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At least 199 records · Page 11

Highly selective Si 3 N 4 /SiO 2 etching using an NF 3 /N 2 /O 2 /H 2 remote plasma. I. Plasma source and critical fluxes

Highly selective plasma etching of silicon nitride (Si 3 N 4 ), while not etching silicon dioxide (SiO 2 ), is a critical step in the fabrication of microelectronics devices. In many applications, this etching must be damage-free and isotropic, which then motivates the use of remote plasmas where the reactants interacting with the substrate are dominantly neutral species. In this paper and Paper II, mechanisms for highly selective Si 3 N 4 etching in remote plasmas are discussed based on results from experiments and simulations. It has been shown experimentally that high Si 3 N 4 /SiO 2 etch selectivity (≈380) can be achieved in the downstream effluent of an NF 3 /N 2 /O 2 /H 2 plasma. The authors found that H2 plays a principal role in the reaction mechanism as Si 3 N 4 /SiO 2 selectivity shows a sharp maximum as a function of the H2 flow rate. Based on this observation, and measured densities of F-atoms and H2 in the process chamber, a mechanism of selective Si 3 N 4 /SiO 2 etching is proposed in which HF molecules in vibrationally excited states accelerate etching reactions. A reaction mechanism for NF 3 /N 2 /O 2 /H 2 plasmas and its afterglow was developed to computationally determine the species densities and fluxes on the wafer level, validated by comparing with experimentally measured F-atom and H 2 densities. The calculated species densities and fluxes were used as input to an analytical model of Si 3 N 4 and SiO 2 etching based on the results of quantum chemistry simulations. This paper presents experimental results (etching data and species densities), the reaction mechanism for NF 3 /N 2 /O 2 /H 2 plasmas, and the results of simulations of gas phase chemistry. Quantum chemistry simulations of elementary etching reactions, description of the analytical model of Si 3 N 4 and SiO 2 etching, calculations of the etch rates, and Si 3 N 4 and SiO 2 selectivity with this model are presented in Paper II.

42 ENGINEERING↗

Highly selective Si 3 N 4 /SiO 2 etching using an NF 3 /N 2 /O 2 /H 2 remote plasma. II. Surface reaction mechanism

Developing processes for highly selective etching of silicon nitride (Si 3 N 4 ) with respect to silicon dioxide (SiO 2 ) is a major priority for semiconductor fabrication processing. In this paper and in Paper I [Volynets et al., J. Vac. Sci. Technol. A 38, 023007 (2020)], mechanisms are discussed for highly selective Si3N4 etching in a remote plasma based on experimental and theoretical investigations. The Si 3 N 4 /SiO 2 etch selectivity of up to 380 was experimentally produced using a remote plasma sustained in NF 3 /N 2 /O 2 /H 2 mixtures. A selectivity strongly depends on the flow rate of H 2 , an effect attributed to the formation of HF molecules in vibrationally excited states that accelerate etching reactions. Based on experimental measurements and zero-dimensional plasma simulations, an analytical etching model was developed for etch rates as a function of process parameters. Reaction rates and sticking coefficients were provided by quantum chemistry models and also fitted to the experimental results. Etch rates from the analytical model show good agreement with the experimental results and demonstrate why certain etchants accelerate or inhibit the etch process. In particular, the modeling shows the important role of HF molecules in the first vibrationally excited state [HF( v = 1)] in achieving high Si 3 N 4 /SiO 2 selectivity.

42 ENGINEERING↗

Tackling Climate Change with Machine Learning

Climate change is one of the greatest challenges facing humanity, and we, as machine learning (ML) experts, may wonder how we can help. Here we describe how ML can be a powerful tool in reducing greenhouse gas emissions and helping society adapt to a changing climate. From smart grids to disaster management, we identify high impact problems where existing gaps can be filled by ML, in collaboration with other fields. Our recommendations encompass exciting research questions as well as promising business opportunities. We call on the ML community to join the global effort against climate change.

54 ENVIRONMENTAL SCIENCES↗

Microwave Microscopy and Its Applications

Understanding the nanoscale electrodynamic properties of a material at microwave frequencies is of great interest for materials science, condensed matter physics, device engineering, and biology. With specialized probes, sensitive detection electronics, and improved scanning platforms, microwave microscopy has become an important tool for cutting-edge materials research in the past decade. In this article, we review the basic components and data interpretation of microwave imaging and its broad range of applications. In addition to the general-purpose mapping of permittivity and conductivity, microwave microscopy is now exploited to perform quantitative measurements on semiconductor devices, photosensitive materials, ferroelectric domains and domain walls, and acoustic-wave systems. Implementation of the technique in low-temperature and high-magnetic-field chambers has also led to major discoveries in quantum materials with strong correlation and topological order. We conclude the review with an outlook of the ultimate resolution, operation frequency, and future industrial and academic applications of near-field microwave microscopy.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

US Fallout Shelter

Being indoors (sheltering) reduces radiation exposures resulting from nuclear fallout or a power-plant accident. However, most US building types, particularly non-residential buildings, lack quantitative estimates. We provide here a high-level modeling analysis of modern US building protection based on a novel radiation protection building attribute taxonomy, a new building protection model, compilation of prior experimental results, and nationally representative building survey data. This approach provides a consistent, quantitative understanding of US building protection and, when combined with the distribution of people among different buildings, can assist in selecting emergency response strategies. We find that indoor radiation protection varies by orders of magnitude. Most people in non-residential buildings are adequately protected, particularly below ground or in the building center. Residential buildings are less protective and those with lighter weight walls lack adequate, above ground protection. This work also highlights key areas where further investigation will improve the current results. These include the improving the understanding of residential basement protection, additional experimental data on non-residential buildings (particularly schools and industrial buildings), and the frequency of brick veneer and stucco exterior residential buildings.

61 RADIATION PROTECTION AND DOSIMETRY↗

Final Design for Thermal/Epithermal eXperiments (TEX) with Absorbers to Provide Validation Benchmarks for Y-12 Electrorefining Facility

One of the main goals of the Thermal/Epithermal eXperiments (TEX) project is to use existing Nuclear Criticality Safety Program (NCSP) assets to create critical experiment plutonium and uranium test beds for materials important to criticality safety that have insufficient benchmark evaluations. The plutonium test bed experiments were completed in 2018 and are published in the 2020 edition of the International Criticality Safety Benchmark Evaluation Project (ICSBEP) Handbook. The uranium test bed assemblies were measured in 2020, with benchmark preparation underway.

42 ENGINEERING↗

Field Test Report Neutron Scintillator Array Dry Storage Cask Scanner FY2024

During two weeks of Field Testing at the Idaho National Laboratory INTEC Cask Farm in July and August 2024, the LLNL Dry Storage Cask Scanner Array was lifted on top of an MC-10 dry storage fuel cask and operated to acquire neutron and gamma-ray data from the 24 fuel bundle positions. Neutron and gamma-ray data acquisition scans across the top of the cask of varying dwell times were performed July 15-18, 2024 and August 19-22, 2024 to evaluate the ability of the scanner data to reveal asymmetries in the fuel positions that reflect asymmetries in the MC-10 cask fuel bundle loading. The MC-10 cask 24 position fuel bundle loading at the INTEC Cask Farm is well documented, including the locations of six empty fuel bundle positions. This loading presents an opportunity to test the ability of the scanner system to detect diversion of spent fuel bundles as well as to validate the MC-10 cask MCNP modeling. The cask scanner array consists of six Stilbene crystal scintillator detectors and a linear actuator frame that moves the six detectors across the MC-10 dry storage cask to obtain data above each of the 24 fuel bundle positions. The detectors are connected to a pulse-shape discrimination data acquisition system capable of generating separate neutron and gamma-ray spectra for each detector and for each scan position. From the prior single detector Field Test in 2021 and iteration with MCNP modeling, the neutron and gamma-ray data were analyzed in multiple energy regions to identify an analysis method that would provide the strongest and most consistent signature of the asymmetric MC-10 cask fuel loading1 . From both the 2021 Field Test and the current Field Test results, the neutron capture gamma-ray count rate around 2.2 MeV provides the strongest signature of the asymmetric MC-10 cask fuel loading and has qualitative agreement with MCNP calculations. Counting all gamma-rays produces a similar signature. Neutrons emerging from the cask top are moderated and captured by the hydrogen in the polyethylene moderator and scintillator detector, producing a 2.2 MeV gamma ray which is seen in the scintillator gamma-ray spectrum. The count rate in the 2.2 MeV gamma-ray region is ~50 c/s, which is ~1000x higher than the ~0.05 n/s rate in the > 4MeV neutron region, and ~50x greater than the ~1 n/s rate in the neutrons > 500 keV region. Analysis of the 2.2 MeV neutron-capture Compton-scattered gamma-rays produces a statistically significant signature of the INTEC Cask Farm MC-10 asymmetric fuel loading. MCNP simulations indicate that the average neutron energy spectrum offers the potential to detect a large asymmetry from several missing bundles as well as individual missing fuel bundles. Testing this feature will require measurements on a cask with single missing elements.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

First experimental study of multiple orientation muon tomography, with image optimization in sparse data environments

Due to the high penetrating power of cosmic ray muons, they can be used to probe very thick and dense objects. As charged particles, they can be tracked by ionization detectors, determining the position and direction of the muons. With detectors on either side of an object, particle direction changes can be used to extract scattering information within an object. This can be used to produce a scattering intensity image within the object related to density and atomic number. Such imaging is typically performed with a single detector-object orientation, taking advantage of the more intense downward flux of muons, producing planar imaging with some depth-of-field information in the third dimension. Several simulation studies have been published with multi-orientation tomography, which can form a three-dimensional representation faster than a single orientation view. In this work we present the first experimental multiple orientation muon tomography study. Experimental muon-scatter based tomography was performed using a concrete filled steel drum with several different metal wedges inside, between detector planes. Data was collected from different detector-object orientations by rotating the steel drum. The data collected from each orientation were then combined using two different tomographic methods. Results showed that using a combination of multiple depth-of-field reconstructions, rather than a traditional inverse Radon transform approach used for CT, resulted in more useful images for sparser data. As cosmic ray muon flux imaging is rate limited, the imaging techniques were compared for sparse data. Using the combined depth-of-field reconstruction technique, fewer detector-object orientations were needed to reconstruct images that could be used to differentiate the metal wedge compositions.

Applied Physics (physics.app-ph)↗

Transportable educational programs for scientific and technical professionals: More effective utilization of automated scientific and technical data base systems

This grant final report executive summary documents a major, long-term program addressing innovative educational issues associated with the development, administration, evaluation, and widespread distribution of transportable educational programs for scientists and engineers to increase their knowledge of, and facilitate their utilization of automated scientific and technical information storage and retrieval systems. This educational program is of very broad scope, being targeted at Colleges of Engineering and Colleges of Physical sciences at a large number of colleges and universities throughout the United States. The educational program is designed to incorporate extensive hands-on, interactive usage of the NASA RECON system and is supported by a number of microcomputer-based software systems to facilitate the delivery and usage of the educational course materials developed as part of the program.

Dominick, Wayne D.↗

Program for the Increased Participation of Minorities in NASA-Related Research

The goal of this program is to increase the participation of minorities in NASA related research and "Science for the Nation s Interest". Collaborative research projects will be developed involving NASA-MSFC, National Space Science and Technology Center (NSSTC), other government agencies, industries and minority serving institutions (MSIs). The primary focus for the MSIs will be on Alabama A&M University and Tuskegee University, which are in partnership with the NSSTC. These schools have excellent Ph.D. programs in physics and materials science and engineering, respectively. The first phase of this program will be carried out at Alabama A&M University in the "Research and Development Office" in collaboration with Dr. Dorothy Huston, Vice President of Research and Development. The development assignment will be carried out at the NSSTC with Sandy Coleman/ RS01 and this will primarily involve working with Tuskegee University.A portion of the program will be devoted to identifying and contacting potential funding sources for use in establishing collaborative research projects between NASA-MSFC, other government agencies, NSSTC, industries, and MSIs. These potential funding sources include the National Science Foundation (NSF), National Institute of Health (NIH), Department of Defense (DOD), Army, Navy, and Air Force. Collaborative research projects will be written mostly in the following research areas: a. Cosmic radiation shielding materials b. Advanced propulsion material c. Biomedical materials and biosensors d. In situ resource utilization e. Photonics for NASA applications

Source record↗

Artificial Muscles Based on Electroactive Polymers as an Enabling Tool in Biomimetics

Evolution has resolved many of nature's challenges leading to working and lasting solutions that employ principles of physics, chemistry, mechanical engineering, materials science, and many other fields of science and engineering. Nature's inventions have always inspired human achievements leading to effective materials, structures, tools, mechanisms, processes, algorithms, methods, systems, and many other benefits. Some of the technologies that have emerged include artificial intelligence, artificial vision, and artificial muscles, where the latter is the moniker for electroactive polymers (EAPs). To take advantage of these materials and make them practical actuators, efforts are made worldwide to develop capabilities that are critical to the field infrastructure. Researchers are developing analytical model and comprehensive understanding of EAP materials response mechanism as well as effective processing and characterization techniques. The field is still in its emerging state and robust materials are still not readily available; however, in recent years, significant progress has been made and commercial products have already started to appear. In the current paper, the state-of-the-art and challenges to artificial muscles as well as their potential application to biomimetic mechanisms and devices are described and discussed.

electroactive polymers↗

Enabling a Voice Management System for Space Applications, Design and Software Development

Sustainable missions, beyond low Earth orbit, will require autonomous capabilities in order to achieve NASA’s Artemis program objectives. Correspondingly, the crew must have a means to efficiently interact with these autonomous systems; this can be facilitated via voice and speech communications. Voice-based controls enable the user to access autonomous systems hands-free/eyes-free, allowing the user to better focus on critical tasks. The goal of this project was to explore the knowledge and technology needed to successfully design effective voice interfaces for autonomous systems. The main objective was to understand how a crew member, through voice interaction, could most efficiently and intuitively communicate with a notional autonomous vehicle system manager. This project leveraged prior research conducted by the University of Michigan’s Bioastronautics and Life Support System (BLiSS) team as part of a NASA Moon to Mars eXploration Systems and Habitation (M2M X-Hab) 2020 Academic Innovation Challenge. The X-Hab 2020 work from the BliSS Team resulted in an intuitive graphical user interface/user experience that was built on an Internet of Things (IOT) platform. The Voice User Interface (VUI) design for the M2M X-Hab 2021 project leveraged this technology and incorporated a voice-based assistant and NASA’s Platform for Autonomous Systems (NPAS) software. This required technologies to convert voice to text, conduct semantic interpretations, and convert responses from the autonomous system to text and to speech; additionally, the background noise environment of spacecraft was assessed, and a relatable personality for the autonomous system to facilitate human-like conversations was created. This work’s success was largely due to the diverse team that included expertise in Space Systems Engineering, Human Computer Interaction, Aerospace Engineering, Computer Science, Biomedical Engineering, and Applied Physics. The differing perspectives fostered elaborate discussions, resulting in the conception of three main interactions: (1) User-System, (2) NPAS-System, and (3) Environment-System. The system developed, i.e. the VUI, had to be unique, efficient, and intuitive; thus, the team crafted a personality for the system to enable human-like conversation. User surveys sent to students and young professionals were used to help determine these personality traits by capturing perspectives and expectations of the “Artemis Generation Astronauts”. To further simulate human-like conversations, the system had to be able to quickly interpret user speech and be able to integrate with NASA’s NPAS system for quick and reliable information transfer. Results of this research include (1) a working prototype user interface, that is compatible with NASA’s NPAS system; (2) software that demonstrates the ability to interpret user requests and respond appropriately; (3) the capability to implement fully expanded conversations between user and system using intuitive communication in four request categories; and (4) software and hardware recommendations that optimize the system’s ability to operate, i.e. be heard, in a noisy environment. The technologies chosen for this project’s demonstrations included the following: Raspberry Pi, RASA, Mozilla Deep Speech, Coqui, RTX Voice and Adobe XD. This work has laid the foundation for the development of VUI’s used for autonomy, and is intended to provide guidance for future VUI development.

Tara Vega↗

Enabling a Voice Management System for Space Applications

The sustainable missions beyond Low Earth Orbit (LEO) envisioned for NASA’s Artemis program will require autonomous capabilities. Moreover, Artemis mission crews will need a means to efficiently interact with a spacecraft’s autonomous systems. This interaction can be facilitated by voice and speech communications because voice-based controls enable users to interact hands- and eyes-free, allowing the user to better focus on critical tasks. The goal of our project was to explore the knowledge and technology needed to successfully design effective Voice User Interfaces (VUIs) for autonomous systems utilizing Human Centered Design (HCD) principles. The focus of the human factors’ aspect of engineering, pays close attention to psychological and physiological principles in the development of autonomous crew operation systems. A main objective was to understand how a crew member, through voice interaction, could efficiently and intuitively communicate with a notional autonomous vehicle system manager. This project was a part of the NASA Moon to Mars eXploration Systems and Habitation (M2M X-Hab) 2020 Academic Innovation Challenge. The work from the BLiSS Team, at the University of Michigan, resulted in the design of a system persona, Diego, to which an astronaut may quickly build trust with autonomous systems, to alleviate known stressors on mental health expected during long duration space missions. Optimal software to facilitate integration of the system persona into a reference Lunar orbiting Gateway station was defined. Additionally, a Speech to Text (STT) system and a Graphical User Interface (GUI) that could be implemented in future missions was developed on an Internet of Things (IOT) platform. The Voice User Interface (VUI) design for the M2M X-Hab 2020 project leveraged previous technology developed by the BLiSS team to incorporate a voice-based interface into NASA’s Platform for Autonomous Systems (NPAS) software. This required technologies to convert voice to text, conduct semantic interpretations, and convert responses from the autonomous system to text and to speech; additionally, the spacecraft background noise environment was assessed, a noise mitigation technique was developed, and a relatable personality for the autonomous system was developed in order to facilitate human-like conversations. The success of our effort was largely due to the diversity of the team that included expertise in Space Systems Engineering, Human Computer Interaction, Aerospace Engineering, Computer Science, Biomedical Engineering, and Applied Physics. The diverse perspectives fostered elaborate discussions, resulting in the conception of three main subsystems: (1) User-System, (2) NPAS-System, and (3) Environment-System. The VUI was unique and had to be efficient and intuitive. For this project, 5 subteams were formed, each with a separate objective, Voice Design team, Background Noise Mitigation team, Software Integration team and Graphical User Interface team. The BLiSS team crafted a personality for the VUI to enable human-like conversation and drive user adoption and trust. User surveys were completed and used to help determine the required VUI system personality traits by capturing perspectives and expectations of prospective “Artemis Generation Astronauts”. To further simulate human-like conversations, the system had to be able to quickly interpret user speech and be able to integrate with NASA’s NPAS platform for quick and reliable information transfer. The outcomes of our research were: (1) a working prototype user interface, that is compatible with NASA’s NPAS platform; (2) software that demonstrates the ability of the VUI system to interpret user requests and respond appropriately; (3) the capability to implement fully expanded conversations between user and system using intuitive communication in four request categories; and (4) software and hardware recommendations that optimize the system’s ability to operate in a noisy environment. Our research has laid the foundation for the development of VUI’s for autonomy, and provides a baseline for future VUI developments.

Voice user interface↗

Overview of the Inaugural Space Health Impacts for the NASA Experience (SHINE) Training Program – Virtual Space Radiation Curriculum

The Space Radiation Element part of NASA Human Research Program initiated a virtual, annual space radiation curriculum. The SHINE space radiation curriculum aims to educate participants not only in the scientific aspects of space radiation but also in the agency’s risk management strategies. SHINE combines weekly seminars by speakers from NASA, other government agencies, academia, and industry, with networking sessions designed to foster collaboration between participants and interactions with NASA scientists. A total of 59 applications were received from which 25 participants were selected. The 25 participants, with citizenship from a total of 8 countries, are composed of 5 graduate students, 4 postdocs, 11 scientists and 5 professors/medical doctors. Participants have a wide range of expertise including molecular and cellular biology, microbiology, botany, physiology, engineering, physics, aerospace medicine, planetary science, biostatistics, and modeling. The inaugural course ran weekly from February 2023 to August 2023 and was comprised of lectures, less formal coffee hours and office hours. The topics covered ranged from space environments to health effects to granting opportunities. The second annual SHINE training program is scheduled from February to August 2024. In addition, a separate competitive practicum session, to allow participants to gain hands-on radiation experience, will be held Fall 2024 at the NASA Space Radiation Laboratory (NSRL).

Janice A. Zawask↗

Overview of The Inaugural Space Health Impacts for the NASA Experience (SHINE) Training Program – Virtual Space Radiation Curriculum

The Space Radiation Element of the NASA Human Research Program initiated a virtual, annual space radiation curriculum. The Space Health Impacts for the NASA Experience (SHINE) space radiation didactic curriculum aims to educate participants not only in the scientific aspects of space radiation but also in the agency’s risk management strategies. SHINE combines weekly seminars by speakers from NASA, other government agencies, academia, and industry, with networking sessions designed to foster collaboration between participants and interactions with NASA scientists and HRP funded investigators. The inaugural course ran weekly from February 2023 to August 2023 and was comprised of lectures, less formal coffee hours and office hours. The SHINE topics ranged from space environments to health effects and countermeasure to granting opportunities. Participants developed beam time proposals for real, proposed, or potential experiments at the NASA Space Radiation Laboratory (NSRL) at the Brookhaven National Laboratory. For the 2023 course, a total of 59 applications were received from which 25 participants were selected. Selected participants were citizens from 8 countries and comprised 5 graduate students, 4 postdocs, 11 scientists and 5 professors/medical doctors. Participants had a wide range of expertise including molecular and cellular biology, microbiology, botany, physiology, engineering, physics, aerospace medicine, planetary science, biostatistics, and modeling. The second annual SHINE training program is scheduled from February to August 2024. In addition, a separate SHINE space radiation practicum session, to allow participants to gain hands-on radiation experience, will be held Fall 2024 at the NSRL.

Radiation↗