Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “inductive charging”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

192 records · Page 11
All sourcesNASA NTRSDOE OSTI
NASA NTRS2009

Environmental Effects on ISS Materials Aging (1998 to 2008)

The performance of ISS spacecraft materials and systems on prolonged exposure to the low- Earth orbit (LEO) space flight are reported in this paper. In-flight data, flight crew observations, and the results of ground-based test and analysis directly supporting programmatic and operational decision-making are described. The space flight environments definitions (both natural and induced) used for ISS design, material selection, and verification testing are shown, in most cases, to be more severe than the actual flight environment accounting, in part, for the outstanding performance of ISS as a long mission duration spacecraft. No significant ISS material or system failures have been attributed to spacecraft-environments interactions. Nonetheless, ISS materials and systems performance data is contributing to our understanding of spacecraft material interactions with the spaceflight environment so as to reduce cost and risk for future spaceflight projects and programs. Orbital inclination (51.6 deg) and altitude (nominally near 360 km) determine the set of natural environment factors affecting the functional life of materials and systems on ISS. ISS operates in an electrically conducting environment (the F2 region of Earth s ionosphere) with well-defined fluxes of atomic oxygen, other charged and neutral ionospheric plasma species, solar UV, VUV, and x-ray radiation as well as galactic cosmic rays, trapped radiation, and solar cosmic rays. The LEO micrometeoroid and orbital debris environment is an especially important determinant of spacecraft design and operations. The magnitude of several environmental factors varies dramatically with latitude and longitude as ISS orbits the Earth. The high latitude orbital environment also exposes ISS to higher fluences of trapped energetic electrons, auroral electrons, solar cosmic rays, and galactic cosmic rays than would be the case in lower inclination orbits, largely as a result of the overall shape and magnitude of the geomagnetic field. As a result, ISS exposure to many environmental factors can vary dramatically along a particular orbital ground track, and from one ground track to the next, during any 24-hour period. The induced environment results from ISS interactions with the natural environment as well as environmental factors produced by ISS itself and visiting vehicles fleet. Examples include ram-wake effects, hypergolic thruster plume impingement, materials out-gassing, venting and dumping of fluids, and specific photovoltaic (PV) power system interactions with the ionospheric plasma (7-11). Vehicle size (L) and velocity (V), combined with the magnitude and direction of the geomagnetic field (B) produce operationally significant magnetic induction voltages (VxB.L) in ISS conducting structure during flight through high latitudes (> +45deg) during each orbit. Finally, an induced ionizing radiation environment is produced by cosmic ray interaction with the relatively thick ISS structure and shielding materials. The intent of this review article is, therefore, to provide a summary of selected aspects and elements of the ISS vehicle with regard to LEO space environment effects, associated with the much larger and more complicated vehicle that ISS has become since 1998, but also with an eye towards performance life extension to the year 2016 and beyond.

Alred, John↗
NASA NTRS2007

Progress in Spacecraft Environment Interactions: International Space Station (ISS) Development and Operations

The set of spacecraft interactions with the space flight environment that have produced the largest impacts on the design, verification, and operation of the International Space Station (ISS) Program during the May 2000 to May 2007 time frame are the focus of this paper. In-flight data, flight crew observations, and the results of ground-based test and analysis directly supporting programmatic and operational decision-making are reported as are the analysis and simulation efforts that have led to new knowledge and capabilities supporting current and future space explorations programs. The specific spacecraft-environment interactions that have had the greatest impact on ISS Program activities during the first several years of flight are: 1) spacecraft charging, 2) micrometeoroids and orbital debris effects, 3) ionizing radiation (both total dose to materials and single event effects [SEE] on avionics), 4) hypergolic rocket engine plume impingement effects, 5) venting/dumping of liquids, 6) spacecraft contamination effects, 7) neutral atmosphere and atomic oxygen effects, 8) satellite drag effects, and 9) solar ultraviolet effects. Orbital inclination (51.6deg) and altitude (nominally between 350 km and 460 km) determine the set of natural environment factors affecting the performance and reliability of materials and systems on ISS. ISS operates in the F2 region of Earth s ionosphere in well-defined fluxes of atomic oxygen, other ionospheric plasma species, solar UV, VUV, and x-ray radiation as well as galactic cosmic rays, trapped radiation, and solar cosmic rays. The micrometeoroid and orbital debris environment is an important determinant of spacecraft design and operations in any orbital inclination. The induced environment results from ISS interactions with the natural environment as well as environmental factors produced by ISS itself and visiting vehicles. Examples include ram-wake effects, hypergolic thruster plume impingement, materials out-gassing, venting and dumping of fluids, and specific photovoltaic (PV) power system interactions with the ionospheric plasma. Vehicle size (L) and velocity (v), combined with the magnitude and direction of the geomagnetic field (B) produce operationally significant magnetic induction voltages (VxB.L) in ISS conducting structure during high latitude flight (>+/- 45deg) during each orbit. In addition, ISS is a large vehicle and produces a deep wake structure from which both ionospheric plasma and neutrals species are largely excluded. ISS must fly in a very limited number of approved flight attitudes, so that exposure of a particular material or system to environmental factors depends upon: 1) location on ISS, 2) ISS flight configuration, 3) ISS flight attitude, and 4) variation of solar exposure (Beta angle), and hence thermal environment, with time. Finally, an induced ionizing radiation environment is produced by trapped radiation and solar/cosmic ray interactions with the relatively massive ISS structural shielding.

Koontz, Steve↗
DOE OSTI2026

Strong-Drive Limits in Josephson Circuits: From Chaos to an Unbound-Resonance Threshold

Strong microwave drives enable fast measurement and parametric control in superconducting circuits but can induce transitions out of the intended low-energy manifold. We develop a unified description of strong-drive limits in flux- and charge-driven Josephson circuits across drive frequency and dc flux bias. Using classical phase-space analysis and Floquet--Markov simulations, we identify distinct low- and high-frequency mechanisms. At low frequency, we characterize bound-state resonances and separatrix chaos and find that the flux-drive chaos threshold depends strongly on dc flux bias. At high frequency, these mechanisms are suppressed, and the dissipative steady state transfers from the central bound-state sector to outer resonances formed by above-barrier running trajectories. The resulting unbound-resonance threshold is nearly independent of drive frequency and circuit parameters over the regime studied and is controlled primarily by dc flux bias. Coherent simulations show that parametric operation persists beyond this threshold, but at a reduced rate, setting an effective upper bound on the achievable operation speed. We derive analytical criteria for both thresholds, validate them numerically, and experimentally confirm the predicted dc-bias dependence of the low-frequency threshold in a flux-driven SQUID. We also determine the timescales for transfer into the unbound-resonance regime and relaxation back to the bound-state manifold after the drive is removed. Finally, we relate the stability limits to a complementary picture based on the junction critical current and extend the framework to multitone drives and inductively shunted circuits. Together, these results identify the mechanisms limiting strong driving and suggest routes to extend the stable operating range of Josephson circuits.

You, Xinyuan [Fermilab] (ORCID:0000000291789419)↗
DOE OSTI2025

Experimental study of airpath electrification in an opposed-piston two stroke (OP2S) engine architecture

The opposed-piston two stroke (OP2S) engine shows potential as an alternative engine architecture to the conventional four stroke engine due to its high-power density, thermal efficiency, and versatile airpath management system. Since the pistons of a two-stroke engine do not pump the air into and out of the cylinder like in a four-stroke engine, the selection of the air induction devices and airpath actuators becomes critical to optimize engine performance. Both the pumping losses and the in-cylinder combustion process can be affected by the scavenging process in a two-stroke engine. Therefore, this study compares two different airpath configurations for the same family of OP2S engines and investigates performance metrics like scavenging control, pumping work, net indicated and brake efficiencies, and engine-out emissions associated with each airpath. Data was collected on a 3.2 L, two-cylinder OP2S engine with an electrically assisted turbocharger (EAT) and a 4.9 L displacement, three-cylinder engine with a variable geometry turbocharger (VGT) and a supercharger. The experiments consisted of speed and load sweeps for both engines at the same operating conditions to compare scavenge control in both architectures. For the three-cylinder layout, the SE sweep range was much higher, and the intake pressure could be independently varied with air flowrate, thus providing more flexibility for scavenging control. The supercharger and the VGT usage was optimized based on its efficiency map and thus, this layout had lower pumping losses compared to the EAT. The two-cylinder engine had a higher overall SE as compared to the three-cylinder engine, but the intake pressure and air flowrate could not be decoupled, leading to over scavenging and increased short circuiting of fresh charge into the exhaust.

Bhatt, Ankur [Clemson University, Clemson, SC, USA↗
NASA NTRS2001

Physical and biological studies with protons and HZE particles in a NASA supported research center in radiation health

NASA has established and supports a specialized center for research and training (NSCORT) to specifically address the potential deleterious effects of HZE particles on human health. The NSCORT in radiation health is a joint effort between Lawrence Berkeley National Laboratory (LBNL) and Colorado State University (CSU). The overall scope of research encompasses a broad range of subjects from microdosimetric studies to cellular and tissue responses to initial damage produced by highly energetic protons and heavy charged particles of the type found in galactic cosmic rays (GCR) spectrum. The objectives of the microdosimetry studies are to determine the response of Tissue Equivalent Proportional Counter (TEPC) to cosmic rays using ground based accelerators. This includes evaluation of energy loss due to the escape of high-energy delta rays and increased energy deposition due to the enhanced delta ray production in the wall of the detector. In this report major results are presented for 56Fe at 1000, 740, 600 and 400 MeV/nucleon. An assessment of DNA repair and early development of related chromosomal changes is extremely important to our overall understanding of enhanced biological effectiveness of high LET particle radiation. Results are presented with respect to the fidelity of the rejoining of double strand breaks and the implications of misrejoining. The relationship between molecular and cytogenetic measurements is presented by studying damage processing in highly heterochromatic supernumerary (correction of sypernumerary) X chromosomes and the active X-chromosome. One of the important consequences of cell's inability to handle DNA damage can be evaluated through mutation studies. Part of our goal is the assessment of potential radioprotectors to reduce the mutation yield following HZE exposures, and some promising results are presented on one compound. A second goal is the integration of DNA repair and mutation studies. Results are presented on a direct comparison of initial double strand breaks induction, the time course and fidelity of double strand break rejoining, cell killing and mutation induction in the same human model system. In order to understand the carcinogenic potential of protons and HZE particles, the role of damaged microenvironment in this process must be understood. In this project it has been postulated that radiation affects the microenvironment, which then modifies cell interactions in a manner conducive to neoplastic progression. Both TGF-beta and FGF-2 are important components of microenvironment. A recent result on the assessment of the role of FGF-2 and its cross-talk with TGF-beta as a function of radiation quality is presented. Theoretical modeling has so far played a central role in analyzing and integrating experimental data on repair and mutation studies and predicting new phenomena. The integrated NSCORT program also provides a broad training experience for students and postdoctoral fellows in space radiation health.

NASA Discipline Radiation Health↗
NASA NTRS2012

Development and Testing of a Green-Propellant Micro-Hybrid Thruster with Electrostatic Ignition

As early as 1937 German scientists at Peenemunde experimented with highly unstable fuel blends of nitrous oxide (N2O) and ethanol. These early tests mostly resulted in explosions and destroyed rocket engines. More recently several companies have developed experimental nitrous oxide fuel blends (NOFB) with Isp exceeding 300 sec. Although NOFBx has recently been cleared for tests on the International Space Station, this propellant remains highly experimental and has not been cleared for commercial transport by the US DOT. Recent work by Karabeyoglu et al. has raised concerns about the safety risks of mixing hydrocarbons with N2O. Liquid oxidizer/fuel blends are highly explosive and require extreme care in transport and servicing. By adding small amounts of a liquid organic fuel such as alcohol or a hydrocarbon, the odds of an explosive decomposition event are significantly increased.iv The proposed solution mitigates the explosion hazards of NOFB by separating the oxidizer from the hydrocarbon fuel formed as of a small cylindrical section of ABS thermoplastic. As N2O vapor flows across the grain segment, current enters a 1000 VDC high-tension lead in the ABS fuel grain and produces an inductive spark that vaporizes a small amount of the material. The ablated fuel vapor plus residual energy from the spark seed a localized exothermic N2O dissociation that produces sufficient heat to initiate combustion. The process is also effective when gaseous oxygen is used. A low TRL (2-3) prototype demonstrating the feasibility of controlled hydrocarbon-seeding was recently tested at Utah State University.v The unit features a miniature 2.5 cm ABS fuel grain fabricated using a Stratasys Dimension 3-D printer. The 9-N thruster was pulse-fired up to 27 consecutive times on a single ABS grain segment. Ignition was achieved by as little as 12-15 Joules energy input. This value is contrasted with the typical 30-minute pre-heat requirement for the ECAPS LMP-103S ADN-based monopropellant, requiring an energy input of 14,850 Joules for catalytic dissociation. The hydrocarbon-seeded micro-hybrid was also adapted as a non-pyrotechnic ignitor for a 900 N (200-lbf) thrust hybrid motor. The motor was successfully ignited 4 consecutive times with no hardware swaps or propellant additions. The amount of ABS seed material that can be fit into the injector cap is the only limit to the number of available repeat firings. This series of tests marks the first time a hybrid motor was ever ignited by other than a solid-propellant pyrotechnic charge or bi-propellant flame ignitor. Nitrous oxide hybrid motors are typically difficult to ignite and usually require multiple solid-propellant charges to initiate combustion, so this nonpyrotechnic ignition is a significant accomplishment. The controlled hydrocarbon-seeding approach is fundamentally different from all other green propellant solutions offered by the aerospace industry. Although the proposed system is more correctly a hybrid technology; the system retains all the simple features of a monopropellant design. To date no optimization study has been performed to identify the best grain geometry for electrostatic ignition. Fortunately, because the grain segments are fabricated using rapid-prototyping technology, changing the grain geometry is as simple as modifying the 3-D printer CAD-file. Vacuum Isp exceeding 270 seconds has been demonstrated (Ref v), a value significantly higher than those offered by competing green monopropellant options. The propellants of choice, N2O/GOX and ABS are 100% non-toxic, non-explosive, and environmentally benign. Because the inert oxidizer and fuel components are mixed only within the combustion chamber, the system retains the inherent safety of a hybrid rocket and can be piggy-backed as a secondary payload with no overall mission risk increase to the primary payload, an excellent characteristic for secondary launch systems.

Whitmore, Stephen A.↗
NASA NTRS1995

Risk cross sections and their application to risk estimation in the galactic cosmic-ray environment

Radiation risk cross sections (i.e. risks per particle fluence) are discussed in the context of estimating the risk of radiation-induced cancer on long-term space flights from the galactic cosmic radiation outside the confines of the earth's magnetic field. Such quantities are useful for handling effects not seen after low-LET radiation. Since appropriate cross-section functions for cancer induction for each particle species are not yet available, the conventional quality factor is used as an approximation to obtain numerical results for risks of excess cancer mortality. Risks are obtained for seven of the most radiosensitive organs as determined by the ICRP [stomach, colon, lung, bone marrow (BFO), bladder, esophagus and breast], beneath 10 g/cm2 aluminum shielding at solar minimum. Spectra are obtained for excess relative risk for each cancer per LET interval by calculating the average fluence-LET spectrum for the organ and converting to risk by multiplying by a factor proportional to R gamma L Q(L) before integrating over L, the unrestricted LET. Here R gamma is the risk coefficient for low-LET radiation (excess relative mortality per Sv) for the particular organ in question. The total risks of excess cancer mortality obtained are 1.3 and 1.1% to female and male crew, respectively, for a 1-year exposure at solar minimum. Uncertainties in these values are estimated to range between factors of 4 and 15 and are dominated by the biological uncertainties in the risk coefficients for low-LET radiation and in the LET (or energy) dependence of the risk cross sections (as approximated by the quality factor). The direct substitution of appropriate risk cross sections will eventually circumvent entirely the need to calculate, measure or use absorbed dose, equivalent dose and quality factor for such a high-energy charged-particle environment.

NASA Discipline Radiation Health↗
NASA NTRS2005

MESSENGER: Exploring Mercury's Magnetosphere

The MESSENGER mission to Mercury offers our first opportunity to explore this planet s miniature magnetosphere since the brief flybys of Mariner 10. Mercury s magnetosphere is unique in many respects. The magnetosphere of Mercury is among the smallest in the solar system; its magnetic field typically stands off the solar wind only - 1000 to 2000 km above the surface. For this reason there are no closed drift paths for energetic particles and, hence, no radiation belts. The characteristic time scales for wave propagation and convective transport are short and kinetic and fluid modes may be coupled. Magnetic reconnection at the dayside magnetopause may erode the subsolar magnetosphere allowing solar wind ions to impact directly the regolith. Inductive currents in Mercury s interior may act to modify the solar wind interaction by resisting changes due to solar wind pressure variations. Indeed, observations of these induction effects may be an important source of information on the state of Mercury s interior. In addition, Mercury s magnetosphere is the only one with its defining magnetic flux tubes rooted in a planetary regolith as opposed to an atmosphere with a conductive ionospheric layer. This lack of an ionosphere is probably the underlying reason for the brevity of the very intense, but short-lived, - 1-2 min, substorm-like energetic particle events observed by Mariner 10 during its first traversal of Mercury s magnetic tail. Because of Mercury s proximity to the sun, 0.3 - 0.5 AU, this magnetosphere experiences the most extreme driving forces in the solar system. All of these factors are expected to produce complicated interactions involving the exchange and re-cycling of neutrals and ions between the solar wind, magnetosphere, and regolith. The electrodynamics of Mercury s magnetosphere are expected to be equally complex, with strong forcing by the solar wind, magnetic reconnection at the magnetopause and in the tail, and the pick-up of planetary ions all driving field-aligned electric currents. However, these field-aligned currents do not close in an ionosphere, but in some other manner. In addition to the insights- into magnetospheric physics offered by study of the solar wind - Mercury system, quantitative specification of the "external" magnetic field generated by magnetospheric currents is necessary for accurate determination of the strength and multi-polar decomposition of Mercury s intrinsic magnetic field. MESSENGER S highly capable instrumentation and broad orbital coverage will greatly advance our understanding of both the origin of Mercury s magnetic field and the acceleration of charged particles in small magnetospheres. In. this article, we review what is known about Mercury s magnetosphere and describe the MESSENGER science team s strategy for obtaining answers to the outstanding science questions surrounding the interaction of the solar wind with Mercury and its small, but dynamic, magnetosphere.

Slavin, James A.↗
NASA NTRS2012

Computational Transport Modeling of High-Energy Neutrons Found in the Space Environment

The high charge and high energy (HZE) particle radiation environment in space interacts with spacecraft materials and the human body to create a population of neutrons encompassing a broad kinetic energy spectrum. As an HZE ion penetrates matter, there is an increasing chance of fragmentation as penetration depth increases. When an ion fragments, secondary neutrons are released with velocities up to that of the primary ion, giving some neutrons very long penetration ranges. These secondary neutrons have a high relative biological effectiveness, are difficult to effectively shield, and can cause more biological damage than the primary ions in some scenarios. Ground-based irradiation experiments that simulate the space radiation environment must account for this spectrum of neutrons. Using the Particle and Heavy Ion Transport Code System (PHITS), it is possible to simulate a neutron environment that is characteristic of that found in spaceflight. Considering neutron dosimetry, the focus lies on the broad spectrum of recoil protons that are produced in biological targets. In a biological target, dose at a certain penetration depth is primarily dependent upon recoil proton tracks. The PHITS code can be used to simulate a broad-energy neutron spectrum traversing biological targets, and it account for the recoil particle population. This project focuses on modeling a neutron beamline irradiation scenario for determining dose at increasing depth in water targets. Energy-deposition events and particle fluence can be simulated by establishing cross-sectional scoring routines at different depths in a target. This type of model is useful for correlating theoretical data with actual beamline radiobiology experiments. Other work exposed human fibroblast cells to a high-energy neutron source to study micronuclei induction in cells at increasing depth behind water shielding. Those findings provide supporting data describing dose vs. depth across a water-equivalent medium. This poster presents PHITS data suggesting an increase in dose, up to roughly 10 cm depth, followed by a continual decrease as neutrons come to a stop in the target.

Cox, Brad↗
NASA NTRS2012

GERMcode: A Stochastic Model for Space Radiation Risk Assessment

A new computer model, the GCR Event-based Risk Model code (GERMcode), was developed to describe biophysical events from high-energy protons and high charge and energy (HZE) particles that have been studied at the NASA Space Radiation Laboratory (NSRL) for the purpose of simulating space radiation biological effects. In the GERMcode, the biophysical description of the passage of HZE particles in tissue and shielding materials is made with a stochastic approach that includes both particle track structure and nuclear interactions. The GERMcode accounts for the major nuclear interaction processes of importance for describing heavy ion beams, including nuclear fragmentation, elastic scattering, and knockout-cascade processes by using the quantum multiple scattering fragmentation (QMSFRG) model. The QMSFRG model has been shown to be in excellent agreement with available experimental data for nuclear fragmentation cross sections. For NSRL applications, the GERMcode evaluates a set of biophysical properties, such as the Poisson distribution of particles or delta-ray hits for a given cellular area and particle dose, the radial dose on tissue, and the frequency distribution of energy deposition in a DNA volume. By utilizing the ProE/Fishbowl ray-tracing analysis, the GERMcode will be used as a bi-directional radiation transport model for future spacecraft shielding analysis in support of Mars mission risk assessments. Recent radiobiological experiments suggest the need for new approaches to risk assessment that include time-dependent biological events due to the signaling times for activation and relaxation of biological processes in cells and tissue. Thus, the tracking of the temporal and spatial distribution of events in tissue is a major goal of the GERMcode in support of the simulation of biological processes important in GCR risk assessments. In order to validate our approach, basic radiobiological responses such as cell survival curves, mutation, chromosomal aberrations, and representative mouse tumor induction curves are implemented into the GERMcode. Extension of these descriptions to other endpoints related to non-targeted effects and biochemical pathway responses will be discussed.

Kim, Myung-Hee Y.↗
NASA NTRS2005

Magnetically Attached Multifunction Maintenance Rover

A versatile mobile telerobot, denoted the magnetically attached multifunction maintenance rover (MAGMER), has been proposed for use in the inspection and maintenance of the surfaces of ships, tanks containing petrochemicals, and other large ferromagnetic structures. As its name suggests, this robot would utilize magnetic attraction to adhere to a structure. As it moved along the surface of the structure, the MAGMER would perform tasks that could include close-up visual inspection by use of video cameras, various sensors, and/or removal of paint by water-jet blasting, laser heating, or induction heating. The water-jet nozzles would be mounted coaxially within compressed-air-powered venturi nozzles that would collect the paint debris dislodged by the jets. The MAGMER would be deployed, powered, and controlled from a truck, to which it would be connected by hoses for water, compressed air, and collection of debris and by cables for electric power and communication (see Figure 1). The operation of the MAGMER on a typical large structure would necessitate the use of long cables and hoses, which can be heavy. To reduce the load of the hoses and cables on the MAGMER and thereby ensure its ability to adhere to vertical and overhanging surfaces, the hoses and cables would be paid out through telescopic booms that would be parts of a MAGMER support system. The MAGMER would move by use of four motorized, steerable wheels, each of which would be mounted in an assembly that would include permanent magnets and four pole pieces (see Figure 2). The wheels would protrude from between the pole pieces by only about 3 mm, so that the gap between the pole pieces and the ferromagnetic surface would be just large enough to permit motion along the surface but not so large as to reduce the magnetic attraction excessively. In addition to the wheel assemblies, the MAGMER would include magnetic adherence enhancement fixtures, which would comprise arrays of permanent magnets and pole pieces that could be adjusted to maximize or minimize the overall attractive magnetic force. Even with a paint thickness of 2 mm, a preliminary design provides a safety factor of 5 in the magnetic force in the upside- down, water-jets-operating condition, in which the total load (including the weight of the MAGMER and cables and the water-jet force) would be about 260 lb (the weight of 118 kg). Optionally, the MAGMER could carry magnetic shielding and/or could be equipped with a demagnetizing module to remove residual magnetism from the structure. The MAGMER would carry four charge-coupled-device cameras for visual inspection, monitoring of operation, navigation, and avoidance of collisions with obstacles. The control system of the MAGMER would include navigation and collision-avoidance subsystems that would utilize surface features as landmarks, in addition to direct images of obstacles.

Bar-Cohen, Yoseph↗
NASA NTRS1997

Predictive Modeling in Plasma Reactor and Process Design

Research continues toward the improvement and increased understanding of high-density plasma tools. Such reactor systems are lauded for their independent control of ion flux and energy enabling high etch rates with low ion damage and for their improved ion velocity anisotropy resulting from thin collisionless sheaths and low neutral pressures. Still, with the transition to 300 mm processing, achieving etch uniformity and high etch rates concurrently may be a formidable task for such large diameter wafers for which computational modeling can play an important role in successful reactor and process design. The inductively coupled plasma (ICP) reactor is the focus of the present investigation. The present work attempts to understand the fundamental physical phenomena of such systems through computational modeling. Simulations will be presented using both computational fluid dynamics (CFD) techniques and the direct simulation Monte Carlo (DSMC) method for argon and chlorine discharges. ICP reactors generally operate at pressures on the order of 1 to 10 mTorr. At such low pressures, rarefaction can be significant to the degree that the constitutive relations used in typical CFD techniques become invalid and a particle simulation must be employed. This work will assess the extent to which CFD can be applied and evaluate the degree to which accuracy is lost in prediction of the phenomenon of interest; i.e., etch rate. If the CFD approach is found reasonably accurate and bench-marked with DSMC and experimental results, it has the potential to serve as a design tool due to the rapid time relative to DSMC. The continuum CFD simulation solves the governing equations for plasma flow using a finite difference technique with an implicit Gauss-Seidel Line Relaxation method for time marching toward a converged solution. The equation set consists of mass conservation for each species, separate energy equations for the electrons and heavy species, and momentum equations for the gas. The sheath is modeled by imposing the Bohm velocity to the ions near the walls. The DSMC method simulates each constituent of the gas as a separate species which would be analogous in CFD to employing separate species mass, momentum, and energy equations. All particles including electrons are moved and allowed to collide with one another with the stipulation that the electrons remain tied to the ions consistent with the concept of ambipolar diffusion. The velocities of the electrons are allowed to be modified during collisions and are not confined to a Maxwellian distribution. These benefits come at a price in terms of computational time and memory. The DSMC and CFD are made as consistent as possible by using similar chemistry and power deposition models. Although the comparison of CFD and DSMC is interesting, the main goal of this work is the increased understanding of high-density plasma flowfields that can then direct improvements in both techniques. This work is unique in the level of the physical models employed in both the DSMC and CFD for high-density plasma reactor applications. For example, the electrons are simulated in the present DSMC work which has not been done before for low temperature plasma processing problems. In the CFD approach, for the first time, the charged particle transport (discharge physics) has been self-consistently coupled to the gas flow and heat transfer.

Hash, D. B.↗