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DOE OSTI2025

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗

DOE OSTI2022

Atomic Edge-Guided Polyethylene Crystallization on Monolayer Two-Dimensional Materials

In this report we combine an advanced synthesis of two-dimensional (2D) materials (MoSe 2 ) having well-defined atomic edge configurations with ab initio and atomistic molecular dynamics (MD) simulations to study how atomic edges interact with polyethylene (HDPE) chains in a dilute solution assembly process. Our results reveal that Mo-terminated zigzag (Mo-ZZ) edges act as preferred nucleation sites and strongly interact with HDPE chains. The HDPE chains align in parallel with the Mo-ZZ edges and form arrays of lamellae that are perpendicular to the edges. Interestingly, atomic edge configurations are observed to dramatically change such interactions. The crystallization discrepancy at different edges was demonstrated on the same piece of MoSe 2 with different types of edges. The ab initio and MD simulations between n-alkane (n = 5 and 25), a segment of HDPE, and MoSe 2 suggest that the atomic structures of MoSe 2 can affect their interactions with n-alkane chains. Following the Mo-ZZ edge preferred nucleation principle, controlled long-range alignment of HDPE lamellae can be realized by creating multilayer MoSe 2 with parallel atomic steps. This research opens a pathway toward an atomic level understanding of polymer–2D nanomaterial interactions. It also bridges the gap between atomic-level and long-range mesoscopic structures and introduces a novel strategy for long-range structural control.

36 MATERIALS SCIENCE↗

DOE OSTI2022

Electrode biasing maintains the edge shear layer at high density in the J-TEXT tokamak

Collapse of the edge flow shear as the line-averaged density approaches the Greenwald density limit has been observed as a precursor to the enhanced edge particle flux characteristic of proximity to the density limit regime. Here, we report the use of a biased electrode to sustain the edge shear layer in high density discharges, in which the shear layer would otherwise collapse. A stable increase in line-averaged density is observed along with a strong increase in edge density. These experiments were carried out on the J-TEXT tokamak. The Reynolds stress at the edge is enhanced, and the zonal flow sustained, while density perturbation levels, the flux of turbulence internal energy (i.e., turbulence spreading), and particle and heat flux all decrease significantly. Electron adiabaticity increases, and bias voltage modulation experiments show that an increase in the edge shear leads the increase in adiabaticity. Furthermore, these results suggest that external edge E × B flow shear drive may be of interest for sustaining edge plasma states at high density, and support the hypothesis that collapse of the edge shear layer triggers the onset of the strong transport and turbulence characteristic of the density limit regime.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2020

Magnetic multilayer edges in Bernal-stacked hexagonal boron nitride

Single-layer h-BN is known to have edges with unique magnetism; however, in the commonly fabricated multilayer AA'-h-BN, edge relaxations occur that create interlayer bonds and eliminate the unpaired electrons at the edge. Recently, a robust method of growing the unconventional Bernal-stacked h-BN (AB-h-BN) has been reported. Here, we use theoretical approaches to investigate the nitrogen-terminated zigzag edges in AB-h-BN that can be formed in a controlled fashion using a high-energy electron beam. We find that these "open"edges remain intact in bilayer and multilayer AB-h-BN, enabling researchers potentially to investigate these edge states experimentally. We also investigate the thermodynamics of the spin configurations at the edge by constructing a lattice model that is based on parameters extracted from a set of first-principles calculations. We find that the edge spins in neighboring layers interact very weakly, resulting in a sequence of independent spin chains in multilayer samples. By solving this model using Monte Carlo simulations, we can determine nm-scale correlation lengths at liquid-N 2 temperatures and lower. At low temperatures, these edges may be utilized in magnetoresistance and spintronics applications.

1-dimensional spin chains↗

NASA NTRS2000

Flame Spread Along Free Edges of Thermally Thin Samples in Microgravity

The effects of imposed flow velocity on flame spread along open edges of a thermally thin cellulosic sample in microgravity were studied experimentally and theoretically. In this study, the sample was ignited locally at the middle of the 4 cm wide sample, and subsequent flame spread reached both open edges of the sample along the direction of the flow. The following flame behaviors were observed in the experiments and predicted by the numerical calculation, in order of increased imposed flow velocity: (1) ignition but subsequent flame spread was not attained, (2) flame spread upstream (opposed mode) without any downstream flame, and (3) the upstream flame and two separate downstream flames traveled along the two open edges (concurrent mode). Generally, the upstream and downstream edge flame spread rates were faster than the central flame spread rate for an imposed flow velocity of up to 5 cm/s. This was due to greater oxygen supply from the outer free stream to the edge flames and more efficient heat transfer from the edge flames to the sample surface than the central flames. For the upstream edge flame, flame spread rate was nearly independent of, or decreased gradually with, the imposed flow velocity. The spread rate of the downstream edge, however, increased significantly with the imposed flow velocity.

MICROGRAVITY↗

DOE OSTI2025

Habitat specialization and edge effects of soil microbial communities in a fragmented landscape

Abstract Soil microorganisms play outsized roles in nutrient cycling, plant health, and climate regulation. Despite their importance, we have a limited understanding of how soil microbes are affected by habitat fragmentation, including their responses to conditions at fragment edges, or “edge effects.” To understand the responses of soil communities to edge effects, we analyzed the distributions of soil bacteria, archaea, and fungi in an experimentally fragmented system of open patches embedded within a forest matrix. In addition, we identified taxa that consistently differed among patch, edge, or matrix habitats (“specialists”) and taxa that showed no habitat preference (“nonspecialists”). We hypothesized that microbial community turnover would be most pronounced at the edge between habitats. We also hypothesized that specialist fungi would be more likely to be mycorrhizal than nonspecialist fungi because mycorrhizae should be affected more by different plant hosts among habitats, whereas specialist prokaryotes would have smaller genomes (indicating reduced metabolic versatility) and be less likely to be able to sporulate than nonspecialist prokaryotes. Across all replicate sites, the matrix and patch soils harbored distinct microbial communities. However, sites where the contrasts in vegetation and pH between the patch and matrix were most pronounced exhibited larger differences between patch and matrix communities and tended to have edge communities that differed from those in the patch and forest. There were similar numbers of patch and matrix specialists, but very few edge specialist taxa. Acidobacteria and ectomycorrhizae were more likely to be forest specialists, while Chloroflexi, Ascomycota, and Glomeromycota (i.e., arbuscular mycorrhizae) were more likely to be patch specialists. Contrary to our hypotheses, nonspecialist bacteria were not more likely than specialist bacteria to have larger genomes or to be spore‐formers. We found partial support for our mycorrhizal hypothesis: arbuscular mycorrhizae, but not ectomycorrhizae, were more likely to be specialists. Overall, our results indicate that soil microbial communities are sensitive to edges, but not all taxa are equally affected, with arbuscular mycorrhizae in particular showing a strong response to habitat edges. In the context of increasing habitat fragmentation worldwide, our results can help inform efforts to maintain the structure and functioning of the soil microbiome.

Winfrey, Claire C. [Department of Ecology and Evol↗

DOE OSTI2021

Tuning Electronic Properties of 2D Materials Using Metal Adsorbates: Cu at WTe 2 Edges

Two-dimensional materials exhibit properties promising for novel applications. Topologically protected states at their edges can be harnessed for use in quantum devices. We use ab initio simulations to examine properties of edges in 1T'-WTe 2 monolayers, known to exhibit topological order, and their interactions with Cu atoms. Comparison of (010)-oriented edges that have the same composition but different terminations shows that, as the number of Cu atoms increases, their thermodynamically-preferred arrangement depends on the details of the edge structure. Cu atoms aggregate into a cluster at the most stable edge; while the cluster is non-magnetic, it spin-polarizes the W atoms along the edge, which removes the topological protection. At the metastable edge, Cu atoms form a chain incorporated into the WTe 2 lattice; the topological state is preserved in spite of the dramatic edge restructuring. This suggests that exploiting interactions of metal species with metastable edge terminations can provide a path towards non-invasive interfaces.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2022

Electron energy loss spectroscopy database synthesis and automation of core-loss edge recognition by deep-learning neural networks

Abstract The ionization edges encoded in the electron energy loss spectroscopy (EELS) spectra enable advanced material analysis including composition analyses and elemental quantifications. The development of the parallel EELS instrument and fast, sensitive detectors have greatly improved the acquisition speed of EELS spectra. However, the traditional way of core-loss edge recognition is experience based and human labor dependent, which limits the processing speed. So far, the low signal–noise ratio and the low jump ratio of the core-loss edges on the raw EELS spectra have been challenging for the automation of edge recognition. In this work, a convolutional-bidirectional long short-term memory neural network (CNN-BiLSTM) is proposed to automate the detection and elemental identification of core-loss edges from raw spectra. An EELS spectral database is synthesized by using our forward model to assist in the training and validation of the neural network. To make the synthesized spectra resemble the real spectra, we collected a large library of experimentally acquired EELS core edges. In synthesize the training library, the edges are modeled by fitting the multi-Gaussian model to the real edges from experiments, and the noise and instrumental imperfectness are simulated and added. The well-trained CNN-BiLSTM network is tested against both the simulated spectra and real spectra collected from experiments. The high accuracy of the network, 94.9%, proves that, without complicated preprocessing of the raw spectra, the proposed CNN-BiLSTM network achieves the automation of core-loss edge recognition for EELS spectra with high accuracy.

36 MATERIALS SCIENCE↗

DOE OSTI2021

Edge counts for the auxiliary pair graph within the graphical unitary group approach

Closed-form expressions are presented for the numbers of edges in the auxiliary pair graphs (APGs) associated with non spin-orbit and spin-orbit Shavitt graphs for full configuration interaction expansions. A Shavitt graph is a visual representation of a configuration state function expansion space constructed via the graphical unitary group approach (GUGA). An APG is an organisational aid and a programmatic tool generated from a Shavitt graph. The number of edges in an APG determines bounds on the computational scaling as a function of the total numbers of electrons, orbitals, and spin multiplicities. The edge counts extend a suite of Shavitt graph statistics based on these functional parameters. The derivation and the presentation of the formulas for the edge counts has been assisted by the bra-ket interchange symmetry and the particle-hole interchange symmetry in the GUGA formalism. Furthermore, these symmetry operators produce one-to-one correspondences between various sets of edges, and this yields identities among some edge count formulas. There are 208 possible edge types. Of these, some do not contribute to two-electron operators, some are related by bra-ket interchange symmetry, and some are related by particle-hole interchange symmetry. For the remaining unique edge types, explicit expressions are derived for the numbers of edges.

74 ATOMIC AND MOLECULAR PHYSICS↗

DOE OSTI2025

Scalable edge clustering of dynamic graphs via weighted line graphs

Timestamped relational datasets consisting of records (or connections) between pairs of entities are ubiquitous in network science. For applications like peer-to-peer communication, email, various social network interactions, and computer network security, it is useful to organize these records into groups based on how and when they are occurring. Weighted line graphs offer a natural way to model how records are related in such datasets but for large real-world graph topologies, building and utilizing the line graph is prohibitively expensive. Here, we present the framework to cluster the edges of a dynamic graph via the associated line graph that contains two major contributions. The first is a method to work with the line graph implicitly and the second is a distributed scale implementation of an agglomerative hierarchical graph clustering algorithm. We outline a novel hierarchical dynamic graph edge clustering approach that efficiently breaks massive relational datasets into small sets of edges containing events at various timescales. This is in stark contrast to traditional graph clustering algorithms that prioritize highly connected (clique-like) community structures. Our approach relies on constructing a sufficient subgraph of a weighted line graph and applying a hierarchical agglomerative clustering. This approach is related to scalable techniques from spatial clustering, nonlinear-dimension reduction, topological data analysis, and draws particular inspiration from HDBSCAN. As an edge clustering, this method yields an overlapping node clustering. Our algorithm is parallelizable and we demonstrate efficient clustering of a billion-scale, real-world dynamic graph into small edge sets that correlate in topology and time. The entire clustering process for a graph with tens of billions of edges takes just a few minutes of run time on 256 nodes of a distributed compute environment. We argue how the output of the edge clustering is useful for a multitude of data visualization and powerful machine learning tasks, both involving the original massive dynamic graph data and metadata associated with the nodes and edges. Finally, we describe how this approach can be extended to dynamic hypergraphs and dynamic graphs/hypergraphs with unstructured data living on vertices and edges.

Data Analysis↗

DOE OSTI2025

Edge-driven transition between extended quantum anomalous Hall crystal and fractional Chern insulator in rhombohedral graphene multilayers

Fractional Chern insulators (FCI) with fractionally quantized Hall conductance at fractional fillings and an extended quantum anomalous Hall (EQAH) crystal with an integer quantized Hall conductance over an extended region of doping were recently observed in pentalayer graphene. One particularly puzzling observation is the transition between the EQAH and FCI regimes, driven either by temperature or electrical current. Here, in this study, we propose a scenario to understand these transitions based on the topologically protected gapless edge modes that are present in both the FCI and EQAH phases and should be most relevant at temperature scales below the energy gap. Our consideration is based on the simple assumption that the edge velocity in FCI is smaller than that in EQAHE and thus contributes to a higher entropy. We further argue that domains with opposite fractionally quantized Hall conductance are ubiquitous in the devices due to disorder, which gives rise to a network of edge modes. The velocity of the edge modes between domains is further reduced due to edge reconstruction. The edge velocity can also be reduced by current when the occupation of the edge mode approaches the gap edge. The edge entropy therefore drives the transition from EQAH to FCI either by temperature or current at a nonzero temperature.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2020

ECAR-5067 Computational Evaluation on Effect of Edge-rounding in Circular to Annular Flow Transitions within a Hexagonal Duct

In this ECAR, the computational fluid dynamics (CFD) simulation of the duct with a cross-section varying from circle to annulus was performed to evaluate the effect of edge-rounding of the internal edges. The edge of circular channel and the edge of inner annular channel were rounded with the radius of curvature ranged from 0 mm to 20 mm. The CFD results show that the pressure loss of the duct can be reduced by increasing the radius of the rounded edge. Case-A results showed that the pressure drop can be significantly reduced by the edge-rounding, e.g., the pressure drop was reduced approximately 56% by the radius of curvature of 5.0mm, and reduced 70% by the radius of curvature of 20.0 mm although its effectiveness would be attenuated as the radius of curvature of edge increases. Results from Case-B showed the impact of rounding the inlet edge was practically negligible compared to the outlet edge. This ECAR could provide a guideline to determine the optimum inlet module design of the VTR fuel rod bundle.

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗

NASA NTRS1982

Critical review of the trailing edge condition in steady and unsteady flow. Blade flutter in compressors and fans: Numerical simulation of the aerodynamic loading

Existing interpretations of the trailing edge condition, addressing both theoretical and experimental works in steady, as well as unsteady flows are critically reviewed. The work of Kutta and Joukowski on the trailing edge condition in steady flow is reviewed. It is shown that for most practical airfoils and blades (as in the case of most turbomachine blades), this condition is violated due to rounded trailing edges and high frequency effects, the flow dynamics in the trailing edge region being dominated by viscous forces; therefore, any meaningful modelling must include viscous effects. The question of to what extent the trailing edge condition affects acoustic radiation from the edge is raised; it is found that violation of the trailing edge condition leads to significant sound diffraction at the tailing edge, which is related to the problem of noise generation. Finally, various trailing edge conditions in unsteady flow are discussed, with emphasis on high reduced frequencies.

Radwan, S. F.↗

NASA NTRS1992

Increased heat transfer to elliptical leading edges due to spanwise variations in the freestream momentum: Numerical and experimental results

A study of the effect of spanwise variation in momentum on leading edge heat transfer is discussed. Numerical and experimental results are presented for both a circular leading edge and a 3:1 elliptical leading edge. Reynolds numbers in the range of 10,000 to 240,000 based on leading edge diameter are investigated. The surface of the body is held at a constant uniform temperature. Numerical and experimental results with and without spanwise variations are presented. Direct comparison of the two-dimensional results, that is, with no spanwise variations, to the analytical results of Frossling is very good. The numerical calculation, which uses the PARC3D code, solves the three-dimensional Navier-Stokes equations, assuming steady laminar flow on the leading edge region. Experimentally, increases in the spanwise-averaged heat transfer coefficient as high as 50 percent above the two-dimensional value were observed. Numerically, the heat transfer coefficient was seen to increase by as much as 25 percent. In general, under the same flow conditions, the circular leading edge produced a higher heat transfer rate than the elliptical leading edge. As a percentage of the respective two-dimensional values, the circular and elliptical leading edges showed similar sensitivity to span wise variations in momentum. By equating the root mean square of the amplitude of the spanwise variation in momentum to the turbulence intensity, a qualitative comparison between the present work and turbulent results was possible. It is shown that increases in leading edge heat transfer due to spanwise variations in freestream momentum are comparable to those due to freestream turbulence.

Rigby, D. L.↗

NASA NTRS1998

Lidar Measurements of Tropospheric Wind Profiles with the Double Edge Technique

Research has established the importance of global tropospheric wind measurements for large scale improvements in numerical weather prediction. In addition, global wind measurements provide data that are fundamental to the understanding and prediction of global climate change. These tasks are closely linked with the goals of the NASA Earth Science Enterprise and Global Climate Change programs. NASA Goddard has been actively involved in the development of direct detection Doppler lidar methods and technologies to meet the wind observing needs of the atmospheric science community. A variety of direct detection Doppler wind lidar measurements have recently been reported indicating the growing interest in this area. Our program at Goddard has concentrated on the development of the edge technique for lidar wind measurements. Implementations of the edge technique using either the aerosol or molecular backscatter for the Doppler wind measurement have been described. The basic principles have been verified in lab and atmospheric lidar wind experiments. The lidar measurements were obtained with an aerosol edge technique lidar operating at 1064 nm. These measurements demonstrated high spatial resolution (22 m) and high velocity sensitivity (rms variances of 0.1 m/s) in the planetary boundary layer (PBL). The aerosol backscatter is typically high in the PBL and the effects of the molecular backscatter can often be neglected. However, as was discussed in the original edge technique paper, the molecular contribution to the signal is significant above the boundary layer and a correction for the effects of molecular backscatter is required to make wind measurements. In addition, the molecular signal is a dominant source of noise in regions where the molecular to aerosol ratio is large since the energy monitor channel used in the single edge technique measures the sum of the aerosol and molecular signals. To extend the operation of the edge technique into the free troposphere we have developed a variation of the edge technique called the double edge technique. In this paper a ground based aerosol double edge lidar is described and the first measurements of wind profiles in the free troposphere obtained with this lidar will be presented.

Gentry, Bruce M.↗

NASA NTRS2000

Flap Edge Aeroacoustic Measurements and Predictions

An aeroacoustic model test has been conducted to investigate the mechanisms of sound generation on high-lift wing configurations. This paper presents an analysis of flap side-edge noise, which is often the most dominant source. A model of a main element wing section with a half-span flap was tested at low speeds of up to a Mach number of 0.17, corresponding to a wing chord Reynolds number of approximately 1.7 million. Results are presented for flat (or blunt), flanged, and round flap-edge geometries, with and without boundary-layer tripping, deployed at both moderate and high flap angles. The acoustic database is obtained from a Small Aperture Directional Array (SADA) of microphones, which was constructed to electronically steer to different regions of the model and to obtain farfield noise spectra and directivity from these regions. The basic flap-edge aerodynamics is established by static surface pressure data, as well as by Computational Fluid Dynamics (CFD) calculations and simplified edge flow analyses. Distributions of unsteady pressure sensors over the flap allow the noise source regions to be defined and quantified via cross-spectral diagnostics using the SADA output. It is found that shear layer instability and related pressure scatter is the primary noise mechanism. For the flat edge flap, two noise prediction methods based on unsteady-surface-pressure measurements are evaluated and compared to measured noise. One is a new causality spectral approach developed here. The other is a new application of an edge-noise scatter prediction method. The good comparisons for both approaches suggest that much of the physics is captured by the prediction models. Areas of disagreement appear to reveal when the assumed edge noise mechanism does not fully define, the noise production. For the different edge conditions, extensive spectra and directivity are presented. Significantly, for each edge configuration, the spectra for different flow speeds, flap angles, and surface roughness were successfully scaled by utilizing aerodynamic performance and boundary layer scaling method developed herein.

Brooks, Thomas F.↗

NASA NTRS2000

Flap Edge Aeroacoustic Measurements and Predictions

An aeroacoustic model test has been conducted to investigate the mechanisms of sound generation on high-lift wing configurations. This paper presents an analysis of flap side-edge noise, which is often the most dominant source. A model of a main element wing section with a half-span flap was tested at low speeds of up to a Mach number of 0.17, corresponding to a wing chord Reynolds number of approximately 1.7 million. Results are presented for flat (or blunt), flanged, and round flap-edge geometries, with and without boundary-layer tripping, deployed at both moderate and high flap angles. The acoustic database is obtained from a Small Aperture Directional Array (SADA) of microphones, which was constructed to electronically steer to different regions of the model and to obtain farfield noise spectra and directivity from these regions. The basic flap-edge aerodynamics is established by static surface pressure data, as well as by Computational Fluid Dynamics (CFD) calculations and simplified edge flow analyses. Distributions of unsteady pressure sensors over the flap allow the noise source regions to be defined and quantified via cross-spectral diagnostics using the SADA output. It is found that shear layer instability and related pressure scatter is the primary noise mechanism. For the flat edge flap, two noise prediction methods based on unsteady surface pressure measurements are evaluated and compared to measured noise. One is a new causality spectral approach developed here. The other is a new application of an edge-noise scatter prediction method. The good comparisons for both approaches suggest that much of the physics is captured by the prediction models. Areas of disagreement appear to reveal when the assumed edge noise mechanism does not fully define the noise production. For the different edge conditions, extensive spectra and directivity are presented. Significantly, for each edge configuration, the spectra for different flow speeds, flap angles, and surface roughness were successfully scaled by utilizing aerodynamic performance and boundary layer scaling methods developed herein.

Brooks, Thomas F.↗

NASA NTRS2005

Development of X-43A Mach 10 Leading Edges

The nose leading edge of the Hyper-X Mach 10 vehicle was orginally anticipated to reach temperatures near 4000 F at the leading-edge stagnation line. A SiC coated carbon/carbon (C/C) leading-edge material will not survive that extreme temperature for even a short duration single flight. To identify a suitable leading edge for the Mach 10 vehicle, arc-jet testing was performed on thirteen leading-edge segments fabricated from different material systems to evaluate their performance in a simulated flight environment. Hf, Zr, Si, and Ir based materials, in most cases as a coating on C/C, were included in the evaluation. Afterwards, MER, Tucson, AZ was selected as the supplier of the flight vehicle leading edges. The nose and the vertical and horizontal tail leading edges were fabricated out of a 3:1 biased high thermal conductivity C/C. The leading edges were coated with a three layer coating comprised of a SiC conversion of the top surface of the C/C, followed by a chemical vapor deposited layer of SiC, followed by a thin chemical vapor deposited layer of HfC. This paper will describe the fabrication of the Mach 10 C/C leading edges and the testing performed to validate performance.

Ohlhorst, Craig W.↗