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At least 199 records · Page 11

Molecular Layer Deposited Aluminum‐Based Hybrid Resist for High‐Resolution Nanolithography and Direct Ultra‐High Aspect Ratio Pattern Transfer

Inorganic-containing hybrid photoresists are critical for next-generation extreme ultraviolet (EUV) lithography and angstrom-era semiconductor miniaturization. However, associated conventional solution processing struggles to achieve ultrathin, uniform films with high conformality and compositional control, limiting overall patterning performance. Here, this study reports the systematic lithographic patterning characterization of an Al-based hybrid resist synthesized via vapor-phase molecular layer deposition (MLD), using the trimethylaluminum (TMA) metal precursor and the hydroquinone (HQ) aromatic organic linker. The resist supports both sub-20 nm high-resolution nanolithography and virtually infinite silicon plasma etch selectivity. Lithographic performance studied using electron beam lithography (EBL) as a proxy for EUV shows that, under an optimized process adopting post-exposure bake, the resist achieves the best resolution of 15.4 nm linewidth under stringent 1:1 line-space high-density patterning—limited only by the minimum beam size of the EBL system. The resist also shows wide dose latitude and balanced performance in resolution, roughness, and sensitivity. The infinite silicon etch selectivity, stemming from spontaneous aluminum oxyfluoride passivation layer formation, enables fabrication of micrometer-tall, 40 nm-wide silicon nanofin structures using only a ≈30 nm-thick resist layer, without no hard mask. These results highlight the potential of MLD-based hybrid resists for developing next-generation resist materials for micro/nanoelectronics manufacturing.

36 MATERIALS SCIENCE↗

SIMS analysis of high-performance accelerator niobium

Niobium is used to fabricate superconducting radio frequency accelerator modules because of its high critical temperature, high critical magnetic field, and easy formability. Recent experiments have shown a very significant improvement in performance (over 100%) after a high-temperature bake at 1400 degrees C for 3h. SIMS analysis of this material showed the oxygen profile was significantly deeper than the native oxide with a shape that is indicative of diffusion. Positive secondary ion mass spectra showed the presence of Ti with a depth profile similar to that of O. It is suspected that Ti is associated with the performance improvement. The source of Ti contamination in the anneal furnace has been identified, and a new furnace was constructed without Ti. Initial results from the new furnace do not show the yield improvement. Further analyses should determine the relationship of Ti to cavity performance.

Maheshwari, P.↗

Developing AlMn Films for Argonne TES Fabrication

The reference design for the next-generation cosmic microwave background (CMB) experiment, CMB-S4, relies on large arrays of transition-edge sensor (TES) bolometers coupled to Superconducting Quantum Interference Device (SQUID)-based readout systems. Mapping the CMB to near cosmic variance limits will enable the search for signatures of inflation and constrain dark energy and neutrino physics. AlMn TESes provide simple film manufacturing and highly uniform arrays over large areas to meet the requirements of the CMB-S 4 experiment. TES parameters such as critical temperature and normal resistance must be tuned to experiment specifications and can be varied based on geometry and steps in the fabrication process such as deposition layering, geometry, and baking time and temperature. Using four-terminal sensing, we measured T C and R N of AlMn 2000 ppm films and devices of varying thicknesses fabricated at Argonne National Laboratory to motivate device geometries and fabrication processes to tune T C to 150–200 mK and R N to ~10 mΩ. Furthermore, measurements of IV curves and time constants for the resulting devices of varying leg length were made using time-division SQUID multiplexing and determined TC, G, k, f 3db , and RN. We present the results of these tests along with the geometries and fabrication steps used to tune the device parameters to the desired limits.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Bayesian projection pursuit regression

In projection pursuit regression (PPR), a univariate response variable is approximated by the sum of $M$ “ridge functions,” which are flexible functions of one-dimensional projections of a multivariate input variable. Traditionally, optimization routines are used to choose the projection directions and ridge functions via a sequential algorithm, and $M$ is typically chosen via cross-validation. Here, we introduce a novel Bayesian version of PPR, which has the benefit of accurate uncertainty quantification. To infer appropriate projection directions and ridge functions, we apply novel adaptations of methods used for the single ridge function case ($M$=1), called the Bayesian Single Index Model; and use a Reversible Jump Markov chain Monte Carlo algorithm to infer the number of ridge functions $M$. We evaluate the predictive ability of our model in 20 simulated scenarios and for 23 real datasets, in a bake-off against an array of state-of-the-art regression methods. Finally, we generalize this methodology and demonstrate the ability to accurately model multivariate response variables. Its effective performance indicates that Bayesian Projection Pursuit Regression is a valuable addition to the existing regression toolbox.

97 MATHEMATICS AND COMPUTING↗

Effect of Solution Heating Rate on Quasi-static and Dynamic Mechanical Properties of Al-Mg-Si-Cu Alloy

The effect of solution heating rate on quasi-static and dynamic mechanical properties of Al-Mg-Si-Cu alloy in bake hardening state was investigated through mechanical properties, microstructure and fracture morphology characterization in the present study. The results show that solution heating rate has a strong influence on microstructure, quasi-static and dynamic mechanical properties. As solution heating rate rises, the grain microstructure transforms from the elongated grains to equiaxed grains and the fraction of low-angle grain boundaries (LAGBs) also decreases. Moreover, the equivalent average grain size first decreases, and then increases. The relationship between solution heating rate and mechanical property is monotonic, not depending on strain rate. As solution heating rate rises, the yield strength, ultimate tensile strength and elongation decrease. In contrast to quasi-static loading, dynamic loading always tends to improve strengths and elongation. In addition, compared with the quasi-static tensile specimens, the dynamic tensile specimens possess a larger number of dislocations. Regardless of strain rate and solution heating rate, all the tensile specimens exhibit the ductile fracture mode. As solution rate rises, the dimples decrease and become shallow gradually. The dimples in dynamic fracture zone are larger and deeper than those in the quasi-static fracture zone.

36 MATERIALS SCIENCE↗

Self-Supplied Liquid Injection Field Desorption/Ionization Ion Source for an Orthogonal Time-of-Flight Instrument

A new implementation of a dedicated ion source for field ionization (FI), field desorption (FD), and liquid injection field desorption/ionization (LIFDI) for the JEOL AccuTOF GC series of orthogonal-acceleration time-of-flight instruments is presented. In contrast to existing implementations, this third-party LIFDI probe and source combination does not require the exchange of the entire ion source comprising ion source block and lens stack to switch from electron ionization (EI) to LIFDI. Rather, the methods may be swapped conveniently by only exchanging the ion source block for a mechanical probe guide and inserting the LIFDI probe in place of the standard direct insertion probe (DIP) via the vacuum lock. Further, this LIFDI setup does not require any changes of the electronics or software of the AccuTOF mass spectrometer because it is self-supplied in terms of power supply, observation optics, and computer control. The setup offers advanced FI/FD/LIFDI control features such as emission-controlled emitter heating current and emitter flash baking during elongated runs as required for gas chromatography-FI-mass spectrometry (MS). The LIFDI source and probe and its operation are reported in detail. FI spectra of the volatile analytes toluene, heptane, and pentafluoroiodobenzene are presented. LIFDI operation is demonstrated for the analysis of the saturated hydrocarbon dotriacontane and the low-mass hydrocarbon polymers polystyrene 484 and polystyrene 1050. Further, the air-sensitive 2nd-generation Hoveyda–Grubbs catalyst is analyzed by LIFDI-MS. For comparison with long-established LIFDI instrumentation, some of the spectra obtained with the new setup are also compared with those from a double-focusing magnetic sector instrument. .

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Effects of edge-seal design on the mechanical and thermal performance of vacuum-insulated glazing

Although vacuum-insulated glazing (VIG) has been proposed as a promising solution towards developing energy-efficient buildings, VIGs have not become popular in the market due to several technical challenges including the complexity of the fabrication process. In particular, the edge-seal is a key component that significantly affects the thermal insulation and mechanical performance, and the development of edge-seal with adequate thermal insulation, mechanical strength, and reasonable processing cost is essential to overcome such technical issues in VIG. For this purpose, effects of edge-seal design parameters on the VIG performance should be identified. In this research, we analyzed the edge-seal for thermal transport as well as structural stresses to study the effects, and then identified and evaluated the material mixes for the edge-seal requirements. Here, the finite element simulations showed the significance of VIG corner calculation on overall thermal transmittance and the importance of seal conductivity below 1 W/m.K. The experiments with the flexible seals with different ratios of fine glass powder demonstrated that the measured shear strength values for the seal with less than 30% glass powder were more than 10 times larger than the calculated shear stress values. Based on these simulation and experimental results, a flexible sealant was developed using a proprietary mix of ceramic materials that meets the requirements of the designed VIG edge-seal, including structural as well as thermal stress resistance and a low conductivity. Moreover, the sealant is self-curing under atmospheric conditions, and thus it does not require costly inline process of laser curing or oven baking.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

Reduction of hydrogen content in deuterium plasma with mixed graphite and tungsten divertors in EAST

Reduction of hydrogen content in deuterium-fueled fusion plasmas is important not only to avoid diluting reacting core deuterons but also so as to allow the optimization of hydrogen-minority-heating efficiency in those fusion devices which employ ion-cyclotron-radio-frequency heating systems. In EAST, the amount of hydrogen released from plasma-facing components has been shown to depend strongly on both their composition and their temperature. In this paper, as measured by thermal desorption spectroscopy, the hydrogen inventory in graphite – used in EAST as lower divertor material – has been determined to be >25 times larger than that of tungsten which comprises the upper divertor. This difference in hydrogen inventory is attributed mostly to the intrinsically porous nature of bulk graphite. Thus the main source of hydrogen release into EAST discharges was identified as the graphite tiles used in the lower divertor. The hydrogen content in EAST plasmas were clearly reduced by first employing a high-temperature vacuum baking of all graphite tiles and then renewing a 100–200 μm thick SiC coating before an EAST experimental run campaign. Subsequent active surface conditioning of all wall components with elemental silicon and then with elemental lithium were seem to again reduce the plasma hydrogen content significantly – with lithium proving to be more effective than silicon. Combining these several techniques, H/(H + D) levels as low as ~3% have been achieved in EAST discharges. Additionally, the effects of lithium thickness on H surface implantation and retention has been re-examined semi-quantitatively using data from a previous run campaign. These data suggest that relatively thick Li films coated on the first wall can effectively isolate the rich source of hydrogen stored in the porous bulk of the underlying graphite from the deuterium-fueled plasma so as to minimize hydrogen release. In conclusion, an operational maneuver whereby a diverted plasma is repetitively switched from an upper single null configuration to a lower single null configuration is presented. This switching maneuver has been shown to suppress hydrogen influx into a 35s-long EAST discharge by alternately mitigating the rise in divertor temperature.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Application of an orcinol-ferric chloride colorimetric assay in barley and wheat accessions for water-extractable and total arabinoxylan

Arabinoxylan is an important hemicellulose potentially affecting wheat baking qualities, barley malt quality, and may impart prebiotic benefits. Water-extractable (WEAX) and total arabinoxylan (TOAX) were characterized in 204 wheat and barley accessions, respectively, using an orcinol-ferric chloride assay. WEAX measurement accuracy was optimum when glucose concentration was greater than 12–13 times pentose concentration. The modified method removed enough excess glucose spectral absorbance to make the corrected and uncorrected lines different, but still significantly correlated (p = 0.009, R = 0.94). Mean WEAX (expressed as percentage WEAX of TOAX) for the wheat accessions was 15.90%, ranging from 8.82% to 24.87%, and for barley accessions WEAX the mean was 7.10%, and ranged from 2.98% to 13.86%. Conclusions are 1) the assay is useful for a breeding program because of its semi-high throughput design for the simultaneous analysis of 16 (WEAX) to 40 (TOAX) barley lines or 24 (WEAX) to 40 (TOAX) wheat lines, 2) the trichromatic measurement reduces the impact of glucose, and 3) the broad range of WEAX measured showed that barley and wheat accessions vary in their extractable and unextractable components.

59 BASIC BIOLOGICAL SCIENCES↗

Deuterium retention and out-gassing from beryllium oxide on beryllium

We studied the desorption of D implanted into Be with a superficial oxide layer. We found that the different oxide thicknesses and implantation at different energies resulted in a strong variation of the fraction stopped within the oxide layer. Thermal desorption of D was subsequently performed, intermitted by nuclear reaction analysis for assessment of the D depth distributions and total retained amounts. Moreover, for the conditions, where part of the D was deposited in the Be substrate, a sharp decrease of the retained amount of D occurs around 200 °C. This is attributed to the release from metallic Be. Correspondingly, the D and O depth profiles show that above 200 °C the remaining D is only retained in the BeO layer. Apparently, the superficial BeO layer does not act as a diffusion barrier for D that is released from the metallic substrate. The retained amount of D deposited within the BeO layer decreases steadily and is not completely released at 350 °C, the foreseen bake-out temperature in ITER.

07 ISOTOPE AND RADIATION SOURCES↗

High-temperature lean Cu alloys with Cr-to-Nb atomic ratio of 2

Two Cu-Cr-Nb alloys, denoted as alloy 1 (comprising Cu-0.89 at% Cr-0.42 at% Nb) and alloy 2 (comprising Cu-1.84 at% Cr-0.99 at% Nb), were produced through a series of manufacturing processes including vacuum induction melting, melt spinning, consolidation, brazing, and baking, with both alloys aimed at achieving a nominal Cr-to-Nb atomic ratio of 2. Microstructural characterization using transmission electron microscopy and X-ray diffraction identified the cubic C15 Laves-phase Cr 2 Nb as the dominant precipitate in both alloys, cross-validated by thermodynamic calculations and atomistic simulation-based density functional theory (DFT). Besides cubic C15 Cr 2 Nb, hexagonal C14-phase Cr 2 Nb and α-BiF3 cubic structured Cr 3 Nb were also observed in the alloys, including a coherent interface formed between the Cr 3 Nb precipitate and the Cu matrix. The hardness of the alloys increases, and the electrical conductivity decreases with increasing alloying addition content; two practical equations described the trends. Further DFT simulations revealed that the electrical conductivity (conductance) of the Cu/Cr 2 Nb interface is an order of magnitude higher than the intrinsic Cu high-angle grain boundaries.

36 MATERIALS SCIENCE↗

Humidity sensitivity of large area silicon sensors: Study and implications

The production of large area sensors is one of the main challenges that the ATLAS collaboration faces for the new Inner-Tracker full-silicon detector. During the prototype fabrication phase for the High Luminosity Large Hadron Collider upgrade, several ATLAS institutes observed indications of humidity sensitivity of large area sensors, even at relative humidities well below the dew point. Specifically, prototype Barrel and End-Cap silicon strip sensors fabricated in 6-inch wafers manifest a prompt decrease of the breakdown voltage when operating under high relative humidity, adversely affecting the performance of the sensors. In addition to the investigation of these prototype sensors, a specific fabrication batch with special passivation is also studied, allowing for a deeper understanding of the responsible mechanisms. Here we present an extensive study of this behaviour on large area sensors. The locations of the hotspots at the breakdown voltage at high humidity are revealed using different infrared thermography techniques. Several palliative treatments are attempted, proving the influence of sensor cleaning methods, as well as baking, on the device performance, but no improvement on the humidity sensitivity was achieved. Furthermore, a study of the incidence of the sensitivity in different batches is also presented, introducing a hypothesis of the origins of the humidity sensitivity associated to the sensor edge design, together with passivation thickness and conformity. Several actions to be taken during sensor production and assembly are extracted from this study, in order to minimize the impact of humidity sensitivity on the performance of large area silicon sensors for High Energy Physics experiments.

47 OTHER INSTRUMENTATION↗

Retention properties in displacement damaged ultra-fine grain tungsten exposed to divertor plasma

One of the main advantages of using tungsten (W) as a plasma facing material (PFM) is its low uptake and retention of tritium. However, in high purity (ITER grade) W, hydrogenic retention increases significantly with neutron-induced displacement damage in the W lattice. This experiment examines an alternative W grade PFM, ultra-fine grain (UFG) W, to compare its retention properties with ITER grade W after 12 MeV Si ion displacement damage up to 0.6 dpa (displacements per atom.) Following exposure to plasma in the DIII-D divertor, D retention was then assessed with Nuclear Reaction Analysis (NRA) depth profiling up to 3.5 µm and thermal desorption spectrometry (TDS). Undamaged specimens were also included in our test matrix for comparison. For all samples, D release peaks were observed during TDS at approximately 200 °C and 750 °C. For the ITER-grade W specimens, the intensity of the 750 °C release peak was more pronounced for specimens that had been pre-damaged. Conversely, UFG samples that had been damaged by 12 MeV Si showed enhancement of the lower temperature release peak (200 °C). NRA profiles also reveal a higher D concentration for UFG W samples up to the peak in the damage profile at a depth of 2 m. Overall, we observed that the total trapped inventory in UFG W was 20% higher than ITER grade W in the undamaged case and 10% higher in the damaged case. A comparison of NRA and TDS data indicates that a larger fraction of the total retained D is trapped near the surface (86–100%) in UFG W pre-damaged to 0.6 dpa compared with ITER grade W (39–61%). Further examination of the UFG material with microscopy is recommended for a definitive determination of the types of defects responsible for D trapping. Our results highlight some potential trade-offs associated UFG W regarding its performance from a tritium retention standpoint. That said, our TDS results indicate that this enhanced inventory can be released by baking at relatively low temperatures (<500 °C), providing an avenue for minimizing tritium retention in this material that would be practical for implementation in a tokamak.

Barton, J↗

Improved liquid lithium surfaces in the Lithium Tokamak Experiment-β

Advances in vacuum, surface, and lithium conditioning techniques throughout five years of continuous operations in LTX-β have produced mirror-like liquid lithium surfaces and demonstrated the feasibility of high-performance tokamak discharges fully surrounded by liquid metal without significant operational problems. Improvements in conditioning techniques and procedures, including many weeks of baking and accumulation of 70 g of Li, led to reduced residual gasses and clean Li surfaces - all while still maintaining enough operational flexibility for multiple in-vacuum diagnostic upgrades and calibrations. Coatings had a visibly clean appearance, with reflective liquid metal demonstrating good wetting and surface adhesion with films that were now macroscopically thick. Solidified Li showed large crystal grains, while surface science measurements observed reduced impurities in the lithium. Steadily improved plasma performance was achieved with liquid lithium, with discharges able to match solid Li in terms of evolution of I p and n e , including rapid density pumping indicating low recycling. There were indications of moderately increased Li impurity influx, though few significant disturbances by the large liquid surfaces on tokamak operations over hundreds of discharges. Liquid metal plasma facing components are a potential solution to the extreme heat and particle fluxes that could cause unacceptable damage to solid materials, while liquid lithium also has the potential for greatly increased confinement in the low-recycling regime. While many liquid metal approaches are possible, and numerous experiments have been conducted in test stands and small modules in fusion devices, LTX-β is the only tokamak operated while fully surrounded by liquid metal.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Emerging Potassium Metal Anodes: Perspectives on Control of the Electrochemical Interfaces

Potassium metal acts as the anode in emerging potassium metal batteries (KMBs). It further serves as the counter-electrode for potassium ion battery (KIB) half-cells, with its reliable performance being critical for assessing the working electrode material. This first-of-its-kind critical review focuses on the dual challenge of controlling the potassium metal-substrate and the potassium metal-electrolyte interface so as to prevent dendrites. The discussion begins with a comparison of the physical and chemical properties of K metal anodes versus the much oft studied Li and Na metal anodes. Based on established descriptions for root causes of dendrites, the problem should be less severe for K than for Li or Na, while in fact the opposite is observed. The key reason that the K metal surface rapidly becomes dendritic in common electrolytes is its unstable solid electrolyte interphase (SEI). An unstable SEI layer is defined as being non self-passivating. No SEI is perfectly stable during cycling, and all SEI structures are heterogenous both vertically and horizontally relative to the electrolyte interface. The difference between a "stable" and an "unstable" SEI may be viewed as the relative degree to which during cycling it thickens and becomes further heterogeneous. The unstable SEI on K metal leads to a number of interrelated problems, such as low cycling Coulombic efficiency (CE), a severe impedance rise, large overpotentials, and possibly electrical shorting; all of which have been reported to occur as early as in the first ten plating/stripping cycles. Many of the traditional "interface fixes" employed for Li and Na metal anodes, such as various artificial SEIs, surface membranes, barrier layers, the secondary separators, etc. have not been attempted or optimized for the case of K. This is an important area for further exploration, with an understanding that success may come harder than with Li due to K-based SEI reactivity with both ether and ester solvents. The second critical problem with K metal anodes is that they do not thermally or electrochemically wet a standard (untreated) Cu foil current collector. Published experimental and modeling research directly highlights the weak bonding between the K atoms and a Cu surface. Existing surface treatment approaches that achieve improved K wetting are discussed, along with the general design rules for future studies. Also discussed are geometry-based methods to tune nucleation, as well dual approaches where nucleation and SEI structure are tuned through complementary schemes to achieve extended half-cell and full battery stability. We hypothesize that K metal never achieves a planar wetting morphology even at cycle one making the dendrites "baked-in". We propose that classical thin films growth models, Frank van der Merwe (F-M), Volmer Weber (V-W), and Stranski-Krastanov (S-K) can be employed to describe early stage plating behavior. It is demonstrated that island-like V-W growth is the applicable description for the natural plating behavior of K on pristine Cu. Moving forward, there are three inter-related thrusts to be pursued: First, K salt - based electrolyte formulations have to mature and become further tailored to handle the increased reactivity of a metal rather than an ion anode. Second, the K-based SEI structure needs to be further understood and ultimately tuned to be less reactive. Third, the energetics of the K metal - current collector interface must be controlled to promote planar wetting/dewetting throughout cycling.

25 ENERGY STORAGE↗

Bismuth-oxo Clusters for Next Generation Extreme Ultraviolet Light Photolithography

Photolithography is the primary technique used for the patterning of semiconducting materials for chip manufacturing; however, as requisite pattern dimensions and feature sizes continue to decrease, state-of-the-art lithographic methods now require the use of 13.5 nm extreme ultraviolet (EUV) light. The shift toward these higher energy wavelengths of light has resulted in a need for new single component materials, with high EUV absorption cross sections and high etch resistance. Herein, we report the exploration of Bi 9 O 7 (hfac) 13 as the first bismuth oxo cluster based EUV photoresist. It was determined this material has an exceptional EUV linear absorption coefficient (24 μm –1 ), nearly an order of magnitude larger than commercially available chemically amplified resists (CARs) (∼5 μm –1 ). Additionally, the resist was determined to be highly sensitive to EUV exposure and displayed a dose-to-gel of 10 mJ/cm 2 , undergoing ligand decomposition during exposure and cross-linking during the postexposure bake, which was supported by FTIR and residual gas analysis. In conclusion, this class of bismuth-oxo cluster resists can lead to the development of more efficient, effective and safe EUV resist materials required for next-generation photolithography.

MacKenzie, Harvey K. [Univ. of Victoria, BC (Canad↗

Chemical Modification Mechanisms in Hybrid Hafnium Oxo-methacrylate Nanocluster Photoresists for Extreme Ultraviolet Patterning

The potential implementation of extreme ultraviolet (EUV) lithography into next generation device processing is bringing urgency to identify resist materials that optimize EUV lithographic performance. Inorganic/organic hybrid nanoparticles or clusters constitute a promising new class of materials, with high EUV sensitivity from the core and tunable chemistry through the coordinating ligands. Development of a thorough mechanistic understanding of the solubility switching reactions in these materials is an essential first step toward their implementation in patterning applications but remains challenging due to the complexity of their structures, limitations in EUV sources, and lack of rigorous in situ characterization. Here, we report a mechanistic investigation of the solubility switching reactions in hybrid clusters comprising a small HfOx core capped with a methacrylic acid ligand shell (HfMAA). We show that EUV-induced reactions can be studied by performing in situ infrared (IR) spectroscopy of electron-irradiated films using a variable energy electron gun. Combining additional ex situ metrology, we track the chemical evolution of the material at each stage of a typical resist processing sequence. For instance, we find that a cross-linking reaction initiated by decarboxylation of the methacrylate ligands under electron irradiation constitutes the main solubility switching mechanism, although there are also chemical changes imparted by a typical post application bake (PAB) step alone. Lastly, synchrotron-based IR microspectroscopy measurements of EUV-irradiated HfMAA films enable a comparison of reactions induced by EUV vs electron beam irradiation of the same resist material, yielding important insight into the use of electron beam irradiation as an experimental model for EUV exposure.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Toward a Diverse Next-Generation Energy Workforce: Teaching Artificial Photosynthesis and Electrochemistry in Elementary Schools through Active Learning

Artificial photosynthesis is a promising approach to generate commodity chemicals using abundant chemical feedstocks and renewable energy sources. Despite its importance, affordable and effective hands-on classroom activities that demonstrate artificial photosynthesis and teach key concepts, especially for primary school students, are lacking. Educating young students on this topic is a critical step in the development of the next-generation energy workforce, especially one that is diverse in race and gender. Here, we hypothesize that an effective approach to educate a broad range of young students on the topic of artificial photosynthesis is through the use of an active learning-based lesson plan that employs cheap and accessible materials. This hypothesis is confirmed by evaluating the understanding of fifth grade students with a survey before and after a lesson plan on artificial photosynthesis that uses active-learning techniques and uses safe and highly accessible materials (baking soda, tap water, plastic jars, Ni coil, alligator clips, and a solar cell) to perform solar-powered water splitting. The lesson plan and survey questions are designed to align with the educational outcomes for fifth grade classrooms in California and to address four general learning objectives: (1) Motivations of Artificial Photosynthesis, (2) Applications of Artificial Photosynthesis, (3) Inputs and Outputs of Artificial Photosynthesis, and (4) Engineering Design for Artificial Photosynthesis. The survey data demonstrate a statistically significant improvement in overall student understanding from the lesson plan. Importantly, the data show that the lesson plan presented here is effective at narrowing the performance gap between minority students and overly represented groups.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗