Results for “Moving mesh” — Page 11

NASA NTRS1992

Adaptive explicit and implicit finite element methods for transient thermal analysis

The application of adaptive finite element methods to the solution of transient heat conduction problems in two dimensions is investigated. The computational domain is represented by an unstructured assembly of linear triangular elements and the mesh adaptation is achieved by local regeneration of the grid, using an error estimation procedure coupled to an automatic triangular mesh generator. Two alternative solution procedures are considered. In the first procedure, the solution is advanced by explicit timestepping, with domain decomposition being used to improve the computational efficiency of the method. In the second procedure, an algorithm for constructing continuous lines which pass only once through each node of the mesh is employed. The lines are used as the basis of a fully implicit method, in which the equation system is solved by line relaxation using a block tridiagonal equation solver. The numerical performance of the two procedures is compared for the analysis of a problem involving a moving heat source applied to a convectively cooled cylindrical leading edge.

Probert, E. J.↗

NASA NTRS1967

Wabble gear drive mechanism

The wabble gear principle was applied in the design of a driving mechanism for controlling spacecraft solar panels. The moving elements, other than the output gear, are contained within a hermetically sealed package to prevent escape of lubricants and ingestion of contaminant particles. The driving gear contains one more tooth than the output gear on a concave, conical pitch surface of slightly larger apex angle. The two gears mesh face to face such that engagement takes place at one point along the circumference. The driving gear is not permitted to rotate by virtue of its attachment through the bellows which permits flexure in the pitch and yaw position, but not in roll. As the bearing carrier rotates, the inclined mounting of the bearing causes the driving gear to perform a wabbling, irrotational motion. This wabbling motion causes the contact point between the output gear and the driving gear to traverse around the circumference of the gears once per revolution of the bearing carrier.

Winiarski, F. J.↗

NASA NTRS2012

Numerical Predictions of Sonic Boom Signatures for a Straight Line Segmented Leading Edge Model

A sonic boom wind tunnel test was conducted on a straight-line segmented leading edge (SLSLE) model in the NASA Langley 4- by 4- Foot Unitary Plan Wind Tunnel (UPWT). The purpose of the test was to determine whether accurate sonic boom measurements could be obtained while continuously moving the SLSLE model past a conical pressure probe. Sonic boom signatures were also obtained using the conventional move-pause data acquisition method for comparison. The continuous data acquisition approach allows for accurate signatures approximately 15 times faster than a move-pause technique. These successful results provide an incentive for future testing with greatly increased efficiency using the continuous model translation technique with the single probe to measure sonic boom signatures. Two widely used NASA codes, USM3D (Navier-Stokes) and CART3D-AERO (Euler, adjoint-based adaptive mesh), were used to compute off-body sonic boom pressure signatures of the SLSLE model at several different altitudes below the model at Mach 2.0. The computed pressure signatures compared well with wind tunnel data. The effect of the different altitude for signature extraction was evaluated by extrapolating the near field signatures to the ground and comparing pressure signatures and sonic boom loudness levels.

Elmiligui, Alaa A.↗

DOE OSTI2024

A quasi-meshfree method for constructing boundary-aware reproducing bases on geometrically complex domains using manifold geodesics

In many applications, physical domains are geometrically complex making it challenging to perform coarse-scale approximation. A defeaturing process is often used to simplify the domain in preparation for approximation and analysis at the coarse scale. In this paper, a methodology is presented for constructing a coarse-scale reproducing basis on geometrically complex domains given an initial fine-scale mesh of the fully featured domain. The initial fine-scale mesh can be of poor quality and extremely refined. The construction of the basis functions begins with a coarse-scale covering of the domain and generation of weighting functions with local support. Manifold geodesics are used to define distances within the local support for general applicability to non-convex domains. Conventional moving least squares is used to construct the coarse-scale reproducing basis. Applications in quasi-interpolation and linear elasticity are presented.

97 MATHEMATICS AND COMPUTING↗

NASA NTRS1989

Finite element analysis of high speed compressible flows using mesh refinement/movement procedures

An adaptive mesh refinement procedure for analyzing high-speed inviscid and viscous compressible flows is described. The adaptation procedure which uses both quadrilateral and triangular elements is implemented with an explicit finite element formulation. Elements in regions of strong and weak gradients are refined or coarsened based on inviscid and viscous indicators. Nodal locations are also adaptively moved to better resolve flow features. The effectiveness of the finite element procedure is demonstrated by modeling flows with complex shock structure and viscous-inviscid interactions. Numerical results are compared with experimental data.

Ramakrishnan, R.↗

NASA NTRS1990

Numerical simulations of interacting disk galaxies

Galaxy-galaxy interactions have long attracted many extragalactic astronomers in various aspects. A number of computer simulations performed in the 1970s have successfully reproduced the peculiar morphologies observed in interacting disk galaxies and clarified that tidal deformation explains most of the observed global peculiarities. However, most of these simulations have used test particles in modelling the disk component. Tidal response of a self-gravitating disk remains to be further clarified. Another topic which is intensely discussed at present is the relation between galaxy-galaxy interactions and activity. Many observations suggest that interactions trigger strong starbursts and possibly active galactic nuclei (AGN). However, the detailed mechanism of triggering is not yet clear. It is vital here to understand the dynamics of interstellar gas. In order to understand various phenomena related to galaxy-galaxy interactions (mainly for disk galaxies), the author performed a series of numerical simulations on close galaxy encounters which includes both interstellar gas and self-gravitating disk components. In these simulations, the galaxy model to be perturbed (target galaxy) consists of a halo and a disk. The halo was treated as a rigid spherical gravitational field which is assumed to remain fixed during the interaction. The disk is composed of stars and gas. The stellar disk was constructed by 20000 collisionless particles of the same mass. Those particles move in the halo gravitational field, interacting with each other and with the perturber. Therefore, the self-graviy of the disk is properly taken into account. Stellar particles were initially given circular velocities with small random motions required to stabilize the disk against local axisymmetric disturbances. The gravitational field of the stellar disk was calculated by the particle-mesh scheme (e.g. Hockney and Eastwood 1981). The gaseous component was modelled by the cloud-particle scheme (e.g. Roberts and Hausman 1984). Here, the authors represent the gas as an ensemble of small spheres (i.e. clouds) and include the creation of an OB star in a cloud-cloud collision and subsequent velocity push on nearby clouds due to a supernova explosion.

Noguchi, Masafumi↗

NASA NTRS2010

Dynamically Evolving Sectors for Convective Weather Impact

A new strategy for altering existing sector boundaries in response to blocking convective weather is presented. This method seeks to improve the reduced capacity of sectors directly affected by weather by moving boundaries in a direction that offers the greatest capacity improvement. The boundary deformations are shared by neighboring sectors within the region in a manner that preserves their shapes and sizes as much as possible. This reduces the controller workload involved with learning new sector designs. The algorithm that produces the altered sectors is based on a force-deflection mesh model that needs only nominal traffic patterns and the shape of the blocking weather for input. It does not require weather-affected traffic patterns that would have to be predicted by simulation. When compared to an existing optimal sector design method, the sectors produced by the new algorithm are more similar to the original sector shapes, resulting in sectors that may be more suitable for operational use because the change is not as drastic. Also, preliminary results show that this method produces sectors that can equitably distribute the workload of rerouted weather-affected traffic throughout the region where inclement weather is present. This is demonstrated by sector aircraft count distributions of simulated traffic in weather-affected regions.

Drew, Michael C.↗

NASA NTRS2005

Beam-Steerable Flat-Panel Reflector Antenna

Many space applications require a high-gain antenna that can be easily deployable in space. Currently, the most common high-gain antenna for space-born applications is an umbrella-type reflector antenna that can be folded while being lifted to the Earth orbit. There have been a number of issues to be resolved for this type of antenna. The reflecting surface of a fine wire mesh has to be light in weight and flexible while opening up once in orbit. Also the mesh must be a good conductor at the operating frequency. In this paper, we propose a different type of high-gain antenna for easy space deployment. The proposed antenna is similar to reflector antennas except the curved main reflector is replaced by a flat reconfigurable surface for easy packing and deployment in space. Moreover it is possible to steer the beam without moving the entire antenna system.

Lee, Choon Sae↗

DOE OSTI2026

Causality-respecting adaptive refinement for PINNs: enabling precise interface evolution in phase field modeling

Physics-informed neural networks (PINNs) have emerged as a powerful tool for solving physical systems described by partial differential equations (PDEs). However, their accuracy in dynamical systems, particularly those involving sharp moving boundaries with complex initial morphologies, remains a challenge. Here, this study introduces an approach combining residual-based adaptive refinement (RBAR) with causality-informed training to enhance the performance of PINNs in solving spatio-temporal PDEs. Our method employs a three-step iterative process: initial causality-based training, RBAR-guided domain refinement, and subsequent causality training on the refined mesh. Applied to the Allen-Cahn equation, a widely-used model in phase field simulations, our approach demonstrates significant improvements in solution accuracy and computational efficiency over traditional PINNs. Notably, we observe an ‘overshoot and relocate’ phenomenon in dynamic cases with complex morphologies, showcasing the method’s adaptive error correction capabilities. This synergistic interaction between RBAR and causality training enables accurate capture of interface evolution, even in challenging scenarios where traditional PINNs fail. Our framework not only resolves the limitations of uniform refinement strategies but also provides a generalizable methodology for solving a broad range of spatio-temporal PDEs. The enhanced performance of the RBAR–causality combined framework demonstrates its strong potential for advancing PINN-based modeling of physical systems characterized by complex, evolving interfaces.

Allen-Cahn equations↗

DOE OSTI2026

Hydrogeological assessment of CO2 containment assurance and wellbore integrity at a Gulf Coast storage site

Abstract A large-scale carbon capture and storage (CCS) initiative on the Texas Gulf Coast serves as a premier demonstration of the U.S. Department of Energy’s CarbonSAFE program. Targeting deep saline formations, specifically Oligo-Miocene deltaic sequences, the project aims to establish technical and commercial viability for geologic CO2 storage within a major industrial corridor. This study provides a rigorous hydrogeological assessment to support Class VI permitting by quantifying the high degree of containment security. Utilizing a compositional reservoir simulator, we developed a suite of 27 distinct simulation cases to evaluate vertical plume dynamics near both planned injection wells and proximal legacy infrastructure. To ensure numerical accuracy near wellbores, we implemented a refined mesh strategy, determining that a 5.6 ft × 5.6 ft grid refinement offered the optimal balance between computational efficiency and descriptive precision. The modeling framework utilized a systematic sensitivity-based approach to evaluate the mechanical redundancy of the subsurface system by performing a bounding analysis of wellbore interfaces against hypothetical high-permeability microannuli. By systematically isolating competing physical drivers, including permeability, porosity, gas hysteresis, thermal gradients, salinity, and solubility trapping (quantified via Henry’s law with dynamically adjusted coefficients), this work moves beyond binary assessments to establish a nuanced hierarchy of containment factors. The results confirm that primary trapping mechanisms (e.g., gas hysteresis and solubility), combined with the site's unique geomechanical stratigraphy, significantly restrict vertical mobility and reinforce the robust containment security of the reservoir. Baseline results demonstrate substantial vertical separation between the CO2 plume and the upper confining system, ensuring robust containment. Sensitivity analysis reveals that even under highly conservative bounding scenarios—assuming theoretical 10-Darcy pathways at specific wellbore locations—the 2,900-ft thick multi-layered confining zone remains a reliable barrier. In these hypothetical upper-bound cases, peak upward fluxes of CO2 and saltwater after 15 years of injection remain localized and dissipate rapidly within the lower sections of the confining interval, leaving the integrity of the seal uncompromised. Furthermore, the study identifies that while localized wellbore pathways define theoretical upper bounds of vertical migration, the Area of Review (AoR) is primarily sensitive to regional thermal gradients and hysteresis, which can influence the AoR by over 3,000 acres in pessimistic configurations. Also, primary trapping mechanisms, specifically gas hysteresis and solubility, work in tandem with the Gulf Coast’s unique geomechanical stratigraphy to significantly restrict vertical mobility. Ductile, smectite-rich mudstones facilitate natural borehole convergence and the self-healing of potential conduits, creating a natural geomechanical bridge that effectively mitigates migration potential at both current injection points and legacy-well locations. This comprehensive modeling effort demonstrates that the integration of high-resolution wellbore simulations and regional geomechanical observations confirms the long-term storage security of the studied site, providing a physics-based foundation for industrial-scale CCS deployments. This modeling framework establishes a baseline for future research into coupled geomechanical effects, such as time-dependent borehole convergence, to further refine long-term containment projections. Acknowledgements We thank the Gulf Coast Carbon Center (GCCC) at the Bureau of Economic Geology for foundational research support. We appreciate Alex Bump for technical guidance and David Hoffman for model mesh generation. This work used TACC’s Frontera cluster for simulations and CMG Ltd. software licenses provided to UT-Austin. This material is based upon work supported by the Department of Energy under Award Number DE-FE0032338. Disclaimer This material is based upon work supported by the U.S. Department of Energy’s Fossil Energy and Carbon Management Office under the CarbonSAFE program, award Number DE-FE0032338. The views expressed herein do not necessarily represent the views of the U.S. Department of Energy or the United States Government.

58 GEOSCIENCES↗

DOE OSTI2026

Hydrogeological assessment of CO2 containment assurance and wellbore integrity at a Gulf Coast storage site

Abstract A large-scale carbon capture and storage (CCS) initiative on the Texas Gulf Coast serves as a premier demonstration of the U.S. Department of Energy’s CarbonSAFE program. Targeting deep saline formations, specifically Oligo-Miocene deltaic sequences, the project aims to establish technical and commercial viability for geologic CO2 storage within a major industrial corridor. This study provides a rigorous hydrogeological assessment to support Class VI permitting by quantifying the high degree of containment security. Utilizing a compositional reservoir simulator, we developed a suite of 27 distinct simulation cases to evaluate vertical plume dynamics near both planned injection wells and proximal legacy infrastructure. To ensure numerical accuracy near wellbores, we implemented a refined mesh strategy, determining that a 5.6 ft × 5.6 ft grid refinement offered the optimal balance between computational efficiency and descriptive precision. The modeling framework utilized a systematic sensitivity-based approach to evaluate the mechanical redundancy of the subsurface system by performing a bounding analysis of wellbore interfaces against hypothetical high-permeability microannuli. By systematically isolating competing physical drivers, including permeability, porosity, gas hysteresis, thermal gradients, salinity, and solubility trapping (quantified via Henry’s law with dynamically adjusted coefficients), this work moves beyond binary assessments to establish a nuanced hierarchy of containment factors. The results confirm that primary trapping mechanisms (e.g., gas hysteresis and solubility), combined with the site's unique geomechanical stratigraphy, significantly restrict vertical mobility and reinforce the robust containment security of the reservoir. Baseline results demonstrate substantial vertical separation between the CO2 plume and the upper confining system, ensuring robust containment. Sensitivity analysis reveals that even under highly conservative bounding scenarios—assuming theoretical 10-Darcy pathways at specific wellbore locations—the 2,900-ft thick multi-layered confining zone remains a reliable barrier. In these hypothetical upper-bound cases, peak upward fluxes of CO2 and saltwater after 15 years of injection remain localized and dissipate rapidly within the lower sections of the confining interval, leaving the integrity of the seal uncompromised. Furthermore, the study identifies that while localized wellbore pathways define theoretical upper bounds of vertical migration, the Area of Review (AoR) is primarily sensitive to regional thermal gradients and hysteresis, which can influence the AoR by over 3,000 acres in pessimistic configurations. Also, primary trapping mechanisms, specifically gas hysteresis and solubility, work in tandem with the Gulf Coast’s unique geomechanical stratigraphy to significantly restrict vertical mobility. Ductile, smectite-rich mudstones facilitate natural borehole convergence and the self-healing of potential conduits, creating a natural geomechanical bridge that effectively mitigates migration potential at both current injection points and legacy-well locations. This comprehensive modeling effort demonstrates that the integration of high-resolution wellbore simulations and regional geomechanical observations confirms the long-term storage security of the studied site, providing a physics-based foundation for industrial-scale CCS deployments. This modeling framework establishes a baseline for future research into coupled geomechanical effects, such as time-dependent borehole convergence, to further refine long-term containment projections. Acknowledgements We thank the Gulf Coast Carbon Center (GCCC) at the Bureau of Economic Geology for foundational research support. We appreciate Alex Bump for technical guidance and David Hoffman for model mesh generation. This work used TACC’s Frontera cluster for simulations and CMG Ltd. software licenses provided to UT-Austin. This material is based upon work supported by the Department of Energy under Award Number DE-FE0032338. Disclaimer This material is based upon work supported by the U.S. Department of Energy’s Fossil Energy and Carbon Management Office under the CarbonSAFE program, award Number DE-FE0032338. The views expressed herein do not necessarily represent the views of the U.S. Department of Energy or the United States Government.

58 GEOSCIENCES↗

NASA NTRS1996

Computational Modeling of Magnetically Actuated Propellant Orientation

Unlike terrestrial applications where gravity positions liquid at the "bottom" of the tank, the location of liquid propellant in spacecraft tanks is uncertain unless specific actions are taken or special features are built into the tank. Some mission events require knowledge of liquid position prior to a particular action: liquid must be positioned over the tank outlet prior to starting the main engines and must be moved away from the tank vent before vapor can be released overboard to reduce pressure. It may also be desirable to positively position liquid to improve propulsion system performance: moving liquid away from the tank walls will dramatically decrease the rate of heat transfer to the propellant, suppressing the boil-off rate, thereby reducing overall mission propellant requirements. The process of moving propellant to a desired position is referred to as propellant orientation or reorientation. Propulsive reorientation relies on small auxiliary thrusters to accelerate the tank. The inertia of the liquid causes it to collect in the aft-end of the tank if the acceleration is forward. Liquid Acquisition Devices (LAD's) rely on surface tension to hold the liquid within special geometries, (i.e. vanes, wire-mesh channels, start-baskets), to positively position propellants. Both of these technologies add significant weight and complexity to the spacecraft and can be limiting systems for long duration missions. The subject of the present research is an alternate technique for positively positioning liquid within spacecraft propellant tanks: magnetic fields. LOX is paramagnetic (attracted toward a magnet) and LH2 is diamagnetic (repelled from a magnet). Order-of-magnitude analyses, performed in the 1960's to determine required magnet size, concluded that the magnets would be prohibitively massive and this option has remained dormant during the intervening years. Recent advances in high-temperature superconducting materials hold the promise of electromagnets with sufficient performance to support cryogenic propellant management tasks. In late 1992, NASA MSFC began a new investigation in this technology commencing with the design of the Magnetically-Actuated Propellant Orientation (MAPO) experiment. A mixture of ferrofluid and water is used to simulate the paramagnetic properties of LOX and the experiment is being flown on the KC-135 aircraft to provide a reduced gravity environment. The influence of a 0.4 Tesla ring magnet on flow into and out of a subscale Plexiglas tank is being recorded on video tape. The most efficient approach to evaluating the feasibility of MAPO is to compliment the experimental program with development of a computational tool to model the process of interest. The goal of the present research is to develop such a tool. Once confidence in its fidelity is established by comparison to data from the MAPO experiment, it can be used to assist in the design of future experiments and to study the parameter space of the process. Ultimately, it is hoped that the computational model can serve as a design tool for full-scale spacecraft applications.

Hochstein, John I.↗

NASA NTRS1999

An Elasticity-Based Mesh Scheme Applied to the Computation of Unsteady Three-Dimensional Spoiler and Aeroelastic Problems

This paper presents a modification of the spring analogy scheme which uses axial linear spring stiffness with selective spring stiffening/relaxation. An alternate approach to solving the geometric conservation law is taken which eliminates the need for storage of metric Jacobians at previous time steps. Efficiency and verification are illustrated with several unsteady 2-D airfoil Euler computations. The method is next applied to the computation of the turbulent flow about a 2-D airfoil and wing with two and three- dimensional moving spoiler surfaces, and the results compared with Benchmark Active Controls Technology (BACT) experimental data. The aeroelastic response at low dynamic pressure of an airfoil to a single large scale oscillation of a spoiler surface is computed. This study confirms that it is possible to achieve accurate solutions with a very large time step for aeroelastic problems using the fluid solver and aeroelastic integrator as discussed in this paper.

Bartels, Robert E.↗

DOE OSTI2024

Meshfree Methods

Meshfree methods have undergone substantial development and have received much attention in the last two decades. This new family of numerical methods is designed to inherit the main advantages of the finite element method such as compact supports of shape functions and good approximation properties while, at the same time, overcome the main disadvantages of the finite element method caused by the mesh dependence. The meshfree methods share a common feature that no mesh is needed and shape functions are constructed from sets of points, thus eliminating the need for time consuming mesh generation. The most significant advantage of meshfree methods is the flexibility in customizing approximation functions for desired regularity and for capturing essential physics and features of the particular problems of interest. Adaptivity formulation and multiple-scale solution strategies also can be implemented with relative ease. It has become clear that the meshfree methods provide considerable advantages over the conventional finite element methods in solving problems involving moving discontinuities, evolving material interfaces, multiple-scale phenomena, large material distortion and structural deformation, and fracture and damage processes. This Chapter gives an overview of many classes of meshfree methods, with more detailed discussions on Smoothed Particle Hydrodynamics (SPH), the Reproducing Kernel Particle Method (RKPM), Peridynamics (PD), the Material Point Method (MPM), as well as their applications in various challenging engineering problems.2

Chen, Jiun-Shyan↗

NASA NTRS1996

A Well Connected Future: Networking Trends

It is clear networks of various types are beginning to have a substantial impact on every aspect of our lives, our jobs, society and the way we perceive and use information. Commerce is moving onto the Internet; doctors are performing surgery and diagnosis with the aid of high performance networks and satellites; and political revolutions and coups are reported through the use of networks. This is only the first glimpse of what is yet to come. This paper is a brief survey of technology research in networking, with emphasis on the use of satellites present and future as a component of a global information mesh.

St.Johns, Michael↗

NASA NTRS1994

Computing unsteady shock waves for aeroacoustic applications

The computation of unsteady shock waves, which contribute significantly to noise generation in supersonic jet flows, is investigated. This paper focuses on the difficulties of computing slowly moving shock waves. Numerical error is found to manifest itself principally as a spurious entropy wave. Calculations presented are performed using a third order essentially nonoscillatory scheme. The effect of stencil biasing parameters and of two versions of numerical flux formulas on the magnitude of spurious entropy are investigated. The level of numerical error introduced in the calculation in quantified as a function of shock pressure ratio, shock speed, Courant number, and mesh density. The spurious entropy relative to the entropy jump across a static shock decreases with increasing shock strength and shock velocity relative to the grid, but is insensitive to Courant number. The structure of the spurious entropy wave is affected by the choice of flux formulas and algorithm biasing parameters. The effect of the spurious numerical waves on the calculation of sound amplification by a shock wave is investigated. For this class of problem, the acoustic pressure waves are relatively unaffected by the spurious numerical phenomena.

Meadows,, Kristine r.↗

NASA NTRS1994

Computing unsteady shock waves for aeroacoustic applications

The computation of unsteady shock waves, which contribute significantly to noise generation in supersonic jet flows, is investigated. The paper focuses on the difficulties of computing slowly moving shock waves. Numerical error is found to manifest itself principally as a spurious entropy wave. Calculations presented are performed using a third-order essentially nonoscillatory scheme. The effect of stencil biasing parameters and of two versions of numerical flux formulas on the magnitude of spurious entropy are investigated. The level of numerical error introduced in the calculation is quantified as a function of shock pressure ratio, shock speed, Courant number, and mesh density. The spurious entropy relative to the entropy jump across a static shock decreases with increasing shock strength and shock velocity relative to the grid, but is insensitive to Courant number. The structure of the spurious entropy wave is affected by the choice of flux formulas and algorithm biasing parameters. The effect of the spurious numerical waves on the calculation of sound amplification by a shock wave is investigated. For this class of problem, the acoustic pressure waves are relatively unaffected by the spurious numerical phenomena.

Meadows, Kristine R.↗

NASA NTRS1998

Profile Evolution Simulation in Etching Systems Using Level Set Methods

Semiconductor device profiles are determined by the characteristics of both etching and deposition processes. In particular, a highly anisotropic etch is required to achieve vertical sidewalls. However, etching is comprised of both anisotropic and isotropic components, due to ion and neutral fluxes, respectively. In Ar/Cl2 plasmas, for example, neutral chlorine reacts with the Si surfaces to form silicon chlorides. These compounds are then removed by the impinging ion fluxes. Hence the directionality of the ions (and thus the ion angular distribution function, or IAD), as well as the relative fluxes of neutrals and ions determines the amount of undercutting. One method of modeling device profile evolution is to simulate the moving solid-gas interface between the semiconductor and the plasma as a string of nodes. The velocity of each node is calculated and then the nodes are advanced accordingly. Although this technique appears to be relatively straightforward, extensive looping schemes are required at the profile corners. An alternate method is to use level set theory, which involves embedding the location of the interface in a field variable. The normal speed is calculated at each mesh point, and the field variable is updated. The profile comers are more accurately modeled as the need for looping algorithms is eliminated. The model we have developed is a 2-D Level Set Profile Evolution Simulation (LSPES). The LSPES calculates etch rates of a substrate in low pressure plasmas due to the incident ion and neutral fluxes. For a Si substrate in an Ar/C12 gas mixture, for example, the predictions of the LSPES are identical to those from a string evolution model for high neutral fluxes and two different ion angular distributions.(2) In the figure shown, the relative neutral to ion flux in the bulk plasma is 100 to 1. For a moderately isotropic ion angular distribution function as shown in the cases in the left hand column, both the LSPES (top row) and rude's string method (bottom row) predict tapered profiles. The LSPES uses an AD with a FWHM = 13.5 degrees, and rude's model uses a ratio of sheath voltage to ion temperature of 50. The more anisotropic IADs produce profiles with more vertical sidewalls and a wider bottom surface, as shown in the right hand column. Here, the LSPES has an AD with a FWHM = 2 degrees, and rude's model uses a ratio of 500 of sheath voltage to ion temperature. The agreement between the LSPES and rude's model is excellent in both cases. We will present etching profiles generated by the LSPES, including calculations of the re-emitted fluxes of both neutrals and ions off of the profile walls. In addition, we will show the effect of geometric structures (overhangs, etc.) on the etching profiles. Other physical aspects, such as surface diffusion, will also be included in the model.

Hwang, Helen H.↗