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At least 199 records · Page 11

Predictive Modeling in Plasma Reactor and Process Design

Research continues toward the improvement and increased understanding of high-density plasma tools. Such reactor systems are lauded for their independent control of ion flux and energy enabling high etch rates with low ion damage and for their improved ion velocity anisotropy resulting from thin collisionless sheaths and low neutral pressures. Still, with the transition to 300 mm processing, achieving etch uniformity and high etch rates concurrently may be a formidable task for such large diameter wafers for which computational modeling can play an important role in successful reactor and process design. The inductively coupled plasma (ICP) reactor is the focus of the present investigation. The present work attempts to understand the fundamental physical phenomena of such systems through computational modeling. Simulations will be presented using both computational fluid dynamics (CFD) techniques and the direct simulation Monte Carlo (DSMC) method for argon and chlorine discharges. ICP reactors generally operate at pressures on the order of 1 to 10 mTorr. At such low pressures, rarefaction can be significant to the degree that the constitutive relations used in typical CFD techniques become invalid and a particle simulation must be employed. This work will assess the extent to which CFD can be applied and evaluate the degree to which accuracy is lost in prediction of the phenomenon of interest; i.e., etch rate. If the CFD approach is found reasonably accurate and bench-marked with DSMC and experimental results, it has the potential to serve as a design tool due to the rapid time relative to DSMC. The continuum CFD simulation solves the governing equations for plasma flow using a finite difference technique with an implicit Gauss-Seidel Line Relaxation method for time marching toward a converged solution. The equation set consists of mass conservation for each species, separate energy equations for the electrons and heavy species, and momentum equations for the gas. The sheath is modeled by imposing the Bohm velocity to the ions near the walls. The DSMC method simulates each constituent of the gas as a separate species which would be analogous in CFD to employing separate species mass, momentum, and energy equations. All particles including electrons are moved and allowed to collide with one another with the stipulation that the electrons remain tied to the ions consistent with the concept of ambipolar diffusion. The velocities of the electrons are allowed to be modified during collisions and are not confined to a Maxwellian distribution. These benefits come at a price in terms of computational time and memory. The DSMC and CFD are made as consistent as possible by using similar chemistry and power deposition models. Although the comparison of CFD and DSMC is interesting, the main goal of this work is the increased understanding of high-density plasma flowfields that can then direct improvements in both techniques. This work is unique in the level of the physical models employed in both the DSMC and CFD for high-density plasma reactor applications. For example, the electrons are simulated in the present DSMC work which has not been done before for low temperature plasma processing problems. In the CFD approach, for the first time, the charged particle transport (discharge physics) has been self-consistently coupled to the gas flow and heat transfer.

Hash, D. B.↗

Double layer formation

An investigation is conducted of the plasma processes which occur during the formation of a double layer in response to an applied initial electric field, when triggered by a current in the plasma. The important feature of the formation process was the creation of an ion-rich plasma-density cavity. The positive space charge of the cavity was shielded by induction of a negative space charge on the low potential side of the cavity, giving rise to the formation of a fully developed double layer. The shielding was complete only when the electron current from the low potential side exceeded the electron thermal current. It was found that during the formation of double layers counterstreaming electrons are generated. Moreover, transient double layers with reverse polarity also occur during this phase. Thus, the recurring formation of double layers can give rise to flickering double layers.

Singh, N.↗

Machine learning with knowledge constraints for process optimization of open-air perovskite solar cell manufacturing

Perovskite photovoltaics (PV) have achieved rapid development in the past decade in terms of power conversion efficiency of small-area lab-scale devices; however, successful commercialization still requires further development of low-cost, scalable, and high-throughput manufacturing techniques. One of the critical challenges of developing a new fabrication technique is the high-dimensional parameter space for optimization, but machine learning (ML) can readily be used to accelerate perovskite PV scaling. Herein, we present an ML-guided framework of sequential learning for manufacturing process optimization. We apply our methodology to the Rapid Spray Plasma Processing (RSPP) technique for perovskite thin films in ambient conditions. With a limited experimental budget of screening 100 process conditions, we demonstrated an efficiency improvement to 18.5% as the best-in-our-lab device fabricated by RSPP, and we also experimentally found 10 unique process conditions to produce the top-performing devices of more than 17% efficiency, which is 5 times higher rate of success than the control experiments with pseudo-random Latin hypercube sampling. Our model is enabled by three innovations: (a) flexible knowledge transfer between experimental processes by incorporating data from prior experimental data as a probabilistic constraint; (b) incorporation of both subjective human observations and ML insights when selecting next experiments; (c) adaptive strategy of locating the region of interest using Bayesian optimization first, and then conducting local exploration for high-efficiency devices. Furthermore, in virtual benchmarking, our framework achieves faster improvements with limited experimental budgets than traditional design-of-experiments methods (e.g., one-variable-at-a-time sampling). This framework shows the capability of incorporating researchers’ domain knowledge into the ML-guided optimization loop; therefore, it has the potential to facilitate the wider adoption of ML in scaling to perovskite PV manufacturing.

14 SOLAR ENERGY↗

Science Applications, Part 1

The tethered satellite system mission can allow direct observation of the structure and the dynamics of the lower atmosphere; as well as answer some basic questions on the chemical composition of the atmosphere; the coupling mechanisms between small and large scale motions; the global wind field of the lower atmosphere, and how it is influenced by waves and tides; the mass, momentum, and energy fluxes in the lower thermosphere; how the above are affected by externally perturbed conditions (for example by magnetic storms, solar wind and its variability, etc.); and the pattern of electric current circulation and its relationship with the magnetospheric environment. Fundamental plasma processes can also be studied. Similarity of conditions in other plasmas in space makes it possible to get information on the magnetospheres of the giant planets or more generally on the solar system. The electrodynamic phenomena associated with the Jovian satellite Io (radioemission, UV emission, energetic electron precipitation) can be examined by simple scaling to the terrestrial case.

Mariani, F.↗

Verification of a Fluid-Based Plasma-Edge Model Within the Multiphysics Object-Oriented Simulation Environment (MOOSE) Framework

As the goal of achieving fusion power on the grid comes closer to fruition, fully coupled multiphysics models of fusion devices will be crucial. These models must incorporate the interconnected phenomena of these devices, including plasma physics, neutronics, first wall interactions, and tritium transport. Currently, there are two main approaches to developing these platforms: (1) loosely coupled, where one couples existing codes and solvers together through input and output parameters and data, and (2) tightly coupled, where one develops the necessary models within a singular, integrated framework. This work focuses on the latter approach for magnetically confined fusion devices by developing a fluid-based plasma-edge model within the Multiphysics Object Oriented Simulation Environment (MOOSE) Framework. This effort is coordinated with other efforts to develop, test, demonstrate, and deploy fusion relevant multiphysics capabilities including electromagnetics, particle-in-cell plasma, tritium transport, and fusion blanket design. This new model is an expansion of the MOOSE-based plasma application, Zapdos, which was originally formulated to model low-temperature, non-magnetized plasma processes. Verification studies have been conducted using newly developed magnetic plasma capabilities. These involved convergence analyses utilizing the method of manufactured solutions to verify new operators and case studies. A modular approach was taken here to demonstrate increasingly complicated simulation scenarios, which included a singular fluid with uniform magnetic field case, a singular fluid with spatially varying magnetic field case, and a coupled multifluid case.

70 - PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Emission Process II: Collisional Plasmas

Covered are the basic atomic processes that are important in X-ray emitting plasmas; collisional excitation/ionization, photoexitation/ionization, radiative decay and so on.

Smith, Randall K.↗

Excess of L-Alanine in Amino Acids Synthesized in a Plasma Torch Generated by a Hypervelocity Meteorite Impact Reproduced in the Laboratory

We present a laboratory reproduction of hypervelocity impacts of a carbon containing meteorite on a mineral substance representative of planetary surfaces. The physical conditions of the resulting impact plasma torch provide favorable conditions for abiogenic synthesis of protein amino acids: We identified glycine and alanine, and in smaller quantities serine, in the produced material. Moreover, we observe breaking of alanine mirror symmetry with L excess, which coincides with the bioorganic world. Therefore the selection of L-amino acids for the formation of proteins for living matter could have been the result from plasma processes occurring during the impact meteorites on the surface. This indicates that the plasma torch from meteorite impacts could play an important role in the formation of biomolecular homochirality. Thus, meteorite impacts possibly were the initial stage of this process and promoted conditions for the emergence of a living matter.

George G Managadze↗

Ion Energy and Ion Flux Distributions of CF4/Ar/O2 Inductively Coupled Plasmas in a GEC Cell

Knowledge of ion kinetics in plasma processing gas mixtures, such as CF4:Ar:O2, is important for understanding plasma assisted etching and deposition of materials. Ion energies and ion fluxes were measured in this mixture for 80:10:10, 60:20:20, and 40:30:30 mixture ratios in the pressure range of 10-50 mTorr, and at 200 and 300 W of RF power. Ions from plasma, sampled through a 10 micron orifice in the center of the lower plane electrode, were energy and mass analyzed by a combination of electrostatic energy and quadrupole mass filters. CFx(+) (x = 1 - 3), F2(+), F(+), C(+) from CF4, Ar(+) from Ar, and O2(+) and O(+) from O2, and by-product ions SiFx(+)(x = 1 - 3) from etching of quartz coupling window, COFx(+)(x = 1 - 3), CO(+), CO2(+), and OF(+) were detected. In all conditions ion flux decreases with increase of pressure but increase with increase of RF power. Ar(+) signal decreases with increase of pressure while CF3(+), which is the dominant ion at all conditions, increases with increase in pressure. The loss mechanism for Ar(+) and increase of CF3(+) is due to large cross section for Ar(+) + CF4 yields Ar + CF3(+) + F. Ion energies, which range from 15-25 eV depending on plasma operating conditions, are nearly Gaussian. By-product ion signals are higher at lower pressures indicating stronger plasma interaction with quartz window.

Rao, M. V. V. S.↗

Nanosynthesis by atmospheric arc discharges excited with pulsed-DC power: a review

Plasma technology is actively used for nanoparticle synthesis and modification. All plasma techniques share the ambition of providing high quality, nanostructured materials with full control over their crystalline state and functional properties. Pulsed-DC physical/chemical vapour deposition, high power impulse magnetron sputtering, and pulsed cathodic arc are consolidated low-temperature plasma processes for the synthesis of high-quality nanocomposite films in vacuum environment. However, atmospheric arc discharge stands out thanks to the high throughput, wide variety, and excellent quality of obtained stand-alone nanomaterials, mainly core–shell nanoparticles, transition metal dichalcogenide monolayers, and carbon-based nanostructures, like graphene and carbon nanotubes. Unique capabilities of this arc technique are due to its flexibility and wide range of plasma parameters achievable by modulation of the frequency, duty cycle, and amplitude of pulse waveform. The many possibilities offered by pulsed arc discharges applied on synthesis of low-dimensional materials are reviewed here. Periodical variations in temperature and density of the pulsing arc plasma enable nanosynthesis with a more rational use of the supplied power. Parameters such as plasma composition, consumed power, process stability, material properties, and economical aspects, are discussed. Lastly a brief outlook towards future tendencies of nanomaterial preparation is proposed. Atmospheric pulsed arcs constitute promising, clean processes providing ecological and sustainable development in the production of nanomaterials both in industry and research laboratories.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

The ISPM solar-wind ion composition spectrometer

The International Solar Polar Mission (ISPM) Solar-Wind Ion Composition Spectrometer which determines elemental and ionic-charge composition, and the temperatures and mean speeds of all major solar-wind ions, from H through Fe, at solar wind speeds ranging from 145 km/sec (protons) to 1352 km/sec (Fe+8) is described. The instrument, which covers an energy per charge range from 110 eV/q to 66.7 keV/q in 13 min, combines an electrostatic analyzer with postacceleration, followed by a time-of-flight and energy measurement. Conditions and processes in the region of the corona where the solar wind is accelerated; location of the source regions of the solar wind in the corona; coronal heating processes; the extent and causes of variations in the composition of the solar atmosphere; plasma processes in the solar wind; acceleration of energetic particles in the solar wind; the thermalization and acceleration of interstellar ions in the solar wind, and their composition; and the composition and behavior of the plasma in the Jovian magnetosphere are studied.

Gloeckler, G.↗

Collaborative Research: Enabling multi-scale studies of magnetic reconnection with interpretable data-driven models

The development of accurate reduced descriptions and improved closures for magnetic reconnection is an important and a long‐standing challenge in plasma physics. The four‐fluid approach, and associated closures, that were investigated have the potential to improve the accuracy of plasma fluid models, capturing physical effects which would otherwise require a kinetic description. If successful, this approach could have an important impact for the modeling of laboratory and space plasmas. The major goals of this project were to develop new machine learning (ML) tools based on sparse and symbolic regression techniques, and to extract interpretable and generalizable reduced models (e.g., in the form of partial differential equations - PDEs) from data generated by first principles plasma simulations. Preserving interpretability of such data‐driven models is key to addressing the long‐standing theoretical and numerical challenges. Prior proof‐of‐principle studies have demonstrated the enormous potential of this approach, by recovering the well‐established hierarchy of plasma equations (from Vlasov to MHD) from data produced by particle‐in‐cell (PIC) simulations. Our goal in this project was to extend and apply these new tools to construct better kinetic closures for magnetic reconnection; to derive better models of particle injection and acceleration by this fundamental plasma process; and to use this understanding to accelerate the development of multi‐scale plasma algorithms. While our immediate focus was on the problem of magnetic reconnection, the tools that were will developed are general and applicable to other areas of plasma physics, and more broadly to many‐body phenomena. We anticipate that the development of these multi‐scale models will have a significant impact across different areas of plasma science, from fusion to space and astrophysical plasmas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Automated Array Assembly, Phase 2

The solar cell module process development activities in the areas of surface preparation are presented. The process step development was carried out on texture etching including the evolution of a conceptual process model for the texturing process; plasma etching; and diffusion studies that focused on doped polymer diffusion sources. Cell processing was carried out to test process steps and a simplified diode solar cell process was developed. Cell processing was also run to fabricate square cells to populate sample minimodules. Module fabrication featured the demonstration of a porcelainized steel glass structure that should exceed the 20 year life goal of the low cost silicon array program. High efficiency cell development was carried out in the development of the tandem junction cell and a modification of the TJC called the front surface field cell. Cell efficiencies in excess of 16 percent at AM1 have been attained with only modest fill factors. The transistor-like model was proposed that fits the cell performance and provides a guideline for future improvements in cell performance.

Carbajal, B. G.↗

Fundamental principles of hollow-cathode-discharge operations in space and the design of a rocket-borne demonstration

The issue of hollow-cathode operations in space is treated from the point of view of fundamental principles of plasma interactions and their control over currents involving the device, the spaceborne vehicle, and the ambient space plasma. Particular attention is given to collective plasma processes, the effects of the ambient magnetic field, and the high probability of plasma turbulence triggered by hallow cathode operations. The paper presents a rocket payload and experiment scenario designed for accommodation on a Black Brant booster, launched from a midlatitude site to an apogee in excess of 400 km.

Szuszczewicz, Edward P.↗

Spacecraft observations of the interaction of active comets with the solar wind

Six spacecraft encountered two comets during 1985 and 1986, obtaining a wealth of data relative to the plasma processes at work in the interaction of an active comet with the solar wind. A review of what space plasma scientists have learned from these data and of their interpretations is presented. The interaction process begins millions of kilometers from the nucleus where the solar wind first picks up cometary ions that slow down the wind and causes the interplanetary magnetic field to pile up and drape around the comet's ionosphere. Thus the geometry of a comet's plasma tail is defined by this draped field. At Halley the Giotto spacecraft noted a well-defined boundary separating the mixture of solar wind and cometary plasmas and the interplanetary magnetic field from the free-field, almost pure cometary plasma in the inner coma. Additional unexpected features in the inner coma were a flux of fast 'granddaughter' ions and high densities of negative ions. Further details covering pickup ions and plasma waves, mass loading, bow shock, energetic particles, the cometosheath, the ionopause, the plasma tail, and the field-free region are provided.

Neugebauer, M.↗

Magnetic field reconnection

A reasonably detailed description is obtained of the current status of our understanding of magnetic field reconnection. The picture that emerges is of a process, simple in concept but extremely complicated and multifaceted in detail. Nonlinear MHD processes in the external flow region, governed by distant boundary conditions, are coupled to nonlinear microscopic plasma processes in the diffusion region, in a manner not clearly understood. It appears that reconnection may operate in entirely different ways for different plasma parameters and different external boundary conditions. Steady reconnection may be allowed in some cases, forbidden in others, with intermediate situations involving impulsive or pulsative events.

Sonnerup, U. O.↗

Improved Method of Purifying Carbon Nanotubes

An improved method of removing the residues of fabrication from carbon nanotubes has been invented. These residues comprise amorphous carbon and metal particles that are produced during the growth process. Prior methods of removing the residues include a variety of processes that involved the use of halogens, oxygen, or air in both thermal and plasma processes. Each of the prior methods entails one or more disadvantages, including non-selectivity (removal or damage of nanotubes in addition to removal of the residues), the need to dispose of toxic wastes, and/or processing times as long as 24 hours or more. In contrast, the process described here does not include the use of toxic chemicals, the generation of toxic wastes, causes little or no damage to the carbon nanotubes, and involves processing times of less than 1 hour. In the improved method, purification is accomplished by flowing water vapor through the reaction chamber at elevated temperatures and ambient pressures. The impurities are converted to gaseous waste products by the selective hydrogenation and hydroxylation by the water in a reaction chamber. This process could be performed either immediately after growth or in a post-growth purification process. The water used needs to be substantially free of oxygen and can be obtained by a repeated freeze-pump-thaw process. The presence of oxygen will non-selectively attach the carbon nanotubes in addition to the amorphous carbon.

Delzeit, Lance D.↗

The Solar Wind Ion Composition Spectrometer

The Solar Wind Ion Composition Spectrometer (SWICS) on Ulysses is designed to determine uniquely the elemental and ionic-charge composition, and the temperatures and mean speeds of all major solar-wind ions, from H through Fe, at solar wind speeds ranging from 175 km/s (protons) to 1280 km/s (Fe(8+)). The instrument, which covers an energy per charge range from 0.16 to 59.6 keV/e in about 13 min, combines an electrostatic analyzer with postacceleration, followed by a time-of-flight and energy measurement. The measurements made by SWICS will have an impact on many areas of solar and heliospheric physics, in particular providing essential and unique information on: (1) conditions and processes in the region of the corona where the solar wind is accelerated; (2) the location of the source regions of the solar wind in the corona; (3) coronal heating processes; (4) the extent and causes of variations in the composition of the solar atmosphere; (5) plasma processes in the solar wind; (6) the acceleration of energetic particles in the solar wind; (7) the thermalization and acceleration of interstellar ions in the solar wind, and their composition; and (8) the composition, charge states, and behavior of the plasma in various regions of the Jovian magnetosphere.

Gloeckler, G.↗