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DOE OSTI2023

AGC-2 Specimen Post Irradiation Data Package Report

This report documents results of the post-irradiation examination material property testing of the creep, control, and piggyback specimens from the irradiation creep capsule Advanced Graphite Creep (AGC)-2 are reported. This is the second of a series of six irradiation test trains planned as part of the AGC experiment to fully characterize the neutron irradiation effects and radiation creep behavior of current nuclear graphite grades. The AGC-2 capsule was irradiated in the Idaho National Laboratory Advanced Test Reactor at a nominal temperature of 600°C and to a peak dose of 5 dpa (displacements per atom). One half of the creep specimens were subjected to mechanical stresses (an applied stress of either 13.8, 17.2, or 20.7 MPa) to induce irradiation creep. All post-irradiation testing and measurement results are reported with the exception of the irradiation mechanical strength testing, which is the last destructive testing stage of the irradiation testing program. Material property tests were conducted on specimens from 15 nuclear graphite grades using a similar loading configuration as the first AGC capsule (AGC-1) to provide easy comparison between the two capsules. However, AGC-2 contained an increased number of specimens (i.e., 487 total specimens irradiated) and replaced specimens of the minor grade 2020 with the newer grade 2114. The data reported include specimen dimensions for both stressed and unstressed specimens to establish the irradiation creep rates, mass and volume data necessary to derive density, elastic constants (Young’s modulus, shear modulus, and Poisson’s ratio) from ultrasonic time of flight velocity measurements, Young’s modulus from the fundamental frequency of vibration, electrical resistivity, and thermal diffusivity and thermal expansion data from 100–500°C. No data outliers were determined after all measurements were completed. A brief statistical analysis was performed on the irradiated data and a limited comparison between pre- and post-irradiation properties is presented. A more complete evaluation of trends in the material property changes, as well as irradiation-induced creep due to irradiation, temperature, and applied load on specimens will be discussed in later AGC-2 post-irradiation examination analysis reports.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2024

AGC-4 Specimen Post-Irradiation Examination Data Interim Report

This interim report documents preliminary results of the post-irradiation examination material property testing from the fourth advanced graphite creep (AGC), AGC 4, capsule specimens. This is the fourth of a series of six irradiation test trains planned as part of the AGC experiment to fully characterize the neutron irradiation effects and radiation creep behavior of current nuclear graphite grades to moderate dose levels (=7 dpa). The AGC 4 capsule was irradiated in the Idaho National Laboratory Advanced Test Reactor at a nominal temperature of 800°C and to a peak dose of 8 dpa. Half of the AGC-4 specimens were subjected to compressive stresses to induce irradiation creep. Post-irradiation testing and measurement results are reported with the exception of thermal testing, which is still in progress, and irradiation mechanical strength testing. Additionally, some specimens initially deemed too hot to be examined in the ART Graphite laboratory may still be measured. The data reported includes specimen dimensions for both stressed and unstressed specimens to establish the irradiation creep rates, mass and dimensional data necessary to derive density, elastic constants (Young?s modulus, shear modulus, and Poisson?s ratio) from ultrasonic time of flight velocity measurements, Young?s modulus from the fundamental frequency of vibration, and electrical resistivity. A more complete evaluation of trends in the material property changes, as well as irradiation-induced creep due to the irradiation environment and applied load on the specimens, will be discussed later in AGC 4 post-irradiation examination analysis reports.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2025

AGC-4 Specimen Post-Irradiation Examination Data Interim Report

11 - NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2026

Grid-Forming and -Following Background, Future, and Strategies

This paper reviews current grid forming (GFM) and grid following (GFL) inverter control strategies and explores the optimized ratio between these assets in high-penetration inverter-based resource (IBR) grids. Two case studies demonstrate that an insufficient GFM ratio leads to instability, while increasing GFM participation improves fault recovery, voltage stability, and frequency regulation.

14 - SOLAR ENERGY↗

DOE OSTI2024

Microwave-Absorbing Foams with Adjustable Absorption Frequency and Structural Coloration

Microwave-absorbing materials with regulatable absorption frequency and optical camouflage hold great significance in intelligent electronic devices and advanced stealth technology. Herein, we present an innovative microwave-absorbing foam that can dynamically tune microwave absorption frequencies via a simple mechanical compression while in parallel enabling optical camouflage over broad spectral ranges by adjusting the structural colors. In this study, the vivid colors spanning different color categories generated from thin-film interference can be precisely regulated by adjusting the thickness of the conformal TiO 2 coatings on Ni/melamine foam. Enhanced interfacial and defect-induced polarizations resulting from the introduction of TiO 2 coating synergistically contribute to the dielectric attenuation performance. Consequently, such a foam exhibits exceptional microwave absorption capabilities, and the absorption frequency can be dynamically tuned from the S band to the Ku band by manipulating its compression ratio. Additionally, simulation calculations validate the adjustable electromagnetic wave loss behavior, offering valuable insights for the development of next-generation intelligent electromagnetic devices across diverse fields.

36 MATERIALS SCIENCE↗

DOE OSTI2025

Comprehensive defect evaluation of advanced nuclear fuels using high-resolution acoustic signals and optimized sensor separation

Graphite pebble composite structures based on TRistructural-ISOtropic (TRISO) particles are being developed as core nuclear fuels in advanced power reactors, promising safe operation at increased temperatures. Ensuring the structural integrity of these nuclear fuels requires comprehensive and accurate non-destructive evaluation (NDE) techniques to characterize defects and damage in the pebbles. However, traditional acoustic evaluation methods face limitations in defect characterization due to the highly attenuative, and geometrically and compositionally complex nature of these structures. This study proposes an improved acoustic NDE technique for accurate detection and classification of anticipated relevant defects and damage in graphite pebbles using high-resolution acoustic signals and optimized transmit-receive sensor networks. The proposed approach utilizes a triangular three-sensor network as the base unit, comprising three transmit-receive sensors. The sensor separation distance, as well as acoustic excitation center frequency, pulse-width, and bandwidth are optimized to enhance spatial resolution and improve signal-to-noise ratio, enabling effective characterization of the smallest size and widest range of defects in pebbles. Furthermore, the use of the triangular sensor configuration instead of a more conventional transmit-receive sensor pair expands the inspection region from a one-dimensional linear path to a two-dimensional area, increasing spatial coverage. To mitigate challenges associated with processing of complex acoustic signals arising from high-frequency, high-bandwidth excitation in these structures, a machine-learning-based signal processing algorithm is integrated with the sensor network. In the machine-learning-based algorithm, multi-domain features are extracted from the acoustic signals to capture intricate signal characteristics, significantly improving defect identification and classification compared to traditional approaches. The proposed acoustic NDE technique offers considerable promise for practical and reliable defect/damage diagnostics of advanced nuclear pebble fuels.

42 ENGINEERING↗

DOE OSTI2024

Boundary of the Distribution of Solar Wind Proton Beta versus Temperature Anisotropy

Abstract The frequency distribution of solar wind protons, measured in the vicinity of Earth’s orbit, is customarily plotted in ( β ∥ , T ⊥ / T ∥ ) phase space. Here, T ⊥ / T ∥ is the ratio of perpendicular and parallel temperatures, and β ∥ = 8 π nT ∥ / B 2 is the ratio of parallel thermal energy to background magnetic field energy, the so-called “parallel beta,” with ⊥ and ∥ denoting directions with respect to the ambient magnetic field. Such a frequency distribution, plotted as a two-dimensional histogram, forms a peculiar rhombic shape defined with an outer boundary in the said phase space. Past studies reveal that the threshold conditions for temperature anisotropy–driven plasma instability partially account for the boundary on the high- β ∥ side. The low- β ∥ side remains largely unexplained despite some efforts. Work by Vafin et al. recently showed that certain contours of collisional relaxation frequency, ν pp , when parameterized by T ⊥ / T ∥ and β ∥ , could match the overall shape of the left-hand boundary, thus suggesting that the collisional relaxation process might be closely related to the formation of the left-hand boundary. The present paper extends the analysis by Vafin et al. and carries out the dynamical computation of the collisional relaxation process for an ensemble of initial proton states with varying degrees of anisotropic temperatures. The final states of the relaxed protons are shown to closely match the observed boundary to the left of the ( β ∥ , T ⊥ / T ∥ ) phase space. When coupled with a similar set of calculations for the ensemble in the collective instability regime, it is found that the combined collisional/collective effects provide the baseline explanation for the observation.

Astronomy & Astrophysics↗

DOE OSTI2023

Clonality, local population structure, and gametophyte sex ratios in cryptic species of the Sphagnum magellanicum complex

Sphagnum (peatmoss) comprises a moss (Bryophyta) clade with approximately 300-500 species. The genus has unparalleled ecological importance because Sphagnum-dominated peatlands store almost a third of the terrestrial carbon pool and peatmosses engineer the formation and microtopography of peatlands. Genomic resources for Sphagnum are being actively expanded, but many aspects of their biology are still poorly known. Among these are the degree to which Sphagnum species reproduce asexually, and the relative frequencies of male and female gametophytes in these haploid-dominant plants. Here, we assess clonality and gametophyte sex ratios and test hypotheses about the local-scale distribution of clones and sexes in four North American species of the S. magellanicum complex. These four species are difficult to distinguish morphologically and are very closely related. We also assess microbial communities associated with Sphagnum host plant clones and sexes at two sites. 405 samples of the four species, representing 57 populations, were subjected to RADseq. Analyses of population structure and clonality based on the molecular data utilized both phylogenetic and phenetic approaches. Multi-locus genotypes (genets) were identified using the RADseq data. Sexes of sampled ramets were determined using a molecular approach that utilized coverage of loci on the sex chromosomes after the method was validated using a sample of plants that expressed sex phenotypically. Sex ratios were estimated for each species, and populations within species. Differences in fitness between genets was estimated as the numbers of ramets each genet comprised. Degree of clonality (numbers of genets/numbers of ramets [samples]) within species, among sites, and between gametophyte sexes were estimated. Sex ratios were estimated for each species, and populations within species. Sphagnum-associated microbial communities were assessed at two sites in relation to Sphagnum clonality and sex. All four species appear to engage in a mixture of sexual and asexual (clonal) reproduction. A single ramet represents most genets but 2-8 ramets were detected for some genets. Only one genet is represented by ramets in multiple populations; all other genets are restricted to a single population. Within populations ramets of individual genets are spatially clustered, suggesting limited dispersal even within peatlands. Sex ratios are male-biased in S. diabolicum but female-biased in the other three species, although significantly so only in S. divinum. Neither species nor males/females differ in levels of clonal propagation. At St. Regis Lake (NY) and Franklin Bog (VT), microbial community composition is strongly differentiated between the sites, but differences between species, genets, and sexes were not detected. Within S. divinum, however, female gametophytes harbored 2-3 times the number oi of microbial taxa as males. These four Sphagnum species all exhibit a similar reproductive patterns that result from a mixture of sexual and asexual reproduction. The spatial patterns of clonally replicated ramets of genets suggest that these species fall between the so-called phalanx patterns where genets abut one another but do not extensively mix, because of limited ramet fragmentation, and the guerrilla patterns where extensive genet fragmentation and dispersal results in greater mixing of different genets. Although sex ratios in bryophytes are most often female-biased, both male and female biases occur in this complex of closely related species. The association of far greater microbial diversity for female gametophytes in S. divinum, which has a female-biased sex ratio, suggests additional research to determine if levels of microbial diversity are consistently correlated with differing patterns of sex ratio biases.

59 BASIC BIOLOGICAL SCIENCES↗

DOE OSTI2023

Framework for phase transitions between the Maxwell and Gibbs constructions

By taking the nucleon-to-quark phase transition within a neutron star as an example, we present a thermodynamically consistent method to calculate the equation of state of ambient matter so that transitions that are intermediate to those of the familiar Maxwell and Gibbs constructions can be described. This method does not address the poorly known surface tension between the two phases microscopically (as, for example, in the calculation of the core pasta phases via the Wigner-Seitz approximation) but instead combines the local and global charge neutrality conditions characteristic of the Maxwell and Gibbs constructions, respectively. Overall charge neutrality is achieved by dividing the leptons to those that obey local charge neutrality (Maxwell) and those that maintain global charge neutrality (Gibbs). The equation of state is obtained by using equilibrium constraints derived from minimizing the total energy density. The results of this minimization are then used to calculate neutron star mass-radius curves, tidal deformabilities, equilibrium and adiabatic sound speeds, and nonradial g-mode oscillation frequencies for several intermediate constructions. Various quantities of interest transform smoothly from their Gibbs structures to those of Maxwell as the local-to-total electron ratio η, introduced to mimic the hadron-to-quark interface tension from 0 (Gibbs) to ∞ (Maxwell), is raised from 0 to 1. As a result, a notable exception is the g-mode frequency for the specific case of η = 1 for which a gap appears between the quark and hadronic branches.

79 ASTRONOMY AND ASTROPHYSICS↗

DOE OSTI2025

Evaluating methods to reduce duration of near-threshold fatigue crack growth rate measurements for low-alloy steels in hydrogen gas

Measurement of the near-threshold fatigue crack growth rate (da/dN) vs. stress-intensity factor range (∆K) relationship in hydrogen gas is essential for maximizing the calculated design fatigue life of high-pressure hydrogen storage vessels. However, such measurements are rarely performed, since the low cyclic loading frequencies applied in standard practice lead to prohibitively protracted test durations. The objective of this study was to demonstrate two means for reducing test durations when measuring near-threshold da/dN vs. ΔK relationships under decreasing ΔK for low-alloy pressure vessel steels in hydrogen gas: 1) imposing steeper K-gradients relative to the recommended limits in standards such as ASTM E647, and 2) increasing cyclic loading frequency relative to typical values applied during fatigue crack growth testing of low-alloy steels in hydrogen gas. Recognizing that steeper K-gradients could amplify loading-history effects, test methods employing this approach were designed to mitigate such effects by either maintaining constant K max or gradually increasing the K-gradient as the threshold was approached. Although the varying K-gradient method was vulnerable to loading-history effects in the form of plasticity-induced crack closure, particularly at lower stress ratio (R) and higher starting K max values, these effects could be compensated by applying the adjusted compliance ratio (ACR) method. Here, it was demonstrated that steeper K-gradients in concert with increased cyclic loading frequency reduced the duration of near-threshold fatigue crack growth tests in hydrogen gas by more than 99% relative to standard practices.

Fatigue threshold↗

DOE OSTI2020

Spatially resolved fibre cavity ring down spectroscopy

Abstract This paper presents a fibre cavity ring down spectroscopy probed by Rayleigh scattering optical frequency domain reflectometry (OFDR), which provides spatial location of stimuli and improved signal to noise ratio for distributed sensing measurements. A section of optical fibre was integrated into an active fibre ring cavity with optical gain and interrogated by the OFDR system for 11 cycles with a single laser scan. Through the cavity ring down configuration, root-mean-squared (RMS) noise of distributed temperature and strain measurements was reduced to 6.9 mK and less than 0.1 με, respectively for 1-cm spatially resolved measurements. Our work shows that the active fibre cavity configuration can be combined with distributed fibre sensing schemes to achieve both high spatial resolution and high sensitivity measurements.

97 MATHEMATICS AND COMPUTING↗

DOE OSTI2025

Overview of the SCEC/USGS Community Stress Drop Validation Study Using the 2019 Ridgecrest Earthquake Sequence

We present initial findings from the ongoing Community Stress Drop Validation Study to compare spectral stress-drop estimates for earthquakes in the 2019 Ridgecrest, California, sequence. This study uses a unified dataset to independently estimate earthquake source parameters through various methods. Stress drop, which denotes the change in average shear stress along a fault during earthquake rupture, is a critical parameter in earthquake science, impacting ground motion, rupture simulation, and source physics. Spectral stress drop is commonly derived by fitting the amplitude-spectrum shape, but estimates can vary substantially across studies for individual earthquakes. Sponsored jointly by the U.S. Geological Survey and the Statewide (previously, Southern) California Earthquake Center our community study aims to elucidate sources of variability and uncertainty in earthquake spectral stress-drop estimates through quantitative comparison of submitted results from independent analyses. The dataset includes nearly 13,000 earthquakes ranging from M 1 to 7 during a two-week period of the 2019 Ridgecrest sequence, recorded within a 1° radius. Here, in this article, we report on 56 unique submissions received from 20 different groups, detailing spectral corner frequencies (or source durations), moment magnitudes, and estimated spectral stress drops. Methods employed encompass spectral ratio analysis, spectral decomposition and inversion, finite-fault modeling, ground-motion-based approaches, and combined methods. Initial analysis reveals significant scatter across submitted spectral stress drops spanning over six orders of magnitude. However, we can identify between-method trends and offsets within the data to mitigate this variability. Averaging submissions for a prioritized subset of 56 events shows reduced variability of spectral stress drop, indicating overall consistency in recovered spectral stress-drop values.

58 GEOSCIENCES↗

DOE OSTI2024

Temporal Explosion Source Processes of Declared Nuclear Tests in the Democratic People’s Republic of Korea

In this work we highlight a preliminary temporal source analysis of the six declared Democratic People's Republic of Korea (DPRK) nuclear tests. We use regional seismic data to estimate relative source time functions (RSTFs) via iterative time-domain deconvolution (Ammon, 2006; Pippin, 2022) of vertical-component ground motions recorded within 2000 km of the source region. Since RSTFs are ideally independent of site and propagation effects, their amplitude spectrum is equivalent to the source spectral ratio, but they also retain phase information. We compare observed RSTFs (in the time and frequency domains) with synthetic RSTFs derived from the Mueller & Murphy (1971) explosion source model. The resolution of these time functions varies, however, we generally obtain high-quality results within the limitations of the recording broadband instrumentation. The results indicate that this method effectively preserves source time-history information that can be used for temporal analysis of remote nuclear explosions. This preliminary analysis is intended to assess the viability of using time-domain deconvolution methods for extracting temporal source information.

45 MILITARY TECHNOLOGY, WEAPONRY, AND NATIONAL DEF↗

DOE OSTI2026

Pulsed radio frequency power modulation for profile control in cryogenic reactive ion etching of silicon gratings

Cryogenic silicon etching with SF 6 /O 2 plasmas enables vertical sidewalls and smooth surfaces for high–aspect-ratio structures, yet precise control of etched profiles (sidewall angle, lateral etching, and linewidth retention) remains challenging under continuous-wave excitation due to coupling among radical fluxes, ion energy distributions, and in situ passivation dynamics. In this work, we investigated pulsed radio frequency bias delivery as a process knob for profile control during cryogenic silicon etching. Systematic experiments on 500 nm-wide, 1 μm-pitch gratings etched to 0.8–1.1 μm depth at 0.5–2 kHz pulsing frequency and 25%–75% duty cycle revealed strong dependencies of etch rate, linewidth, and sidewall angle on modulation conditions. We proposed a conceptual kinetic picture combined with feature-scale electrostatic analysis to understand the alternation of ion-driven etching and passivation recovery between on/off segments and local electric field shaping and modulation of ion trajectories within the trench. Moderate duty cycles (50%–75%) near 1 kHz achieved a balance between anisotropy and etch rate. These results demonstrate pulsed-bias modulation can be utilized to tune directionality and sidewall preservation in cryogenic SF 6 /O 2 etching, which are relevant to photonic, metrology, and quantum device fabrication.

36 MATERIALS SCIENCE↗

DOE OSTI2022

Influence of Supporting Electrolyte on Hydroxide Exchange Membrane Water Electrolysis Performance: Catholyte

Alkaline or hydroxide exchange membrane water electrolysis (HEMWE) is a promising technology for green hydrogen production using platinum group metal-free catalysts and stainless steel, an advantage of alkaline water electrolysis (AWE), and a gas-impermeable membrane, a parallel to proton exchange membrane electrolysis (PEMWE). However, the HEMWE requires supporting electrolytes and there is minimal understanding of their role on the respective reactions. Without SELs, HEMWE performance and durability are worse than PEMWE systems. Herein, consistently feeding potassium hydroxide anolyte, we systematically study the effects of catholyte SELs in HEMWEs including dry vs. wet operation, cation effects, anion effects, and cation/OH ratios on cell potential and stability. We report that (i) hydration of the cathode improves high current density operation by preventing dehydration of the hydroxide exchange membrane (HEM), (ii) there was no correlation between cation type and cell potential, (iii) cell potential and high frequency resistance did not correlate with SEL conductivity, (iv) cathodic carbonate SEL had a significant negative effect on cell performance, (v) increased cation/OH ratio also caused increased cell potentials. Overall, this study concludes that feeding water or potassium hydroxide solution is desirable to improve the AEMWE performance.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2021

Alcohol consumption and breast cancer risk in Japan: A pooled analysis of eight population‐based cohort studies

Abstract Although alcohol consumption is reported to increase the incidence of breast cancer in European studies, evidence for an association between alcohol and breast cancer in Asian populations is insufficient. We conducted a pooled analysis of eight large‐scale population‐based prospective cohort studies in Japan to evaluate the association between alcohol (both frequency and amount) and breast cancer risk with categorization by menopausal status at baseline and at diagnosis. Estimated hazard ratios (HR) and 95% confidence intervals were calculated in the individual cohorts and combined using random‐effects models. Among 158 164 subjects with 2 369 252 person‐years of follow‐up, 2208 breast cancer cases were newly diagnosed. Alcohol consumption had a significant association with a higher risk of breast cancer in both women who were premenopausal at baseline (regular drinker compared to nondrinker: HR 1.37, 1.04‐1.81, ≥23 g/d compared to 0 g/d: HR 1.74, 1.25‐2.43, P for trend per frequency category: P = .017) and those who were premenopausal at diagnosis (≥23 g/d compared to 0 g/d: HR 1.89, 1.04‐3.43, P for trend per frequency category: P = .032). In contrast, no significant association was seen in women who were postmenopausal at baseline or at diagnosis, despite a substantial number of subjects and long follow‐up period. Our results revealed that frequent and high alcohol consumption are both risk factors for Asian premenopausal breast cancer, similarly to previous studies in Western countries. The lack of a clear association in postmenopausal women in our study warrants larger investigation in Asia.

Iwase, Madoka↗

DOE OSTI2024

Maximizing the Radar Generalized Image Quality Equation for Bistatic SAR Using Waveform Frequency Agility

The radar generalized image quality equation (RGIQE) is a metric used to measure both monostatic and bistatic synthetic aperture radar (BSAR) image quality, it is a function of signal-to-noise ratio (SNR) and 2-D bandwidth. The 2-D bandwidth is equal to the area of the transfer function’s (TF) passband region. With the exception of side-looking monostatic geometries, almost all monostatic and bistatic geometries have skewed passband shapes when waveform frequency parameters remain unchanged from pulse to pulse. Most synthetic aperture radar (SAR) applications require a rectangular-shaped passband region, this is achieved by inscribing a rectangular region within the skewed intrinsic passband region. Increasing skewness results in less inscription area reducing 2-D bandwidth, image SNR, and thus RGIQE capacity. In this article, a waveform with frequency agility is used to rectify the skewness that degrades RGIQE capacity. By changing the waveform’s center frequency and instantaneous bandwidth from pulse to pulse in a particular manner, the intrinsic passband region can be de-skewed. The de-skewed shape maximizes the inscription area thus maximizing 2-D bandwidth, image SNR, and RGIQE capacity. Here, three examples are given in this article, one monostatic geometry, and two bistatic geometries. RGIQE capacity is increased by 52.02%, 44.42%, and 79.09% for the three examples.

47 OTHER INSTRUMENTATION↗

DOE OSTI2021

Residual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy

In this study, the Raman biaxial stress coefficients K II and strain-free phonon frequencies ω 0 have been determined for the E 2 (low), E 2 (high), and A 1 (LO) phonon modes of aluminum nitride, AlN, using both experimental and theoretical approaches. The E 2 (high) mode of AlN is recommended for the residual stress analysis of AlN due to its high sensitivity and the largest signal-to-noise ratio among the studied modes. The E 2 (high) Raman biaxial stress coefficient of ₋3.8 cm₋1/GPa and strain-free phonon frequency of 656.68 cm ₋1 were then applied to perform both macroscopic and microscopic stress mappings. For macroscopic stress evaluation, the spatial variation of residual stress was measured across an AlN-on-Si wafer prepared by sputter deposition. A cross-wafer variation in residual stress of ~150 MPa was observed regardless of the average stress state of the film. Microscopic stress evaluation was performed on AlN piezoelectric micromachined ultrasonic transducers (pMUTs) with submicrometer spatial resolution. These measurements were used to assess the effect of device fabrication on residual stress distribution in an individual pMUT and the effect of residual stress on the resonance frequency. At ~20 μm directly outside the outer edge of the pMUT electrode, a large lateral spatial variation in residual stress of ~100 MPa was measured, highlighting the impact of metallization structures on residual stress in the AlN film.

36 MATERIALS SCIENCE↗