Use a SEM on a production line
Scanning electron microscope for poor metallization detection in manufacturing cycle of semiconductor devices
Adolphsen, J. W.↗
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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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Particle size and shape distributions of lunar fines by CESEMI
Particle size and shape distributions of Apollo 12 lunar fines by computer evaluation of scanning electron microscope images
Goerz, H.↗
Preliminary terrestrial based experiments on gravity-affected crystal growth
Tin was melted in a heating assembly secured to the arm of a centrifuge. The furnace was allowed to pivot and reach its equilibrium angle of swing for the gravity force being experienced. The crucible was cooled during rotation to allow the growth of single crystals. The crystals were etched for the purpose of observing the growth striations. Slices were removed from some of the crystals to permit observation of the striations in the interior. Visual analyses were made with a scanning electron microscope. Preliminary conclusions relating the appearance of the striations to gravity forces and the affected growth mechanisms are presented. Further experiments that will verify these conclusions and determine other gravity effects are proposed.
Johnston, M. H.↗
Primary and secondary micrometeoroid impact rate on the lunar surface: A direct measurement
Determination of the number of micrometeoroid impact craters on the camera provided an opportunity to make a sensitive direct measurement of the flux of interplanetary dust particles impacting the lunar surface. Optical and scanning electron microscope studies were performed. Low velocity impact and flux analyses are presented.
Brownlee, D. E.↗
Microcrater investigations on Surveyor 3 material
Screws 9 and 23 from Surveyor 3 were examined with a scanning electron microscope for micrometeorite impact features. Six craters on one of the screws appear to be low velocity impact craters, and a flux for about 0.12 sq cm was calculated to be 0.005/sq m/sec for particle diameter or = 1 micron. Two interpretations are considered: (1) The impacts were produced by interplanetary particles and the flux indicates that deviation from the normal distribution exists only for particles below 1 micron in diameter. (2) Most of the craters were produced by secondary lunar debris, and the flux represents the upper limit for interplanetary particles.
Schneider, E. J.↗
Measurement of lattice damage caused by ion-implantation doping of semiconductors.
Discussion of two new techniques used to measure the lattice damage produced in GaAs by the implantation of 60 keV cadmium ions. In the first method, optical reflection spectra of the ion-implanted samples were measured in the wavelength range from 2000 to 4600 A. The decrease in reflectivity resulting from ion-implantation was used to determine the relative amount of lattice damage as a function of ion dose. The second technique employed the scanning electron microscope. Patterns very similar in appearance to Kikuchi electron diffraction patterns are obtained when the secondary and/or backscattered electron intensity is displayed as a function of the angle of incidence of the electron beam on a single crystal surface. The results of measurements made by both methods are compared with each other and with data obtained by the method of measuring lattice damage by Rutherford scattering of 1 MeV helium ions.
Hunsperger, R. G.↗
Analysis of individual particles collected from the stratosphere.
Four classified types of particles in stratospheric balloon collections include chains, aggregates, crystals, and irregular solids which are often liquid coated. An analysis has been made of many individual particles using an X-ray detector on a scanning electron microscope. Chain type particles are composed entirely of elements lighter than sodium. All other particle types are composed mostly of various combinations of the elements Al, Si, Na, K, Ca, Fe, Mg, Ti, and S. The most common element group is Al, Si, Ca or K, and Fe, followed by sulfur or calcium alone. At lower altitudes (12-15 km), liquid is usually associated with the particles and sulfur is prominent. At higher altitudes (23-36 km), liquids and sulfur are usually absent. However, when liquids are occasionally found, so is sulfur. Particles collected with NASA aircraft at 12 km also contain mostly the Al, Si, Ca, Fe element group with associated sulfur, or sulfur alone.
Farlow, N. H.↗
Reliability of hybrid microcircuit discrete components
Data accumulated during 4 years of research and evaluation of ceramic chip capacitors, ceramic carrier mounted active devices, beam-lead transistors, and chip resistors are presented. Life and temperature coefficient test data, and optical and scanning electron microscope photographs of device failures are presented and the failure modes are described. Particular interest is given to discrete component qualification, power burn-in, and procedures for testing and screening discrete components. Burn-in requirements and test data will be given in support of 100 percent burn-in policy on all NASA flight programs.
Allen, R. V.↗
Weldability, strength, and high temperature stability of chemically vapor deposited tungsten
Three types of CVD tungsten (fluoride-produced, chloride-produced and the combination of the two which is termed duplex) were evaluated to determine their weldability, high temperature strength and structural stability during 5000 hour exposure to temperatures of 1540 C and 1700 C. Each type of CVD tungsten could be successfully electron beam welded but the results for the chloride product were not as satisfactory as those of the other two materials. The high temperature strength behavior of the three materials did not differ greatly. However a large difference was noted for the grain growth behavior of the two basic CVD tungsten materials. Fluoride tungsten was found to be relatively stable while for the most part the grain size of chloride tungsten increased appreciably. The examination of freshly fractured surfaces with a scanning electron microscope revealed numerous bubbles in the fluoride material following its exposure to 1700 C for 5000 hours. Less severe thermal treatments produced relatively few bubbles in this material. Only at certain locations within the chloride material associated with the interruption of tungsten were bubbles noted.
Bryant, W. A.↗
Microstructural study of the nickel-base alloy WAZ-20 using qualitative and quantitative electron optical techniques
The NASA nickel-base alloy WAZ-20 was analyzed by advanced metallographic techniques to qualitatively and quantitatively characterize its phases and stability. The as-cast alloy contained primary gamma-prime, a coarse gamma-gamma prime eutectic, a gamma-fine gamma prime matrix, and MC carbides. A specimen aged at 870 C for 1000 hours contained these same constituents and a few widely scattered high W particles. No detrimental phases (such as sigma or mu) were observed. Scanning electron microscope, light metallography, and replica electron microscope methods are compared. The value of quantitative electron microprobe techniques such as spot and area analysis is demonstrated.
Young, S. G.↗
Investigation of the plastic fracture of high strength steels
This investigation deals in detail with the three recognized stages of plastic fracture in high strength steels, namely, void initiation, void growth, and void coalescence. The particular steels under investigation include plates from both commercial purity and high purity heats of AISI 4340 and 18 Ni, 200 grade maraging steels. A scanning electron microscope equipped with an X-ray energy dispersive analyzer, together with observations made using light microscopy, revealed methods of improving the resistance of high strength steels to plastic fracture.
Cox, T. B.↗
CESEMI studies of Apollo 14 and 15 fines.
Quantitative size and shape analyses have been carried out on six lunar fines from Apollo 14 and 15 by computer evaluation of scanning electron microscope images (CESEMI). For the size range of 0.50 to 30 microns diameter, the distributions are log-normal on a number count basis. This finding is in contrast with results for coarser materials in the fines reported by King et al. suggesting the operation of a different process. Aspect ratios range from 0.1 to 1.0 with an average value of about 0.6. Only slight differences are observed among samples. A shape complexity factor (ratio of particle perimeter to ellipse perimeter) also varies only slightly among the six samples.
Gorz, H.↗
Profiling microcraters using stereomicrographs.
The determination of the population, shape, and size of microcraters on lunar rocks enables space scientists to study cosmic erosion, survival times of rocks on the lunar surface, and the flux of primary cosmic particles. A graphical method of profiling and contouring microcraters on lunar rocks from a pair of stereomicrographs obtained by a scanning electron microscope was developed. The graphical method utilizes the simple geometry of photography generated by a parallel bundle of rays, orthogonal to the image plane.
Malhotra, R. C.↗
Role of Hf and Zr in the hydrogen embrittlement of Ta and Cb alloys
The hydrogen embrittlement of aged T-111 and similar Ta and Cb alloys is characterized and the mechanisms believed responsible for the increased sensitivity of T-111 to low temperature hydrogen embrittlement after aging for 1000 hours or longer near 1040 C are described. A total of eight Ta base alloys and two Cb base alloys were investigated. The effects of pre-age annealing temperature, aging time, temperature and environment, and alloy composition on the susceptibility to hydrogen embrittlement were investigated. The primary method of determining the effects of these variables on the ductility of T-111 was by bend testing at 25 and -196 C. Fractured specimens were examined by the scanning electron microscope, electron microprobe, metallography and X-ray diffration.
Stephens, J. R.↗
Examination of oxide scales in the SEM using backscattered electron images
The complementary use of the scanning electron microscope in the backscattered electron mode with the more usual secondary electron mode results in a significant increase in the versatility of the instrument, since regions of different chemical composition can be readily detected, and their morphology examined. The use of this technique to examine complex oxide scales formed on heat-resistant alloys is described, and in particular the location of thoria particles in the scale formed on a Ni-20 wt pct Cr-2.3 wt pct ThO2 alloy, and the examination of the behavior of yttrium during the high-temperature oxidation of a Co-Cr-Al-Y alloy are discussed.
Price, C. W.↗
X ray analysis of balloon-collected particles erroneously considered as an October influx into the lower stratosphere
Individual particles were analyzed on the collection screens in a Jeolco scanning electron microscope using a Kevex Li-drifted silicon energy dispersive X ray detector. It was found that the bulk of the stratospheric samples studied comes from explosive squib devices. It is pointed out that this finding does not invalidate the extensive results obtained by Bigg et al. (1970, 1971) in previous sampling experiments.
Farlow, N. H.↗
Role of HF and Zr in the hydrogen embrittlement of Ta and Cb alloys
An attempt is made to characterize the hydrogen embrittlement of aged T-111 and similar Ta and Cb alloys and to describe the mechanisms believed responsible for the increased sensitivity of T-111 to low temperature hydrogen embrittlement after aging for 1000 hr or longer near 1040 C. A total of eight Ta-base alloys and two Cb-base alloys were investigated. The effects of pre-age annealing temperature, aging time, temperature and environment, and alloy composition on the susceptibility to hydrogen embrittlement were investigated. The primary method of determining the effects of these variables on the ductility of T-111 was by bend testing at 25 and -196 C. Fractured specimens were examined by the scanning electron microscope, electron microprobe, metallography, and X-ray diffraction.
Stephens, J. R.↗
Cathodoluminescence of regolith returned by Luna 16 automatic station
Observations of local variations in the intensity and spectral composition of the cathodoluminescence of lunar regolith are described. These variations are caused by structural features, by the kind and quantity of the material, and by the admixtures. In addition, cathodoluminescent emission is also associated with a change in the temperature of the lunar surface. Periodic diurnal illumination and darkening of the moon is responsible for a temperature gradient normal to the lines of longitude. These observations made of regolith, using a scanning electron microscope with an attachment for temperature variation, simulate the indicated thermal changes of the cathodoluminescent properties of lunar material.
Spivak, G. V.↗