Thermal evaporation of thin Li films

Abstract

Thermal evaporation of lithium is considered a promising technique for the fabrication of clean lithium thin films for solid-state batteries. Here, in this study, we present a practical investigation of nanometer scale lithium films prepared by evaporation on different substrates. These substrates include Li-alloying and nonalloying metals as well as different classes of solid-state lithium-ion conductors. The deposition rate was also varied. For films less than 100 nm thick, the data show that the deposition rate has the biggest impact on the surface coverage. At 50 Å/s, Li forms small particles <1 μm in diameter while higher deposition rate of 150 Å/s resulted in more uniform film morphology on all the substrates. At the lower deposition rates, the wetting of Li to the substrate will impact the particle morphology. We also used the particles to estimate a contact angle between Li and the substrate to qualitatively compare the adhesion from substrate to substrate. The smallest contact angle was observed from lithium films on Li 7 La 3 Zr 2 O 12 and LiPON (nominal Li 2.94 PO 3.5 N 0.31 ) solid-state electrolytes.