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At least 217 records · Page 12

Numerical Modeling of Thermofluid Transients During Chilldown of Cryogenic Transfer Lines

The chilldown of fluid transfer lines is an important part of using cryogenic systems such as those found in both ground and space based applications. The chilldown process is a complex combination of both thermal and fluid transient phenomena. A cryogenic liquid flows through a transfer line that is initially at a much higher temperature than the cryogen. Transient heat transfer processes between the liquid and transfer line cause vaporization of the liquid, and this phase change can cause transient pressure and flow surges in the liquid. As the transfer line is cooled, these effects diminish until the liquid reaches a steady flow condition in the chilled transfer line. If these transient phenomena are not properly accounted for in the design process of a cryogenic system, it can lead to damage or failure of system components during operation. For such cases, analytical modeling is desirable for ensuring that a cryogenic system transfer line design is adequate for handling the effects of a chilldown process. The purpose of this paper is to present the results of a numerical model developed using Generalized Fluid System Simulation Program (GFSSP)'s new fluid transient capability in combination with its previously developed thermal transient capability to predict pressure and flow surge in cryogenic transfer lines during a chilldown process. An experiment performed by the National Bureau of Standards (NBS) in 1966 has been chosen as the baseline comparison case for this work. NBS s experimental set-up consisted of a 10.59 cubic foot supply dewar, an inlet valve, and a 200 foot long, in Outside Diameter (OD) vacuum jacketed copper transfer line that exhausted to atmosphere. Three different inlet valves, an in-port ball valve, a 1-in-port globe valve and a 1-in-port gate valve, were used in NBS's experiments. Experiments were performed using both liquid hydrogen and liquid nitrogen as the fluids. The proposed paper will include detailed comparisons of GFSSP's predictions with NBS's experimental results.

Majumdar, Alok↗

Settled Cryogenic Propellant Transfer

Cryogenic propellant transfer can significantly benefit NASA s space exploration initiative. LMSSC parametric studies indicate that "Topping off" the Earth Departure Stage (EDS) in LEO with approx.20 mT of additional propellant using cryogenic propellant transfer increases the lunar delivered payload by 5 mT. Filling the EDS to capacity in LEO with 78 mT of propellants increases the delivered payload by 20 mT. Cryogenic propellant transfer is directly extensible to Mars exploration in that it provides propellant for the Mars Earth Departure stage and in-situ propellant utilization at Mars. To enable the significant performance increase provided by cryogenic propellant transfer, the reliability and robustness of the transfer process must be guaranteed. By utilizing low vehicle acceleration during the cryogenic transfer the operation is significantly simplified and enables the maximum use of existing, reliable, mature upper stage cryogenic-fluid-management (CFM) techniques. Due to settling, large-scale propellant transfer becomes an engineering effort, and not the technology development endeavor required with zero-gravity propellant transfer. The following key CFM technologies are all currently implemented by settling on both the Centaur and Delta IV upper stages: propellant acquisition, hardware chilldown, pressure control, and mass gauging. The key remaining technology, autonomous rendezvous and docking, is already in use by the Russians, and must be perfected for NASA whether the use of propellant transfer is utilized or not.

Kutter, Bernard F.↗

Cryogenic Fluid Technologies for Long Duration In-Space Operations

Reliable knowledge of low-gravity cryogenic fluid management behavior is lacking and yet is critical in the areas of storage, distribution, and low-gravity propellant management. The Vision for Space Exploration mission objectives will require the use of high performance cryogenic propellants (hydrogen, oxygen, and methane). Additionally, lunar missions will require success in storing and transferring liquid and gas commodities on the surface. The fundamental challenges associated with the in-space use of cryogens are their susceptibility to environmental heat, their complex thermodynamic and fluid dynamic behavior in low gravity and the uncertainty of the position of the liquid-vapor interface if the propellants are not settled. The Cryogenic Fluid Management (CFM) project is addressing these issues through ground testing and analytical model development, and has crosscutting applications and benefits to virtually all missions requiring in-space operations with cryogens. Such knowledge can significantly reduce or even eliminate tank fluid boil-off losses for long term missions, reduce propellant launch mass and on-orbit margins, and simplify vehicle operations. The Cryogenic Fluid Management (CFM) Project is conducting testing and performing analytical evaluation of several areas to enable NASA s Exploration Vision. This paper discusses the content and progress of the technology focus areas within CFM.

Motil, Susan M.↗

Gauging Systems Monitor Cryogenic Liquids

Rocket fuel needs to stay cool - super cool, in fact. The ability to store gas propellants like liquid hydrogen and oxygen at cryogenic temperatures (below -243 F) is crucial for space missions in order to reduce their volumes and allow their storage in smaller (and therefore, less costly) tanks. The Agency has used these cryogenic fluids for vehicle propellants, reactants, and life support systems since 1962 with the Centaur upper stage rocket, which was powered with liquid oxygen and liquid hydrogen. During proposed long-duration missions, super-cooled fluids will also be used in space power systems, spaceports, and lunar habitation systems. In the next generation of launch vehicles, gaseous propellants will be cooled to and stored for extended periods at even colder temperatures than currently employed via a process called densification. Densification sub-cools liquids to temperatures even closer to absolute zero (-459 F), increasing the fluid s density and shrinking its volume beyond common cryogenics. Sub-cooling cryogenic liquid hydrogen, for instance, from 20 K (-423 F) to 15 K (-432.4 F) reduces its mass by 10 percent. These densified liquid gases can provide more cost savings from reduced payload volume. In order to benefit from this cost savings, the Agency is working with private industry to prevent evaporation, leakage, and other inadvertent loss of liquids and gases in payloads - requiring new cryogenic systems to prevent 98 percent (or more) of boil-off loss. Boil-off occurs when cryogenic or densified liquids evaporate, and is a concern during launch pad holds. Accurate sensing of propellants aboard space vehicles is also critical for proper engine shutdown and re-ignition after launch, and zero boil-off fuel systems are also in development for the Altair lunar lander.

Source record↗

Cryogenic Moisture Apparatus

The Cryogenic Moisture Apparatus (CMA) is designed for quantifying the amount of moisture from the surrounding air that is taken up by cryogenic-tank-insulating material specimens while under typical conditions of use. More specifically, the CMA holds one face of the specimen at a desired low temperature (e.g., the typical liquid-nitrogen temperature of 77 K) while the opposite face remains exposed to humid air at ambient or near-ambient temperature. The specimen is weighed before and after exposure in the CMA. The difference between the "after" and "before" weights is determined to be the weight of moisture absorbed by the specimen. Notwithstanding the term "cryogenic," the CMA is not limited to cryogenic applications: the low test temperature can be any temperature below ambient, and the specimen can be made of any material affected by moisture in air. The CMA is especially well suited for testing a variety of foam insulating materials, including those on the space-shuttle external cryogenic tanks, on other cryogenic vessels, and in refrigerators used for transporting foods, medicines, and other perishables. Testing is important because absorbed moisture not only adds weight but also, in combination with thermal cycling, can contribute to damage that degrades insulating performance. Materials are changed internally when subjected to large sub-ambient temperature gradients.

Fesmire, James↗

Cryogenic Curation of Lunar Samples Returned to Earth

Future lunar missions may collect samples that have been preserved at sub-freezing or even cryogenic temperatures. For such samples, the study of volatiles and temperature-sensitive minerals will have high priority. Valuable geochemical and mineralogical information will be lost if such samples are allowed to reach ambient temperatures on Earth. The ability to store, document, subdivide, and transport extraterrestrial geologic samples while maintaining sub-freezing or cryogenic temperatures, possibly as low as 40 K, is required for the complete scientific study of samples from cold environments. A lunar cryogenic sample return mission might require a combination of passive cooling during collection and cruise and active cooling during and after re-entry for maintaining desired temperatures. Once on Earth, cryocontainment must be maintained through delivery to a cryogenic chamber in the curatorial facility. This cryogenic curation chamber would include cameras and robotic manipulators for preliminary examination, subdivision of samples, and specialized sample allocation containers for shipment to laboratories world-wide. This presentation describes the planning and feasibility of cryogenic curation with current technologies developed for the superconductor industry. In addition, significant advanced research and development would be required to tailor some of these technologies to the task of sample return and long term curation of lunar samples at low temperatures in order to preserve their scientific integrity.

Calaway, Michael J.↗

Real-Time Model-Based Leak-Through Detection within Cryogenic Flow Systems

The timely detection of leaks within cryogenic fuel replenishment systems is of significant importance to operators on account of the safety and economic impacts associated with material loss and operational inefficiencies. Associated loss in control of pressure also effects the stability and ability to control the phase of cryogenic fluids during replenishment operations. Current research dedicated to providing Prognostics and Health Management (PHM) coverage of such cryogenic replenishment systems has focused on the detection of leaks to atmosphere involving relatively simple model-based diagnostic approaches that, while effective, are unable to isolate the fault to specific piping system components. The authors have extended this research to focus on the detection of leaks through closed valves that are intended to isolate sections of the piping system from the flow and pressurization of cryogenic fluids. The described approach employs model-based detection of leak-through conditions based on correlations of pressure changes across isolation valves and attempts to isolate the faults to specific valves. Implementation of this capability is enabled by knowledge and information embedded in the domain model of the system. The approach has been used effectively to detect such leak-through faults during cryogenic operational testing at the Cryogenic Testbed at NASA's Kennedy Space Center.

Walker, M.↗

An Overview of Recent Cryogenic Fluid Management Developments

Long-term storage, supply, and transfer of cryogenic fluids are critical capabilities needed to advance the human exploration of space. Technologies and advanced development programs have been pursued to address issues likely to confront the designers and developers of future cryogenic fluid management (CFM) subsystems and propulsion systems. NASA and aerospace industries have continued to conduct research and development for the propulsion applications of cryogenic fluids. From the well known in-space applications, to new applications involving superconducting motors within multiple different aircraft, and a renewed interest in production of oxygen on Mars, NASA continues to probe cryogenic applications within propulsion. This article presents brief reviews of several of the current CFM efforts to support future space missions. NASA GRC is currently focusing on understanding some of the finer points in the application of multilayer insulation. GRC recently finished the activation of a new calorimeter that operates at 20 K with a warm boundary that can operate either around 90 K or at 300 K. Current testing is focused on investigating multiple different seam concepts, initially between temperatures of 300 K and 20 K, and between 20 K and 90 K. One of the larger recent NASA investments has been on the Structural Heat Intercept, Insulation, and Vibration Experiment Rig (SHIIVER). SHIIVER is a 4 m diameter tank that is approximately 1/2 scale of the planned upper stage of the new Space Launch System (SLS) rocket. SHIIVER is focused on demonstrating the thermal benefits of multilayer insulation on the tank domes and boil-off vapor cooling on structural cylinders that hold the tank in-line on the rocket. It will also quantify any damage that may incur during the acoustic environment of over 160 decibels that SLS will experience on its trip to Earth orbit. In support of the possible production of oxygen out of the Mars' atmosphere, a team comprised of four NASA centers (GRC, MSFC, JSC, and KSC) collaborated to investigate multiple different hardware combinations, refrigeration cycles, and integration techniques to minimize power and mass of the storage and liquefaction system. Moreover, high efficiency, high capacity cryocoolers are an element of CFM which is essential for achieving NASA's future long duration missions. Currently in development is a 20W at 20K unit for use with liquid hydrogen. It is scheduled for delivery to NASA in the summer of 2017. Two Phase I SBIRS have recently concluded resulting in the preliminary design of two different 90K units, each having a refrigeration capacity of approximately 150W. Once the development efforts are complete, these high capacity 90K units will be integrated into the design of NASA's Liquid Oxygen (LOX)/Methane applications such as the Lander and Ascent Vehicles, or possibly an in-space stage. CFM technology is critical to the success of missions to Mars, Planetary Exploration, and In-Situ Resource Utilization (ISRU) for cryogenic propellant production. NASA is focusing on the development of CFM technologies needed to provide necessary data and relevant experience to support informed decisions on implementation of design of cryogenic systems for long term space missions. Lessons learned from the described CFM developments would lead to enhanced safety and reliability and enabling technologies which could allow NASA to meet future space exploration goals.

Hedayat, A.↗

Cryogenic Selective Surfaces

There are many challenges involved in deep-space exploration, but several of these can be mitigated, or even solved, by the development of a coating that reflects most of the Sun’s energy, yet still provides far-infrared heat emission. Such a coating would allow non-heat-generating objects in space to reach cryogenic temperatures without using an active cooling system. This would benefit deep-space sensors that require low temperatures, such as the James Webb Telescope focal plane array. It would also allow the use of superconductors in deep space, which could lead to magnetic energy storage rings, lossless power delivery, or perhaps a large-volume magnetic shield against galactic cosmic radiation. However, perhaps the most significant enablement achieved from such a coating would be the long-term, deep space storage of cryogenic liquids, such as liquid oxygen (LOX). In our Phase I NIAC study, we realized that a combination of scattering particles and a silver backing could yield a highly effective, very broadband, reflector that could potentially reflect more than 99.9% of the Sun’s irradiant power. We developed a sophisticated model of this reflector and theoretically showed that cryogenic temperatures could be achieved in deep space at one astronomical unit (1 AU) from the Sun. We showed how this new reflector could minimize heat conduction into the cryogenic tanks by coating the tank support struts. We then modelled a strawman architecture for a mission to Mars, using a coated LOX tank, coated struts, and infrared shields, to show that with our new coating it would be possible to maintain liquid oxygen passively. As a result of this work a patent application was generated and a paper published in Optics Letters. Our Phase II NIAC study had two primary goals, to develop a rigid version of the cryogenic selective surface proposed in Phase I and to test its performance in a simulated deep space environment. During the first year of the project the work concentrated on developing rigid tiles of BaF2, leading to tiles as large as 4 inches in diameter that transmitted very little visible light. In addition, during the first year a simulated deep space environment was created using a vacuum chamber and cryocooler. Using this facility, we showed that our BaF2 tiles absorbed less than ¼% of 375 nm radiation, a significant milestone for the work. During the second year of the project, we continued to develop the BaF2 tiles and we put significant effort into the construction of a deep space environment where we could project simulated solar radiation onto a sample. In the spring of 2018, we conducted our first solar simulator test with BaF2 and saw about 3.6% absorption. This is better than the state-of-the-art, but disappointing since predictions were for much lower absorption. We, erroneously, attributed this absorption to water retention by the BaF2, and decided to change materials. We considered several oxides and settled on yttrium oxide (Y2O3) for further development, because it is broadband, lightweight, has high index, and is hydrophobic. In July 2018 we conducted our first test of a rigid tile of Y2O3 in the simulated deep space environment and saw significant absorption again. We then realized that the issue was not water, but mid-wave radiation passing through the tile and being absorbed by the temperature sensor and the varnish used to hold it in place. We wrapped the sensor in silver foil, re-ran the test, and saw much lower absorption; only 1.1%. We then re-ran the BaF2 tile and saw 1.4% absorption. These values are almost adequate to maintain LOX in deep space, but we suspect that there are still issues in our test apparatus; we suspect thermocouple wires may be absorbing radiation. Further, post-NIAC, testing will better determine the performance of our new solar reflector. In order to restrict the size of this report, we will only briefly describe topics that we have previously published, allowing us to devote more time to new material. So minimal material will be devoted to modeling the material and deep space cryogenic storage, while longer sections will cover our material development, simulated deep space testing, and new applications. The Launch Service Program (LSP) requested that we explore ways to use this new coating to maintain LOX in low Earth Orbit and that work is described. In addition, the Nuclear Thermal Propulsion (NTP) Program asked us to explore ways to reduce the heat load for liquid hydrogen, resulting in the development of a spray-on version of the coating that should significantly improve in-space multi-layer insulation performance.

Robert C. Youngquist,↗

Progress on the Reduced Gravity Cryogenic Transfer (RGCT) Project

Reduced gravity transfer of cryogenic propellants is crucial to being able to perform planned extended-duration space exploration missions. However, the transfer of cryogenic propellants under reduced gravity conditions has never been demonstrated in a mass-efficient fashion. Efficient cryogenic fluid transfer methods will reduce the transfer time or amount of propellant consumed for chilldown of transfer lines and tanks and ensure successful engine restart or fill of a customer receiver tank. The purpose of the Reduced Gravity Cryogenic Transfer (RGCT) project is to enhance line chilldown, tank chilldown, and tank fill/transfer in a reduced gravity environment through (1) ground and reduced gravity cryogenic testing and (2) numerical model development and validation, which includes empirical, lumped capacitance, and computational fluid dynamics modeling. Technologies developed, data gathered, and models developed and validated under RGCT have played a critical role in enabling longer duration in-space missions. This presentation will provide a description of the ongoing cryogenic propellant transfer ground and reduced gravity testing, numerical modeling, and technology development to-date.

Boiling↗

Validation of Universal Cryogenic Flow Boiling Correlations in Thermal Desktop for Liquid Methane and Liquid Nitrogen

Future in-space cryogenic architectures will depend on the ability to accurately model various stages of cryogenic propellant transfer and storage. Currently there is a need for more accurate, direct cryogenic data-anchored models for various boiling phenomena. This paper presents the implementation and validation of recently developed universal cryogenic flow boiling correlations for saturated flow boiling heat transfer coefficients (HTC) and critical heat flux (CHF) into the Thermal Desktop (SINDA/FLUINT) modeling software. The correlations are validated against steady state cryogenic flow boiling historical heated tube cases from liquid nitrogen and liquid methane experiments covering a wide range of inlet conditions, mass flux, and heat flux. Overall, Thermal Desktop with the new universal cryogenic flow boiling correlations demonstrates significant improvement in predictive performance for both wall temperature and CHF location compared to the Thermal Desktop model with built-in correlations when both are compared to the data.

Mariano Mercado↗

Design and Fabrication of the Mu2e Cryogenic Distribution System

The muon-to-electron conversion (Mu2e) experiment at Fermilab will be used to search for the charged lepton flavor-violating conversion of muons to electrons in the field of an atomic nucleus. The Mu2e experiment is currently in the design and construction stage and is expected to begin operations in 2022. The Mu2e experiment uses four large superconducting solenoid magnets including a Production Solenoid (PS), an Upstream and Downstream Transport Solenoid (TSu and TSd) and a Detector Solenoid (DS). This paper will focus on the cryogenic distribution system for these four solenoid magnets. Liquid helium will be supplied from two re-purposed Tevatron satellite refrigerators. A large cryogenic distribution box (DB) is located in the Mu2e building to distribute the required cryogens to each of the four solenoid magnets. Each solenoid magnet will have a dedicated transfer line and cryogenic feed box (FB). The solenoid magnets each require two liquid helium circuits and two liquid nitrogen circuits. The most unique feature about this cryogenic system is that the assemblies for the start of the superconducting portion of the power leads are mounted in feed boxes that are in the range of 23 m to 31 m away from the solenoid magnets. The cryogenic feed boxes are located remotely to provide protection from radiation damage and high magnetic fields. The power leads are NbTi superconducting cable stabilized with high conductivity aluminum. The 6061-T6 aluminum grade was selected for the transfer line piping so that the piping would thermally contract at the same rate as the power lead. A major concern for this transfer line is that a small helium leak could create an electric discharge arc due to the Paschen effect. This paper includes a description of the design features and testing done to ensure that the power leads are protected from the Paschen effect while still being adequately cooled to liquid helium temperatures.

43 PARTICLE ACCELERATORS↗

Effect of Deep Cryogenic Treatment on Mechanical Properties and Microstructure of the Tool Steel CR7V for Hot Stamping

To solve the failure problem of hot stamping tool, the CR7V steel was deep cryogenically treated at different dwelling times with multiple tempering. The hardness, impact toughness and wear resistance of the CR7V steel were examined, and the effects of deep cryogenic treatment on the microstructure of the CR7V steel were studied by means of optical microscope, scanning electron microscope and energy-dispersive spectroscopy. The results show that deep cryogenic treatment has little effect on the hardness of the tempered CR7V steel, but improves its impact toughness and wear resistance. The improvement in mechanical properties is a result of the combination of dissolution of large carbide particles, formation of small-sized and uniformly distributed carbide particles and fine tempered martensite structure. The cryogenic treatment is optimized as follows: vacuum gas quenching, deep cryogenic treatment at − 196 °C for 6 h and triple tempering at 560 °C for 2 h, which improves the wear resistance by 68% and the impact toughness by 58% compared to the conventional heat treatment.

36 MATERIALS SCIENCE↗

In Situ X-Ray Diffraction Analysis of Face-Centered Cubic Metals Deformed at Room and Cryogenic Temperatures

The present study concerns the cryogenic processing of metals with simultaneous analysis of x-ray diffraction in a synchrotron ring. The mechanical properties improvement related to cryogenic processing of metals is attributed to the partial suppression of dynamic recovery. Thus, commercially pure metals with different stacking fault energies (silver, copper and aluminum) were deformed by uniaxial tensile tests and characterized by in situ x-ray diffraction, at room (293 K) and cryogenic (77 K) temperatures. The cryogenic processing allows a simultaneous improvement in ductility and strength for silver and copper and an improvement in strength for aluminum. This difference in mechanical properties was investigated by means of variations in crystallite size, microstrain and also the amount and size of dimples on the fracture surface. The microstructural refinement at cryogenic temperatures shows a tendency related to the stacking fault energies.

36 MATERIALS SCIENCE↗

Impact of Cryogenic Treatment on Mechanical Behavior and Microstructure of Ti-6Al-4V ELI Biomaterial

Ti-6Al-4V with its ELI variant is a potential biomaterial for structural implants. However, its poor resistance to plastic shearing results in poor tribological properties that hinders its widespread use in biomedical implants. Cryogenic treatment being an established technique for improving wear resistance and other mechanical properties of ferrous materials is applied on Ti-6Al-4V ELI alloy. To ensure comprehensive investigations, the widely studied microstructures of Ti-6Al-4V ELI, i.e., lamellar, martensite, two variants of bimodal and mill annealed are considered in this work. Deep cryogenic treatment at the soaking temperature (− 196 °C) for 24 h soaking time followed by tempering has been applied. The impact of cryogenic treatment has been assessed in terms of changes in the mechanical behavior including wear resistance, hardness, tensile properties and impact strength. The alterations in mechanical behavior due to cryogenic treatment are correlated with microstructure evolution. Cryogenic treatment has caused significant improvement in mechanical behavior of Ti-6Al-4V ELI alloy.

36 MATERIALS SCIENCE↗

Cryogenic Stress-Driven Grain Growth Observed via Microcompression with in situ Electron Backscatter Diffraction

The deformation of materials at cryogenic temperature is of interest for space, arctic, and fundamental science applications. In this work, a custom-built cooling system attached to a commercial picoindenter was used for in situ cryogenic microcompression testing of equal-channel angular-pressed copper with real-time electron backscatter diffraction. Stress-driven grain growth at cryogenic temperatures was observed during a series of elastic and plastic deformations. Finally, these results provide direct evidence for the previously predicted phenomenon, whereas previous ex situ examinations demonstrated coarsening after cryogenic loading when samples were not maintained at cryogenic temperatures between deformation and characterization.

36 MATERIALS SCIENCE↗

Ultralow-temperature cryogenic transmission electron microscopy using a new helium flow cryostat stage

Advances in cryogenic electron microscopy have opened new avenues for probing quantum phenomena in correlated materials. This study reports the installation and performance of a new side-entry condenZero cryogenic cooling system for JEOL (Scanning) Transmission Electron Microscopes (S/TEM), utilizing compressed liquid helium (LHe) and designed for imaging and spectroscopy at ultra-low temperatures. The system includes an external dewar mounted on a vibration-damping stage and a pressurized, low-noise helium transfer line with a remotely controllable needle valve, ensuring stable and efficient LHe flow with minimal thermal and mechanical noise. Performance evaluation demonstrates a stable base temperature of 4.37 K measured using a Cernox bare chip sensor on the holder with temperature fluctuations within ±0.004 K. Complementary in-situ electron energy-loss spectroscopy (EELS) via aluminum bulk plasmon analysis was used to measure the local specimen temperature and validate cryogenic operation during experiments. The integration of cryogenic cooling with other microscopy techniques, including electron diffraction and Lorentz TEM, was demonstrated by resolving charge density wave (CDW) transitions in NbSe2 using electron diffraction, and imaging nanometric magnetic skyrmions in MnSi via Lorentz TEM. In conclusion, this platform provides reliable cryogenic operation below 7 K, establishing a low-drift route for direct visualization of electronic and magnetic phase transformations in quantum materials.

Charge density wave↗

Physical understanding of cryogenic implant benefits for electrical junction stability

We investigate the effect of cryogenic temperature implants on electrical junction stability for ultra shallow junction applications for sub-32 nm technology nodes and beyond. A comprehensive study was conducted to gain physical understanding of the impact of cryogenic temperature implants on dopant-defect interactions. Carborane (C{sub 2}B{sub 10}H{sub 12}) molecule, a potential alternative to monomer boron was implanted in carbon preamorphized silicon substrates at cryogenic implant temperatures. Results indicate implants at cryogenic temperatures increase dopant activation with reduced diffusion, resulting in lower sheet resistance for a lower junction depth. Further, this study emphasizes the benefits of co-implants performed at cryogenic temperatures as alternative to traditional preamorphizing implants.

36 MATERIALS SCIENCE↗