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At least 235 records · Page 13
All sourcesNASA NTRSDOE OSTI
DOE OSTI2021

Intrinsically Honeycomb-Patterned Hydrogenated Graphene

Since the advent of graphene ushered the era of 2D materials, many forms of hydrogenated graphene have been reported, exhibiting diverse properties ranging from a tunable bandgap to ferromagnetic ordering. Patterned hydrogenated graphene with micron-scale patterns has been fabricated by lithographic means. We report successful millimeter-scale synthesis of an intrinsically honeycomb-patterned form of hydrogenated graphene on Ru(0001) by epitaxial growth followed by hydrogenation is reported. Combining scanning tunneling microscopy observations with density-functional-theory (DFT) calculations, it is revealed that an atomic-hydrogen layer intercalates between graphene and Ru(0001). The result is a hydrogen honeycomb structure that serves as a template for the final hydrogenation, which converts the graphene into graphane only over the template, yielding honeycomb-patterned hydrogenated graphene (HPHG). In effect, HPHG is a form of patterned graphane. DFT calculations find that the unhydrogenated graphene regions embedded in the patterned graphane exhibit spin-polarized edge states. This type of growth mechanism provides a new pathway for the fabrication of intrinsically patterned graphene-based materials.

2D material↗
DOE OSTI2019

Using Deep Learning for Automated Communication Pattern Characterization: Little Steps and Big Challenges

Characterization of a parallel application’s communication patterns can be useful for performance analysis, debugging, and system design. However, obtaining and interpreting a characterization can be difficult. AChax implements an approach that uses search and a library of known communication patterns to automatically characterize communication patterns. Our approach has some limitations that reduce its effectiveness for the patterns and pattern combinations used by some real-world applications. By viewing AChax’s pattern recognition problem as an image recognition problem, it may be possible to use deep learning to address these limitations. In this position paper, we present our current ideas regarding the benefits and challenges of integrating deep learning into AChax and our conclusion that a hybrid approach combining deep learning classification, regression, and the existing AChax approach may be the best long-term solution to the problem of parameterizing recognized communication patterns.

Roth, Philip↗
DOE OSTI2024

Experimental Examination of Additively Manufactured Patterns on Structural Nuclear Materials for Digital Image Correlation Strain Measurements

Abstract Background There are a limited number of commercially available sensors for monitoring the deformation of materials in-situ during harsh environment applications, such as those found in the nuclear and aerospace industries. Such sensing devices, including weldable strain gauges, extensometers, and linear variable differential transformers, can be destructive to material surfaces being investigated and typically require relatively large surface areas to attach (> 10 mm in length). Digital image correlation (DIC) is a viable, non-contact alternative to in-situ strain deformation. However, it often requires implementing artificial patterns using splattering techniques, which are difficult to reproduce. Objective Additive manufacturing capabilities offer consistent patterns using programmable fabrication methods. Methods In this work, a variety of small-scale periodic patterns with different geometries were printed directly on structural nuclear materials (i.e., stainless steel and aluminum tensile specimens) using an aerosol jet printer (AJP). Unlike other additive manufacturing techniques, AJP offers the advantage of materials selection. DIC was used to track and correlate strain to alternative measurement methods during cyclic loading, and tensile tests (up to 1100 µɛ) at room temperature. Results The results confirmed AJP has better control of pattern parameters for small fields of view and facilitate the ability of DIC algorithms to adequately process patterns with periodicity. More specifically, the printed 100 μm spaced dot and 150 μm spaced line patterns provided accurate measurements with a maximum error of less than 2% and 4% on aluminum samples when compared to an extensometer and commercially available strain gauges. Conclusion Our results highlight a new pattern fabrication technique that is form factor friendly for digital image correlation in nuclear applications.

Novich, K. A. (ORCID:0000000204466022)↗
DOE OSTI2024

Phase Identification in Synchrotron X-ray Diffraction Patterns of Ti–6Al–4V Using Computer Vision and Deep Learning

X-ray diffraction patterns contain information about the atomistic structure and microstructure (defect population) of materials, extracting detailed information from diffraction patterns is complex, demanding and relies on prior knowledge. Here, we hypothesize that deep-learning techniques can help to perform an effective and accurate analysis with high throughput rates. To demonstrate this concept, we applied a novel deep learning framework to determine the evolution of the β-phase volume fraction in a Ti–6Al–4V alloy during heat-treatment from video sequences of 2D diffraction patterns recorded in transmission and with highly monochromatic radiation in a synchrotron beamline. In particular, we studied the impact of network design on prediction reliability and computational performance. Networks of different architectures were trained using 3008 experimental 2D patterns. A well-tuned model was found to reproduce the phase fractions of another experimental data set, consisting of 1100 diffraction patterns, with a mean-square error as small as 2.6 x 10 -4 . The average prediction error of β-phase volume fraction was within 1.6 x 10 -2 (in each diffraction pattern) of the values obtained by conventional methods. Our work demonstrates that convolutional neural networks can evaluate high energy X-ray diffraction patterns with a remarkable level of reliability. Furthermore, it demonstrates the significance of network design on the reliability of predictions and computational performance. The most complex models do not necessarily result in highest accuracy and may even fail to learn from the data.

36 MATERIALS SCIENCE↗
DOE OSTI2015

Morphology and orientation of β-BaB{sub 2}O{sub 4} crystals patterned by laser in the inside of samarium barium borate glass

Nonlinear optical β-BaB{sub 2}O{sub 4} crystal lines (β-BBO) were patterned in the inside of 8Sm{sub 2}O{sub 3}–42BaO–50B{sub 2}O{sub 3} glass by irradiations of continuous-wave Yb:YVO{sub 4} lasers with a wavelength of 1080 nm (power: P=0.8–1.0 W, scanning speed: S=0.2–2.5 μm/s), in which the laser focal position was moved gradually from the surface to the inside. The morphology, size, and orientation of β-BBO crystals were examined from polarization optical microscope and birefringence imaging observations. It was demonstrated that c-axis oriented β-BBO crystals with long lengths (e.g., 20 mm) were patterned in the inside of the glass. The morphology of β-BBO in the cross-section of lines was a rectangular shape with rounded corners, and the volume of β-BBO formed increased with increasing laser power and with decreasing laser scanning speed. The maximum depth in the inside from the surface for β-BBO patterning increased with increasing laser power, e.g., D{sub max}∼100 μm at P=0.8 W, D{sub max}∼170 μm at P=0.9 W, and D{sub max}∼200 μm at P=1 W. The present study proposes that the laser-induced crystallization opens a new door for applied engineering in glassy solids. - Graphical abstract: This figure shows the POM photographs for β-BaB{sub 2}O{sub 4} crystal lines patterned by cw Yb:YVO{sub 4} fiber laser irradiations with a laser power of P=0.8 W and a laser scanning speed S=2 μm/s in the glass. The laser focal point was moved gradually from the surface into the inside. The results shown in Fig. 1 demonstrate that it is possible to pattern highly oriented β-BaB{sub 2}O{sub 4} crystals even in the inside of glasses. - Highlights: • β-BaB{sub 2}O{sub 4} crystal lines were patterned in the inside of a glass by lasers. • Laser focal position was moved gradually from the surface to the inside. • Birefringence imaging was observed. • Morphology, size, and orientation of crystals were clarified. • Crystal lines with long lengths (e.g., 20 mm) were patterned at the depth of 200 μm.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2014

Advanced morphological analysis of patterns of thin anodic porous alumina

Different conditions of fabrication of thin anodic porous alumina on glass substrates have been explored, obtaining two sets of samples with varying pore density and porosity, respectively. The patterns of pores have been imaged by high resolution scanning electron microscopy and analyzed by innovative methods. The regularity ratio has been extracted from radial profiles of the fast Fourier transforms of the images. Additionally, the Minkowski measures have been calculated. It was first observed that the regularity ratio averaged across all directions is properly corrected by the coefficient previously determined in the literature. Furthermore, the angularly averaged regularity ratio for the thin porous alumina made during short single-step anodizations is lower than that of hexagonal patterns of pores as for thick porous alumina from aluminum electropolishing and two-step anodization. Therefore, the regularity ratio represents a reliable measure of pattern order. At the same time, the lower angular spread of the regularity ratio shows that disordered porous alumina is more isotropic. Within each set, when changing either pore density or porosity, both regularity and isotropy remain rather constant, showing consistent fabrication quality of the experimental patterns. Minor deviations are tentatively discussed with the aid of the Minkowski measures, and the slight decrease in both regularity and isotropy for the final data-points of the porosity set is ascribed to excess pore opening and consequent pore merging. - Highlights: • Thin porous alumina is partly self-ordered and pattern analysis is required. • Regularity ratio is often misused: we fix the averaging and consider its spread. • We also apply the mathematical tool of Minkowski measures, new in this field. • Regularity ratio shows pattern isotropy and Minkowski helps in assessment. • General agreement with perfect artificial patterns confirms the good manufacturing.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Additive Lithography–Organic Monolayer Patterning Coupled with an Area-Selective Deposition

The combination of area-selective deposition (ASD) with a patternable organic monolayer provides a versatile additive lithography platform, enabling the generation of a variety of nanoscale feature geometries. Stearate hydroxamic acid self-assembled monolayers (SAMs) were patterned with extreme ultraviolet (λ = 13.5 nm) or electron beam irradiation and developed with ASD to achieve line space patterns as small as 50 nm. Density functional theory was employed to aid in the synthesis of hydroxamic acid derivatives with optimized packing density to enhance the imaging contrast and improve dose sensitivity. Near-edge X-ray absorption fine structure spectroscopy and infrared spectroscopy reveal that the imaging mechanism is based on improved deposition inhibition provided by the cross-linking of the SAM to produce a more effective barrier during a subsequent deposition step. With patterned substrates composed of coplanar copper lines and silicon spacers, hydroxamic acids selectively formed monolayers on the metal portions and could undergo a pattern-wise exposure followed by ASD in the first combination of a patternable monolayer with ASD. This material system presents an additional capability compared to traditional ASD approaches that generally reflect a starting patterned surface. Finally, this bottoms-up additive approach to lithography may be a viable alternative to subtractive nanoscale feature generation.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2017

Habitat-specific patterns and drivers of bacterial β-diversity in China’s drylands

The existence of biogeographic patterns among most free-living microbial taxa has been well established, yet little is known about the underlying mechanisms that shape these patterns. In this work, we examined soil bacterial β-diversity across different habitats in the drylands of northern China. We evaluated the relative importance of environmental factors versus geographic distance to a distance-decay relationship, which would be explained by the relative effect of basic ecological processes recognized as drivers of diversity patterns in macrobial theoretical models such as selection and dispersal. While the similarity of bacterial communities significantly declined with increasing geographic distance, the distance-decay slope and the relative importance of factors driving distance-decay patterns varied across different habitats. A strong distance-decay relationship was observed in the alpine grassland, where the community similarity was influenced only by the environmental factors. Yet, geographic distance was solely responsible for community similarity in the desert. Even the average compositional similarity among locations in the desert was distinctly lower compared with those in other habitats. We found no evidence that dispersal limitation strongly influenced the β-diversity of bacterial communities in the desert grassland and typical grassland. Together, our results provide robust evidence of habitat specificity for microbial diversity patterns and their underlying drivers. Our findings suggest that microorganisms also have multiple drivers of diversity patterns and some of which may be parallel to some fundamental processes for explaining biodiversity patterns in macroorganisms.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2016

Directed self-assembly of block copolymer films on atomically-thin graphene chemical patterns

Directed self-assembly of block copolymers is a scalable method to fabricate well-ordered patterns over the wafer scale with feature sizes below the resolution of conventional lithography. Typically, lithographically-defined prepatterns with varying chemical contrast are used to rationally guide the assembly of block copolymers. The directed self-assembly to obtain accurate registration and alignment is largely influenced by the assembly kinetics. Furthermore, a considerably broad processing window is favored for industrial manufacturing. Using an atomically-thin layer of graphene on germanium, after two simple processing steps, we create a novel chemical pattern to direct the assembly of polystyreneblock-poly(methyl methacrylate). Faster assembly kinetics are observed on graphene/germanium chemical patterns than on conventional chemical patterns based on polymer mats and brushes. This new chemical pattern allows for assembly on a wide range of guiding periods and along designed 90° bending structures. We also achieve density multiplication by a factor of 10, greatly enhancing the pattern resolution. Lastly, the rapid assembly kinetics, minimal topography, and broad processing window demonstrate the advantages of inorganic chemical patterns composed of hard surfaces.

36 MATERIALS SCIENCE↗
DOE OSTI2015

A quantitative analysis of the efficiency of solar-driven water-splitting device designs based on tandem photoabsorbers patterned with islands of metallic electrocatalysts

The trade-off between the optical obscuration and kinetic overpotentials of electrocatalyst films patterned onto the surface of tandem light-absorber structures in model photoelectrosynthetic water-splitting systems was investigated using a 0-dimensional load-line analysis and experimental measurements. The electrocatalytic performance of the catalyst at high current densities, normalized to the electrocatalyst surface area, is an important factor in the dependence of the optimal solar-to-hydrogen (STH) conversion efficiency, η STH,opt , on the filling fraction ( f c ) of the patterned catalysts, because even under conditions that produce minority-carrier current densities of ~10 mA cm -2 at the solid/liquid interface, the current density at catalyst-bearing sites can be >1–2 A cm -2 in low filling-fraction films. A universal current-density versus potential relationship, up to current densities of 10 A cm -2 , was obtained experimentally for the hydrogen-evolution reaction (HER) using patterned Pt ultramicroelectrode (UME) arrays with a range of filling fractions and disc diameters. The η STH,opt of system designs that utilize patterned electrocatalysts located on the illuminated side of tandem photoabsorbers was then evaluated systematically. The maximum STH conversion efficiency, η STH,max , using a hypothetical electrocatalyst that was optically transparent but which nevertheless exhibited a current-density versus potential behavior that is characteristic of the most active Pt films measured experimentally regardless of their optical obscuration, was 26.7%. By comparison, the maximum η STH,opt of 24.9% for real patterned Pt electrocatalyst films closely approached this ideal-case limit. The performance and materials utilization of the patterned electrocatalysts and of the uniformly coated electrocatalysts on tandem photoabsorbers were also compared in this research. Hence, patterned electrocatalysts with very low filling fractions can provide a potentially promising path to the realization of efficient large-scale photoelectrolysis systems while minimizing the use of scarce noble metals.

14 SOLAR ENERGY↗
DOE OSTI2015

Processing ultrasonic inspection data from multiple scan patterns for turbine rotor weld build-up evaluations

The study presents a data processing methodology for weld build-up using multiple scan patterns. To achieve an overall high probability of detection for flaws with different orientations, an inspection procedure with three different scan patterns is proposed. The three scan patterns are radial-tangential longitude wave pattern, axial-radial longitude wave pattern, and tangential shear wave pattern. Scientific fusion of the inspection data is implemented using volume reconstruction techniques. The idea is to perform spatial domain forward data mapping for all sampling points. A conservative scheme is employed to handle the case that multiple sampling points are mapped to one grid location. The scheme assigns the maximum value for the grid location to retain the largest equivalent reflector size for the location. The methodology is demonstrated and validated using a realistic ring of weld build-up. Tungsten balls and bars are embedded to the weld build-up during manufacturing process to represent natural flaws. Flat bottomed holes and side drilled holes are installed as artificial flaws. Automatic flaw identification and extraction are demonstrated. Results indicate the inspection procedure with multiple scan patterns can identify all the artificial and natural flaws.

42 ENGINEERING↗
DOE OSTI2015

Application of sub-micrometer patterned permalloy thin film in tunable radio frequency inductors

Electrical tunable meander line inductor using coplanar waveguide structures with patterned permalloy (Py) thin film has been designed and implemented in this paper. High resistivity Si substrate is used to reduce the dielectric loss from the substrate. Inductor is implemented with a 60 nm thick Py deposited and patterned on top of the gold meander line, and Py film is patterned with dimension of 440 nm 10 lm to create the shape anisotropy field, which in turn increases the FMR frequency. Compared to a regular meanderline inductor without the application of sub-micrometer patterned Py thin film, the inductance density has been increased to 20% for the implemented inductor with patterned Py. Measured FMR frequency of the patterned Py is 4.51 GHz without the application of any external magnetic field. This has enabled the inductor application in the practical circuit boards, where the large external magnet is unavailable. Inductance tunability of the implemented inductor is demonstrated by applying a DC current. Applied DC current creates a magnetic field along the hard axis of the patterned Py thin film, which changes the magnetic moment of the thin film and thus, decreases the inductance of the line. Here, the measured results show that the inductance density of the inductor can be varied 5% by applying 300 mA DC current, larger inductance tunability is achievable by increasing the thickness of Py film.

36 MATERIALS SCIENCE↗
DOE OSTI2016

In vivo visualization method by absolute blood flow velocity based on speckle and fringe pattern using two-beam multipoint laser Doppler velocimetry

Two-beam multipoint laser Doppler velocimetry (two-beam MLDV) is a non-invasive imaging technique able to provide an image of two-dimensional blood flow and has potential for observing cancer as previously demonstrated in a mouse model. In two-beam MLDV, the blood flow velocity can be estimated from red blood cells passing through a fringe pattern generated in the skin. The fringe pattern is created at the intersection of two beams in conventional LDV and two-beam MLDV. Being able to choose the depth position is an advantage of two-beam MLDV, and the position of a blood vessel can be identified in a three-dimensional space using this technique. Initially, we observed the fringe pattern in the skin, and the undeveloped or developed speckle pattern generated in a deeper position of the skin. The validity of the absolute velocity value detected by two-beam MLDV was verified while changing the number of layers of skin around a transparent flow channel. The absolute velocity value independent of direction was detected using the developed speckle pattern, which is created by the skin construct and two beams in the flow channel. Finally, we showed the relationship between the signal intensity and the fringe pattern, undeveloped speckle, or developed speckle pattern based on the skin depth. The Doppler signals were not detected at deeper positions in the skin, which qualitatively indicates the depth limit for two-beam MLDV.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2022

Pit rim decomposition into multiple quantum dots on surfaces of epitaxial thin films grown on pit-patterned substrates

Here, we report results of dynamical simulations according to an experimentally validated surface morphological evolution model on the formation of regular arrays of quantum dot molecules (QDMs) consisting of 1D arrays of smaller interacting quantum dots (QDs). These QD arrays form along the sides of each pit rim on the surface of a coherently strained thin film epitaxially deposited on a semiconductor substrate, the surface of which consists of a periodic pattern of inverted prismatic pits with rectangular pit openings. We find that this complex QDM pattern results from the decomposition of the pit rim from a “quantum fortress” with four elongated QDs into four 1D arrays of multiple smaller QDs arranged along each side of the pit rim. Systematic parametric analysis indicates that varying the pit opening dimensions and the pit wall inclination directly impacts the number of QDs in the resulting QDM pattern, while varying the pit depth only affects the dimensions of the QDs in the nanostructure pattern. Therefore, the number, arrangement, and sizes of QDs in the resulting pattern of QDMs on the film surface can be engineered precisely by proper tuning of the pit design parameters. Our simulation results are supported by predictions of morphological stability analysis, which explains the pit rim decomposition into multiple QDs as the outcome of a tip-splitting instability and provides a fundamental characterization of the post-instability nanostructure pattern. Our theoretical findings can play a vital role in designing optimal semiconductor surface patterns toward enabling future nanofabrication technologies.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Elastic forces drive nonequilibrium pattern formation in a model of nanocrystal ion exchange

The widely used process of nanocrystal ion exchange operates out of thermodynamic equilibrium and can require mixing components of varying sizes. Here we use theory and computer simulation to study a simple model which captures these two basic features of ion exchange reactions. We show that a strong driving force for exchange among different-sized species creates nonequilibrium patterns within model nanocrystals. We further demonstrate that such patterns can be thermodynamically stable within core/shell nanocrystals. These results help us understand the heterostructures formed in ion-exchanged nanocrystals and suggest strategies for leveraging elasticity to design patterns in nanoscale materials. Chemical transformations, such as ion exchange, are commonly employed to modify nanocrystal compositions. Yet the mechanisms of these transformations, which often operate far from equilibrium and entail mixing diverse chemical species, remain poorly understood. Here we explore an idealized model for ion exchange in which a chemical potential drives compositional defects to accumulate at a crystal’s surface. These impurities subsequently diffuse inward. We find that the nature of interactions between sites in a compositionally impure crystal strongly impacts exchange trajectories. In particular, elastic deformations which accompany lattice-mismatched species promote spatially modulated patterns in the composition. These same patterns can be produced at equilibrium in core/shell nanocrystals, whose structure mimics transient motifs observed in nonequilibrium trajectories. Moreover, the core of such nanocrystals undergoes a phase transition—from modulated to unstructured—as the thickness or stiffness of the shell is decreased. Our results help explain the varied patterns observed in heterostructured nanocrystals produced by ion exchange and suggest principles for the rational design of compositionally patterned nanomaterials.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2014

Parametric study of flow patterns behind the standing accretion shock wave for core-collapse supernovae

In this study, we conduct three-dimensional hydrodynamic simulations systematically to investigate the flow patterns behind the accretion shock waves that are commonly formed in the post-bounce phase of core-collapse supernovae. Adding small perturbations to spherically symmetric, steady, shocked accretion flows, we compute the subsequent evolutions to find what flow pattern emerges as a consequence of hydrodynamical instabilities such as convection and standing accretion shock instability for different neutrino luminosities and mass accretion rates. Depending on these two controlling parameters, various flow patterns are indeed realized. We classify them into three basic patterns and two intermediate ones; the former includes sloshing motion (SL), spiral motion (SP), and multiple buoyant bubble formation (BB); the latter consists of spiral motion with buoyant-bubble formation (SPB) and spiral motion with pulsationally changing rotational velocities (SPP). Although the post-shock flow is highly chaotic, there is a clear trend in the pattern realization. The sloshing and spiral motions tend to be dominant for high accretion rates and low neutrino luminosities, and multiple buoyant bubbles prevail for low accretion rates and high neutrino luminosities. It is interesting that the dominant pattern is not always identical between the semi-nonlinear and nonlinear phases near the critical luminosity; the intermediate cases are realized in the latter case. Running several simulations with different random perturbations, we confirm that the realization of flow pattern is robust in most cases.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2016

Regional and global elevational patterns of microbial species richness and evenness

Although elevational gradients in microbial biodiversity have attracted increasing attention recently, the generality in the patterns and underlying mechanisms are still poorly resolved. Further, previous studies focused mostly on species richness, while left understudied evenness, another important aspect of biodiversity. Here, we studied the elevational patterns in species richness and evenness of stream biofilm bacteria and diatoms in six mountains in Asia and Europe. We also reviewed published results for elevational richness patterns for soil and stream microbes in a literature analysis. Our results revealed that even within the same ecosystem type (that is, stream) or geographical region, bacteria and diatoms showed contrasting patterns in diversity. Stream microbes, including present stream data, tend to show significantly increasing or decreasing elevational patterns in richness, contrasting the findings for soil microbes that typically showed nonsignificant or significantly decreasing patterns. In all six mountains for bacteria and in four mountains for diatoms, species richness and evenness were positively correlated. The variation in bacteria and diatom richness and evenness were substantially explained by anthropogenic driven factors, such as total phosphorus (TP). However, diatom richness and evenness were also related to different main drivers as richness was mostly related to pH, while evenness was most explained by TP. Our results highlight the lack of consistent elevational biodiversity patterns of microbes and further indicate that the two facets of biodiversity may respond differently to environmental gradients.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2020

Impact of thermodynamic fluctuations and pattern size on the nucleation behavior during area selective deposition

In this work, the authors explore the impact that thermodynamic fluctuations have on the spontaneous appearance of defects during area selective deposition on patterned surfaces that are fully covered by adsorbates under local thermodynamic equilibrium, such as self-assembled monolayers. By using a simple lattice gas model for the adsorbed monolayer, the authors were able to track the spontaneous formation of defects in the monolayer as a function of the pattern width. The results indicate that, for pattern widths of the order of tens of nanometers, roughening effects at the pattern edge can be the leading source for the spontaneous appearance of nucleation defects. This leads to an enhancement of the density of defects that can be up to three orders of magnitude higher than those expected in uniform (not patterned) surfaces. The model also predicts a density of defects that is inversely proportional to the pattern width. Finally, if the dynamic nucleation of defects during area selective deposition is driven by thermodynamic fluctuations, the model predicts that the nucleation rate should be proportional to the total precursor fluency and independent of purge times. Moreover, a tight confinement of the monolayer through a high quality smooth interface in the patterned substrate and strong cohesive interactions between adsorbates should each contribute to a reduction of the overall defect density.

36 MATERIALS SCIENCE↗