Variable control MEMS valve for gas/liquid systems
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reflector↗
SEARCH · Engineering Papers
Results for “mems”
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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A wafer transfer technology for MEMS adaptive optics
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MEMS NEMS space NASA JPL valve micro-propulsion mi↗
Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02
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MEMS reliability analysis↗
Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01
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MEMS reliability analysis↗
An overview of MEMS-based micropropulsion developments at JPL
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micropropulsion microspacecraft MEMS↗
MEMS development for space applications at NASA/JPL
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MEMS space applications micro-gyroscope micro prop↗
MEMS fabrication of a microelectrode for local electrode atom probe microanalysis
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nonorthogonal MEMS three-dimensional atom probe x-↗
Challenges in Interconnection and Packaging of Microelectromechanical Systems (MEMS)
Integrated circuit packaging and their testing is well advanced because of the maturity of the IC industry, their wide applications, and availability of industrial infrastructure.
COTS MEMS packaging interconnections reliability↗
MEMS Packaging and Reliability Challenges
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microelectromechanical systems MEMS COTS reliabili↗
Fundamentals of Microelectromechanical Systems (MEMS)
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MEMS Microelectromechanical Systems packaging adva↗
MEMS based sun sensor
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MEMS sun sensor attitude determination↗
MEMS-based force-detected nuclear magnetic resonance spectrometer for in situ planetary exploration
Nuclear Magnetic resonance (NMR) is a well-known spectroscopic technique used by chemists and is especially powerful in detecting the presence of water and distinguishing between arbitrary physisorbed and chemisorbed states. This ability is of particular importance in the search for extra-terrestrial life on planets such as Mars.
in situ instruments NMR FDNMR MEMS↗
Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device
This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure.
GMR MEMS spin valves micromachining hard magnetic ↗
Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device
The measurement of acceleration has been accomplished using several technologies in high-reliability applications such as guidance control, detonation, and shock/vibration measurement. Electromechanical, piezoelectric, piezoresistive, and capacitive acceleration sensors are available and the literature pertinent to giant magnetoresistive sensors (GMR) for the above applications are scanty.
acceleration MEMS GMR giant magnetoresistive senso↗
Microelectromechanical Systems (MEMS)
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microelectromechanical systems MEMS integrated cir↗
Challenges in Interconnection and Packaging of Microeletromechanical Systems (MEMS)
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MEMS↗
Low-Cost MEMs Robotics for Space Exploration: A Probabilistic Trade Space for Biomorphic Exploration Devices
During the next decade, numerous in-situ sampling missions are planned to a variety of planets, moons, asteroids, and comets.
In-situ sampling robotics MEMs Biomorphic↗