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DOE OSTI · 2549457

Machine learning-assisted laser-induced breakdown spectroscopy for estimating substrate surface temperatures

Abstract

Laser-induced breakdown spectroscopy has been used for detecting substrate surface temperatures with the assistance of machine learning.

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Dong, Haoyu [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA], Huang, Xi [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] (ORCID:0000000244773748), Wadle, Luke [Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA], Trinh, Lanh [Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] (ORCID:000000017066867X), Li, Peizi [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA], Silvain, Jean-Francois [CNRS, University of Bordeaux, Bordeaux I.N.P., ICMCB, UMR 5026, F-33608 Pessac, France], Cui, Bai [Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA], Lu, Yongfeng [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] (ORCID:0000000259421999). 2025-01-01. Machine learning-assisted laser-induced breakdown spectroscopy for estimating substrate surface temperatures. https://doi.org/10.1039/d4ja00437j

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