularly water and oxygen, to minimize the frequency and mass of resupply missions. The Environmental Control and Life Support System (ECLSS) is essential to such missions, with the International Space Station (ISS) serving as a testbed for advanced water recovery and partial oxygen recycling via physico-chemical methods. Yet, ECLSS and propulsion subsystems generally operate independently, despite overlapping requirements and potential areas for synergy. For instance, ECLSS byproducts, water, CO 2 , and hydrogen, could be repurposed for propulsion, potentially reducing dedicated propellant mass and increasing overall system efficiency. One promising approach is to develop shared-resource architectures that integrate ECLSS with propulsion systems. This study examines the potential of such integration through the Sabatier CO₂ reduction process, focusing on water management as a key factor in system mass trade-offs. The Sabatier reaction produces water and methane from metabolic CO 2 and electrolytic hydrogen, partially closing the life support loop and providing methane, which could serve as a propellant. This integration could minimize waste, reduce resupply requirements, and enhance mission mass efficiency. A dynamic modeling framework will be used to simulate resource flows over long missions, capturing interactions between life support and propulsion. By comparing integrated versus separate system configurations, the study aims to quantify mass benefits and penalties, informing future habitat designs and trade studies for missions prioritizing autonomy and mass efficiency.

ECLSS

Two-dimensional non-equilibrium melting of charged colloids

Thermodynamic two-dimensional melting has been extensively studied in experiments and simulations, and is well predicted by theory. For systems in equilibrium, this transition is well described by the Kosterlitz–Thouless–Halperin–Nelson–Young theory, where melting is directly linked to the unbinding of topological defects. For driven, non-equilibrium melting and other non-equilibrium phase transitions, the picture is less clear. Here, in this work, we study the two-dimensional melting of a crystal of charged colloids. By randomly replacing some charged colloids with magnetic colloids, we can melt our system by rotating a fraction of the particles to create non-equilibrium, hydrodynamic random flows and local stresses. We can also melt it thermally by changing the particle number density. We find that an effective temperature approach cannot explain the results of our driven system. Rather, in both experiments and simulations, we observe that plotting the hexatic order parameter and the hexatic correlation’s exponent versus the density of disclinations and dislocations, respectively, yields universal curves. This implies that in our systems, two-dimensional melting depends directly on the density of topological defects and is independent of whether thermal or non-equilibrium forces generate them.

critical phenomena

The Use of Immersion Rigs for High Temperature Hydrogen Exposure Testing within the Nuclear Thermal Rocket Element Environmental Simulator (NTREES): Thermal Soak Rig (TSR)

The Nuclear Thermal Rocket Element Environmental Simulator (NTREES) facility was purpose constructed to perform non-nuclear evaluations of nuclear thermal propulsion (NTP) system fuel materials and structures within prototypic thermochemical environments. This system has been utilized steadily in its ability to subject test specimens to thermochemical and thermohydraulic environments simulating that of an operating nuclear rocket engine. Fission heat is simulated by induction power and experiments are conducted within a ~1000 psi pressure vessel. Hydrogen is conventionally passed through the heated fuel surrogate test specimen while pressure, temperature, and gas species data are collected at various points along the experiment. In order to test fuel and material coupon samples, a class of test apparatus named “immersion rigs” are being developed and employed to more rapidly test these smaller and more technically challenging test specimen. One example of a promising potential fuel structure, Tristructural-isotropic (TRISO) particles, presents unique challenges for testing of this type. TRISO fuel micro-particles are spheroids typically on the order of 500 – 1000 μm in diameter, and exposing a batch sample to hot hydrogen requires purpose-built special test equipment. Thusly, an immersion rig was developed and successfully demonstrated to expose ~1 g of micro-particles to hydrogen gas at temperatures and pressures relevant to NTP systems for the purpose of fuel evaluation. The rig, comprised primarily of graphite and pure tungsten, houses in its core a batch of micro-particles between pucks of porous silicon carbide (SiC). This approach permits gas flow while simultaneously retaining the particles in place. Herein is a discussion of the design, analysis, fabrication, and testing of the NTREES Thermal Soak Rig (TSR).

Space Nuclear Propulsion

SimH 2 : an integrated techno-economic modeling framework for hydrogen pipeline infrastructure and network optimization

Large-scale hydrogen (H 2 ) pipeline transport design and network optimization have seldom been reported due to the lack of a cost model accounting for the relationship between transport cost and hydrogen mass flow rate. Here, this work introduced a system-level cost model for hydrogen pipeline transport at supercritical state and integrated it with an existing CO 2 pipeline network tool, SimCCS, for hydrogen-specific pipeline design and optimization. The Intermountain West (I-West) region of the U.S., historically dependent on fossil fuel-based economies, is chosen to demonstrate the capabilities of our H 2 pipeline cost model and transport network optimization platform called SimH 2 . Two scenarios are examined: one where the pipeline is not allowed to pass through disadvantaged communities and the other where it is permitted. The results highlight that incorporating disadvantaged-community constraints lead to longer pipeline routes and increased transport costs, reflecting the trade-offs involved in equitable infrastructure development. It is demonstrated that the newly developed SimH 2 tool not only enables the efficient design of H 2 transportation pipelines but also optimizes the network by accounting for local terrain and the presence of disadvantaged areas.

08 HYDROGEN

Host galaxies of ultra-strong Mg ii absorbers at z ∼ 0.7

ABSTRACT We report spectroscopic identification of the host galaxies of 18 ultra-strong Mg ii systems (USMg ii) at 0.6 ≤ z ≤ 0.8. We created the largest sample by merging these with 20 host galaxies from our previous survey within 0.4 ≤ z ≤ 0.6. Using this sample, we confirm that the measured impact parameters ($\rm 6.3\leqslant D[kpc] \leqslant 120$ with a median of 19 kpc) are much larger than expected, and the USMg ii host galaxies do not follow the canonical $\rm {\it W}_{2796}-{\it D}$ anticorrelation. We show that the presence and significance of this anticorrelation may depend on the sample selection. The $\rm {\it W}_{2796}-{\it D}$ anticorrelation seen for the general Mg ii absorbers show a mild evolution at low $\rm W_{2796}$ end over the redshift range 0.4 ≤ z ≤ 1.5 with an increase of the impact parameters. Compared to the host galaxies of normal Mg ii absorbers, USMg ii host galaxies are brighter and more massive for a given impact parameter. While the USMg ii systems preferentially pick star-forming galaxies, they exhibit slightly lower ongoing star-forming rates compared to main sequence galaxies with the same stellar mass, suggesting a transition from star-forming to quiescent states. For a limiting magnitude of mr < 23.6, at least 29 per cent of the USMg ii host galaxies are isolated, and the width of the Mg ii absorption in these cases may originate from gas flows (infall/outflow) in isolated haloes of massive star forming but not starbursting galaxies. We associate more than one galaxy with the absorber in $\ge 21~{{\ \rm per\ cent}}$ cases, where interactions may cause wide velocity spread.

Astronomy & Astrophysics

SERFE Ground Unit EVA Series After Three Year Spacesuit Stowage Period

NASA’s spacesuit government reference design for returning to the Moon is called the Exploration Extravehicular Mobility Unit (xEMU). The xEMU subassembly that provides life support, such as oxygen and thermal control, is the Portable Life Support System (PLSS). Inside the PLSS is a new technology that NASA wanted to test to provide cooling to the crew during EVAs (ExtraVehicular Activity). This technology is called the Spacesuit Water Membrane Evaporator (SWME). In order to test SWME in an improved thermal control loop (TCL) both on Earth and in Space, the Spacesuit Evaporation Rejection Flight Experiment (SERFE) was created. The Ground unit, or testbed at Johnson Space Center (JSC), tested the cooling technology in Earth’s gravity, while the Flight unit, or payload on the International Space Station (ISS), tested the cooling technology in micro-gravity. Since fluids flow differently in micro-gravity, testing in both environments would provide important data for improving cooling performance during EVAs. Both units completed 25 simulated EVAs with the same settings so SWME performance on the ground could be compared to the ISS. The Flight unit was completed first and performed EVAs on the ISS between 2020 and 2022. The Ground unit performed EVAs between 2021 and 2022. When the Flight unit came back from the ISS, it was taken apart for analysis. This analysis looked at how well SWME was able to maintain its heat rejection capability after various dwell times, such as a 90 day Airlock Coolant Loop Recovery (ALCLR) cycle, when the Extravehicular Mobility Unit (EMU) currently on the ISS would normally need maintenance. After a three year simulated spacesuit dwell, the Ground unit performed another EVA series in 2025 to test SWME’s shelf life. The results from this test series will inform mission planning as NASA plans to go back to the Moon and beyond.

Michael Lewandowski

SERFE Ground Unit EVA Series After Three Year Spacesuit Stowage Period

NASA’s spacesuit government reference design for returning to the Moon is called the Exploration Extravehicular Mobility Unit (xEMU). The xEMU subassembly that provides life support, such as oxygen and thermal control, is the Portable Life Support System (PLSS). Inside the PLSS is a new technology that NASA wanted to test to provide cooling to the crew during EVAs (ExtraVehicular Activity). This technology is called the Spacesuit Water Membrane Evaporator (SWME). In order to test SWME in an improved thermal control loop (TCL) both on Earth and in Space, the Spacesuit Evaporation Rejection Flight Experiment (SERFE) was created. The Ground unit, or testbed at Johnson Space Center (JSC), tested the cooling technology in Earth’s gravity, while the Flight unit, or payload on the International Space Station (ISS), tested the cooling technology in micro-gravity. Since fluids flow differently in micro-gravity, testing in both environments would provide important data for improving cooling performance during EVAs. Both units completed 25 simulated EVAs with the same settings so SWME performance on the ground could be compared to the ISS. The Flight unit was completed first and performed EVAs on the ISS between 2020 and 2022. The Ground unit performed EVAs between 2021 and 2022. When the Flight unit came back from the ISS, it was taken apart for analysis. This analysis looked at how well SWME was able to maintain its heat rejection capability after various dwell times, such as a 90 day Airlock Coolant Loop Recovery (ALCLR) cycle, when the Extravehicular Mobility Unit (EMU) currently on the ISS would normally need maintenance. After a three year simulated spacesuit dwell, the Ground unit performed another EVA series in 2025 to test SWME’s shelf life. The results from this test series will inform mission planning as NASA plans to go back to the Moon and beyond.

SWME

Efficient electrocatalytic valorization of chlorinated organic water pollutant to ethylene

Electrochemistry can provide an efficient and sustainable way to treat environmental waters polluted by chlorinated organic compounds. However, the electrochemical valorization of 1,2-dichloroethane (DCA) is currently challenged by the lack of a catalyst that can selectively convert DCA in aqueous solutions into ethylene. Here, in this work, we report a catalyst comprising cobalt phthalocyanine molecules assembled on multiwalled carbon nanotubes that can electrochemically decompose aqueous DCA with high current and energy efficiencies. Ethylene is produced at high rates with unprecedented ~100% Faradaic efficiency across wide electrode potential and reactant concentration ranges. Kinetic studies and density functional theory calculations reveal that the rate-determining step is the first C–Cl bond breaking, which does not involve protons—a key mechanistic feature that enables cobalt phthalocyanine/carbon nanotube to efficiently catalyse DCA dechlorination and suppress the hydrogen evolution reaction. The nanotubular structure of the catalyst enables us to shape it into a flow-through electrified membrane, which we have used to demonstrate >95% DCA removal from simulated water samples with environmentally relevant DCA and electrolyte concentrations.

Choi, Chungseok [Yale Univ., New Haven, CT (United

CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System

The effective operation of atomic layer deposition (ALD) feeding system is the premise of realizing specific ALD processes. In the present work, a detailed computational fluid dynamics (CFD) model of the feeding system has been developed and validated, which accounts for the roles of ALD valves and manifolds. A numerical simulation of the compressible fluid flow and heat/mass transfer within the feeding system was conducted. The dosing amounts and the spatiotemporal distributions of the precursors can be accurately predicted using the CFD model, as validated by experimental results. Different precursors, operating conditions, and structures of the feeding system were simulated and analyzed to examine the operating flexibility of the feeding system. The simulation results can be adopted as the upstream boundary conditions for simulations of the ALD process in the reaction chamber. The substrate-scale simulation indicates that the effect of the feeding system on the film deposition is highly related to the surface kinetics of ALD. The present work can serve as a guide for the development and optimization of different ALD-based processes via proper operation and even the design of the feeding system.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH