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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 253 records · Page 14
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Correlative X-ray micro-nanotomography with scanning electron microscopy at the Advanced Light Source

Geological samples are inherently multi-scale. Understanding their bulk physical and chemical properties requires characterization down to the nano-scale. A powerful technique to study the three-dimensional microstructure is X-ray tomography, but it lacks information about the chemistry of samples. To develop a methodology for measuring the multi-scale 3D microstructure of geological samples, correlative X-ray micro- and nanotomography were performed on two rocks followed by scanning electron microscopy with energy-dispersive spectroscopy (SEM-EDS) analysis. The study was performed in five steps: (i) micro X-ray tomography was performed on rock sample cores, (ii) samples for nanotomography were prepared using laser milling, (iii) nanotomography was performed on the milled sub-samples, (iv) samples were mounted and polished for SEM analysis and (v) SEM imaging and compositional mapping was performed on micro and nanotomography samples for complimentary information. Correlative study performed on samples of serpentine and basalt revealed multiscale 3D structures involving both solid mineral phases and pore networks. Significant differences in the volume fraction of pores and mineral phases were also observed dependent on the imaging spatial resolution employed. This highlights the necessity for the application of such a multiscale approach for the characterization of complex aggregates such as rocks. Information acquired from the chemical mapping of different phases was also helpful in segmentation of phases that did not exhibit significant contrast in X-ray imaging. Adoption of the protocol used in this study can be broadly applied to 3D imaging studies being performed at the Advanced Light Source and other user facilities.

58 GEOSCIENCES↗
DOE OSTI2025

Versatile Cell Design for Molten Fluoride Salt Spectroscopy: Investigating Metal-Ion Speciation in Molten Fluoride Salts

Fluoride-based molten salts are widely used in industrial applications including aluminum production, thermal energy storage, optical crystal growth, and advanced nuclear reactor designs. Despite the wide range of uses, fundamental understandings of coordination chemistry and methods for probing molten fluorides are scarce, likely due to the difficulty of probing fluoride melts with spectroscopic techniques. Performing spectroscopic measurements of fluoride-based salts is challenging due to the highly corrosive nature of these salts, which can degrade many common optical materials. Here, in this work, we present a versatile optical cell design that enables spectroscopic measurements of corrosive melts. This innovative cell design overcomes the challenges posed by the corrosive nature of the salts, allowing for an accurate and consistent spectroscopic analysis. This work reports temperature-dependent absorption measurements for Co 2+ , Ni 2+ , and Cr 3+ analytes in LiF-NaF-KF eutectic salt (i.e., FLiNaK), which are common corrosion products originating from structural alloys in molten-fluoride handling. Absorption spectra were used to understand interactions of these analytes with FLiNaK, particularly ligand field coordination. The analysis of absorption spectra was complemented by structural analyses using ab initio molecular dynamics (AIMD) simulations, providing deeper insights into the behavior of the analytes in FLiNaK. Our findings indicate that the analytes studied in this work exist in octahedral or near-octahedral coordination states that remain stable across the temperature range of 500–600 °C. This work not only highlights an applied solution to performing optical spectroscopy in corrosive, high-temperature melts but also provides important fundamental insight on coordination behavior of transition-metal species in molten fluorides.

Fluoride salt spectroscopy↗
DOE OSTI2020

A Review of Machine Learning Applications in Power System Resilience

The integration of power electronics enabled devices and the high penetration of renewable energy drastically increase the complexity of power system operation and control. Power systems are still vulnerable to large-scale blackouts caused by extreme natural events or man-made attacks. With the recent development in artificial intelligence technique, machine learning has shown a processing ability in computational, perceptual and cognitive intelligence. It is an urgent challenge to integrate the advanced machine learning technology and large amount of real-time data from wide area measurement systems and intelligent electronic devices, in order to effectively enhance power system resilience and ensure the reliable and secure operation of power systems. Therefore, this paper aims to systematically review the existing application of machine learning methods on power system resilience enhancement, to expand the interest of researchers and scholars in this topic, and to jointly promote the application of artificial intelligence in the field of power systems.

Deep Learning↗
DOE OSTI2023

Robust In-Situ Strain Measurements to Monitor CO 2 Storage

The goal of this project was to develop and demonstrate robust instrumentation to monitor the in-situ strain tensor in order to improve the reliability and security of CO 2 storage in geologic formations. We met the original goals of the project and the major overarching accomplishment is the advancement of strain tensor monitoring from an intriguing concept to a commercially available technology with a solid foundation of novel instruments supported by theoretical analyses and validation experiments. The main accomplishments of the project are summarized below. We designed, built and evaluated nine new optical fiber strainmeters and tiltmeters using Michelson interferometers to measure deformation with ultra-high resolution at both shallow and deep point locations in the subsurface. These are the robust strainmeters that motivated the title of the project. We designed, built and evaluated a novel method of measuring distributed strain in optical fibers with nanostrain resolution, and cm-scale location, and sampling into the seismic band. The new method is called Coherence-length-gated Microwave Photonics Interfereometry (CMPI). CMPI technology has advantages over existing commercial DAS and DSS methods. We developed and demonstrated capabilities to deploy instruments in the field and used them to measure strain caused by ambient signals like barometric pressure and tides, as well as induced signals like surface loading and pore pressure changes from pumping tests. We deployed a working strainmeter at 1,700 ft depth, slightly above an active reservoir. This is to our knowledge the greatest depth a strainmeter has been deployed and the techniques we used can readily be extended to greater depths. Optical fiber borehole tensor strainmeter techology was advanced from a TRL 4 at the start, to a TRL of 7 at the conclusion of the project. The project included advances in simulations and theoretical analyses. We developed and demonstrated a computational workflow that uses machine learning to reduce the computational requirements and make it practical to use Bayesian inversion to solve large numerical poroelastic analyses needed to interpret strain tensor field data. We evaluated the strain tensor fields and time series that would be caused by leaks of CO 2 or other fluids from reservoirs. These simulations demonstrated that signals from leaks could be measured with instruments developed for the project, opening a potentially new method for ensuring storage security. We showed that strains in caprock can be used to estimate pressure in a reservoir. This avoids the need to drill monitoring wells into the reservoir, and it expands the capabilities of monitoring in the caprock. The project includes a derivation and application of a novel analytical solution to the strains in the vicinity of a pressurized poroelastic inclusion. This solution explains field data measured during injeciton tests at the North Avant Field, and it will simplify future interpretation of strain tensor data. The project included a broad range of experiments, and of the most significant is the characterization of the strain tensor at an array three strainmeters during six injection tests at the North Avant Field, Oklahoma. This demonstrated repeatability of the strain signal measured by the new instruments developed for the project, and it showed similarities between the strain signal at shallow depths and pressure in the underlying reservoir. We also demonstrated that useful strain data can be measured at reservoir depths. This confirms that strain tensor data can be measured throughout the caprock over a reservoir. The project demonstrated the feasibility of using the strain tensor and distributed strain measured in caprock during a variety of different well tests where the pumping rate was constant, sinusoidal and positive, or a periodic square wave with zero net rate. This further strengthens the validity of using strain data to characterize reservoirs and aquifers. We also demonstrated that strain caused be fluctuations of air pressure and water pressure in the vadose zone can be measured and interpreted, suggesting that high resolution distributed strain measurements hold promise for monitoring the vadose zone. The project partially supported nine graduate students in the Environmental Engineering, Hydrogeology, Electrical Engineering programs at Clemson University. The research was described in nine journal papers, 23 talks and conference abstracts. Additional journal papers are in preparation. A new company called Tensora was started to provide strainmeter technology for commercial applications.

01 COAL, LIGNITE, AND PEAT↗
DOE OSTI2026

Quantitative measurements of dislocations in metals for advancing predictive simulations

LLNL applications require scientists to predict how materials evolve under various thermomechanical conditions. While this is achieved through physics-based simulations, uncertainty in the predictions of mechanical properties remains a serious challenge that limits the predictive capabilities of models because we lack methods to compare predictions of atomic-scale defects (dislocations) with experimental measurements. High energy X-ray diffraction (HEXRD) is the most relevant technique that can provide the necessary statistical information on dislocations. However, this technique is not yet quantitative because we lack a precise understanding of the relationship between X-ray diffraction patterns and the underlying material dislocation content and arrangements. To address this need, we used our novel computational X-ray diffraction method to simulate the effect of dislocations on the diffraction patterns. We compared virtual and experimental diffraction patterns. Results allowed us to clearly establish the relationship between X-ray diffraction patterns and the underlying dislocation structures, proving that it is feasible to quantitatively measure dislocation statistics with HEXRD. This project delivered a method that can provide the missing piece to LLNL’s mechanical property simulations in advanced metals by obtaining experimentally long-needed quantitative dislocation data, which could fully enable predictive capabilities.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Field Testing of Safeguards Technologies in the Hot Fuel Examination Facility

Recent developments in nuclear fuel reprocessing techniques have yielded more efficient processes and fuel cycle options that strengthen the nuclear industry and production of clean energy. One such area of interest is pyroprocessing of used oxide fuel. However, with these advances in the back end of the nuclear fuel cycle, advances in safeguards instrumentation, measurements, and approaches are needed to ensure special nuclear material (SNM) is accounted for according to regulatory requirements. As a high-level overview of a nominal pyroprocessing approach, used oxide fuel from commercial light water reactors (LWR) is mechanically removed from the metallic cladding. Then the fuel is crushed and randomized representative samples are taken and sent to an analytical lab for analysis. The analytical results of the feed material are used for input accountancy into the rest of the process. The crushed oxide fuel is then moved to the oxide reduction (OR) furnace where it is reduced from an oxide to metallic form. The OR product is distilled to remove salt and then moved to an electrorefiner (ER), where it is immersed in a eutectic mixture of lithium chloride potassium chloride (LiCl-KCl) that typically ranges between 450-550 ?. Within the ER, the usable uranium is electrochemically transported through the molten salt from the anode to the cathode, and then subsequently removed as a relatively pure U product.. A simplified model of pyroprocessing techniques with added emphasis on the safeguards can be seen below in Fig. 1

11 - NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2025

Variable Bragg x-ray beam splitters

Beam splitters are utilized in a variety of advanced x-ray instruments and are essential for extending quantum optics techniques to x rays. A new fabrication method has produced thinned Bragg diffracting silicon devices with variable reflectivity and transmission coefficients and negligible absorption losses. Diffraction measurements confirm that silicon continues to exhibit perfect crystal diffraction even for thicknesses below two microns. Devices are machined from standard wafers, with the thinned regions contained within the robust frame of an unperturbed crystal for ease of handling.

Powers, L. T. (ORCID:000900047481248X)↗
DOE OSTI2024

Emerging Functionality in Transition-Metal Compounds Driven by Spatial Confinement and Broken Symmetry

This research project investigates the emerging functionality in transition-metal-compounds (TMCs) driven by spatial confinement and broken symmetry. It combines advanced growth capabilities with cutting-edge characterization and first principles theory to probe and control the properties of TMC interfaces, including the utilization and development of state-of-the-art atomically resolved electron microscopy and spectroscopy to determine the structure, composition, and bonding at TMC interfaces. The proposed research will focus on four challenging areas: 1) manipulate interfaces to design new material phases such as magnetic metals with unique polar structure (net dipole) to achieve multiple functionality; 2) explore electronic mismatch or screening at interfaces of insulating/poor metal TMCs to produce novel electronic and magnetic properties; 3) elucidate and exploit the role of defects, both point and extended, on the functionality of interfaces; 4) develop advanced electron microscopy/spectroscopy techniques to explore temperature dependent phase transitions and couple these structural tools with new nonlinear optical probes of the electronic structure. The research team aims to close the materials-by-design loop of make, measure, model, and modify. The program promises to enhance our ability to engineer the desired physical properties at interfaces, superlattices (periodic arrays of films of different compounds), and heterostructures of TMCs.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Bayesian Cloud Property Retrievals from ARM Active and Passive Measurements

The optimum use of the continuous measurements of thermodynamics, radiation, aerosols, clouds and precipitation from the DOE Atmospheric Radiation Measurement (ARM) program is key to achieve the DOE Atmospheric System Research (ASR)’s objectives. One of the key mission requirements is to retrieve cloud and precipitation properties, as well as vertical motion parameters, along the vertical cross- section defined by the profiling active sensors. Such retrievals are challenging to perform continuously in the entire spectrum of cloud and precipitation conditions due to the large natural microphysical and dynamical variability, the often-limited information content in the measurements, and the lack of proper characterization of measurement quality and uncertainty. Today, the acquisition of new remote and in-situ sensors by the ARM program creates opportunities to address the microphysical retrieval problem by exploiting new, more robust retrieval techniques and integrating various scattered advancements in both sensor techniques and retrieval algorithms. During this project, we constructed a robust Bayesian Markov chain Monte Carlo (MCMC) cloud property retrieval algorithm that includes a state of the art radar forward model. Our MCMC-based retrieval produces both the best estimate of height-resolved cloud and precipitation properties in the radar profile, as well as an estimate of the in-cloud vertical motion and turbulence. In addition, the MCMC algorithm automatically produces robust and flexible estimates of retrieval uncertainty. We tested the algorithm on several synthetic cloud profiles obtained from large eddy simulation (LES) models with bin-resolved microphysics.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2022

Environmentally Assisted Cracking Research for Current and Advanced Nuclear Structural Materials

Understanding environmentally assisted cracking is an important aspect of nuclear materials research, as it provides information about failure mechanisms that lead to safety concerns or shutdowns. Idaho National Laboratory has ongoing research to understand how materials behave in the harsh nuclear environments for both the current fleet of light water reactors, as well as advanced reactors, where materials are exposed to more extreme environments. Corrosion and cracking of current materials, advanced materials, and materials formed through advanced manufacturing techniques are being examined, with particular interest in irradiation effects on corrosion and cracking, as well as the effects of environmental impurities. Testing, such as stress corrosion cracking, corrosion fatigue, and in-situ crack growth measurements, as well as a suite of characterization tools, including electron microscopy techniques and x-ray computed tomography, are being utilized to better understand the material response, limitations, and cracking mechanisms to ensure safe and reliable nuclear plants.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Advanced Building Technologies for Energy Savings and Decarbonization

The building sector is a major consumer of energy, making it essential to explore innovative strategies for reducing its environmental impact. As we shift our focus toward decarbonization and electrification, the need for advanced building operation techniques and equipment becomes increasingly urgent. These advancements are crucial for maintaining or enhancing indoor environmental quality while simultaneously minimizing energy consumption. This Special Issue aims to showcase cutting-edge technologies in building energy management, alongside effective measurement and verification methods. It will also address fault detection and diagnosis approaches, leveraging both simulation and experimental studies. The ultimate goal is to highlight solutions that not only reduce CO₂ emissions but also improve indoor environmental quality, creating healthier and more sustainable living and working spaces. By presenting a diverse array of research contributions, this Special Issue will provide valuable insights into the latest advancements in building energy technologies. It will drive the discussion around effective strategies for energy efficiency and environmental sustainability in the building sector. These efforts can help transform buildings from energy consumers into more efficient spaces that contribute to reducing our overall carbon footprint.

Im, Piljae↗
DOE OSTI2021

Improved Gamma-Ray Point Source Quantification in Three Dimensions by Modeling Attenuation in the Scene

We discuss using a series of detector measurements taken at different locations to localize a source of radiation as a well-studied problem. The source of radiation is sometimes constrained to a single point-like source, in which case the location of the point source can be found using techniques such as maximum likelihood. Recent advancements have shown the ability to locate point sources in 2D and even 3D, but few have studied the effect of intervening material on the problem. In this work we examine gamma-ray data taken from a freely moving system and develop voxelized 3-D models of the scene using data from the onboard LiDAR. Ray casting is used to compute the distance each gamma ray travels through the scene material, which is then used to calculate attenuation assuming a single attenuation coefficient for solids within the geometry. Parameter estimation using maximum likelihood is performed to simultaneously find the attenuation coefficient, source activity, and source position that best match the data. Using a simulation, we validate the ability of this method to reconstruct the true location and activity of a source, along with the true attenuation coefficient of the structure it is inside, and then we apply the method to measured data with sources and find good agreement.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2025

Quantitative phase retrieval and characterization of magnetic nanostructures via Lorentz (scanning) transmission electron microscopy

Magnetic materials phase reconstruction using Lorentz transmission electron microscopy (LTEM) measurements have traditionally been achieved using longstanding methods such as off-axis holography (OAH) fast-Fourier transform technique and the transport-of-intensity equation (TIE). The increase in access to processing power alongside the development of advanced algorithms have allowed for phase retrieval of nanoscale magnetic materials with greater efficacy and resolution. Specifically, reverse-mode automatic differentiation (RMAD) and the extended electron ptychography iterative engine (ePIE) are two recent developments of phase retrieval that can be applied to analyzing micro-to-nano- scale magnetic materials. This work evaluates phase retrieval using TIE, RMAD, and ePIE in simulations of Permalloy (Ni 80 Fe 20 ) nanoscale islands, or nanomagnets. Extending beyond simulations, we demonstrate total phase retrieval and image reconstructions of a NiFe nanowire using OAH and RMAD in LTEM and ePIE in Lorentz-mode-4D scanning transmission electron microscopy experiments and determine the saturation magnetization through corroborations with micromagnetic modeling. Finally, we demonstrate the efficacy of these methods in retrieving the total phase and highlight its use in characterizing and analyzing the proximity effect of the magnetic nanostructures.

Lorentz transmission electron microscopy↗
DOE OSTI2025

Pump with Broadband Probe Experiments for Single-Shot Measurements of Plasma Conditions and Crossed-Beam Energy Transfer

Here, a novel technique for measuring plasma conditions using monochromatic pump-broadband-probe laser interactions has been experimentally demonstrated. Originally proposed in Ludwig et al. [Phys. Plasmas 26, 113108 (2019)], this method utilizes crossed-beam energy transfer between the broadband probe and the pump, mediated by plasma ion acoustic waves. The complete energy transfer spectrum can be captured in a single shot, enabling the inference of plasma parameters such as density, electron and ion temperatures, and flow velocity. Compared to Thomson scattering, this technique offers signal enhancements typically larger than 9 orders of magnitude, significantly reducing the required probe laser intensity and facilitating interactions that are linear and measurements that are nonperturbative of the plasma. Furthermore, it provides a powerful tool for advancing studies of crossed-beam energy transfer under conditions relevant to inertial confinement fusion experiments.

Physics - Plasma physics↗
DOE OSTI2023

Exploring and Embracing Heterogeneity in Atomically Thin Energy Materials

Atomically thin semiconductors offer extraordinary opportunities for the manipulation of charge carriers, many-body optical excitations, quantum light emitters, and non-charge based quantum numbers. Confinement and reduced dielectric screening in these two-dimensional (2D) materials give rise to large characteristic energies so that many-body and quantum effects are important even at room temperature. Optical excitations in extended homogeneous areas have been investigated intensely, albeit mostly focusing on a limited set of materials, particularly transition metal dichalcogenides. Much less understood are light-matter interactions for other classes of 2D semiconductors, as well as effects that arise in heterogeneous materials, either near naturally occurring defects, impurities, edges and grain boundaries, or as a result of intentional interface formation in heterostructures. Addressing such systems experimentally involves significant challenges: Understanding the atomistic growth mechanisms of 2D semiconductors, so that novel systems with designed properties, specific ‘imperfections’, or controlled interfaces can be realized; and probing of local excitations at scales that match the relevant (micrometer to nanometer) length scales in heterogeneous materials. In this research project, we addressed these challenges by harnessing quantitative in-situ microscopy to study the growth of 2D and layered semiconductors and heterostructures, combined with local spectroscopic measurements of quasiparticles excited at the nanometer scale. An integral part of the research has been the development of novel experimental approaches, both for in-situ microscopy of synthesis and for nanometer-scale spectroscopy. In particular, advanced techniques were developed for cathodoluminescence in scanning transmission electron microscopy (STEM-CL) where a nanometer-focused electron beam is used to locally excite electron-hole pairs, excitons, as well as propagating hybrid light-matter modes such as exciton-polaritons. Experiments were guided and analyzed via computations of structure, chemistry, and excitation spectra. The particular materials focus has been on group IV chalcogenides, a family of less explored 2D/layered semiconductors whose diversity in crystal structure and properties promises access to novel materials architectures and the discovery of phenomena that can support emerging technology needs.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Advanced Energy Scale Correction Techniques for the X-ray Transition Edge Sensors of the Athena mission

The X-ray Integral Field Unit (X-IFU) onboard the future European X-ray telescope Athena will be the first space instrument carrying an array of more than a thousand transition edge sensors. One of the key challenges of the X-IFU is the measurement of narrow X-ray atomic lines to determine velocity shifts at an unprecedented level of accuracy. For this reason, the energy scale of the instrument needs to be known with extreme accuracy, of 0.4 eV (1σ) up to 7 keV. The energy scale will be measured on the ground through a dedicated calibration campaign using fiducial X-ray sources. Though calibrated, the energy scale is extremely sensitive to the environmental conditions around the TES array, and drifts in the readout chain electronics. Uncorrected, the energy scale can naturally drift up to hundreds of eVs. Changes of the TES gain will be monitored via onboard X-ray calibration sources, and the energy scale will be corrected either per pixel, or within a small groups of pixels. Although simulations show that a 0.4 eV level can be achieved, the very high accuracy required by the X-IFU calls for experimental validation. A dedicated measurement campaign has been performed by NASA Goddard Space Flight Center to characterize the energy scale of a prototype kilo-pixel array of X-IFU-representative TESs. The analysis of the data demonstrated the ability to correct for various drifts using two fiducial lines to track the temporal gain variation. In this paper, we propose to extend this study on the same data set by investigating multi-parameter correction techniques based on both the pulse-height of the fiducial line and the prepulse baseline level, using the knowledge of the TES energy scale at reference temperature/magnetic field set points acquired on the ground. Investigations on the co-adding of pixels to perform a joint correction over pools of pixels is also explored.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2021

Microstructure and water absorption of ancient concrete from Pompeii: An integrated synchrotron microtomography and neutron radiography characterization

There is renewed interest in using advanced techniques to characterize ancient Roman concrete due to its exceptional durability and low-carbon footprint. In the present work, samples were drilled from the “Hospitium” in Pompeii and were analyzed by synchrotron microtomography (μCT) and neutron radiography to study how the microstructure, including the presence of induced cracks, affects their water adsorption. The water distribution and absorptivity were quantified by neutron radiography. The 3D crack propagation, pore size distribution and orientation, tortuosity, and connectivity were analyzed from μCT results using advanced imaging methods. Porosity was also measured by mercury intrusion porosimetry (MIP) as a reference. Ductile fracture patterns were observed once cracks were introduced. Compared to Portland cement mortar/concrete, the Pompeii samples had relatively high porosity, low connectivity, and a similar coefficient of capillary penetration. In addition, permeability was predicted from models based on percolation theory and pore structure data to evaluate the fluid transport properties. Understanding the microstructure of ancient Pompeii concrete is important because it could inspire the development of modern concrete with high durability.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Operando XPS in reactive plasmas: The importance of the wall reactions

In this article, advancements in differential pumping and electron optics over the past few decades have enabled x-ray photoelectron spectroscopy (XPS) measurements at (near-)ambient pressures, bridging the pressure gap for characterizing realistic sample chemistries. Recently, we have demonstrated the capabilities of an ambient pressure XPS setup for in situ plasma environment measurements, allowing plasma-surface interactions to be studied in operando rather than using the traditional before-and-after analysis approach. This new “plasma-XPS” technique facilitates the identification of reaction intermediates critical for understanding plasma-assisted surface processes relevant to semiconductor nanomanufacturing, such as physical vapor deposition, etching, atomic layer deposition, and many other plasma applications. In this paper, we apply the plasma-XPS approach to monitor real-time surface chemical changes on a model Ag(111) single crystal exposed to oxidizing and reducing plasmas. We correlate surface-sensitive data with concurrent gas-phase XPS measurements and residual gas mass-spectrum analysis of species generated during plasma exposure, highlighting the significant role of plasma-induced chamber wall reactions. Ultimately, we demonstrate that plasma-XPS provides comprehensive insights into both surface and gas-phase chemistry, establishing it as a versatile and dynamic characterization tool with broad applications in microelectronics research. Finally, we outline potential enhancements and future metrology directions to advance plasma-XPS investigations further.

36 MATERIALS SCIENCE↗