SF6 / Acetone Separation & Purification

Abstract

Sulfur hexafluoride (SF₆) is recognized as the most potent greenhouse gas used in the power transmission and semiconductor sectors. In the past decade, its global emissions have increased sharply, largely due to the absence of effective disposal and recovery pathways. This concern was formally addressed under the Kyoto Protocol, which urged participating nations to adopt measures to limit SF₆ emissions and mitigate its role in climate change. In recent years, various abatement strategies have been explored, including non-thermal plasma (NTP) technologies such as radio frequency, microwave, dielectric barrier discharge, and electron beam systems. While these methods can decompose SF₆, they also produce hazardous by-products like sulfur oxyfluorides, sulfur dioxide, hydrofluoric acid, and fluorine gas. Because these compounds pose both environmental and health risks, replacing traditional disposal practices with modern, more effective treatment methods has become an urgent priority.