DOE OSTI · 2432030
Plasma Focused Ion Beam Nanothermometry
Abstract
In this report we detail demonstration of temperature dependent effects on grayscale intensity imaged in Focused Ion Beam (FIB) microscope, as well as secondary electron (SE) dependence on temperature in the Auger Electron Spectroscopy (AES) and a Scanning Electron Microscope (SEM). In each instrument an intrinsic silicon sample is imaged at multiple temperatures over the course of each experiment. The grayscale intensity is shown to scale with sample temperature. Sample preparation procedures are discussed, along with hypothesized explanations for unsuccessful trials. Anticipated outcomes and future directions for these measurements are also detailed.
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Hodges, Wyatt Lea, Deitz, Julia, Ruggles, Timothy, Rosenberg, Samantha Gayle, Boro, Joseph Robert, Fowler, James Elliot, Perry, Daniel Lee, Lam, Mila Nhu, Williard, John Newsom, Jauregui, Luis Jose, Wixom, Ryan R.. 2023-02-01. Plasma Focused Ion Beam Nanothermometry. https://doi.org/10.2172/2432030
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