DOE OSTI · 3004299
High Speed Surface Acoustic Wave Imaging with Spectral Interferometry
Abstract
We measure 1 gigahertz surface vibrations with spectral interferometry on a 76 kilohertz linescan camera. The vibrometer has a noise floor of 120 fm/sqrt(Hz) and images a 110 x 210 micron device in 10 minutes.
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Thomas, Joseph [Virginia Tech, Blacksburg], Xi, Zichen [Virginia Tech, Blacksburg], Ji, Jun [Virginia Tech, Blacksburg], Shi, Guannan [Bradley Department of Electric and Computer Engineering, Virginia Tech, Blacksburg, VA 24061 USA], Srijanto, Bernadeta [ORNL] (ORCID:0000000211881267), Kravchenko, Ivan [ORNL] (ORCID:0000000349995822), Yao, Yu [School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ, 85281 US], Shao, Linbo [Virginia Tech, Blacksburg], Zhu, Yizheng [Virginia Tech, Blacksburg]. 2025-05-01. High Speed Surface Acoustic Wave Imaging with Spectral Interferometry. https://doi.org/10.1364/cleo_si.2025.ss118_6
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