Product Assurance of MEMS and Microsystems
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MEMS Microsystems robotic spacecrafts↗
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Results for “mems”
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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Environmental Testing of MEMS for Space Applications
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MEMS environmental program policies Space applicat↗
MEMS Magnetic Sensor in Standard CMOS
A novel micromechanical magnetic sensor has been built and tested.
Magnetometer microsensor MEMS Magnetic sensor Micr↗
Microelectronics Packaging Issues of Microelectromechanical Systems (MEMS)
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packaging silicon poly-silicon microspacecraft app↗
Packaging and Qualification of Mems-Based Space Systems
The number of spacecraft designed and built over the next century will grow exponentially as communication satellite networks proliferate and NASA continues to push towards the development of many microspacecraft to replace its traditional.
communication satellite networks satellite network↗
Development of MEMS microchannel heat sinks for micro/nano spacecraft thermal control
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micro/nano spacecraft thermal control MEMS based t↗
Development of MEMS microchannel heat sinks for micro/nano spacecraft thermal control
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micro/nano spacecraft thermal control MEMS based t↗
Micro/Nano spacecraft thermal control using MEMS based pumped liquid cooling systems
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spacecraft thermal control microelectromechanical ↗
Heterogenous assembly of a MEMS neuro-prosthetic system
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heterogenous assembly MEMS neuro-prosthetic flip c↗
NEPP Cots Mems Programs
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COTS Microelectromechanical Systems MEMS reliabili↗
Automated MEMs Gyroscope Characterization
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green charts↗
MEMS Gyroscope Lifetime Characterization
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MEMS micro gyroscope lifetime long term analysis f↗
Temperature Dependent Characteristics of the JPL Silcon MEMS Gyroscope
Advances in aeronautics and space technology have created a need for miniaturized navigation instruments such as gyroscopes, a need wich is currently beig addressed by a number of micromachined designs.
temperature MEMS gyro characteristics gyroscope↗
Advancements in MEMS Materials and Processing Technology
From achievements in display imaging to air bag deployment, microelectromechanical systems are becoming more commonplace in everyday life. With an abundance of opportunities for innovative R&D in the field, the research trends are not only directed toward novel sensor and actuator development, but also toward further miniaturization, specifically achieving micro- and nanoscaled intergrated systems.
MEMS Materials Microelectromechanical↗
Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device for Nondestructive Evaluation (NDE) Health Monitoring Applications for International Space Station (ISS)
This paper discusses the fabrication aspects of an accelerometer device that is based on a sputter deposited, multilayer, and giant magnetoresistive field sensor.
Mission Assurance accelerometer Giant Magnetoresis↗
Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device for Nondestructive Evaluation (NDE) Health Monitoring Applications for International Space Station (ISS)
This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited, multilayer, giant magnetoresistive field sensor.
Code Q Nondestructive Evaluation Program JPL NASA ↗
Reliability of COTS MEMS accelerometer under shock and thermomechanical cycling
A comparison of the data from microaccelerometers of the same type and between several types will be presented. Self-test output signals and X-ray evaluation test data after completion of 182 thermal cycles will also be presented.
MEMS thermal cycling microaccelerometers↗
A Wafer Transfer Technology for MEMS Adaptive Optics
Adaptive optics systems require the combination of several advanced technologies such as precision optics, wavefront sensors, deformable mirrors, and lasers with high-speed control systems. The deformable mirror with a continuous membrane is a key component of these systems. This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. This technology is developed for the fabrication of a compact deformable mirror with a continuous facet. A 1 (mu)m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers (i.e. wax, epoxy, or photoresist). Smaller or larger diameter membranes can also be transferred using this technique. The fabricated actuator membrane with an electrode gap of 1.5 (mu)m shows a vertical deflection of 0.37 (mu)m at 55 V.
Micro Electro Mechanical Systems (MEMS)↗