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At least 181 records · Page 10

Structural, Optical and Mechanical Properties of Nanocrystalline Molybdenum Thin Films Deposited under Variable Substrate Temperature

Molybdenum (Mo), which is one among the refractory metals, is a promising material with a wide variety of technological applications in microelectronics, optoelectronics, and energy conversion and storage. However, understanding the structure–property correlation and optimization at the nanoscale dimension is quite important to meet the requirements of the emerging nanoelectronics and nanophotonics. In this context, we focused our efforts to derive a comprehensive understanding of the nanoscale structure, phase, and electronic properties of nanocrystalline Mo films with variable microstructure and grain size. Molybdenum films were deposited under varying temperature (25–500 °C), which resulted in Mo films with variable grain size of 9–22 nm. The grazing incidence X-ray diffraction analyses indicate the (110) preferred growth behavior the Mo films, though there is a marked decrease in hardness and elastic modulus values. In particular, there is a sizable difference in maximum and minimum elastic modulus values; the elastic modulus decreased from ~460 to 260–280 GPa with increasing substrate temperature from 25–500 °C. The plasticity index and wear resistance index values show a dramatic change with substrate temperature and grain size. Additionally, the optical properties of the nanocrystalline Mo films evaluated by spectroscopic ellipsometry indicate a marked dependence on the growth temperature and grain size. This dependence on grain size variation was particularly notable for the refractive index where Mo films with lower grain size fell in a range between ~2.75–3.75 across the measured wavelength as opposed to the range of 1.5–2.5 for samples deposited at temperatures of 400–500 °C, where the grain size is relatively higher. The conductive atomic force microscopy (AFM) studies indicate a direct correlation with grain size variation and grain versus grain boundary conduction; the trend noted was improved electrical conductivity of the Mo films in correlation with increasing grain size. The combined ellipsometry and conductive AFM studies allowed us to optimize the structure–property correlation in nanocrystalline Mo films for application in electronics and optoelectronics.

36 MATERIALS SCIENCE↗

Deriving the Infrared Complex Refractive Indices of Organic Powders for Optical Modeling: Comparison of Methods

Identification of solids via infrared reflection spectroscopy requires a spectral library of all solids likely to be encountered. A confounding factor in populating such a spectral library is that the reflectance spectra of solids vary with their form, including particle size, film thickness, and substrate. To reduce the efforts of experimentally constructing such a library, an alternate strategy is to use the wavelength-dependent optical constants, n and k, of a solid to calculate a series of reflectance spectra corresponding to each scenario or morphology. Because most n/k measurements are best performed on mm-sized crystals, however, the challenge of determining the optical constants increases when a solid is only readily available as a powder, as is often the case. Some organic solids, such as caffeine, are both unavailable in large crystals and difficult to press into pellets. In this study, the infrared optical constants, or complex refractive indices, of caffeine were determined using three different methods: single-angle reflectance, infrared spectroscopic ellipsometry, and quantitative absorbance measurements of KBr pellets. The n and k values derived through each method were used to model the hyperspectral imaging reflectance spectrum of a caffeine film on a steel planchet. Over 1,110 – 870 cm-1, the single-angle reflectance-derived n and k had the best correlation with the experimental spectrum. These results suggest different organic solids may require different methods to determine the most accurate infrared complex refractive indices for synthetic spectral libraries.

FTIR, hyperspectral imaging, infrared, infrared (I↗

Method to derive the infrared complex refractive indices n(λ) and k(λ) for organic solids from KBr pellet absorption measurements

Obtaining the complex refractive index vectors $n($$\tilde{v})$ and $k($$\tilde{v})$ allows calculation of the (infrared) reflectance spectrum that is obtained from a solid in any of its many morphological forms. Here, we report an adaptation to the KBr pellet technique using two gravimetric dilutions to derive quantitative $n($$\tilde{v})$/$k($$\tilde{v})$ for dozens of powders with greater repeatability. The optical constants of bisphenol A and sucrose are compared to those derived by other methods, particularly for powdered materials. The variability of the $k$ values for bisphenol A was examined by 10 individual measurements, showing an average coefficient of variation for $k$ peak heights of 5.6%. Though no established standards exist, the pellet-derived $k$ peak values of bisphenol A differ by 11% and 31% from their single-angle- and ellipsometry-derived values, respectively. These values provide an initial estimate of the precision and accuracy of complex refractive indices that can be derived using this method. Limitations and advantages of the method are discussed, the salient advantage being a more rapid method to derive $n$/$k$ for those species that do not readily form crystals or specular pellets.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Simultaneous Modification of Bottom-Contact Electrode and Dielectric Surfaces for Organic Thin-Film Transistors Through Single-Component Spin-Cast Monolayers

An efficient process is developed by spin-coating a single-component, self-assembled monolayer (SAM) to simultaneously modify the bottom-contact electrode and dielectric surfaces of organic thin-film transistors (OTFTs). This efficient interface modification is achieved using n-alkyl phosphonic acid based SAMs to prime silver bottom-contacts and hafnium oxide (HfO{sub 2}) dielectrics in low-voltage OTFTs. Surface characterization using near edge X-ray absorption fine structure (NEXAFS) spectroscopy, X-ray photoelectron spectroscopy (XPS), attenuated total reflectance Fourier transform infrared (ATR-FTIR) spectroscopy, atomic force microscopy (AFM), and spectroscopic ellipsometry suggest this process yields structurally well-defined phosphonate SAMs on both metal and oxide surfaces. Rational selection of the alkyl length of the SAM leads to greatly enhanced performance for both n-channel (C60) and p-channel (pentacene) based OTFTs. Specifically, SAMs of n-octylphos-phonic acid (OPA) provide both low-contact resistance at the bottom-contact electrodes and excellent interfacial properties for compact semiconductor grain growth with high carrier mobilities. OTFTs based on OPA modifi ed silver electrode/HfO{sub 2} dielectric bottom-contact structures can be operated using < 3V with low contact resistance (down to 700 Ohm-cm), low subthreshold swing (as low as 75 mV dec{sup -1}), high on/off current ratios of 107, and charge carrier mobilities as high as 4.6 and 0.8 cm{sup 2} V{sup -1} s{sup -1}, for C60 and pentacene, respectively. These results demonstrate that this is a simple and efficient process for improving the performance of bottom-contact OTFTs.

36 MATERIALS SCIENCE↗

Sharp and Tunable Crystal/Fano-Type Resonances Enabled by Out-of-Plane Dipolar Coupling in Plasmonic Nanopatch Arrays

Tuning resonance lineshapes of plasmonic structures is essential to create customized media with compelling optical properties for optimized light–matter interactions. The diversity of available metals and the variety of design architectures provide a rich portfolio for statically controlling the resonance lineshape. However, dynamic tuning of resonance attributes (e.g., the resonance wavelength and linewidth) are yet to be more expanded, especially when a narrow resonance linewidth is on demand. Here, using a plasmonic nanopatch array, sharp plasmonic crystal (PC) resonances are demonstrated across a wide spectral range of 230 nm, with full-width at half-maximum of only ≈6 nm. The combination of angle-resolved ellipsometry and full-wave simulations shows that diffractive coupling of out-of-plane electric dipoles is the principal contributor in the formation of such sharp PC resonances. In addition, the designed nanopatch PC supports a plasmonic Fabry–Pérot-like resonance that can be interfered with the PC resonance to generate complex Fano-type lineshapes. Finally, the coexistence of tunable resonance features renders the designed structures as a rich platform for applications seeking enhanced light–matter interactions and optical signal processing.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Investigation of polymer–solvent interactions in poly(styrene sulfonate) thin films

The swelling behavior of acid form poly(styrene sulfonate) (PSS-H) thin films were investigated using in situ spectroscopic ellipsometry (SE) to probe the polymer–solvent interactions of ion-containing polymers under interfacial confinement. The interaction parameter (χ), related to the polymer and solvent solubility parameters in the Flory–Huggins theory, describes the polymer-solvent compatibility. In situ SE was used to measure the degree of polymer swelling in various solvent vapor environments, to determine χ for the solvent-PSS-H system. The calculated solubility parameter of 40–44 MPa 1/2 for PSS-H was determined through measured χ values in water, methanol, and formamide environments at a solvent vapor activity of 0.95. Flory–Huggins theory was applied to describe the thickness-dependent swelling of PSS-H and to quantify the water-PSS-H interactions. Confinement had a significant influence on polymer swelling at low water vapor activities expressed as an increased χ between the water and polymer with decreasing film thickness. Finally, as the volume fraction of water approached ~0.3, the measured χ value was ~0.65, indicating the water interacted with the polymer in a similar manner, regardless of thicknesses.

36 MATERIALS SCIENCE↗

Atmospheric Pressure Plasma CVD of Amorphous Hydrogenated Silicon Carbonitride (a-SiCN:H) Films Using Triethylsilane and Nitrogen

Amorphous hydrogenated silicon carbonitride (a-SiCN:H) thin films are synthesized by atmospheric pressure plasma enhanced chemical vapor (AP-PECVD) deposition using the Surfx Atomflow{trademark} 250D APPJ source with triethylsilane (HSiEt{sub 3}, TES) and nitrogen as the precursor and the reactive gases, respectively. The effect of the substrate temperature (T{sub s}) on the growth characteristics and the properties of a-SiCN:H films was evaluated. The properties of the films were investigated via scanning electron microscopy (SEM), atomic force microscopy (AFM) for surface morphological analyses, Fourier transform infrared spectroscopy (FTIR), and X-ray photoelectron spectroscopy (XPS) for chemical and compositional analyses; spectroscopic ellipsometry for optical properties and thickness determination and nanoindentation to determine the mechanical properties of the a-SiCN:H films. Films deposited at low T{sub s} depict organic like features, while the films deposited at high T{sub s} depict ceramic like features. FTIR and XPS studies reveal that an increases in T{sub s} helps in the elimination of organic moieties and incorporation of nitrogen in the film. Films deposited at T{sub s} of 425 C have an index of refraction (n) of 1.84 and hardness (H) of 14.8 GPa. A decrease in the deposition rate between T{sub s} of 25 and 250 C and increase in deposition rate between T{sub s} of 250 and 425 C indicate that the growth of a-SiCN:H films at lower T{sub s} are surface reaction controlled, while at high temperatures film growth is mass-transport controlled. Based on the experimental results, a potential route for film growth is proposed.

36 MATERIALS SCIENCE↗

Al+Si Interface Optical Properties Obtained in the Si Solar Cell Configuration

Al is a commonly used material for rear side metallization in commercial silicon (Si) wafer solar cells. In this study, through-the-silicon spectroscopic ellipsometry is used in a test sample to measure Al+Si interface optical properties like those in Si wafer solar cells. Two different spectroscopic ellipsometers are used for measurement of Al+Si interface optical properties over the 1128-2500 nm wavelength range. For validation, the measured interface optical properties are used in a ray tracing simulation over the 300-2500 nm wavelength range for an encapsulated Si solar cell having random pyramidal texture. The ray tracing model matches well with the measured total reflectance at normal incidence of a commercially available Si module. The Al+Si optical properties presented here enable quantitative assessment of major irradiance/current flux losses arising from reflection and parasitic absorption in encapsulated Si solar cells.

14 SOLAR ENERGY↗

Three-Component Model of an Effective Medium for Determining the Composition of Layers on Silicon Wafers

A proposed model of an effective medium in which a Maxwell–Garnett matrix medium is filled with a Bruggeman medium is used to solve inverse problems of multi-angle ellipsometry to determine the composition of transition layers surrounding a layer of thermal silicon dioxide on a silicon substrate. The volume filling factors of the layer reflect correctly possible structural transformations during the oxidation of crystalline silicon.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Investigation of Cody–Lorentz and Tauc–Lorentz Models in Characterizing Dielectric Function of (HfO{sub 2}){sub x}(ZrO{sub 2}){sub 1–x} Mixed Thin Film

In the present study, Tauc–Lorentz and Urbach tail assisted Cody–Lorentz models were intuitively derived, explained, and employed to simulate the imaginary dielectric function of the atomic layer deposited (HfO{sub 2}){sub x}(ZrO{sub 2}){sub 1–x} in the energy range of 0.7–9.3 eV. A fitting procedure is carried out using the Levenberg–Marquardt method for minimizing mean square errors. Both models support the experimental data derived by vacuum ultraviolet spectroscopic ellipsometry. For a zirconium content of 60 and 75%, a weak absorption profile is observed in the visible region and elaborately explained by the Lorentz oscillator model. In order to calculate the band gap of different compositions, Cody plots and Tauc plots are presented. The results show that the Cody–Lorentz model is more accuracy due to its exponential absorption below the band gap energy and modified density of states.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Accounting for the Complex Surface Structure in Ellipsometric Studies of the Effects of Magnetron Sputtering Modes on the Growth and Optical Properties of In{sub 2}O{sub 3} Films

The efficiency of invoking additional information on optical transmission in solving the inverse problem of ellipsometry by a minimization method is demonstrated in practice for In{sub 2}O{sub 3} fi doped and nondoped with Sn on Al{sub 2}O{sub 3} (012) substrates. This approach allows the thickness and refractive index of thin films with rough surfaces to be uniquely determined. Solutions of the inverse problem in the framework of one-, two-, and multilayer models are compared. The last provides the best description of the experimental data and the correct parameters of the samples. The dependences of the investigated properties of films produced with different magnetron sputtering modes are found using the above methods and models and do not contradict general concepts about the film formation by this material.

36 MATERIALS SCIENCE↗

RF Plasma Polymerization of Orange Oil and Characterization of the Polymer Thin Films

The present study describes an environmentally friendly approach to fabricate hydrocarbon-rich polymer thin films from a bio-renewable precursor, orange oil, cold extracted from orange peels using radio frequency plasma polymerization. The polymer thin films fabricated at different RF power level (10–75 W) were characterized with variable angle spectroscopic ellipsometry, UV–visible spectroscopy, Fourier transform infrared spectroscopy and atomic force microscopy. Optical characterization showed that independent of deposition power films exhibited good transparency (~ 90%) in the visible region and a refractive index of 1.55 at 500 nm. The optical band gap measured around 3.60 eV and falls within the insulating region. The atomic force microscopic images revealed that the surface is pinhole-free in nature and smooth at nanoscale, with average surface roughness dependent on the deposition power. Film hardness increased from 0.50 to 0.78 GPa as applied power increased from 10 to 75 W.

36 MATERIALS SCIENCE↗

Semi-empirical estimation of the attenuation loss for amorphous ZBLAN glass

ZBLAN glass tends to undergo heavy devitrification, forming crystallites that act as scattering centers and results in a large attenuation loss. In this study, attenuation loss values were obtained for ZBLAN glass test samples that were melted and then cooled rapidly at a rate of 4000 °C/min, which yielded amorphous samples that were free of micro/nano-crystalline inclusions. Using an approach by Forouhi and Bloomer, which incorporates Kramers–Kronig relations, in conjunction with measured optical data using ellipsometry, an attenuation loss of 0.092 dB/Km at 1800 nm wavelength was estimated for amorphous ZBLAN test samples.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Morphology, UV–visible and ellipsometric studies of sodium lithium orthovanadate

Sodium lithium orthovanadates were prepared by the classic ceramic method technique. Structure, phase purity, composition, and morphology were characterized by X-ray powder diffraction, infrared spectroscopy, energy dispersive spectroscopy, scanning-electron microscopy and atomic force microscopy. The optical properties of Na{sub x}Li{sub 1−x}CdVO{sub 4} (x = 0.5, 1) compounds prepared were recorded at room temperature using ultra-visible and ellipsometric spectroscopies in the spectral range (200–800) nm. The average reflectance of the pellets showed high reflectivity (over 80%) in the visible spectrum. The UV–Vis absorption bands are assigned to the charge transfer from the oxygen ligands to the central vanadium atom inside the [VO{sub 4}]{sup 3−} groups in the orthovanadate compounds. The optical band gaps E{sub g} of both samples are evaluated using Kubelka–Munk function. The analysis of the data revealed the existence of optical allowed direct transition for Na{sub x}Li{sub 1−x}CdVO{sub 4} (x = 0.5, 1). Spectroscopic ellipsometry measurements have been performed on Na{sub x}Li{sub 1−x}CdVO{sub 4} (x = 0.5, 1) specimens and their optical properties were analyzed using the Cauchy model.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

All-alumina quarter-wave plate coatings fabricated by glancing angle deposition using serial bideposition

Anisotropic phase retarders, used in high power laser facilities to perform polarization smoothing, can be obtained by the glancing angle deposition (GLAD) coating process. Due to its high laser resistance, the coatings are mainly made of silica. Therefore, limited attention has been given to other dielectric materials. Here we present a study on alumina GLAD anisotropic coatings; a material with high laser resistance, higher birefringence and lower environmental sensitivity than silica. Since the anisotropy is related to the coatings microstructure through the deposition angle, samples were coated at angles varying from ± 68° to ± 82° using the serial bideposition technique. They were characterized by ellipsometry, polarimetry, spectrophotometry and electron microscopy. We showed that the highest birefringence is obtained at a deposition angle of ± 76° with an in-plane value of 0.053. Based on these results, a quarter-wave plate at 351 nm was designed as a multilayer with seven pairs of anisotropic layers deposited at ± 76° and isotropic layers deposited at 0°. The fabricated coating exhibited a uniform retardance of 88.51 ± 0.45 nm. The alumina GLAD wave plates presented here, open the door to new possibilities in the laser field and especially in the field of fusion energy.

36 MATERIALS SCIENCE↗

Spectral changes in Si–O–Si stretching band of porous glass network upon ingress of water

Water ingress into porous glass can induce internal stress, resulting in strains in chemical bonds of the network. For silica and silicate glasses, the position of Si–O–Si stretching mode in infrared spectroscopy is known to vary with the degree of strain in the Si–O network. Then, one could hypothesize that the stress due to water ingress could be probed with infrared spectroscopy. We tested this hypothesis using porous layers formed through aqueous corrosion on a model nuclear waste glass. The porosity and thickness of the porous layer were determined using ellipsometry. The humidity-dependent infrared spectra of the samples showed red-shifts of the Si–O–Si stretching band; however, it was difficult to deconvolute the spectral change due to variation of effective refractive index of the sample upon water ingress. Thus, it was infeasible to unambiguously determine the internal stress of porous glass network upon water ingress using the infrared spectroscopy alone.

36 MATERIALS SCIENCE↗

Characterization of thin films prepared by co-sputtering iron and titanium precursors and thermal oxidation under air atmosphere

Highlights: • Thin films of mixed iron and titanium oxide were prepared by Ti-Fe annealing. • Segregation and phase separation of iron and titanium oxides are observed. • Formation of iron rich (Fe{sub x}O) nanoparticles at the surface region is revealed. • Formation of thin films with high refractive index can be obtained. - Abstract: Nanocomposites of metal oxides are useful materials for operation in many energy conversion systems. In this study, such nanocomposites were prepared by oxidation of mixtures of iron and titanium precursor metallic thin films at 520 °C under air atmosphere. The metallic films with different iron percentages were obtained by radio frequency (RF) magnetron sputtering on glass and silicon substrates. The films were characterized by means of X-ray Diffraction (XRD), Raman spectroscopy, UV–Vis spectroscopy, High Resolution Scanning Transmission Electron Microscopy (HRSTEM), Ellipsometry and X-ray Photo-electron Spectroscopy (XPS). The results show that these films present mainly two nanometric phases, namely Fe{sub 2}O{sub 3} and TiO{sub 2}. A phase separation was observed; the film surface was found to be iron rich oxide or clusters of iron rich oxide (Fe{sub x}O{sub y}, x > y), whereas titanium accumulated deeply in the bulk, forming TiO{sub 2} far below the film surface. A red shift of optical absorption as well as a relatively stable high refractive index (varying between 3.1 and 3.5) over a broad band of optical frequencies was observed for the films containing higher iron initial concentrations.

36 MATERIALS SCIENCE↗